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1.发明授权Apparatus and method to enhance X-ray production in laser produced plasmas 失效用于增强激光产生等离子体中的X射线产生的装置和方法
公开(公告)号：US5175757A
公开(公告)日：1992-12-29
申请号：US571253
申请日：1990-08-22
CPC分类号： H05G2/001 , B82Y10/00 , G03F7/70033
摘要： Method and apparatus for generating x-rays for use in, for instance, x-ray photolithography. The method of generating x-rays includes the steps of providing a target and irradiating the target with a laser system which produces a train of sub-pulses to generate an x-ray producing plasma. The sub-pulses are of both high intensity and short duration. The apparatus for generating x-rays from a plasma includes a vacuum chamber, a target supported within the chamber and a laser system, including a short storage time laser.
摘要翻译： 用于生成用于例如x射线光刻的x射线的方法和装置。 产生X射线的方法包括以下步骤：提供目标并用产生一系列子脉冲以产生产生X射线的等离子体的激光系统照射目标物。 子脉冲具有高强度和短持续时间。 用于从等离子体产生X射线的装置包括真空室，支撑在腔室内的靶和包括短存储时间激光器的激光系统。
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公开(公告)号：US09504376B2
公开(公告)日：2016-11-29
申请号：US12909756
申请日：2010-10-21
CPC分类号： A61B3/0025 , A61B3/1015 , A61B3/103 , A61B3/112 , G02C7/027 , G02C7/04
摘要： Devices, systems, and methods that facilitate optical analysis, particularly for the diagnosis and treatment of refractive errors of the eye. An optical diagnostic method for an eye includes obtaining a sequence of aberration measurements of the eye, identifying an outlier aberration measurement of the sequence of aberration measurements, and excluding the outlier aberration measurement from the sequence of aberration measurements to produce a qualified sequence of aberration measurements. The sequence of aberrations measurements can be obtained by using a wavefront sensor. An optical correction for the eye can be formulated in response to the qualified sequence of aberration measurements.
摘要翻译： 便于光学分析的设备，系统和方法，特别是诊断和治疗眼睛屈光不正的方法。 用于眼睛的光学诊断方法包括获得眼睛的像差测量序列，识别像差测量序列的异常像差测量，并从像差测量序列排除异常值像差测量，以产生合格的像差测量序列 。 可以通过使用波前传感器来获得像差测量序列。 可以根据合格的像差测量序列来制定眼睛的光学校正。
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公开(公告)号：US20120113391A1
公开(公告)日：2012-05-10
申请号：US13356131
申请日：2012-01-23
申请人： Stephen W. Farrer , James Copland , Thomas D. Raymond , Wei Xiong
发明人： Stephen W. Farrer , James Copland , Thomas D. Raymond , Wei Xiong
IPC分类号： A61B3/107
CPC分类号： G01B11/2513 , A61B3/107 , G01M11/005 , G01M11/025 , G01M11/0264
摘要： A system for determining a surface shape of a test object includes a pattern having a plurality of first elements dispose about a central axis and defining an aperture containing the central axis. The first elements includes a plurality of common elements having a common form and a reference element having a reference form that is different than the common form. The system further comprises a detector array and an optical system. The optical system is adapted to provide an image of the first elements when light reflects off a surface of a test object, passes through the aperture, and is received by the detector array. The reference form may be configured to facilitate an association between the common elements and the spot images of the common elements.
摘要翻译： 用于确定测试对象的表面形状的系统包括具有围绕中心轴布置并且限定包含中心轴线的孔的多个第一元件的图案。 第一元件包括具有共同形式的多个公共元件和具有不同于通用形式的参考形式的参考元件。 该系统还包括检测器阵列和光学系统。 当光从测试对象的表面反射出来时，该光学系统适于提供第一元件的图像，通过该孔并由检测器阵列接收。 参考表格可以被配置为便于公共元素与公共元素的斑点图像之间的关联。
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公开(公告)号：US08118429B2
公开(公告)日：2012-02-21
申请号：US12259381
申请日：2008-10-28
申请人： Thomas D. Raymond , Paul Pulaski , Stephen W. Farrer , Daniel R. Neal , Alan H. Greenaway , David M. Faichnie , Heather I. Campbell Dalgarno , Graham N. Craik
发明人： Thomas D. Raymond , Paul Pulaski , Stephen W. Farrer , Daniel R. Neal , Alan H. Greenaway , David M. Faichnie , Heather I. Campbell Dalgarno , Graham N. Craik
CPC分类号： G01M11/0292 , A61B3/1015 , G01J9/00
摘要： A phase diversity wavefront sensor includes an optical system including at least one optical element for receiving a light beam; a diffractive optical element having a diffractive pattern defining a filter function, the diffractive optical element being arranged to produce, in conjunction with the optical system, images from the light beam associated with at least two diffraction orders; and a detector for detecting the images and outputting image data corresponding to the detected images. In one embodiment, the optical system, diffractive optical element, and detector are arranged to provide telecentric, pupil plane images of the light beam. A processor receives the image data from the detector, and executes a Gerchberg-Saxton phase retrieval algorithm to measure the wavefront of the light beam.
