摘要:
A radiation-sensitive resin composition includes a resin including a repeating unit shown by a following general formula (1), a photoacid generator and a photodisintegrating base shown by a following general formula (8). R2 represents a hydrogen atom or a methyl group, and each of R2s individually represents a monovalent alicyclic hydrocarbon group having 4 to 20 carbon atoms or a derivative thereof, a linear or branched alkyl group having 1 to 4 carbon atoms, or the like. Each of R18 to R20 individually represents a hydrogen atom, an alkyl group, an alkoxy group, a hydroxyl group or a halogen atom, and Z− represents OH−, R—COO−, R—SO3− or an anion shown by a following formula (10), wherein R represents an alkyl group, an aryl group or an alkaryl group.
摘要翻译:辐射敏感性树脂组合物包括含有下列通式(1)表示的重复单元的树脂,光致酸产生剂和由以下通式(8)表示的光致聚合碱。 R2表示氢原子或甲基,R2各自表示碳原子数为4〜20的一价脂环式烃基或其衍生物,碳原子数为1〜4的直链或支链烷基等。 R 18〜R 20各自独立地表示氢原子,烷基,烷氧基,羟基或卤素原子,Z-表示OH-,R-COO-,R-SO 3 - 或下述 式(10),其中R表示烷基,芳基或烷芳基。
摘要:
An immersion upper layer film composition includes a resin and a solvent. The resin forms a water-stable film during irradiation and is dissolved in a subsequent developer. The solvent contains a monovalent alcohol having 6 or less carbon atoms. The composition is to be applied to form a coat on a photoresist film in an immersion exposure process in which the photoresist film is irradiated through water provided between a lens and the photoresist film.
摘要:
There is provided a semiconductor component including: a semiconductor substrate of a first conduction type; a semiconductor layer of a second conduction type that is formed on the semiconductor substrate and is PN-joined with the semiconductor substrate; an insulator layer laminated on the semiconductor layer; a metal layer laminated on the insulator layer at a pre-specified region; a semiconductor of the second conduction type at a side of the semiconductor layer at which the insulating layer is laminated, the semiconductor being formed directly under the metal layer such that incident light that is incident from the metal layer side is not illuminated onto the semiconductor layer, and the semiconductor containing more impurities than the semiconductor layer; and a conduction portion that conducts between the metal layer and the semiconductor.
摘要:
A method for inspecting an optical information storage medium includes the steps of: irradiating the storage medium with a laser beam and rotating the medium by a constant linear velocity control technique by reference to the radial location at which the laser beam forms a spot on the medium; changing the rotational velocities according to the radial location on the medium between at least two linear velocities that include a first linear velocity Lv1 and a second linear velocity Lv2 higher than the first linear velocity Lv1; generating a focus error signal and/or a tracking error signal based on the light reflected from the medium; performing a focus control and/or a tracking control on the laser beam that irradiates the medium based on the focus and/or tracking error signal(s); and passing the branched outputs of control loops for the focus and/or tracking error signal(s) through predetermined types of frequency band-elimination filters for the focus and/or tracking error signal(s) to obtain residual errors of the focus and/or tracking error signal(s) and comparing the residual errors to predetermined reference values.
摘要:
A method for inspecting an optical information storage medium includes the steps of: irradiating the storage medium with a laser beam and rotating the medium by a constant linear velocity control technique by reference to the radial location at which the laser beam forms a spot on the medium; changing the rotational velocities according to the radial location on the medium between at least two linear velocities that include a first linear velocity Lv1 and a second linear velocity Lv2 higher than the first linear velocity Lv1; generating a focus error signal and/or a tracking error signal based on the light reflected from the medium; performing a focus control and/or a tracking control on the laser beam that irradiates the medium based on the focus and/or tracking error signal(s); and passing the branched outputs of control loops for the focus and/or tracking error signal(s) through predetermined types of frequency band-elimination filters for the focus and/or tracking error signal(s) to obtain residual errors of the focus and/or tracking error signal(s) and comparing the residual errors to predetermined reference values.
摘要:
Information is recorded on an information recording medium by classifying recording conditions by data pattern, including at least one recording mark and at least one space, of a data stream to be recorded; wherein the classification of the recording conditions by data pattern is performed using a combination of the length of a first recording mark included in the data stream and the length of a first space located adjacently previous or subsequent to the first recording mark, and then further performed using the length of a second recording mark which is not located adjacent to the first recording mark and is located adjacent to the first space. Alternatively, the classification of the recording conditions by data pattern is performed using a combination of the length of a first recording mark included in the data stream and the length of a first space located adjacently previous or subsequent to the first recording mark, and then further performed using the length of a second space which is not located adjacent to the first space and is located adjacent to the first recording mark.
摘要:
An optical disk medium includes a track groove thereon. On the optical disk medium, information is recorded along the track groove on a block unit basis. The block unit has a predetermined length. The block unit having the predetermined length includes a number of sub-blocks that are arranged along the groove. A sub-block mark is provided within each of the sub-blocks and used to identify the sub-block.
摘要:
An optical disc medium comprises a track groove, along which main information is recorded. The track groove is divided into a plurality of blocks. The plurality of blocks each include a plurality of frames. The plurality of frames each include one shape of wobbles indicating sub information, among a plurality of prescribed shapes of wobbles. The plurality of blocks each have address information. The address information is represented by a string of at least one piece of sub information represented by the shape of wobbles of at least one of the plurality of frames.
摘要:
A data recording method according to the present invention is a method for recording data as edge position information, including marks and spaces of multiple different lengths, on a storage medium by irradiating the storage medium with a pulsed energy beam. The method includes the steps of: (A) generating a write code sequence based on the data to be recorded; (B) determining a write pulse waveform, defining the power modulation of the energy beam, according to the code lengths of respective codes included in the write code sequence; and (C) modulating the power of the energy beam based on the write pulse waveform. If the shortest code length of the write code sequence is n (which is an integer equal to or greater than one), a write pulse waveform that has only one write pulse is assigned to recording mark making periods corresponding to codes with code lengths x of n, n+1 and n+2, and a write pulse waveform that has multiple write pulses Pw is assigned to recording mark making periods corresponding to codes with code lengths x of n+3 or more.
摘要:
A data recording method according to the present invention is a method for recording data as edge position information, including marks and spaces of multiple different lengths, on a storage medium by irradiating the storage medium with a pulsed energy beam. The method includes the steps of: (A) generating a write code sequence based on the data to be recorded; (B) determining a write pulse waveform, defining the power modulation of the energy beam, according to the code lengths of respective codes included in the write code sequence; and (C) modulating the power of the energy beam based on the write pulse waveform. If the shortest code length of the write code sequence is n (which is an integer equal to or greater than one), a write pulse waveform that has only one write pulse is assigned to recording mark making periods corresponding to codes with code lengths x of n, n+1 and n+2, and a write pulse waveform that has multiple write pulses Pw is assigned to recording mark making periods corresponding to codes with code lengths x of n+3 or more.