Chemical resistant semiconductor processing chamber bodies
    1.
    发明申请
    Chemical resistant semiconductor processing chamber bodies 审中-公开
    耐化学腐蚀的半导体加工室体

    公开(公告)号:US20080038448A1

    公开(公告)日:2008-02-14

    申请号:US11731075

    申请日:2007-03-30

    IPC分类号: B05C11/00 B05D3/00

    CPC分类号: H01L21/67051 H01L21/6719

    摘要: In one embodiment a chamber body enabling semiconductor processing equipment to be at least partially housed in the chamber body, the semiconductor processing equipment being configured to process a substrate using fluids is disclosed. The chamber body being comprised of a base material implemented to form the chamber body, the chamber body defined by at least a bottom surface and wall surfaces that are integrally connected to the bottom surface to enable capture of overflows of fluids during the processing of the substrate over the chamber body. Additionally, the base material is metallic. The chamber body also has a primer coat material disposed over and on the base material. The primer coat material has metallic constituents to define an integrated bond with the base material along with non-metallic constituents. The chamber body further includes a main coat material disposed over and on the primer coat material. The main coat material being defined from non-metallic constituents, the non-metallic constituents of the main coat material defining an integrated bond with the primer coat material. The main coat material defined to completely overlie all the metallic constituents of the primer coat.

    摘要翻译: 在一个实施例中,公开了使半导体处理设备能够至少部分地容纳在室主体中的室主体,半导体处理设备被配置为使用流体处理衬底。 腔室主体包括被实施成形成腔室主体的基底材料,至少由底部表面限定的腔体主体和与底部表面一体连接的壁表面,以在衬底的处理期间捕获流体溢出物 在房间的身体。 另外,基材是金属的。 腔室主体还具有设置在基底材料上方的底漆涂层材料。 底涂层材料具有金属成分,以与非金属组分一起界定与基材的整体结合。 室主体还包括设置在底漆涂层材料上和之上的主涂层材料。 主涂层材料由非金属组分定义,主涂层材料的非金属组分限定与底漆涂层材料的整体结合。 主涂层材料被定义为完全覆盖底漆涂层的所有金属成分。

    Method for Manufacturing a Hybrid Composite Wafer Carrier for Wet Clean Equipment
    2.
    发明申请
    Method for Manufacturing a Hybrid Composite Wafer Carrier for Wet Clean Equipment 失效
    制造用于湿式清洁设备的混合复合晶片载体的方法

    公开(公告)号:US20120168079A1

    公开(公告)日:2012-07-05

    申请号:US13403839

    申请日:2012-02-23

    IPC分类号: B29C70/02 C09J5/00

    摘要: A carrier structure for supporting a substrate when being processed by passing the carrier through a meniscus formed by upper and lower proximity heads is described. A method of manufacturing the carrier further described. The method includes forming a composite frame having a carbon fiber core, a top sheet, a bottom sheet, a layer of aramid fabric between the top sheet and the core and a second layer of aramid fabric between the bottom sheet and the core. The top sheet and the bottom are each formed from a polymer material. The method further includes forming an opening sized for receiving a substrate and providing a plurality of support pins extending into the opening for supporting the substrate within the opening. The opening is formed slightly larger than the substrate such that a gap exists between the substrate and the opening.

    摘要翻译: 描述了当通过使载体通过由上下接近头形成的弯月面而被处理时用于支撑基板的载体结构。 进一步描述制造载体的方法。 该方法包括在顶片和芯之间形成具有碳纤维芯,顶片,底片,芳族聚酰胺织物层的复合框架和在底片和芯之间的第二层芳族聚酰胺织物。 顶片和底部均由聚合物材料形成。 该方法还包括形成开口,该开口的尺寸设置成用于接收基底并提供延伸到开口中的多个支撑销,以支撑开口内的基底。 该开口形成为稍微大于基板,使得在基板和开口之间存在间隙。

    HYBRID COMPOSITE WAFER CARRIER FOR WET CLEAN EQUIPMENT
    3.
    发明申请
    HYBRID COMPOSITE WAFER CARRIER FOR WET CLEAN EQUIPMENT 失效
    用于湿巾清洁设备的混合复合波浪载体

    公开(公告)号:US20080152922A1

    公开(公告)日:2008-06-26

    申请号:US11743516

    申请日:2007-05-02

    IPC分类号: B32B27/38

    摘要: A carrier structure for supporting a substrate when being processed by passing the carrier through a meniscus formed by upper and lower proximity heads is described. The carrier includes a frame having an opening sized for receiving a substrate and a plurality of support pins for supporting the substrate within the opening, the opening being slightly larger than the substrate such that a gap exists between the substrate and the opening. The frame comprises a composite core, a top sheet, a bottom sheet, a layer of aramid fabric between the top sheet and the core and a second layer of aramid fabric between the bottom sheet and the core. The top sheet and the bottom sheet being formed from a polymer material. A method of manufacture is also described.