摘要翻译： 相位分集波前传感器包括光学系统，该光学系统包括用于接收光束的至少一个光学元件; 具有限定滤光器功能的衍射图案的衍射光学元件，所述衍射光学元件布置成与所述光学系统结合产生与至少两个衍射级相关联的光束的图像; 以及用于检测图像并输出与检测到的图像相对应的图像数据的检测器。 在一个实施例中，光学系统，衍射光学元件和检测器被布置成提供光束的远心光瞳平面图像。 处理器从检测器接收图像数据，并且执行Gerchberg-Saxton相位检索算法来测量光束的波前。
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公开(公告)号：US20090002631A1
公开(公告)日：2009-01-01
申请号：US11769054
申请日：2007-06-27
摘要： A system measures a corneal topography of an eye. The system includes a group of first light sources arranged around a central axis, the group being separated from the axis by a radial distance defining an aperture in the group; a plurality of second light sources; a detector array; and an optical system adapted to provide light from the second light sources through the aperture to a cornea of an eye, and to provide images of the first light sources and images of the second light sources from the cornea, through the aperture, to the detector array. The optical system includes an optical element having a focal length, f. The second light sources are disposed to be in an optical path approximately one focal length, f, away from the optical element.
摘要翻译： 系统测量眼睛的角膜地形。 该系统包括围绕中心轴布置的一组第一光源，该组与该轴线分开限定该组中的孔的径向距离; 多个第二光源; 检测器阵列; 以及光学系统，其适于将来自所述第二光源的光通过所述孔提供给眼睛的角膜，并且提供所述第一光源和所述第二光源的图像从所述角膜通过所述孔到所述检测器的图像 数组。 光学系统包括具有焦距f的光学元件。 第二光源设置成离光学元件大约一个焦距f的光路。
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6.发明授权Feedback stabilization system for pulsed single longitudinal mode tunable lasers 失效用于脉冲单纵模可调谐激光器的反馈稳定系统
公开(公告)号：US5054028A
公开(公告)日：1991-10-01
申请号：US340823
申请日：1989-04-20
申请人： Peter Esherick , Thomas D. Raymond
发明人： Peter Esherick , Thomas D. Raymond
CPC分类号： H01S3/139 , H01S3/0812 , H01S3/094034 , H01S3/213 , H01S5/143
摘要： A feedback stabilization system for pulse single longitudinal mode tunable lasers having an excited laser medium contained within an adjustable length cavity and producing a laser beam through the use of an internal dispersive element, including detection of angular deviation in the output laser beam resulting from detuning between the cavity mode frequency and the passband of the internal dispersive element, and generating an error signal based thereon. The error signal can be integrated and amplified and then applied as a correcting signal to a piezoelectric transducer mounted on a mirror of the laser cavity for controlling the cavity length.
摘要翻译： 一种用于脉冲单纵模式可调激光器的反馈稳定系统，其具有包含在可调节长度腔内的激发的激光介质，并且通过使用内部色散元件产生激光束，包括检测由于失调之间的失谐导致的输出激光束中的角偏差 腔模式频率和内部色散元件的通带，并基于此产生误差信号。 误差信号可以被积分和放大，然后作为校正信号施加到安装在激光腔的反射镜上的压电换能器，用于控制腔体长度。
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7.发明授权Method of locating valid light spots for optical measurement and optical measurement instrument employing method of locating valid light spots 有权使用定位有效光斑的方法来定位光学测量的有效光斑和光学测量仪器的方法公开(公告)号：US08622546B2
公开(公告)日：2014-01-07
申请号：US13156013
申请日：2011-06-08
申请人： Stephen W. Farrer , Thomas D. Raymond , Wei Xiong , John Dixson , Daniel R. Neal
发明人： Stephen W. Farrer , Thomas D. Raymond , Wei Xiong , John Dixson , Daniel R. Neal
CPC分类号： G01J1/4228 , A61B3/1015
摘要： An algorithm locates valid light spots produced on an image detector by a wavefront of interest. The algorithm includes sequentially examining pixels of the image detector to determine for each of the pixels whether the light intensity detected by the pixel is greater than a threshold, When the pixel's detected light intensity is determined to be greater than the threshold, the algorithm includes: determining whether the pixel belongs to a valid light spot; and when the pixel is determined to belong to a valid light spot; saving data indicating a location for the valid light spot; and masking out a group of pixels of the image detector at the determined location such that the masked pixels are considered to have a light intensity less than the threshold for a remainder of the sequential examination.
