公开(公告)号：US08318031B2

公开(公告)日：2012-11-27

申请号：US12748182

申请日：2010-03-26

申请人： Aron Pentek ,  Thomas J. A. Roucoux ,  Yi Zheng

发明人： Aron Pentek ,  Thomas J. A. Roucoux ,  Yi Zheng

IPC分类号： B44C1/22

CPC分类号： G11B5/3163 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/3146 ,  G11B5/315

摘要： A method for manufacturing a magnetic write head having a write pole with a tapered leading edge and a tapered trailing edge. The method includes forming a non-magnetic bump player over a surface, forming a mask over the non-magnetic bump layer and performing a first ion milling to form a tapered back edge on the non-magnetic bump layer. A magnetic write pole material is then deposited over the surface and over the non-magnetic bump layer. Then a non-magnetic step structure is formed over the magnetic write pole material and an ion milling is performed to form a taper on the upper surface of the write pole. The write pole lateral dimensions can then be defined, and a non-magnetic bump formed over the tapered portion of the upper surface of the write pole. Another ion milling can then be performed to extend the taper of the surface of the write pole.

摘要翻译： 一种用于制造具有带有锥形前缘和锥形后缘的写极的磁写头的方法。 所述方法包括在表面上形成非磁性碰撞播放器，在非磁性凸块层上形成掩模，并执行第一离子铣削以在非磁性凸块层上形成锥形后缘。 然后将磁性写入磁极材料沉积在表面上并在非磁性凸起层上方。 然后在磁性写入磁极材料上形成非磁性阶梯结构，并且执行离子铣削以在写入极的上表面上形成锥形。 然后可以限定写入极横向尺寸，并且在写入极的上表面的锥形部分上形成非磁性凸块。 然后可以执行另一种离子铣削来延伸写极的表面的锥度。

公开(公告)号：US08498078B2

公开(公告)日：2013-07-30

申请号：US12634533

申请日：2009-12-09

申请人： Donald G. Allen ,  Liubo Hong ,  Aron Pentek ,  Thomas J. A. Roucoux ,  Sue S. Zhang ,  Yi Zheng

发明人： Donald G. Allen ,  Liubo Hong ,  Aron Pentek ,  Thomas J. A. Roucoux ,  Sue S. Zhang ,  Yi Zheng

IPC分类号： G11B5/147 ,  G11B5/187

CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/31

摘要： Methods for fabrication of tapered magnetic poles with a non-magnetic front bump layer. A magnetic pole may have a plurality of tapered surfaces at or near an air bearing surface (ABS), wherein a thickness of the write pole increases in a direction away from the ABS. A non-magnetic front bump layer may be formed on one or more of the tapered surfaces of the magnetic pole at a distance from the ABS. The front bump layer may increase the separation distance between a shield layer and the magnetic pole near the tapered surface, thereby improving the performance of the write head.

摘要翻译： 用非磁性前凸块层制造锥形磁极的方法。 磁极可以在空气轴承表面（ABS）处或附近具有多个锥形表面，其中写入极的厚度在远离ABS的方向上增加。 可以在与ABS相距一定距离处的磁极的一个或多个锥形表面上形成非磁性前凸块层。 前凸块层可以增加在锥形表面附近的屏蔽层和磁极之间的间隔距离，从而提高写入头的性能。

公开(公告)号：US20130020204A1

公开(公告)日：2013-01-24

申请号：US13187381

申请日：2011-07-20

申请人： Donald G. Allen ,  Liubo Hong ,  Aron Pentek ,  Thomas J. A. Roucoux ,  Junsheng Yang ,  Yi Zheng ,  Qiping Zhong ,  Honglin Zhu

发明人： Donald G. Allen ,  Liubo Hong ,  Aron Pentek ,  Thomas J. A. Roucoux ,  Junsheng Yang ,  Yi Zheng ,  Qiping Zhong ,  Honglin Zhu

