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公开(公告)号:US20090139957A1
公开(公告)日:2009-06-04
申请号:US12315202
申请日:2008-12-01
申请人: Aref Chowdhury , Hock Ng , Richart Elliott Slusher
发明人: Aref Chowdhury , Hock Ng , Richart Elliott Slusher
IPC分类号: B44C1/22
CPC分类号: B82Y20/00 , B81B1/00 , G02B6/1225 , G02B2006/12035 , H01J1/304 , H01J3/022 , H01J9/025 , H01L21/0254 , H01L21/02639 , H01L21/30612
摘要: A fabrication method produces a mechanically patterned layer of group III-nitride. The method includes providing a crystalline substrate and forming a first layer of a first group III-nitride on a planar surface of the substrate. The first layer has a single polarity and also has a pattern of holes or trenches that expose a portion of the substrate. The method includes then, epitaxially growing a second layer of a second group III-nitride over the first layer and the exposed portion of substrate. The first and second group III-nitrides have different alloy compositions. The method also includes subjecting the second layer to an aqueous solution of base to mechanically pattern the second layer.
摘要翻译: 制造方法产生III族氮化物的机械图案化层。 该方法包括提供晶体衬底并在衬底的平坦表面上形成第一III族氮化物的第一层。 第一层具有单一极性,并且还具有露出基板的一部分的孔或沟槽的图案。 该方法包括在第一层和衬底的暴露部分上外延生长第二III族氮化物层的第二层。 第一和第二III族氮化物具有不同的合金组成。 该方法还包括使第二层经受基底水溶液以机械地图形化第二层。
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公开(公告)号:US08070966B2
公开(公告)日:2011-12-06
申请号:US12315202
申请日:2008-12-01
申请人: Aref Chowdhury , Hock Ng , Richart Elliott Slusher
发明人: Aref Chowdhury , Hock Ng , Richart Elliott Slusher
IPC分类号: C25F3/00 , C03C25/68 , H01L21/461
CPC分类号: B82Y20/00 , B81B1/00 , G02B6/1225 , G02B2006/12035 , H01J1/304 , H01J3/022 , H01J9/025 , H01L21/0254 , H01L21/02639 , H01L21/30612
摘要: A fabrication method produces a mechanically patterned layer of group III-nitride. The method includes providing a crystalline substrate and forming a first layer of a first group III-nitride on a planar surface of the substrate. The first layer has a single polarity and also has a pattern of holes or trenches that expose a portion of the substrate. The method includes then, epitaxially growing a second layer of a second group III-nitride over the first layer and the exposed portion of substrate. The first and second group III-nitrides have different alloy compositions. The method also includes subjecting the second layer to an aqueous solution of base to mechanically pattern the second layer.
摘要翻译: 制造方法产生III族氮化物的机械图案化层。 该方法包括提供晶体衬底并在衬底的平坦表面上形成第一III族氮化物的第一层。 第一层具有单一极性,并且还具有露出基板的一部分的孔或沟槽的图案。 该方法包括在第一层和衬底的暴露部分上外延生长第二III族氮化物层的第二层。 第一和第二III族氮化物具有不同的合金组成。 该方法还包括使第二层经受基底水溶液以机械地图形化第二层。
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公开(公告)号:US08613860B2
公开(公告)日:2013-12-24
申请号:US13248394
申请日:2011-09-29
申请人: Aref Chowdhury , Hock Ng , Richart Elliott Slusher
发明人: Aref Chowdhury , Hock Ng , Richart Elliott Slusher
IPC分类号: C25F3/00 , C23F1/00 , C03C15/00 , C03C25/68 , H01L21/302 , H01L21/461
CPC分类号: B82Y20/00 , B81B1/00 , G02B6/1225 , G02B2006/12035 , H01J1/304 , H01J3/022 , H01J9/025 , H01L21/0254 , H01L21/02639 , H01L21/30612
摘要: A fabrication method produces a mechanically patterned layer of group III-nitride. The method includes providing a crystalline substrate and forming a first layer of a first group III-nitride on a planar surface of the substrate. The first layer has a single polarity and also has a pattern of holes or trenches that expose a portion of the substrate. The method includes then, epitaxially growing a second layer of a second group III-nitride over the first layer and the exposed portion of substrate. The first and second group III-nitrides have different alloy compositions. The method also includes subjecting the second layer to an aqueous solution of base to mechanically pattern the second layer.