摘要翻译： 算法通过感兴趣的波阵面定位在图像检测器上产生的有效光点。 该算法包括顺序地检查图像检测器的像素，以确定每个像素是否由像素检测的光强度是否大于阈值。当像素的检测光强被确定为大于阈值时，该算法包括： 确定像素是否属于有效光点; 并且当确定像素属于有效光点时; 保存指示有效光点位置的数据; 并且在所确定的位置处掩蔽图像检测器的一组像素，使得被掩盖的像素被认为具有小于连续检验的剩余部分的阈值的光强度。
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公开(公告)号：US20090175525A1
公开(公告)日：2009-07-09
申请号：US12350895
申请日：2009-01-08
申请人： Stephen W. Farrer , James Copland , Thomas D. Raymond , Wei Xiong
发明人： Stephen W. Farrer , James Copland , Thomas D. Raymond , Wei Xiong
IPC分类号： G06K9/00
CPC分类号： G01B11/2513 , A61B3/107 , G01M11/005 , G01M11/025 , G01M11/0264
摘要： A system for determining a surface shape of a test object includes a pattern having a plurality of first elements dispose about a central axis and defining an aperture containing the central axis. The first elements includes a plurality of common elements having a common form and a reference element having a reference form that is different than the common form. The system further comprises a detector array and an optical system. The optical system is adapted to provide an image of the first elements when light reflects off a surface of a test object, passes through the aperture, and is received by the detector array. The reference form may be configured to facilitate an association between the common elements and the spot images of the common elements.
摘要翻译： 用于确定测试对象的表面形状的系统包括具有围绕中心轴布置并且限定包含中心轴线的孔的多个第一元件的图案。 第一元件包括具有共同形式的多个公共元件和具有不同于通用形式的参考形式的参考元件。 该系统还包括检测器阵列和光学系统。 当光从测试对象的表面反射出来时，该光学系统适于提供第一元件的图像，通过该孔并由检测器阵列接收。 参考表格可以被配置为便于公共元素与公共元素的斑点图像之间的关联。
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公开(公告)号：US20090161090A1
公开(公告)日：2009-06-25
申请号：US12347909
申请日：2008-12-31
申请人： Charles E. Campbell , Stephen W. Farrer , Daniel R. Neal , William S. Powers , Thomas D. Raymond , James Copland
发明人： Charles E. Campbell , Stephen W. Farrer , Daniel R. Neal , William S. Powers , Thomas D. Raymond , James Copland
IPC分类号： G01B11/255 , G01B11/25 , G01M11/08 , A61B3/107 , G01C5/00
CPC分类号： A61B3/0091 , A61B3/107 , A61B3/145 , G01B11/25 , G01B11/255
摘要： A system for determining the shape of an object and/or a distance of the object from the system includes a first plurality of light source, a second plurality of light sources, and a detector or detector array. The first plurality of light sources are disposed about a central axis and are separated from the central axis by radial distances defining an aperture in the first plurality of light sources. The system also includes an optical system adapted to provide light from the second plurality of light sources through the aperture to the object. The system may further include a computer configured to determine the shape of the object and/or the distance of the object from the system using light from the first and second plurality of light sources that is reflected from the object and received by the detector.
摘要翻译： 用于确定物体的形状和/或物体与系统的距离的系统包括第一多个光源，第二多个光源以及检测器或检测器阵列。 第一多个光源围绕中心轴设置，并且通过限定第一多个光源中的孔的径向距离与中心轴分离。 该系统还包括适于将来自第二多个光源的光通过孔提供给物体的光学系统。 该系统可以进一步包括计算机，该计算机被配置为使用来自被检体的被反射并由检测器接收的来自第一和第二多个光源的光来确定物体的形状和/或物体与系统的距离。
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公开(公告)号：US07976163B2
公开(公告)日：2011-07-12
申请号：US11769054
申请日：2007-06-27
申请人： Charles E. Campbell , Stephen W. Farrer , Daniel R. Neal , William S. Powers , Thomas D. Raymond
发明人： Charles E. Campbell , Stephen W. Farrer , Daniel R. Neal , William S. Powers , Thomas D. Raymond
IPC分类号： A61B3/107
摘要： A system measures a corneal topography of an eye. The system includes a group of first light sources arranged around a central axis, the group being separated from the axis by a radial distance defining an aperture in the group; a plurality of second light sources; a detector array; and an optical system adapted to provide light from the second light sources through the aperture to a cornea of an eye, and to provide images of the first light sources and images of the second light sources from the cornea, through the aperture, to the detector array. The optical system includes an optical element having a focal length, f. The second light sources are disposed to be in an optical path approximately one focal length, f, away from the optical element.
摘要翻译： 系统测量眼睛的角膜地形。 该系统包括围绕中心轴布置的一组第一光源，该组与该轴线分开限定该组中的孔的径向距离; 多个第二光源; 检测器阵列; 以及光学系统，其适于将来自所述第二光源的光通过所述孔提供给眼睛的角膜，并且提供所述第一光源和所述第二光源的图像从所述角膜通过所述孔到所述检测器的图像 数组。 光学系统包括具有焦距f的光学元件。 第二光源设置成离光学元件大约一个焦距f的光路。
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