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公开(公告)号:US11270867B2
公开(公告)日:2022-03-08
申请号:US17114202
申请日:2020-12-07
申请人: Bruker Nano GmbH
发明人: Thomas Schwager , Daniel Radu Goran
IPC分类号: H01J37/244 , H01J37/20 , G01N23/203
摘要: The present invention refers to a method for improving a Transmission Kikuchi Diffraction, TKD pattern, wherein the method comprises the steps of: Detecting a TKD pattern (20b) of a sample (12) in an electron microscope (60) comprising at least one active electron lens (61) focusing an electron beam (80) in z-direction on a sample (12) positioned in distance D below the electron lens (61), the detected TKD (20b) pattern comprising a plurality of image points xD, yD and mapping each of the detected image points xD, yD to an image point of an improved TKD pattern (20a) with the coordinates x0, y0 by using and inverting generalized terms of the form xD=γ*A+(1−γ)*B and yD=γ*C+(1−γ)*D wherein γ = Z D with Z being an extension in the z-direction of a cylindrically symmetric magnetic field BZ of the electron lens (61), and wherein A, B, C, D are trigonometric expressions depending on the coordinates x0, y0, with B and D defining a rotation around a symmetry axis of the magnetic field BZ, and with A and C defining a combined rotation and contraction operation with respect to the symmetry axis of the magnetic field BZ. The invention further relates to a measurement system, computer program and computer-readable medium for carrying out the method of the invention.
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公开(公告)号:US10126256B2
公开(公告)日:2018-11-13
申请号:US15308246
申请日:2015-03-31
申请人: Bruker Nano GmbH
发明人: Thomas Schwager
IPC分类号: G01N23/22 , G01N23/2206 , G01N23/203 , G01N23/2252 , G01N23/207
摘要: Methods and arrangements identify crystalline phases in a polycrystalline sample by determining a normalized vector p(i) for the chemical composition of the expected crystal structure, at each measurement point of the sample, recording a spectrum by means of energy-dispersive X-ray spectroscopy and determining the chemical composition, and recording an electron diffraction image and determining of the diffraction bands. The methods and arrangements also determine a normalized vector v for the chemical composition, compare the normalized vector v with each of the normalized vectors p(i) of the expected crystal structures and outputting an evaluation factor s(i) for the similarity of the vectors in each case, compare the diffraction bands with those of the expected crystal structures and outputting an evaluation factor n(i), and determining an overall quality from the two evaluation factors and identifying the crystal structure with the highest overall quality as belonging to the measurement point.
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公开(公告)号:US12073535B2
公开(公告)日:2024-08-27
申请号:US17644558
申请日:2021-12-15
申请人: Bruker Nano GmbH
发明人: Thomas Schwager
IPC分类号: G06T5/20
CPC分类号: G06T5/20
摘要: The present invention refers to a method of processing an energy-dispersive X-ray (EDX)/X-ray fluorescence (XRF) map (1), comprising selecting a data point (dp) among a plurality of data points of the EDX/XRF map (1), wherein each of the data points comprise a local measured value (m) and a local dispersion value (v) of a measured variable; determine a first modified mean value (M[1]) based on the local measured value (m) of the selected data point (dp) and the local measured value of at least one neighboring data point neighboring the selected data point (dp) and determine a first modified dispersion value (V[1]) based on the local dispersion value (v) of the selected data point (dp) and the dispersion value of the at least one neighboring data point, when m TH[1].
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公开(公告)号:US11940396B2
公开(公告)日:2024-03-26
申请号:US17608635
申请日:2020-05-05
申请人: BRUKER NANO GMBH
发明人: Daniel Radu Goran , Thomas Schwager
IPC分类号: G01N23/20008 , G01N23/20 , G01N23/20025 , G01N23/20058 , G01N23/20091 , G01N23/203 , G01N23/205 , G01N23/2055 , G01N23/207 , G01N23/2206 , G01N23/2252 , G01N23/2254 , G06V10/48
CPC分类号: G01N23/2055 , G01N23/20008 , G01N23/20025 , G01N23/20058 , G01N23/20083 , G01N23/20091 , G01N23/203 , G01N23/205 , G01N23/207 , G01N23/2206 , G01N23/2252 , G01N23/2254 , G06V10/48 , G01N2223/053 , G01N2223/056 , G01N2223/0565 , G01N2223/0566 , G01N2223/071 , G01N2223/079 , G01N2223/08 , G01N2223/102 , G01N2223/401 , G01N2223/605 , G01N2223/607
摘要: A method for improving the quality/integrity of an EBSD/TKD map, wherein each data point is assigned to a corresponding grid point of a sample grid and represents crystal information based on a Kikuchi pattern detected for the grid point; comprising determining a defective data point of the EBSD/TKD map and a plurality of non-defective neighboring data points, comparing the position of Kikuchi bands of a Kikuchi pattern detected for a grid point corresponding to the defective data point with the positions of bands in at least one simulated Kikuchi pattern corresponding to crystal information of the neighboring data points and assigning the defective data point the crystal information of one of the plurality of neighboring data point based on the comparison.
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公开(公告)号:US20220198626A1
公开(公告)日:2022-06-23
申请号:US17644558
申请日:2021-12-15
申请人: Bruker Nano GmbH
发明人: Thomas Schwager
IPC分类号: G06T5/20
摘要: The present invention refers to a method of processing a EDX/XRF map (1), comprising selecting a data point (dp) among a plurality of data points of the EDX/XRF map (1), wherein each of the data points comprise a local measured value (m) and a local dispersion value (v) of a measured variable; determine a first modified mean value (M[1]) based on the local measured value (m) of the selected data point (dp) and the local measured value of at least one neighboring data point neighboring the selected data point (dp) and determine a first modified dispersion value (V[1]) based on the local dispersion value (v) of the selected data point (dp) and the dispersion value of the at least one neighboring data point, when m TH[1].