IPC分类号： G11B5/127 ,  C25D7/00 ,  C23F1/04 ,  C25D5/02

CPC分类号： C25D5/022 ,  C25D5/48 ,  G11B5/3116 ,  G11B5/3163

摘要： A method for manufacturing a magnetic write head having a tapered leading edge. The method includes depositing a sacrificial non-magnetic layer to a thickness that is at least as great as the thickness of the write pole to be formed. The sacrificial non-magnetic layer is then masked and ion milled so as to form a tapered edge on the sacrificial non-magnetic layer that extends through the thickness of the non-magnetic fill layer. A magnetic material is then deposited and planarized by chemical mechanical polishing. The remaining magnetic material forms the entirety of the magnetic write pole so that there is no need to deposit additional magnetic layers further construct the write pole.

摘要翻译： 一种用于制造具有锥形前缘的磁写头的方法。 该方法包括将牺牲非磁性层沉积至至少与待形成的写极的厚度一样大的厚度。 然后对牺牲非磁性层进行掩模和离子研磨，以在牺牲非磁性层上形成延伸穿过非磁性填充层的厚度的锥形边缘。 然后通过化学机械抛光沉积和平坦化磁性材料。 剩余的磁性材料形成整个磁性写入磁极，使得不需要沉积另外的磁性层进一步构造写入极。

公开(公告)号：US20130082027A1

公开(公告)日：2013-04-04

申请号：US13251058

申请日：2011-09-30

申请人： Guomin Mao ,  Donald G. Allen ,  Aron Pentek ,  Thomas J. A. Roucoux ,  Yi Zheng

发明人： Guomin Mao ,  Donald G. Allen ,  Aron Pentek ,  Thomas J. A. Roucoux ,  Yi Zheng

IPC分类号： G11B5/127

CPC分类号： G11B5/3163 ,  G11B5/1278 ,  G11B5/3116

摘要： A method for manufacturing a magnetic write head for magnetic data recording. The method includes forming a depositing a magnetic write pole material and forming a mask structure over the write pole material that includes a polymer mask under-layer, a dielectric hard mask formed over the polymer mask under-layer and a photoresist mask formed over the dielectric hard mask. The image of the photoresist mask is transferred onto the underlying dielectric hard mask and then a reactive ion etching is performed to transfer the image of the dielectric hard mask onto the polymer mask under-layer. This reactive ion etching is performed in an atmosphere chemistry that includes both an oxygen containing gas and a nitrogen containing gas.

摘要翻译： 一种用于制造用于磁数据记录的磁写头的方法。 该方法包括形成磁性写入极材料的沉积，并在包括聚合物掩模底层的写入极材料上形成掩模结构，在聚合物掩模底层上形成的电介质硬掩模和形成在电介质上的光致抗蚀剂掩模 硬面膜 将光致抗蚀剂掩模的图像转印到下面的电介质硬掩模上，然后进行反应离子蚀刻，以将电介质硬掩模的图像转印到聚合物掩模底层上。 该反应离子蚀刻在包含含氧气体和含氮气体的气氛化学中进行。

公开(公告)号：US20110134569A1

公开(公告)日：2011-06-09

申请号：US12634533

申请日：2009-12-09

申请人： Donald G. Allen ,  Liubo Hong ,  Aron Pentek ,  Thomas J. A. Roucoux ,  Sue S. Zhang ,  Yi Zheng

发明人： Donald G. Allen ,  Liubo Hong ,  Aron Pentek ,  Thomas J. A. Roucoux ,  Sue S. Zhang ,  Yi Zheng

IPC分类号： G11B5/10

CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/31

摘要： Methods for fabrication of tapered magnetic poles with a non-magnetic front bump layer. A magnetic pole may have a plurality of tapered surfaces at or near and air bearing surface (ABS), wherein a thickness of the write pole increases in a direction away from the ABS. A non-magnetic front bump layer may be formed on one or more of the tapered surfaces of the magnetic pole at a distance from the ABS. The front bump layer may increase the separation distance between a shield layer and the magnetic pole near the tapered surface, thereby improving the performance of the write head.