摘要翻译: 制造方法产生III族氮化物的机械图案化层。 该方法包括提供晶体衬底并在衬底的平坦表面上形成第一III族氮化物的第一层。 第一层具有单一极性,并且还具有露出基板的一部分的孔或沟槽的图案。 该方法包括在第一层和衬底的暴露部分上外延生长第二III族氮化物层的第二层。 第一和第二III族氮化物具有不同的合金组成。 该方法还包括使第二层经受基底水溶液以机械地图形化第二层。
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公开(公告)号:US07468578B2
公开(公告)日:2008-12-23
申请号:US11442032
申请日:2006-05-27
申请人: Aref Chowdhury , Hock Ng , Richart Elliott Slusher
发明人: Aref Chowdhury , Hock Ng , Richart Elliott Slusher
IPC分类号: H01J9/24
CPC分类号: B82Y20/00 , B81B1/00 , G02B6/1225 , G02B2006/12035 , H01J1/304 , H01J3/022 , H01J9/025 , H01L21/0254 , H01L21/02639 , H01L21/30612
摘要: A fabrication method produces a mechanically patterned layer of group III-nitride. The method includes providing a crystalline substrate and forming a first layer of a first group III-nitride on a planar surface of the substrate. The first layer has a single polarity and also has a pattern of holes or trenches that expose a portion of the substrate. The method includes then, epitaxially growing a second layer of a second group III-nitride over the first layer and the exposed portion of substrate. The first and second group III-nitrides have different alloy compositions. The method also includes subjecting the second layer to an aqueous solution of base to mechanically pattern the second layer.
摘要翻译: 制造方法产生III族氮化物的机械图案化层。 该方法包括提供晶体衬底并在衬底的平坦表面上形成第一III族氮化物的第一层。 第一层具有单一极性,并且还具有露出基板的一部分的孔或沟槽的图案。 该方法包括在第一层和衬底的暴露部分上外延生长第二III族氮化物层的第二层。 第一和第二III族氮化物具有不同的合金组成。 该方法还包括使第二层经受基底水溶液以机械地图形化第二层。
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公开(公告)号:US20060220525A1
公开(公告)日:2006-10-05
申请号:US11442032
申请日:2006-05-27
申请人: Aref Chowdhury , Hock Ng , Richart Slusher
发明人: Aref Chowdhury , Hock Ng , Richart Slusher
CPC分类号: B82Y20/00 , B81B1/00 , G02B6/1225 , G02B2006/12035 , H01J1/304 , H01J3/022 , H01J9/025 , H01L21/0254 , H01L21/02639 , H01L21/30612
摘要: A fabrication method produces a mechanically patterned layer of group III-nitride. The method includes providing a crystalline substrate and forming a first layer of a first group III-nitride on a planar surface of the substrate. The first layer has a single polarity and also has a pattern of holes or trenches that expose a portion of the substrate. The method includes then, epitaxially growing a second layer of a second group III-nitride over the first layer and the exposed portion of substrate. The first and second group III-nitrides have different alloy compositions. The method also includes subjecting the second layer to an aqueous solution of base to mechanically pattern the second layer.
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公开(公告)号:US20060210993A1
公开(公告)日:2006-09-21
申请号:US11064907
申请日:2005-02-23
申请人: Aref Chowdhury , Hock Ng , Bernard Yurke
发明人: Aref Chowdhury , Hock Ng , Bernard Yurke
CPC分类号: G02B6/124 , B82Y10/00 , B82Y15/00 , B82Y20/00 , G01N33/553 , G01N33/588
摘要: An apparatus includes a substrate and a plurality of DNA oligomers in contact with a top surface of the substrate. The substrate is a polar ferroelectric or a polar compound semiconductor.
