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    SEALED ROBOT DRIVE
    3.
    发明申请
    SEALED ROBOT DRIVE 有权
    密封机器人驱动

    公开(公告)号：US20150139770A1

    公开(公告)日：2015-05-21

    申请号：US14540072

    申请日：2014-11-13

    Applicant: Brooks Automation, Inc.

    Inventor： Jairo T. MOURA ,  Ulysses GILCHRIST ,  Robert T. CAVENEY

    IPC: H02K5/128 ,  B25J11/00 ,  H02K1/24 ,  H02K11/00 ,  H02K1/14

    CPC classification number: H02K5/128 ,  B25J11/0095 ,  H02K1/14 ,  H02K1/141 ,  H02K1/148 ,  H02K1/24 ,  H02K1/246 ,  H02K11/21 ,  H02K19/103

    Abstract: A transport apparatus including a housing, a drive mounted to the housing, and at least one transport arm connected to the drive where the drive includes at least one rotor having at least one salient pole of magnetic permeable material and disposed in an isolated environment, at least one stator having at least one salient pole with corresponding coil units and disposed outside the isolated environment, where the at least one salient pole of the at least one stator and the at least one salient pole of the rotor form a closed magnetic flux circuit between the at least one rotor and the at least one stator, and at least one seal configured to isolate the isolated environment where the at least one seal is integral to the at least one stator.

    Abstract translation: 一种运输装置，包括壳体，安装到壳体的驱动器和连接到驱动器的至少一个运输臂，其中驱动器包括至少一个转子，该转子具有至少一个磁性可渗透材料的凸极并设置在隔离的环境中， 至少一个定子具有至少一个具有相应线圈单元的凸极并且设置在隔离环境之外，其中至少一个定子的至少一个凸极和转子的至少一个凸极在其间形成闭合磁通电路， 所述至少一个转子和所述至少一个定子以及至少一个密封件构造成隔离所述隔离环境，其中所述至少一个密封件与所述至少一个定子成一体。

    SUBSTRATE PROCESSING APPARATUS
    4.
    发明申请
    SUBSTRATE PROCESSING APPARATUS 审中-公开

    公开(公告)号：US20200321232A1

    公开(公告)日：2020-10-08

    申请号：US16825663

    申请日：2020-03-20

    Applicant: Brooks Automation, Inc.

    Inventor： Robert T. CAVENEY ,  Jayaraman KRISHNASAMY ,  Ulysses GILCHRIST ,  Mitchell DREW ,  Jairo MOURA

    IPC: H01L21/677 ,  B25J9/04 ,  B25J11/00 ,  B25J18/04

    Abstract: A substrate processing apparatus including a frame, a first SCARA arm connected to the frame, including an end effector, configured to extend and retract along a first radial axis; a second SCARA arm connected to the frame, including an end effector, configured to extend and retract along a second radial axis, the SCARA arms having a common shoulder axis of rotation; and a drive section coupled to the SCARA arms is configured to independently extend each SCARA arm along a respective radial axis and rotate each SCARA arm about the common shoulder axis of rotation where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis, wherein each end effector is configured to hold at least one substrate and the end effectors are located on a common transfer plane.

    SEALED ROBOT DRIVE
    5.
    发明申请
    SEALED ROBOT DRIVE 审中-公开

    公开(公告)号：US20200067368A1

    公开(公告)日：2020-02-27

    申请号：US16674933

    申请日：2019-11-05

    Applicant: Brooks Automation, Inc.

    Inventor： Jairo T. MOURA ,  Ulysses GILCHRIST ,  Robert T. CAVENEY

    IPC: H02K5/128 ,  H02K1/14 ,  H02K1/24 ,  H02K19/10 ,  H02K11/21 ,  B25J11/00

    Abstract: A transport apparatus including a housing, a drive mounted to the housing, and at least one transport arm connected to the drive where the drive includes at least one rotor having at least one salient pole of magnetic permeable material and disposed in an isolated environment, at least one stator having at least one salient pole with corresponding coil units and disposed outside the isolated environment, where the at least one salient pole of the at least one stator and the at least one salient pole of the rotor form a closed magnetic flux circuit between the at least one rotor and the at least one stator, and at least one seal configured to isolate the isolated environment where the at least one seal is integral to the at least one stator.

    HIGH SPEED SUBSTRATE ALIGNER APPARATUS
    7.
    发明申请
    HIGH SPEED SUBSTRATE ALIGNER APPARATUS 审中-公开

    公开(公告)号：US20170236739A1

    公开(公告)日：2017-08-17

    申请号：US15465326

    申请日：2017-03-21

    Applicant: Brooks Automation, Inc.

    Inventor： Jairo T. MOURA ,  Martin HOSEK ,  Todd BOTTOMLEY ,  Ulysses GILCHRIST

    IPC: H01L21/68 ,  H01L21/687 ,  H01L21/677

    CPC classification number: H01L21/681 ,  H01L21/67748 ,  H01L21/68 ,  H01L21/682 ,  H01L21/68707 ,  H01L21/68728 ,  H01L21/68785 ,  H01L21/68792

    Abstract: A substrate aligner providing minimal substrate transporter extend and retract motions to quickly align substrate without back side damage while increasing the throughput of substrate processing. In one embodiment, the aligner having an inverted chuck connected to a frame with a substrate transfer system capable of transferring substrate from chuck to transporter without rotationally repositioning substrate. The inverted chuck eliminates aligner obstruction of substrate fiducials and along with the transfer system, allows transporter to remain within the frame during alignment. In another embodiment, the aligner has a rotatable sensor head connected to a frame and a substrate support with transparent rest pads for supporting the substrate during alignment so transporter can remain within the frame during alignment. Substrate alignment is performed independent of fiducial placement on support pads. In other embodiments the substrate support employs a buffer system for buffering substrate inside the apparatus allowing for fast swapping of substrates.

