公开(公告)号：US20230132290A1

公开(公告)日：2023-04-27

申请号：US17971516

申请日：2022-10-21

Applicant: Applied Materials, Inc.

Inventor： Brian Hayes Burrows ,  Sekar Krishnasamy ,  Ayyanagouda Raravi ,  Monika Mudalkar ,  Govindraj Desai ,  Hemantha Kumar Raju ,  Basavaraj Pattanshetty ,  David Masayuki Ishikawa ,  Visweswaren Sivaramakrishnan ,  Shrikant Swaminathan ,  Mario Cambron ,  Robert Navasca ,  Miaojun Wang ,  Jonathan Frankel

IPC: C23C16/458 ,  C23C16/44 ,  C23C16/455

Abstract: A deposition system includes an isolator or fume hood and a reactor for coating particles, the reactor including a rotatable reactor assembly positioned within the isolator or fume hood and including a reactor drum configured to hold a plurality of particles to be coated, an inlet tube, and an outlet tube. The reactor drum is configured to be detached from the inlet tube and the outlet tube by an operator while the reactor drum remains within the isolator or fume hood.

公开(公告)号：US20230128094A1

公开(公告)日：2023-04-27

申请号：US17971511

申请日：2022-10-21

Applicant: Applied Materials, Inc.

Inventor： Brian Hayes Burrows ,  Sekar Krishnasamy ,  Ayyanagouda Raravi ,  Monika Mudalkar ,  Govindraj Desai ,  Hemantha Kumar Raju ,  Basavaraj Pattanshetty ,  David Masayuki Ishikawa ,  Visweswaren Sivaramakrishnan ,  Shrikant Swaminathan ,  Mario Cambron ,  Robert Navasca ,  Miaojun Wang ,  Jonathan Frankel

IPC: B05C19/02 ,  B01J8/38 ,  B01J8/18

Abstract: A reactor for coating particles includes a rotatable reactor assembly includes a reactor drum configured to hold a plurality of particles to be coated, an inlet tube, and an outlet tube. The drum includes a cylindrical tube, and an inlet-side endplate secured to cover an inlet-side opening of the cylindrical tube and/or an outlet-side endplate secured to cover an outlet-side opening of the cylindrical tube. A stationary gas inlet line is coupled to the inlet tube by a rotary inlet seal, a stationary gas outlet line is coupled to the outlet tube by a rotary outlet seal, and a motor rotates the rotatable reactor assembly. The inlet tube is releasably mechanically secured to the inlet-side endplate and the outlet tube is releasably mechanically secured to the outlet-side endplate.

公开(公告)号：US20230127489A1

公开(公告)日：2023-04-27

申请号：US17971504

申请日：2022-10-21

Applicant: Applied Materials, Inc.

Inventor： Brian Hayes Burrows ,  Sekar Krishnasamy ,  Ayyanagouda Raravi ,  Monika Mudalkar ,  Govindraj Desai ,  Hemantha Kumar Raju ,  Basavaraj Pattanshetty ,  David Masayuki Ishikawa ,  Visweswaren Sivaramakrishnan ,  Shrikant Swaminathan ,  Mario Cambron ,  Robert Navasca ,  Miaojun Wang ,  Jonathan Frankel

IPC: A61K9/16 ,  B01J19/28 ,  B01J19/00

Abstract: A reactor for coating particles includes a rotatable reactor assembly including a drum configured to hold a plurality of particles to be coated, an inlet tube, and an outlet tube, a stationary gas inlet line coupled to the inlet tube by a rotary inlet seal, a stationary gas outlet line coupled to the outlet tube by a rotary outlet seal, and a motor to rotate the rotatable reactor assembly.