DENSITY MODULATED THIN FILM ELECTRODES, METHODS OF MAKING SAME, AND APPLICATIONS OF SAME
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    发明申请
    DENSITY MODULATED THIN FILM ELECTRODES, METHODS OF MAKING SAME, AND APPLICATIONS OF SAME 审中-公开
    密度调制薄膜电极,其制造方法及其应用

    公开(公告)号:US20160226065A1

    公开(公告)日:2016-08-04

    申请号:US15010628

    申请日:2016-01-29

    摘要: Density modulated thin film electrodes, methods of making the same, and applications of the same. The density modulated thin film electrode includes a substrate formed of a current collecting material, and a thin film formed of an electrode material on the substrate. The thin film has a first surface and an opposite, second surface, and a density that is changed with a distance defined from the first surface to a plane in the thin film, the plane being parallel to the first surface. The method includes depositing the electrode material on the substrate to form the thin film, where, during deposition of the electrode material, a pressure of an operating gas is controlled and changed to a predetermined pressure value according to a deposited thickness of the electrode material, so as to make the density of the thin film changed with the distance.

    摘要翻译: 密度调制薄膜电极,制造方法及其应用。 密度调制薄膜电极包括由集电材料形成的基板和由基板上的电极材料形成的薄膜。 薄膜具有第一表面和相对的第二表面,并且密度以从薄膜中的第一表面到平面限定的距离而改变,该平面与第一表面平行。 该方法包括将电极材料沉积在基板上以形成薄膜,其中在沉积电极材料期间,根据电极材料的沉积厚度控制工作气体的压力并改变到预定压力值, 以使薄膜的密度随着距离而变化。