    SUBSTRATE TRANSPORT APPARATUS
    8.
    发明申请
    SUBSTRATE TRANSPORT APPARATUS 有权
    基座运输装置

    公开(公告)号：US20170040203A1

    公开(公告)日：2017-02-09

    申请号：US15114275

    申请日：2015-01-28

    Applicant: BROOKS AUTOMATION, INC.

    Inventor： Robert T. CAVENEY ,  Ulysses GILCHRIST

    IPC: H01L21/687 ,  H01L21/677

    CPC classification number: H01L21/68707 ,  H01L21/67742

    Abstract: A substrate transport apparatus including a frame, an upper arm rotatably mounted to the frame about a shoulder axis, a forearm rotatably mounted to the upper arm about an elbow axis where the forearm includes stacked forearm sections dependent from the upper arm through a common joint, and independent stacked end effectors rotatably mounted to the forearm, the forearm being common to the independent stacked end effectors, wherein at least one end effector is mounted to the stacked forearm sections at a wrist axis, where the forearm is configured such that spacing between the independent stacked end effectors mounted to the stacked forearm sections is decoupled from a height build up between end effectors accommodating pass through instrumentation.

    Abstract translation: 一种基板输送装置，包括框架，上臂部围绕肩部轴线可转动地安装在框架上，前臂围绕肘轴可旋转地安装在上臂上，其中前臂包括通过公共接头从上臂依赖于堆叠的前臂部分， 以及可旋转地安装到前臂的独立的堆叠端部执行器，前臂对于独立的堆叠式末端执行器是共同的，其中至少一个末端执行器在手腕轴线处安装到堆叠的前臂部分，其中前臂被配置为使得前臂 安装到堆叠的前臂部分的独立的堆叠式末端执行器与容纳通过仪器的端部执行器之间的高度建立分离。

    UNEQUAL LINK SCARA ARM
    9.
    发明申请
    UNEQUAL LINK SCARA ARM 审中-公开

    公开(公告)号：US20160221183A1

    公开(公告)日：2016-08-04

    申请号：US15012425

    申请日：2016-02-01

    Applicant: BROOKS AUTOMATION, INC.

    Inventor： Robert T. CAVENEY ,  David MARTIN ,  Ulysses GILCHRIST

    IPC: B25J9/04 ,  H01L21/677

    CPC classification number: B25J9/042 ,  H01L21/67766

    Abstract: A substrate transport apparatus comprising a drive section, a controller, an upper arm, forearm and substrate holder. A proximate end of the upper arm being rotatably mounted to the drive section at a shoulder joint. A proximate end of the forearm being rotatably mounted to a distal end of the upper arm at an elbow joint. The substrate holder being rotatably mounted to a distal end of the forearm at a wrist joint. The upper arm and the forearm being unequal in length from joint center to joint center. The substrate transport arm is adapted to transport substrate to and from at least two substrate holding areas with the drive section of the transport apparatus remaining in a fixed position relative to the holding areas. Each of the upper arm, forearm and substrate holder being independently rotatable with respect to each other.

    Abstract translation: 一种基板输送装置，包括驱动部，控制器，上臂，前臂和基板支架。 上臂的近端在肩关节处可旋转地安装到驱动部。 前臂的近端以肘关节可旋转地安装在上臂的远端。 基体保持器可旋转地安装在腕关节前端的前端。 上臂和前臂从关节中心到关节中心的长度不等。 基板输送臂适于将基板输送至至少两个基板保持区域，并且与传送装置的驱动部分相对于保持区域保持固定位置。 上臂，前臂和基底保持架中的每一个可独立地相对于彼此旋转。

    SUBSTRATE PROCESSING APPARATUS
    10.
    发明申请
    SUBSTRATE PROCESSING APPARATUS 审中-公开

    公开(公告)号：US20190304823A1

    公开(公告)日：2019-10-03

    申请号：US16444225

    申请日：2019-06-18

    Applicant: BROOKS AUTOMATION, INC.

    Inventor： Robert T. CAVENEY ,  Jayaraman KRISHNASAMY ,  Ulysses GILCHRIST ,  Mitchell DREW ,  Jairo T. MOURA

    IPC: H01L21/677 ,  B25J9/04 ,  B25J11/00 ,  B25J18/04

    Abstract: A substrate processing apparatus including a frame, a first SCARA arm connected to the frame, including an end effector, configured to extend and retract along a first radial axis; a second SCARA arm connected to the frame, including an end effector, configured to extend and retract along a second radial axis, the SCARA arms having a common shoulder axis of rotation; and a drive section coupled to the SCARA arms is configured to independently extend each SCARA arm along a respective radial axis and rotate each SCARA arm about the common shoulder axis of rotation where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis, wherein each end effector is configured to hold at least one substrate and the end effectors are located on a common transfer plane.

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