公开(公告)号：US20180158677A1

公开(公告)日：2018-06-07

申请号：US15869021

申请日：2018-01-11

Applicant: Applied Materials, Inc.

Inventor： Cara BEASLEY ,  Ralf HOFMANN ,  Majeed A. FOAD

IPC: H01L21/02 ,  H01L21/288 ,  C01B32/182 ,  C01B32/184 ,  B05D5/12

CPC classification number: H01L21/02527 ,  B05D3/061 ,  B05D3/065 ,  B05D3/141 ,  B05D5/12 ,  C01B32/182 ,  C01B32/184 ,  C01B32/186 ,  C01B32/20 ,  H01L21/02318 ,  H01L21/0234 ,  H01L21/02345 ,  H01L21/0237 ,  H01L21/02376 ,  H01L21/02628 ,  H01L21/02664 ,  H01L21/288

Abstract: Embodiments described herein provide methods and apparatus for forming graphitic carbon such as graphene on a substrate. The method includes providing a precursor comprising a linear conjugated hydrocarbon, depositing a hydrocarbon layer from the precursor on the substrate, and forming graphene from the hydrocarbon layer by applying energy to the substrate. The precursor may include template molecules such as polynuclear aromatics, and may be deposited on the substrate by spinning on, by spraying, by flowing, by dipping, or by condensing. The energy may be applied as radiant energy, thermal energy, or plasma energy.

公开(公告)号：US20170148631A1

公开(公告)日：2017-05-25

申请号：US15427367

申请日：2017-02-08

Applicant: Applied Materials, Inc.

Inventor： Cara BEASLEY ,  Ralf HOFMANN ,  Majeed A. FOAD

IPC: H01L21/02 ,  H01L21/288

CPC classification number: H01L21/02376 ,  B05D3/061 ,  B05D3/065 ,  B05D3/141 ,  B05D5/12 ,  C01B32/182 ,  C01B32/184 ,  C01B32/186 ,  C01B32/20 ,  H01L21/02318 ,  H01L21/0234 ,  H01L21/02345 ,  H01L21/0237 ,  H01L21/02527 ,  H01L21/02628 ,  H01L21/02664 ,  H01L21/288

Abstract: Embodiments described herein provide methods and apparatus for forming graphitic carbon such as graphene on a substrate. The method includes providing a precursor comprising a linear conjugated hydrocarbon, depositing a hydrocarbon layer from the precursor on the substrate, and forming graphene from the hydrocarbon layer by applying energy to the substrate. The precursor may include template molecules such as polynuclear aromatics, and may be deposited on the substrate by spinning on, by spraying, by flowing, by dipping, or by condensing. The energy may be applied as radiant energy, thermal energy, or plasma energy.