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6.
公开(公告)号:US20150233843A1
公开(公告)日:2015-08-20
申请号:US14621580
申请日:2015-02-13
申请人: Bruker Nano GmbH
发明人: Thomas Schwager
IPC分类号: G01N23/207 , G01N23/203
CPC分类号: G01N23/207 , G01N23/203
摘要: According to the invention a method is provided for identifying a crystallographic candidate phase of a crystal in an EBSD diffraction pattern, which includes the following steps: Sorting and indexing of the bands of the diffraction pattern in order of decreasing intensity. Providing of indices of the diffraction bands of candidate phases, which are to be expected as a result of the EBSD pattern acquisition, in a database, wherein all the indices provided can, in each case, be assigned to a candidate phase. Identification of the expected bands with the bands measured in the diffraction pattern for each candidate phase. Comparison of the intensities of bands of the measured diffraction pattern with intensities which were predicted for the diffraction bands of the candidate phases, which are to be expected as a result of the EBSD pattern acquisition, the indices of said candidate phases being stored in the database. In addition, a corresponding computer program and a computer-readable storage medium are provided, on which a computer program according to the invention is stored.
摘要翻译: 根据本发明,提供了一种用于识别EBSD衍射图案中的晶体的晶体候选相的方法,其包括以下步骤:按照强度降低的顺序对衍射图案的带进行排序和索引。 在数据库中提供作为EBSD模式获取的结果的预期候选阶段的衍射带的索引,其中在每种情况下所提供的所有索引可以被分配给候选阶段。 用每个候选相的衍射图形测量的带的预期带的识别。 测量的衍射图谱的频带的强度与作为EBSD模式获取的结果预期的候选相的衍射频带预测的强度的比较,所述候选相位的索引被存储在数据库中 。 此外,提供了相应的计算机程序和计算机可读存储介质,其上存储有根据本发明的计算机程序。
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公开(公告)号:US20210183612A1
公开(公告)日:2021-06-17
申请号:US17114202
申请日:2020-12-07
申请人: Bruker Nano GmbH
发明人: Thomas Schwager , Daniel Radu Goran
IPC分类号: H01J37/244 , H01J37/20
摘要: The present invention refers to a method for improving a Transmission Kikuchi Diffraction, TKD pattern, wherein the method comprises the steps of: Detecting a TKD pattern (20b) of a sample (12) in an electron microscope (60) comprising at least one active electron lens (61) focussing an electron beam (80) in z-direction on a sample (12) positioned in distance D below the electron lens (61), the detected TKD (20b) pattern comprising a plurality of image points xD, yD and mapping each of the detected image points xD, yD to an image point of an improved TKD pattern (20a) with the coordinates x0, y0 by using and inverting generalized terms of the form xD=γ*A+(1−γ)*B and yD=γ*C+(1−γ)*D wherein γ = Z D with Z being an extension in the z-direction of a cylindrically symmetric magnetic field BZ of the electron lens (61), and wherein A, B, C, D are trigonometric expressions depending on the coordinates x0, y0, with B and D defining a rotation around a symmetry axis of the magnetic field BZ, and with A and C defining a combined rotation and contraction operation with respect to the symmetry axis of the magnetic field BZ. The invention further relates to a measurement system, computer program and computer-readable medium for carrying out the method of the invention.
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8.
公开(公告)号:US09279779B2
公开(公告)日:2016-03-08
申请号:US14621580
申请日:2015-02-13
申请人: Bruker Nano GmbH
发明人: Thomas Schwager
IPC分类号: H01J37/26 , G01N23/207 , G01N23/203
CPC分类号: G01N23/207 , G01N23/203
摘要: According to the invention a method is provided for identifying a crystallographic candidate phase of a crystal in an EBSD diffraction pattern, which includes the following steps: Sorting and indexing of the bands of the diffraction pattern in order of decreasing intensity. Providing of indices of the diffraction bands of candidate phases, which are to be expected as a result of the EBSD pattern acquisition, in a database, wherein all the indices provided can, in each case, be assigned to a candidate phase. Identification of the expected bands with the bands measured in the diffraction pattern for each candidate phase. Comparison of the intensities of bands of the measured diffraction pattern with intensities which were predicted for the diffraction bands of the candidate phases, which are to be expected as a result of the EBSD pattern acquisition, the indices of said candidate phases being stored in the database. In addition, a corresponding computer program and a computer-readable storage medium are provided, on which a computer program according to the invention is stored.
摘要翻译: 根据本发明,提供了一种用于识别EBSD衍射图案中的晶体的晶体候选相的方法,其包括以下步骤:按照强度降低的顺序对衍射图案的带进行排序和索引。 在数据库中提供作为EBSD模式获取的结果的预期候选阶段的衍射带的索引,其中在每种情况下所提供的所有索引可以被分配给候选阶段。 用每个候选相的衍射图形测量的带的预期带的识别。 测量的衍射图谱的频带的强度与作为EBSD模式获取的结果预期的候选相的衍射频带预测的强度的比较,所述候选相位的索引被存储在数据库中 。 此外,提供了相应的计算机程序和计算机可读存储介质,其上存储有根据本发明的计算机程序。
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