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    Flexible, modular, compact fiber optic switch
    2.
    发明授权
    Flexible, modular, compact fiber optic switch 失效
    灵活，模块化，紧凑的光纤开关

    公开(公告)号：US06795602B2

    公开(公告)日：2004-09-21

    申请号：US09729336

    申请日：2000-12-01

    申请人： Armand P. Neukermans ,  Timothy G. Slater ,  Tyler L. Baughman ,  James P. Downing ,  John S. Forker ,  Gregory A. Reznick ,  Sam Calmes ,  Steven M. Clark ,  Jack D. Foster ,  Marc R. Schuman ,  Rajiv Ramaswami

    发明人： Armand P. Neukermans ,  Timothy G. Slater ,  Tyler L. Baughman ,  James P. Downing ,  John S. Forker ,  Gregory A. Reznick ,  Sam Calmes ,  Steven M. Clark ,  Jack D. Foster ,  Marc R. Schuman ,  Rajiv Ramaswami

    IPC分类号： G02B635

    CPC分类号： G02B6/359 ,  G02B6/32 ,  G02B6/3518 ,  G02B6/3556 ,  G02B6/357 ,  G02B6/3584 ,  G02B6/4226 ,  G02B26/0841 ,  G02B2006/12104

    摘要： A fiber optic switch (400) includes a fiber optic switching module (100) that receives and fixes ends (104) of optical fibers (106). The module (100) includes numerous reflective light beam deflectors (172) which may be selected as pairs for coupling a beam of light (108) between a pair of optical fibers (106). The module (100) also produces orientation signals from each deflector (172) which indicate its orientation. A portcard (406) included in the switch (400) supplies drive signals to the module (100) for orienting at least one deflector (172). The portcard (406) also receives the orientation signals produced by that deflector (172) together with coordinates that specify an orientation for the deflector (172). The portcard (406) compares the received coordinates with the orientation signals received from the deflector (172) and adjusts the drive signals supplied to the module (100) to reduce any difference between the received coordinates and the orientation signals. The switch (400) also employs optical alignment to precisely orient pairs deflectors (172) coupling a beam of light (108) between optical fibers (106).

    摘要翻译： 光纤开关（400）包括光纤切换模块（100），其接收和固定光纤（106）的端部（104）。 模块（100）包括多个反射光束偏转器（172），其可以被选择成对，用于耦合一对光纤（106）之间的光束（108）。 模块（100）还产生来自指示其取向的每个偏转器（172）的取向信号。 包括在开关（400）中的端口卡（406）向驱动模块（100）提供用于定向至少一个偏转器（172）的驱动信号。 端口卡（406）还接收由该偏转器（172）产生的取向信号以及指定偏转器（172）的取向的坐标。 端口卡（406）将接收到的坐标与从偏转器（172）接收的定向信号进行比较，并且调整提供给模块（100）的驱动信号，以减少所接收的坐标和取向信号之间的差异。 开关（400）还采用光学对准来精确地定向耦合在光纤（106）之间的光束（108）的对偏转器（172）。

    Flexible, modular, compact fiber switch improvements
    3.
    发明授权
    Flexible, modular, compact fiber switch improvements 失效
    灵活，模块化，紧凑的光纤交换机的改进

    公开(公告)号：US06694072B1

    公开(公告)日：2004-02-17

    申请号：US10031159

    申请日：2002-01-11

    申请人： Armand P. Neukermans ,  Steven M. Clark ,  Marc R. Schuman ,  Timothy G. Slater ,  Jack D. Foster ,  Sam Calmes

    发明人： Armand P. Neukermans ,  Steven M. Clark ,  Marc R. Schuman ,  Timothy G. Slater ,  Jack D. Foster ,  Sam Calmes

    IPC分类号： G02B626

    CPC分类号： G02B6/359 ,  G02B6/32 ,  G02B6/327 ,  G02B6/3518 ,  G02B6/3556 ,  G02B6/357 ,  G02B6/3582 ,  G02B6/3584 ,  G02B6/3644 ,  G02B6/3656 ,  G02B6/3672 ,  G02B6/3692 ,  G02B26/0841 ,  G02B26/085 ,  H04Q11/0005 ,  H04Q2011/003 ,  H04Q2011/0039