    摘要翻译: 描述了当通过使载体通过由上下接近头形成的弯月面而被处理时用于支撑基板的载体结构。 载体包括具有开口尺寸的接收基板的框架和用于在开口内支撑基板的多个支撑销,该开口略大于基板,使得基板和开口之间存在间隙。 框架包括复合芯,顶片,底片,顶片和芯之间的芳族聚酰胺织物层,以及在底片和芯之间的第二层芳族聚酰胺织物。 顶片和底片由聚合物材料形成。 还描述了一种制造方法。

    Attention Economy For Attention To Messages, Tasks and Resources
    4.
    发明申请
    Attention Economy For Attention To Messages, Tasks and Resources 有权
    注意经济关注消息,任务和资源

    公开(公告)号:US20120059744A1

    公开(公告)日:2012-03-08

    申请号:US13037225

    申请日:2011-02-28

    IPC分类号: G06Q10/10 G06F15/16

    摘要: A centrally tracked artificial currency is provided within the context of an enterprise. This currency serves as a unit of account, medium of exchange, and store of value in a corporate “attention economy.” Users (typically coworkers) in the enterprise are allotted a base number of currency units, which they can earn, exchange, and spend in a variety of ways to signal importance and “purchase” attention of others, or priority for other organization resources. In one aspect, senders of messages can specify an amount of currency to be associated with the message, so that recipients can see the specified amount before deciding whether to read the message. Once such a system is in use, it facilitates exchange of value based on user-created transactions regarding behavior, communication, resources, incentives, and priorities.

    摘要翻译: 在企业的上下文中提供了一个集中跟踪的人造货币。 该货币作为企业“注意力经济”中的账户,交换媒介和价值储存单位。企业中的用户(通常是同事)被分配了基数的货币单位,可以赚取,交换和 用各种方式来表达重视和“购买”他人的注意力,或优先考虑其他组织资源。 在一个方面,消息的发送者可以指定与消息相关联的货币量,使得接收者可以在决定是否读取消息之前看到指定的数量。 一旦这样的系统被使用,它便于基于用户创建的关于行为,通信,资源,激励和优先级的交易来交换价值。

    Attention Economy for Attention to Messages, Tasks and Resources
    5.
    发明申请
    Attention Economy for Attention to Messages, Tasks and Resources 有权
    注意经济关注消息,任务和资源

    公开(公告)号:US20080147805A1

    公开(公告)日:2008-06-19

    申请号:US11750911

    申请日:2007-05-18

    IPC分类号: G06F15/16

    摘要: A centrally tracked artificial currency is provided within the context of an enterprise. This currency serves as a unit of account, medium of exchange, and store of value in a corporate “attention economy.” Users (typically coworkers) in the enterprise are allotted a base number of currency units, which they can earn, exchange, and spend in a variety of ways to signal importance and “purchase” attention of others, or priority for other organization resources. In one aspect, senders of messages can specify an amount of currency to be associated with the message, so that recipients can see the specified amount before deciding whether to read the message. Once such a system is in use, it facilitates exchange of value based on user-created transactions regarding behavior, communication, resources, incentives, and priorities.

    摘要翻译: 在企业的上下文中提供了一个集中跟踪的人造货币。 这种货币是企业“关注经济”的一个单位,交换媒介和价值储存。 企业中的用户(通常是同事)分配了基数的货币单位,他们可以通过各种方式赚取,交换和支出,以表达他们的重要性和“购买”他人的注意力,或者优先考虑其他组织资源。 在一个方面,消息的发送者可以指定与消息相关联的货币量,使得接收者可以在决定是否读取消息之前看到指定的数量。 一旦这样的系统被使用,它便于基于用户创建的关于行为,通信,资源,激励和优先级的交易来交换价值。

    Attention economy for attention to messages, tasks and resources
    6.
    发明授权
    Attention economy for attention to messages, tasks and resources 有权
    注意经济关注消息,任务和资源

    公开(公告)号:US08757482B2

    公开(公告)日:2014-06-24

    申请号:US13037225

    申请日:2011-02-28

    IPC分类号: G06F7/00

    摘要: A centrally tracked artificial currency is provided within the context of an enterprise. This currency serves as a unit of account, medium of exchange, and store of value in a corporate “attention economy.” Users (typically coworkers) in the enterprise are allotted a base number of currency units, which they can earn, exchange, and spend in a variety of ways to signal importance and “purchase” attention of others, or priority for other organization resources. In one aspect, senders of messages can specify an amount of currency to be associated with the message, so that recipients can see the specified amount before deciding whether to read the message. Once such a system is in use, it facilitates exchange of value based on user-created transactions regarding behavior, communication, resources, incentives, and priorities.

