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公开(公告)号：US4873692A
公开(公告)日：1989-10-10
申请号：US231726
申请日：1988-08-12
IPC分类号： H01S3/1055
CPC分类号： H01S3/1055
摘要： A tunable solid state laser oscillator with very narrow spectral line width for pulsed output comprises a solid state laser medium that generates a laser beam along a resonant path, a beam expander, such as a prism beam expander or cylindrical optic, and a grating mounted with an adjustable angle of incidence with respect to the laser beam. By adjusting the angle of incidence of the beam on the grating, the laser output wavelength is tuned. Further, the reflectivity of the grating provides very narrow spectral line width for oscillation in the laser over the entire tuning range.
摘要翻译： 用于脉冲输出的具有非常窄的谱线宽度的可调谐固体激光振荡器包括：沿着谐振路径产生激光束的固态激光介质，诸如棱镜扩束器或圆柱形光学器件的光束扩展器，以及安装有 相对于激光束的入射角度可调。 通过调整光束在光栅上的入射角，激光输出波长被调谐。 此外，光栅的反射率为激光器在整个调谐范围内的振荡提供非常窄的谱线宽度。
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公开(公告)号：US4935932A
公开(公告)日：1990-06-19
申请号：US232446
申请日：1988-08-15
摘要： A laser beam shaper which provides polarized output with a high spatial quality, utilizing induced stress birefringence. The laser beam shaper in which light resonates along a resonant path defined by reflective surfaces includes a solid state medium, such as a Nd:YAG rod which exhibits thermally induced stress birefringence that is of known, azimuthally independent distribution in planes perpendicular to the resonant path. On either side of the medium, quarter-wave retardation plates are provided which create essentially circular polarization of the resonant light within the medium. Sandwiching the quarter-wave plates and the medium are the first and second polarizing elements, both of which are aligned along the same preferred plane. By inducing stress birefringence in the medium, an output beam is produced. A shape defined by the distribution of the birefringence is provided. With media such as YAG, the shape of the beam is round with high quality.
摘要翻译： 激光束整形器，利用感应应力双折射提供具有高空间质量的偏振输出。 其中沿着由反射表面限定的谐振路径共振的激光束整形器包括固态介质，例如Nd：YAG棒，其呈现在垂直于共振路径的平面中具有已知的方位角独立分布的热致应力双折射 。 在介质的任一侧，提供四分之一波长相位差板，其产生基本上在介质内的共振光的圆偏振。 夹杂四分之一波片和介质是第一和第二偏振元件，它们都沿着相同的优选平面排列。 通过在介质中引起应力双折射，产生输出光束。 提供了由双折射分布限定的形状。 使用YAG等介质，光束的形状是高质量的圆形。
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公开(公告)号：US4955725A
公开(公告)日：1990-09-11
申请号：US358714
申请日：1989-05-26
CPC分类号： H01S3/2308 , H01S3/115 , H01S3/08063 , H01S3/08072 , H01S3/10092
摘要： A laser oscillator/amplifier system in which thermally induced birefringence in the gain media of the oscillator is compensated by thermally induced birefringence in the gain media of the amplifier. The system produces a quality output beam efficiently and with high power density in the preferred polarization. The oscillator cavity is characterized by a high reflector at one end and an output coupler at the second end with an oscillator gain medium exhibiting thermally induced birefringence in between. An amplifier exhibiting thermally induced birefringence which matches the thermally induced birefringence in the oscillator gain medium is mounted to receive the output of the oscillator cavity. A ninety degree rotator is mounted between the oscillator gain medium and the amplifier so that compensation for thermally induced birefringence in the oscillator gain medium is compensated by the matching thermally induced birefringence in the amplifier. The ninety degree rotator may be mounted inside the oscillator cavity, that is, between the oscillator gain medium and the output coupler; or it may be mounted outside of the oscillator cavity, that is, between the output coupler and the amplifier.
