公开(公告)号：US20190295872A1

公开(公告)日：2019-09-26

申请号：US16431239

申请日：2019-06-04

申请人： Applied Materials, Inc.

发明人： Shay ASSAF ,  Andrew CONSTANT ,  Jacob NEWMAN ,  Charles CARLSON ,  William Tyler WEAVER ,  Stephen HICKERSON

IPC分类号： H01L21/67

摘要： Methods and apparatus for processing a substrate are provided herein. In one implementation, the apparatus includes a load lock chamber coupled to a transfer chamber. The transfer chamber is coupled to a thermal process chamber and a substrate is transferred between each of the load lock chamber, the transfer chamber, and the thermal process chamber. In other implementations, a process platform having a load lock chamber, a transfer chamber, and a thermal process chamber is disclosed. Methods of measuring oxygen concentration in a load lock chamber via evacuation of a transfer chamber are also described herein.

公开(公告)号：US20180254207A1

公开(公告)日：2018-09-06

申请号：US15660784

申请日：2017-07-26

申请人： Applied Materials, Inc.

发明人： Shay ASSAF ,  Andrew CONSTANT ,  Jacob NEWMAN ,  Charles CARLSON ,  William Tyler WEAVER ,  Stephen HICKERSON

IPC分类号： H01L21/67

CPC分类号： H01L21/67196 ,  H01L21/67109 ,  H01L21/67161 ,  H01L21/67184 ,  H01L21/67201 ,  H01L21/67207

摘要： Methods and apparatus for processing a substrate are provided herein. In one implementation, the apparatus includes a load lock chamber coupled to a transfer chamber. The transfer chamber is coupled to a thermal process chamber and a substrate is transferred between each of the load lock chamber, the transfer chamber, and the thermal process chamber. In other implementations, a process platform having a load lock chamber, a transfer chamber, and a thermal process chamber is disclosed. Methods of measuring oxygen concentration in a load lock chamber via evacuation of a transfer chamber are also described herein.