    摘要翻译: 在企业的上下文中提供了一个集中跟踪的人造货币。 该货币作为企业“注意力经济”中的账户,交换媒介和价值储存单位。企业中的用户(通常是同事)被分配了基数的货币单位,他们可以赚取,交换和 用各种方式来表达重视和“购买”他人的注意力,或优先考虑其他组织资源。 在一个方面,消息的发送者可以指定与消息相关联的货币量,使得接收者可以在决定是否读取消息之前看到指定的数量。 一旦这样的系统被使用,它便于基于用户创建的关于行为,通信,资源,激励和优先级的交易来交换价值。

    Attention economy for attention to messages, tasks and resources
    7.
    发明授权
    Attention economy for attention to messages, tasks and resources 有权
    注意经济关注消息,任务和资源

    公开(公告)号:US07918388B2

    公开(公告)日:2011-04-05

    申请号:US11750911

    申请日:2007-05-18

    IPC分类号: G06F17/00 G06F7/00

    摘要: A centrally tracked artificial currency is provided within the context of an enterprise. This currency serves as a unit of account, medium of exchange, and store of value in a corporate “attention economy.” Users (typically coworkers) in the enterprise are allotted a base number of currency units, which they can earn, exchange, and spend in a variety of ways to signal importance and “purchase” attention of others, or priority for other organization resources. In one aspect, senders of messages can specify an amount of currency to be associated with the message, so that recipients can see the specified amount before deciding whether to read the message. Once such a system is in use, it facilitates exchange of value based on user-created transactions regarding behavior, communication, resources, incentives, and priorities.

    摘要翻译: 在企业的上下文中提供了一个集中跟踪的人造货币。 该货币作为企业“注意力经济”中的账户,交换媒介和价值储存单位。企业中的用户(通常是同事)被分配了基数的货币单位,可以赚取,交换和 用各种方式来表达重视和“购买”他人的注意力,或优先考虑其他组织资源。 在一个方面,消息的发送者可以指定与消息相关联的货币量,使得接收者可以在决定是否读取消息之前看到指定的数量。 一旦这样的系统被使用,它便于基于用户创建的关于行为,通信,资源,激励和优先级的交易来交换价值。

    Attention economy for attention to messages, tasks and resources
    8.
    发明授权
    Attention economy for attention to messages, tasks and resources 有权
    注意经济关注消息,任务和资源

    公开(公告)号:US07240826B2

    公开(公告)日:2007-07-10

    申请号:US11339814

    申请日:2006-01-24

    IPC分类号: G06F7/00

    摘要: A centrally tracked artificial currency is provided within the context of an enterprise. This currency serves as a unit of account, medium of exchange, and store of value in a corporate “attention economy.” Users (typically coworkers) in the enterprise are allotted a base number of currency units, which they can earn, exchange, and spend in a variety of ways to signal importance and “purchase” attention of others, or priority for other organization resources. In one aspect, senders of messages can specify an amount of currency to be associated with the message, so that recipients can see the specified amount before deciding whether to read the message. Once such a system is in use, it facilitates exchange of value based on user-created transactions regarding behavior, communication, resources, incentives, and priorities.

    摘要翻译: 在企业的上下文中提供了一个集中跟踪的人造货币。 这种货币是企业“关注经济”的一个单位,交换媒介和价值储存。 企业中的用户(通常是同事)分配了基数的货币单位,他们可以通过各种方式赚取,交换和支出,以表示重视和“购买”其他人的注意力,或者优先考虑其他组织资源。 在一个方面,消息的发送者可以指定与消息相关联的货币量,使得接收者可以在决定是否读取消息之前看到指定的数量。 一旦这样的系统被使用,它便于基于用户创建的关于行为,通信,资源,激励和优先级的交易来交换价值。

    Attention economy for attention to messages, tasks and resources
    9.
    发明申请
    Attention economy for attention to messages, tasks and resources 有权
    注意经济关注消息,任务和资源

    公开(公告)号:US20060195379A1

    公开(公告)日:2006-08-31

    申请号:US11339814

    申请日:2006-01-24

    IPC分类号: G06Q40/00

    摘要: A centrally tracked artificial currency is provided within the context of an enterprise. This currency serves as a unit of account, medium of exchange, and store of value in a corporate “attention economy.” Users (typically coworkers) in the enterprise are allotted a base number of currency units, which they can earn, exchange, and spend in a variety of ways to signal importance and “purchase” attention of others, or priority for other organization resources. In one aspect, senders of messages can specify an amount of currency to be associated with the message, so that recipients can see the specified amount before deciding whether to read the message. Once such a system is in use, it facilitates exchange of value based on user-created transactions regarding behavior, communication, resources, incentives, and priorities.

    摘要翻译: 在企业的上下文中提供了一个集中跟踪的人造货币。 这种货币是企业“关注经济”的一个单位,交换媒介和价值储存。 企业中的用户(通常是同事)分配了基数的货币单位,他们可以通过各种方式赚取,交换和支出,以表达他们的重要性和“购买”他人的注意力,或者优先考虑其他组织资源。 在一个方面,消息的发送者可以指定与消息相关联的货币量,使得接收者可以在决定是否读取消息之前看到指定的数量。 一旦这样的系统被使用,它便于基于用户创建的关于行为,通信,资源,激励和优先级的交易来交换价值。