    摘要： A fiber optic switch (400) includes a fiber optic switching module (100) that receives and fixes ends (104) of optical fibers (106). The module (100) includes numerous reflective light beam deflectors (172) arranged in a V-shape which may be selected as pairs for coupling a beam of light (108) between a pair of optical fibers (106). The module (100) also produces orientation signals from each deflector (172) which indicate its orientation. A portcard (406) supplies drive signals to the module (100) for orienting at least one deflector (172). The portcard (406) also receives the orientation signals produced by that deflector (172) together with coordinates that specify an orientation for the deflector (172). The portcard (406) compares the received coordinates with the orientation signals and adjusts the drive signals supplied to the module (100) to reduce any difference between the received coordinates and the orientation signals. The switch (400) also employs optical alignment to precisely orient pairs deflectors (172) coupling a beam of light (108) between optical fibers (106).

    摘要翻译： 光纤开关（400）包括光纤切换模块（100），其接收和固定光纤（106）的端部（104）。 模块（100）包括布置成V形的多个反射光束偏转器（172），该反射光束偏转器可被选择成对，用于耦合一对光纤（106）之间的光束（108）。 模块（100）还产生来自指示其取向的每个偏转器（172）的取向信号。 端口卡（406）向模块（100）提供用于定向至少一个偏转器（172）的驱动信号。 端口卡（406）还接收由该偏转器（172）产生的取向信号以及指定偏转器（172）的取向的坐标。 端口卡（406）将接收到的坐标与取向信号进行比较，并且调整提供给模块（100）的驱动信号，以减少所接收的坐标和取向信号之间的差异。 开关（400）还采用光学对准来精确地定向耦合在光纤（106）之间的光束（108）的对偏转器（172）。

    Precision fiber optic collimator
    6.
    发明授权
    Precision fiber optic collimator 失效
    精密光纤准直仪

    公开(公告)号：US06512868B1

    公开(公告)日：2003-01-28

    申请号：US09715915

    申请日：2000-11-16

    申请人： Jack D. Foster ,  James Bryan

    发明人： Jack D. Foster ,  James Bryan

    IPC分类号： G02B632

    CPC分类号： G02B6/3582 ,  G02B6/262 ,  G02B6/32 ,  G02B6/3512 ,  G02B6/4249 ,  G02B26/085

    摘要： A mechanism for reducing radial offset in a collimnated optical beam associated with an angled end fiber and minimizing an angular offset caused by collimator lens centration errors is presented. An angled end fiber is oriented in a supporting collimator so that the angled surface of the fiber is parallel to the collimator axis, thereby compensating for the radial offset. The angled end fiber is again so oriented after the angular-offset producing collimator lens rotation (used to determine the optical center of the lens) and the collimator lens is moved in a direction parallel to the collimator axis to provide a desired output focal position for the lens.

    摘要翻译： 提出了一种用于减小与成角度端部光纤相关联的准直光束中的径向偏移并且最小化由准直透镜中心误差引起的角度偏移的机构。 成角度的端部光纤被定向在支撑准直器中，使得光纤的成角度的表面平行于准直器轴线，从而补偿径向偏移。 角度端部光纤在角偏移产生准直透镜旋转（用于确定透镜的光学中心）之后再次取向，并且准直透镜在平行于准直器轴线的方向上移动以提供期望的输出焦点位置 镜头。

    Apparatus for producing an electric glow discharge in a flowing gas
    7.
    发明授权
    Apparatus for producing an electric glow discharge in a flowing gas 失效
    用于在流动气体中产生电辉光放电的装置

    公开(公告)号：US4096449A

    公开(公告)日：1978-06-20

    申请号：US759461

    申请日：1977-01-14

    申请人： Jack D. Foster

    发明人： Jack D. Foster

    IPC分类号： B01J19/08 ,  H01S3/0979 ,  H01S3/097

    CPC分类号： H01S3/0979 ,  B01J19/088

    摘要： Apparatus is described for producing an electric glow discharge in gas flowing along a channel with the discharge extending in a direction generally transverse to the flow, such apparatus including a first electrode disclosed adjacent a first wall of the flow channel and a generally planar second electrode disposed adjacent a second wall of the flow channel opposed to the first wall, the second electrode being formed of a material having a resistivity in the range of 10.sup.2 to 10.sup.6 ohm-centimeters. Means for electrically energizing the first and second electrodes to establish the glow discharge are also provided.