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4.发明授权Laser resonator with laser medium exhibiting thermally induced birefringence 失效激光谐振器具有表现出热致双折射的激光介质
公开(公告)号：US4872181A
公开(公告)日：1989-10-03
申请号：US274405
申请日：1988-11-21
CPC分类号： H01S3/115 , H01S3/0818 , H01S3/08072 , H01S3/0816 , H01S3/082 , H01S3/106 , H01S3/107 , H01S3/127
摘要： A laser resonator generates a polarized output beam with a laser medium exhibiting thermally induced birefringence and a Y-shaped resonant cavity. A lasing axis extends between a first side and a second side of the laser medium, Radiation transmitted out of the first side of the laser medium has its polarization rotated by 90 degrees and is guided back along the lasing axis into the laser medium for a second pass. A polarizer is mounted on the second side of the laser medium for guiding the radiation having a first polarization along a first path and radiation having a second polarization that is 90 degrees from the first polarization along a second path. Both the first path and the second path include the lasing axis of the laser medium and form a Y-shaped resonant cavity. Along the first path, a high reflecting means is provided to reflect the radiation back along the first path. Along the second path, an output coupler is provided by which a component of the radiation is reflected back along the second path and a component is transmitted as the polarized output beam. A Q-switch is provided in the first path between the polarizer and the high reflecting means, or in the second path between the polarizer and the output coupler, or in both paths.
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公开(公告)号：US5001716A
公开(公告)日：1991-03-19
申请号：US500576
申请日：1990-03-28
IPC分类号： H01S3/115
CPC分类号： H01S3/115
摘要： A Q-switch for a laser having a resonant cavity including an output coupler, a gain medium and a retro-reflecting mirror is mounted in the resonant cavity between the gain medium and the retro-reflecting mirror. The Q-switch comprises a polarizer and a phase retarding element (such as a Pockels cell) which includes a birefringent substrate for inducing a controllable phase retardation in the cavity mode in response to an applied electric field. A tiltable mount supports the phase retarding element so that the lasing axis lies essentially in a plane of the crystallographic axis 45.degree. from the direction of polarization, and lies at an adjustable angle relative to the crystallographic axis. A control circuit supplies an applied electric field within the substrate having a first magnitude in a first state and a second magnitude in a seocnd state. In the first state, the phase retarding element induces 90.degree. rotation in a round trip for the cavity mode. In the second state, the phase retarding element induces effectively no rotation (0.degree. or 180.degree.) for the cavity mode. Therefore, the resonant cavity achieves a high extinction ratio by proper adjustment of the adjustable angle.
摘要翻译： 具有包括输出耦合器，增益介质和回射反射镜的谐振腔的激光器的Q开关安装在增益介质和后向反射镜之间的谐振腔中。 Q开关包括偏振器和包括双折射基底的相位延迟元件（例如普克尔斯单元），用于响应于所施加的电场在空腔模式中诱发可控相位延迟。 可倾斜安装座支撑相位延迟元件，使得激光轴基本上位于离极化方向45°的结晶轴的平面中，并且相对于结晶轴位于可调节的角度。 控制电路在第一状态下具有第一幅度的第一幅度和第二幅度的第一幅度提供衬底内施加的电场。 在第一状态下，相位延迟元件在腔模式的往返中引起90度旋转。 在第二状态下，相位延迟元件对于空腔模式不会有效地引起旋转（0°或180°）。 因此，谐振腔通过可调节角度的推进调整实现了高消光比。
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公开(公告)号：US4213060A
公开(公告)日：1980-07-15
申请号：US768275
申请日：1977-02-14
申请人： Robert L. Byer , Richard L. Herbst
发明人： Robert L. Byer , Richard L. Herbst
CPC分类号： H01S3/305 , H01S3/1083
摘要： A tunable source of infrared radiation is obtained by irradiating an assemblage of Raman active gaseous atoms or molecules with a high intensity pumping beam of coherent radiation at a pump frequency .omega..sub.p to stimulate the generation of Stokes wave energy at a Stokes frequency .omega..sub.s and to stimulate the Raman resonant mode at the Raman mode frequency .omega..sub.R within the irradiated assemblage where the pump frequency .omega..sub.p minus the Stokes frequency .omega..sub.s is equal to the Raman mode frequency .omega..sub.R. The stimulated assemblage is irradiated with a tunable source of coherent radiation at a frequency .omega..sub.i to generate the output infrared radiation of the frequency .omega..sub.0 which is related to the Raman mode frequency .omega..sub.R and the input wave .omega..sub.i by the relation .omega..sub.0 =.omega..sub.i .+-..omega..sub.R. In one embodiment the interaction between the pump wave energy .omega..sub.p and the tunable input wave energy .omega..sub.i is collinear and the ratio of the phase velocity mismatch factor .DELTA.k to the electric field exponential gain coefficient T is within the range of 0.1 to 5. In another embodiment the pump wave energy .omega..sub.p and the tunable input wave energy .omega..sub.i have velocity vectors k.sub.p and k.sub.i which cross at an angle to each other to compensate for phase velocity mismatches in the medium. In another embodiment, the Stokes wave energy .omega..sub.s is generated by pump energy .omega..sub.p in a first Raman cell and .omega..sub.s, .omega..sub.i and .omega..sub.p are combined in a second Raman mixing cell to produce the output at .omega..sub.i.