摘要翻译： 用非磁性前凸块层制造锥形磁极的方法。 磁极可以在空气轴承表面（ABS）处或附近具有多个锥形表面，其中写入极的厚度在远离ABS的方向上增加。 可以在与ABS相距一定距离处的磁极的一个或多个锥形表面上形成非磁性前凸块层。 前凸块层可以增加在锥形表面附近的屏蔽层和磁极之间的间隔距离，从而提高写入头的性能。

公开(公告)号：US20110262774A1

公开(公告)日：2011-10-27

申请号：US12766769

申请日：2010-04-23

申请人： Aron Pentek ,  Yi Zheng

发明人： Aron Pentek ,  Yi Zheng

IPC分类号： G11B5/33

CPC分类号： G11B5/1278 ,  G11B5/3116 ,  G11B5/315 ,  G11B5/3163 ,  Y10T428/1171

摘要： A magnetic write head having write pole and a wrap-around-trailing magnetic shield having side portions that are separated from the write pole by tapered non-magnetic side gap layers. The tapered non-magnetic side gap layers provide a non-magnetic side gap width that increases with increasing distance from the ABS, thereby providing optimal protection against adjacent track interference at the ABS while minimizing write field loss to the shield in regions away from the ABS.

摘要翻译： 具有写磁极的磁写头和卷绕后磁屏蔽，其具有通过锥形非磁性侧间隙层与写极分离的侧部。 锥形非磁性侧间隙层提供随着与ABS的距离的增加而增加的非磁性侧间隙宽度，从而为ABS提供最佳保护，以防止相邻的轨道干涉，同时最小化远离ABS的区域对屏蔽的写入场损失 。

公开(公告)号：US20110147222A1

公开(公告)日：2011-06-23

申请号：US12641138

申请日：2009-12-17

申请人： Aron Pentek ,  Yi Zheng

发明人： Aron Pentek ,  Yi Zheng

IPC分类号： C23C14/32 ,  C25D5/10

CPC分类号： C25D7/001 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/3146 ,  G11B5/315 ,  G11B5/3163 ,  Y10T428/115

摘要： A method for manufacturing a magnetic write head that has a trailing magnetic shield with a tapered write pole trailing edge, a non-magnetic step layer and a Ru bump and an alumina bump formed at the front of the non-magnetic step layer. The process forms a Ru/alumina side wall at the sides of the write pole, such that the Ru side wall is closest to the write pole. The Ru is removed more readily than the alumina during the ion milling that is performed to taper the write pole. This causes the Ru portion of the side wall to taper away from the write pole rather than forming an abrupt step. This tapering prevents dishing of the trailing edge of the write pole for improved write head performance.

摘要翻译： 一种用于制造具有形成在非磁性阶梯层前面的锥形写磁头后缘的后磁屏蔽，非磁性阶梯层和Ru凸块以及氧化铝凸块的磁写头的方法。 该工艺在写入极的两侧形成Ru /氧化铝侧壁，使得Ru侧壁最靠近写入极。 在离子铣削期间，Ru比氧化铝更容易地被除去，以使得写柱变钝。 这使得侧壁的Ru部分远离写入磁极而变浅，而不是形成突然的步骤。 这种渐缩防止了写磁极的后缘的凹陷以改善写头性能。

公开(公告)号：US07881010B2

公开(公告)日：2011-02-01

申请号：US11956277

申请日：2007-12-13

申请人： Hung-Chin Guthrie ,  Ming Jiang ,  Edward Hin Pong Lee ,  Aron Pentek ,  Sue Siyang Zhang ,  Yi Zheng

发明人： Hung-Chin Guthrie ,  Ming Jiang ,  Edward Hin Pong Lee ,  Aron Pentek ,  Sue Siyang Zhang ,  Yi Zheng

IPC分类号： G11B5/187

CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/3146 ,  G11B5/315

摘要： A method for manufacturing a magnetic write head having a write pole with a flared step feature that defines a secondary flare point. The method involves depositing a magnetic write pole material on a substrate and then depositing a magnetic material over the write pole material followed by a non-magnetic material. A first mask is formed having a front edge to define the location of the secondary flare point, and one or more material removal processes are used to remove portions of the magnetic layer and non-magnetic layer that are not protected by this first mask. The first mask is replaced by a second mask that is configured to define a write pole, and an ion milling is performed to define the write pole. Shadowing from the magnetic layer and non-magnetic layer form a flared secondary flare point.