    摘要翻译： 描述了用于在沿着通道流动的气体中产生电辉光放电的装置，其中放电沿大致横向于流动的方向延伸，这种装置包括邻近流动通道的第一壁所公开的第一电极和设置在大致平面的第二电极 邻近与第一壁相对的流动通道的第二壁，第二电极由具有102至106欧姆厘米范围内的电阻率的材料形成。 还提供了用于对第一和第二电极进行电激励以建立辉光放电的装置。

    Gas recirculating stabilized laser
    8.
    发明授权
    Gas recirculating stabilized laser 失效
    气体再循环稳定激光器

    公开(公告)号：US4099143A

    公开(公告)日：1978-07-04

    申请号：US759460

    申请日：1977-01-14

    申请人： Jack D. Foster

    发明人： Jack D. Foster

    IPC分类号： H01S3/036 ,  H01S3/041 ,  H01S3/086

    CPC分类号： H01S3/036 ,  H01S3/041

    摘要： A recirculating gas laser includes a gas-containing closed chamber having optically aligned mirrors adjacent the ends with a closed loop gas recirculation path, means for moving the gas around that path, and means for producing an electrical discharge in the gas, generally transversely of the optical axis. A heat exchanger for cooling the gas is interposed in the gas flow path, and means for supporting the mirrors extend longitudinally of the chamber and are positioned within the gas flow path to receive the cooled gases thereagainst, this support means being mounted to the chamber by other means which isolate the support from expansion and contraction of the chamber.

    摘要翻译： 循环气体激光器包括含气体封闭室，其具有邻近端部的光学对准的反射镜，其具有闭环气体再循环路径，用于沿着该路径移动气体的装置，以及用于在气体中大致横向于产生放电的装置 光轴。 用于冷却气体的热交换器被插入在气体流路中，并且用于支撑反射镜的装置在腔的纵向延伸并且位于气体流动路径内以接收其中的冷却气体，该支撑装置通过 隔离支架不会膨胀和收缩的其他方式。

    Electron beam blanker
    9.
    发明授权
    Electron beam blanker 失效
    电子束消除器

    公开(公告)号：US4445041A

    公开(公告)日：1984-04-24

    申请号：US269170

    申请日：1981-06-02

    申请人： John Kelly ,  Huei P. Kuo ,  Bernard M. Oliver ,  Jack D. Foster ,  Wayne C. Haase

    发明人： John Kelly ,  Huei P. Kuo ,  Bernard M. Oliver ,  Jack D. Foster ,  Wayne C. Haase

    IPC分类号： G01R31/302 ,  H01J3/26 ,  H01J37/04 ,  H01J37/09 ,  H01J37/153 ,  H01L21/027 ,  H01L21/30 ,  H01L21/66

    CPC分类号： H01J37/045 ,  H01J37/09 ,  H01L21/30

    摘要： An electron beam blanker for use in electron beam lithography systems is disclosed which is capable of providing exposure rates on the order of 300MHz at beam currents of approximately 600nA. A condensing lens and a stigmator are provided to bring the electron beam to a small image in a plane perpendicular to the beam direction. An etched silicon knife-edge, coated with gold, is located in this image plane in close proximity to the beam, to provide a sharp cut-off as the beam is swept past its edge. In accordance with aspects of the invention, a deflector plate structure provides an electromagnetic field whose geometry ensures that the velocity of a beam electron, as it exits the field, is substantially directly proportional to the undeflected beam electron's position vector relative to the beam cross-over in the image plane of the condenser lens. Since the image plane of the condensing lens becomes the object plane for a final lens which forms the spot on a point on the resist, the above geometry substantially eliminates spot motion during the blanker rise time.

    摘要翻译： 公开了一种用于电子束光刻系统的电子束消隐器，其能够在约600nA的束电流下提供大约300MHz的曝光率。 提供了一个聚光透镜和一个荧光标记器，以使电子束在垂直于光束方向的平面内呈现小的图像。 涂有金的蚀刻硅刀刃位于靠近光束的该图像平面中，以在光束被扫过其边缘时提供尖锐的截止。 根据本发明的方面，偏转板结构提供了电磁场，其几何形状确保了射束电子离开场的速度基本上与未偏转的束电子的位置矢量相对于光束横截面成正比， 在聚光镜的图像平面中。 由于聚光透镜的像面成为在抗蚀剂上形成点的最终透镜的物平面，所以上述几何形状基本上消除了遮光器上升时间期间的光斑运动。