摘要翻译： 红外辐射的可调谐源是通过以泵浦频率ω-p照射具有高强度相干辐射的高强度泵浦光束的拉曼活性气体原子或分子的组合来刺激斯托克斯波斯能量在斯托克斯频率ω下的产生，并且 在经过照射的组合中的拉曼模式频率ωR处刺激拉曼谐振模式，其中泵浦频率ω-p减去斯托克斯频率ωs等于拉曼模式频率ωR。用可调谐相干辐射源照射被激励的组合 在频率ωi处产生与拉曼模式频率ωR相关的频率ω0的输出红外辐射，并且通过关系ω0 =ωi +/-ωR，输入波ωi。在一个实施例中，相互作用 在泵波能量ω和可调输入波能量ωi之间是共线的，并且相位速度失配因子DELTA k与 电场指数增益系数T在0.1至5的范围内。在另一个实施例中，泵波能量ω和可调谐输入波能量ωi具有彼此成角度交叉的速度矢量kp和ki，以补偿 介质中的相速度失配。 在另一个实施例中，斯托克斯波能量ω由第一拉曼单元中的泵浦能量ωp产生，并且ωs，ωi和ωp在第二拉曼混合单元中组合以产生ωi的输出。
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公开(公告)号：US4156209A
公开(公告)日：1979-05-22
申请号：US797535
申请日：1977-05-16
CPC分类号： H01S3/08081
摘要： A meniscus lens is disclosed for use in high power light beam applications, such as in the optics of a high power laser where the laser beam intensity is in excess of one megawatt per square centimeter. The meniscus lens is designed such that light rays reflected from the lens are divergent so that no back focal points are created by the lens. In this manner, undesired dielectric breakdowns and damage to optical components and the like are avoided due to reflected back focal points. In one embodiment of the present invention, the output mirror of a high power laser is deposited upon the convex face of a meniscus lens, such lens being designed to avoid back focal points, whereby the construction of the output mirror is greatly simplified.
摘要翻译： 公开了用于高功率光束应用的弯月透镜，例如在激光束强度超过1兆瓦每平方厘米的大功率激光器的光学器件中。 弯月透镜被设计成使得从透镜反射的光线发散，使得透镜不产生后焦点。 以这种方式，由于反射的焦点，避免了不期望的电介质击穿和对光学部件等的损坏。 在本发明的一个实施例中，大功率激光器的输出反射镜沉积在弯月透镜的凸面上，该透镜被设计成避免后焦点，从而大大简化了输出反射镜的结构。
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8.发明授权
公开(公告)号：US4913533A
公开(公告)日：1990-04-03
申请号：US136896
申请日：1987-12-22
CPC分类号： G02F1/37 , G02F1/3525
摘要： A KTP crystal in a nonlinear optical device is heated to and operated at a temperature of at least 50.degree. C. and less than 350.degree. C., and more preferably about 90.degree. C. to about 200.degree. C., and most preferably to about 100.degree. C. to about 125.degree. C., to reduce drift and damage. The KTP crystal is placed in an oven or other heating device, which may be regulated or unregulated. The KTP may be cut at the room temperature phase matching angle and angle tuned for operation at the higher temperature, or the KTP may be cut at the correct angle for phase matching at the operating temperature.