摘要翻译： 一种用于制造具有定义二次闪光点的具有扩口步骤特征的写极的磁写头的方法。 该方法包括将磁性写入极材料沉积在衬底上，然后将磁性材料沉积在写入极材料上，随后是非磁性材料。 形成第一掩模，其具有前边缘以限定次级火炬点的位置，并且使用一个或多个材料去除过程来去除未被该第一掩模保护的磁性层和非磁性层的部分。 第一个掩模由配置为定义写入极的第二个掩模代替，并且执行离子铣削来定义写入极点。 从磁性层和非磁性层的阴影形成扩张的次级耀斑点。

公开(公告)号：US20100163522A1

公开(公告)日：2010-07-01

申请号：US12345804

申请日：2008-12-30

申请人： Aron Pentek ,  Sue Siyang Zhang ,  Yi Zheng

发明人： Aron Pentek ,  Sue Siyang Zhang ,  Yi Zheng

IPC分类号： B44C1/22 ,  B05D5/12

CPC分类号： G11B5/3163 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/315

摘要： A method for manufacturing a magnetic write head. The write head is constructed by a method that includes depositing a magnetic write pole material and then depositing a hard mask over the magnetic material. An inorganic image transfer layer is formed over the hard mask. SiC, alumina, SiO2, SiN, Ta or TaOx. This image transfer is physically robust, so that it does not bend or tip over during manufacture. The image of a patterned photoresist layer can be transferred onto the underlying image transfer layer, and an ion milling can be performed to pattern the image of the image transfer layer onto the underlying hard mask and magnetic material, thereby forming a magnetic write pole.

摘要翻译： 一种用于制造磁写头的方法。 写头由包括沉积磁性写入磁极材料然后在磁性材料上沉积硬掩模的方法构成。 在硬掩模上形成无机图像转印层。 SiC，氧化铝，SiO2，SiN，Ta或TaOx。 这种图像传输是物理上坚固的，因此它在制造过程中不会弯曲或翻倒。 图案化的光致抗蚀剂层的图像可以转移到下面的图像转印层上，并且可以执行离子研磨以将图像转印层的图像图案化到下面的硬掩模和磁性材料上，从而形成磁性写入极。

公开(公告)号：US20100155364A1

公开(公告)日：2010-06-24

申请号：US12343726

申请日：2008-12-24

申请人： Aron Pentek ,  Sue Siyang Zhang ,  Yi Zheng

发明人： Aron Pentek ,  Sue Siyang Zhang ,  Yi Zheng

IPC分类号： B44C1/22

CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/3146 ,  G11B5/315 ,  G11B5/3163

摘要： A method for manufacturing a magnetic write head having a write pole a tapered trailing edge and a trailing, wrap-around magnetic shield with a slanted bump structure that steps away from the magnetic write pole. The method involves first forming a write pole and non-magnetic side gap layers, and then depositing a non-magnetic RIEable material. A mask is formed on the RIEable material and a reactive ion etching (RIE) is performed to form the RIEable material layer into a nonmagnetic bump with a tapered front edge.

摘要翻译： 一种用于制造具有锥形后缘的写入极和具有偏离磁性写入极的倾斜凸起结构的后部缠绕磁屏蔽的磁性写入头的方法。 该方法包括首先形成写磁极和非磁性侧隙层，然后沉积非磁性RIEable材料。 在RIEable材料上形成掩模，并执行反应离子蚀刻（RIE）以将RIEable材料层形成为具有锥形前边缘的非磁性凸块。