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公开(公告)号:US20180264549A1
公开(公告)日:2018-09-20
申请号:US15904204
申请日:2018-02-23
Applicant: Applied Materials Inc.
Inventor: David Masayuki Ishikawa , Paul J. Steffas , Brian Hayes Burrows
CPC classification number: B22F3/1055 , B22F3/1017 , B22F3/24 , B22F2003/1056 , B22F2003/1057 , B22F2003/248 , B22F2999/00 , B28B1/001 , B28B17/0081 , B33Y10/00 , B33Y30/00 , B33Y50/02 , Y02P10/295 , B22F3/004 , B22F2207/15 , B22F2203/11
Abstract: An additive manufacturing system includes a platform to support an object to be fabricated, a dispenser to deliver a plurality of layers of a feed material over the platform, a controller configured to store digital data representing a pre-defined pattern, a laser configured to generate a laser beam to impinge an outermost layer of the feed material and coupled to the controller to fuse the feed material in the pre-defined pattern, and a plurality of independently controllable infrared lamps, each infrared lamp directed to a different section of an outermost layer of the feed material.
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公开(公告)号:US20230128094A1
公开(公告)日:2023-04-27
申请号:US17971511
申请日:2022-10-21
Applicant: Applied Materials, Inc.
Inventor: Brian Hayes Burrows , Sekar Krishnasamy , Ayyanagouda Raravi , Monika Mudalkar , Govindraj Desai , Hemantha Kumar Raju , Basavaraj Pattanshetty , David Masayuki Ishikawa , Visweswaren Sivaramakrishnan , Shrikant Swaminathan , Mario Cambron , Robert Navasca , Miaojun Wang , Jonathan Frankel
Abstract: A reactor for coating particles includes a rotatable reactor assembly includes a reactor drum configured to hold a plurality of particles to be coated, an inlet tube, and an outlet tube. The drum includes a cylindrical tube, and an inlet-side endplate secured to cover an inlet-side opening of the cylindrical tube and/or an outlet-side endplate secured to cover an outlet-side opening of the cylindrical tube. A stationary gas inlet line is coupled to the inlet tube by a rotary inlet seal, a stationary gas outlet line is coupled to the outlet tube by a rotary outlet seal, and a motor rotates the rotatable reactor assembly. The inlet tube is releasably mechanically secured to the inlet-side endplate and the outlet tube is releasably mechanically secured to the outlet-side endplate.
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公开(公告)号:US20230127489A1
公开(公告)日:2023-04-27
申请号:US17971504
申请日:2022-10-21
Applicant: Applied Materials, Inc.
Inventor: Brian Hayes Burrows , Sekar Krishnasamy , Ayyanagouda Raravi , Monika Mudalkar , Govindraj Desai , Hemantha Kumar Raju , Basavaraj Pattanshetty , David Masayuki Ishikawa , Visweswaren Sivaramakrishnan , Shrikant Swaminathan , Mario Cambron , Robert Navasca , Miaojun Wang , Jonathan Frankel
Abstract: A reactor for coating particles includes a rotatable reactor assembly including a drum configured to hold a plurality of particles to be coated, an inlet tube, and an outlet tube, a stationary gas inlet line coupled to the inlet tube by a rotary inlet seal, a stationary gas outlet line coupled to the outlet tube by a rotary outlet seal, and a motor to rotate the rotatable reactor assembly.
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公开(公告)号:US12188148B2
公开(公告)日:2025-01-07
申请号:US17131290
申请日:2020-12-22
Applicant: Applied Materials, Inc.
Inventor: Shu-Kwan Lau , Zhiyuan Ye , Richard O. Collins , Brian Hayes Burrows
Abstract: An apparatus as disclosed herein relates to a chamber body design for use within a thermal deposition chamber, such as an epitaxial deposition chamber. The chamber body is a segmented chamber body design and includes an inject ring and a base plate. The base plate includes a substrate transfer passage and one or more exhaust passages disposed therethrough. The inject ring includes a plurality of gas inject passages disposed therethrough. The inject ring is disposed on top of the base plate and attached to the base plate. The one or more exhaust passages and the gas inject passages are disposed opposite one another. One or more seal grooves are formed in both the base plate and the inject ring to enable the inject ring and the base plate to seal to one another as well as other components within the process chamber.
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公开(公告)号:US20230132290A1
公开(公告)日:2023-04-27
申请号:US17971516
申请日:2022-10-21
Applicant: Applied Materials, Inc.
Inventor: Brian Hayes Burrows , Sekar Krishnasamy , Ayyanagouda Raravi , Monika Mudalkar , Govindraj Desai , Hemantha Kumar Raju , Basavaraj Pattanshetty , David Masayuki Ishikawa , Visweswaren Sivaramakrishnan , Shrikant Swaminathan , Mario Cambron , Robert Navasca , Miaojun Wang , Jonathan Frankel
IPC: C23C16/458 , C23C16/44 , C23C16/455
Abstract: A deposition system includes an isolator or fume hood and a reactor for coating particles, the reactor including a rotatable reactor assembly positioned within the isolator or fume hood and including a reactor drum configured to hold a plurality of particles to be coated, an inlet tube, and an outlet tube. The reactor drum is configured to be detached from the inlet tube and the outlet tube by an operator while the reactor drum remains within the isolator or fume hood.
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公开(公告)号:US11117194B2
公开(公告)日:2021-09-14
申请号:US15904161
申请日:2018-02-23
Applicant: Applied Materials, Inc.
Inventor: David Masayuki Ishikawa , Paul J. Steffas , Brian Hayes Burrows
IPC: B22F10/20 , B33Y30/00 , B28B1/00 , B28B17/00 , B33Y10/00 , B22F3/24 , B33Y50/02 , B22F10/30 , B22F3/10
Abstract: An additive manufacturing system includes a platform to support an object to be fabricated, a dispenser to deliver a plurality of layers of a feed material over the platform, a controller configured to store digital data representing a pre-defined pattern, a laser configured to generate a laser beam to impinge an outermost layer of the feed material and coupled to the controller to fuse the feed material in the pre-defined pattern, and a plurality of independently controllable infrared lamps, each infrared lamp directed to a different section of an outermost layer of the feed material.
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