摘要翻译： 将非线性光学器件中的KTP晶体加热至至少50℃且小于350℃，更优选约90℃至约200℃的温度下操作，最优选至 约100℃至约125℃，以减少漂移和损坏。 将KTP晶体放置在烘箱或其他加热装置中，其可以调节或不调节。 可以在室温相位匹配角度和角度下切割KTP以在较高温度下操作，或者KTP可以在正确的角度切割以在工作温度下进行相位匹配。
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9.发明授权
公开(公告)号：US4360925A
公开(公告)日：1982-11-23
申请号：US124586
申请日：1980-02-25
CPC分类号： H01S3/08081 , H01S3/08036 , H01S3/0931 , H01S3/115
摘要： In a high power laser, such as one employing a relatively high gain lasing medium such as CO.sub.2 or Nd:YAG, the optical resonator for the laser comprises a positive branch unstable resonator. The output beam is coupled from the unstable resonator by means of a partially transmissive mirror of the resonator, whereby a filled-in beam is obtained while facilitating optical alignment of the output coupling means. In a preferred embodiment, the optical resonator comprises a pair of mirrors collinearly arranged on the optical axis of the resonator to supply an output beam which is collinear with the optical axis of the resonator. The filled-in output beam is of generally uniform power density across the transverse cross sectional dimensions thereof, whereby a near diffraction limited output beam is obtained with more uniform power density.
摘要翻译： 在诸如使用诸如CO 2或Nd：YAG的较高增益激光介质的大功率激光器中，用于激光器的光学谐振器包括正支路不稳定谐振器。 输出光束通过谐振器的部分透射镜从不稳定谐振器耦合，由此获得填充光束，同时便于输出耦合装置的光学对准。 在一个优选实施例中，光谐振器包括一对共同设置在谐振器的光轴上的反射镜，以提供与谐振器的光轴共线的输出光束。 填充的输出光束在其横截面尺寸上具有大致均匀的功率密度，由此获得具有更均匀功率密度的近衍射限制输出光束。
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10.发明授权Multi-wavelength laser system, probe station and laser cutter system using the same 失效多波长激光系统，探头台和激光切割系统使用相同
公开(公告)号：US5611946A
公开(公告)日：1997-03-18
申请号：US199389
申请日：1994-02-18
IPC分类号： G01R31/28 , B23K26/00 , B23K26/03 , B23K26/06 , B23K26/067 , G01R31/00 , G02B5/30 , G02B7/00 , G02F1/13 , G02F1/35 , G02F1/37 , H01L21/66 , H01S3/00 , H01S3/109
CPC分类号： B23K26/0665 , B23K26/032 , B23K26/06 , B23K26/0648 , G02B26/007 , G02B26/023 , G02B5/3083 , G02F1/37 , H01L22/22 , G02F1/1309 , G02F2001/354 , H01L2924/0002
摘要： A probe station which comprises a base machine, a chuck mounted on the base machine to hold a device under test (DUT), a probe platen mounted on the base machine on which to mount probes for the device, a microscope mounted on the base machine having a field of view on the DUT on the chuck, and a single laser, mounted with the microscope. The single laser supplies an output beam in a plurality of wavelengths through the microscope optics on a beam line to the field of view of the microscope. The laser system includes a solid state laser, a harmonic generator coupled with the solid state laser, and switchable optics for selecting the wavelength of the output beam from among two or more selectable wavelengths. In addition, the laser system includes a variable attenuator, based on a unique half-wave plate, which operates for the plurality of wavelengths which are selectable as outputs in the infrared (1064 nanometers), in the green (532 nanometers), and in the ultraviolet (355 nanometers, or 266 nanometers). These wavelengths correspond to the fundamental output wavelength of the Nd:YAG laser, the second harmonic, and either the third or fourth harmonic of the laser.
摘要翻译： 一种探针台，包括基本机器，安装在基座机器上以夹持被测器件（DUT）的卡盘，安装在基座机上的探针台板，用于安装用于该装置的探针的探针台，安装在基座机器上的显微镜 在夹具上的DUT上具有视场，并且安装有显微镜的单个激光器。 单个激光器通过显微镜光学器件将输出光束在束线上提供到显微镜的视场。 激光系统包括固态激光器，与固态激光器耦合的谐波发生器，以及用于从两个或更多个可选波长中选择输出光束的波长的可切换光学器件。 此外，激光系统包括可变衰减器，该可变衰减器基于独特的半波片，其操作用于在红色（1064纳米），绿色（532纳米）中可选择作为输出的多个波长，以及 紫外线（355纳米或266纳米）。 这些波长对应于Nd：YAG激光器的基本输出波长，二次谐波，以及激光器的第三或第四谐波。
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