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公开(公告)号:US20050269593A1
公开(公告)日:2005-12-08
申请号:US11180350
申请日:2005-07-13
申请人: Aref Chowdhury , Hock Ng , Richart Slusher
发明人: Aref Chowdhury , Hock Ng , Richart Slusher
IPC分类号: H01L21/205 , B81B1/00 , G02B6/122 , H01J1/30 , H01J1/304 , H01J9/02 , H01L21/306 , H01L29/24
CPC分类号: B82Y20/00 , B81B1/00 , G02B6/1225 , G02B2006/12035 , H01J1/304 , H01J3/022 , H01J9/025 , H01L21/0254 , H01L21/02639 , H01L21/30612
摘要: A fabrication method produces a mechanically patterned layer of group III-nitride. The method includes providing a crystalline substrate and forming a first layer of a first group III-nitride on a planar surface of the substrate. The first layer has a single polarity and also has a pattern of holes or trenches that expose a portion of the substrate. The method includes then, epitaxially growing a second layer of a second group III-nitride over the first layer and the exposed portion of substrate. The first and second group III-nitrides have different alloy compositions. The method also includes subjecting the second layer to an aqueous solution of base to mechanically pattern the second layer.
摘要翻译: 制造方法产生III族氮化物的机械图案化层。 该方法包括提供晶体衬底并在衬底的平坦表面上形成第一III族氮化物的第一层。 第一层具有单一极性,并且还具有露出基板的一部分的孔或沟槽的图案。 该方法包括在第一层和衬底的暴露部分上外延生长第二III族氮化物层的第二层。 第一和第二III族氮化物具有不同的合金组成。 该方法还包括使第二层经受基底水溶液以机械地图形化第二层。
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公开(公告)号:US20120028448A1
公开(公告)日:2012-02-02
申请号:US13248394
申请日:2011-09-29
申请人: Aref Chowdhury , Hock Ng , Richart Elliot Slusher
发明人: Aref Chowdhury , Hock Ng , Richart Elliot Slusher
IPC分类号: H01L21/20
CPC分类号: B82Y20/00 , B81B1/00 , G02B6/1225 , G02B2006/12035 , H01J1/304 , H01J3/022 , H01J9/025 , H01L21/0254 , H01L21/02639 , H01L21/30612
摘要: A fabrication method produces a mechanically patterned layer of group III-nitride. The method includes providing a crystalline substrate and forming a first layer of a first group III-nitride on a planar surface of the substrate. The first layer has a single polarity and also has a pattern of holes or trenches that expose a portion of the substrate. The method includes then, epitaxially growing a second layer of a second group III-nitride over the first layer and the exposed portion of substrate. The first and second group III-nitrides have different alloy compositions. The method also includes subjecting the second layer to an aqueous solution of base to mechanically pattern the second layer.
摘要翻译: 制造方法产生III族氮化物的机械图案化层。 该方法包括提供晶体衬底并在衬底的平坦表面上形成第一III族氮化物的第一层。 第一层具有单一极性,并且还具有露出基板的一部分的孔或沟槽的图案。 该方法包括在第一层和衬底的暴露部分上外延生长第二III族氮化物层的第二层。 第一和第二III族氮化物具有不同的合金组成。 该方法还包括使第二层经受基底水溶液以机械地图形化第二层。
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公开(公告)号:US20070034858A1
公开(公告)日:2007-02-15
申请号:US11202114
申请日:2005-08-11
申请人: Hock Ng
发明人: Hock Ng
CPC分类号: H01L33/06 , B82Y10/00 , B82Y20/00 , H01S5/32341 , H01S5/3412
摘要: An apparatus includes a light-emitting diode. The light-emitting diode has a semiconductor matrix of one or more group III-nitride alloys and quantum dots dispersed inside the matrix. The quantum dots include a group III-nitride alloy different from the one or more group III-nitride alloys of the matrix.
摘要翻译: 一种装置包括发光二极管。 发光二极管具有分散在基体内的一个或多个III族氮化物合金和量子点的半导体矩阵。 量子点包括与基体的一种或多种III族氮化物合金不同的III族氮化物合金。
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公开(公告)号:US20060148139A1
公开(公告)日:2006-07-06
申请号:US11030497
申请日:2005-01-06
IPC分类号: H01L21/00 , H01L21/84 , H01L21/336
CPC分类号: H01L21/823462
摘要: The invention comprises a method of dual oxide gate formation comprising the steps of forming a first gate oxide and forming a second gate oxide using in-situ steam generation oxidation.
摘要翻译: 本发明包括一种双氧化物栅极形成方法,包括以下步骤:使用原位蒸汽发生氧化形成第一栅极氧化物并形成第二栅极氧化物。
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