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    Lithographic projection apparatus, gas purging method, device manufacturing method and purge gas supply system related application
    1.
    发明申请
    Lithographic projection apparatus, gas purging method, device manufacturing method and purge gas supply system related application 审中-公开
    平版印刷设备，气体净化方法，装置制造方法和吹扫气体供应系统相关应用

    公开(公告)号：US20060285091A1

    公开(公告)日：2006-12-21

    申请号：US11396823

    申请日：2006-04-03

    申请人： Bipin Parekh ,  Robert Zeller ,  Russell Holmes ,  Jeffrey Spiegelman

    发明人： Bipin Parekh ,  Robert Zeller ,  Russell Holmes ,  Jeffrey Spiegelman

    IPC分类号： G03B27/52

    CPC分类号： G03F7/70933 ,  G02B27/0006

    摘要： A lithographic projection apparatus includes a support configured to support a patterning device, the patterning device configured to pattern a projection beam according to a desired pattern. The apparatus has a substrate table configured to hold a substrate, a projection system configured to project the patterned beam onto a target portion of the substrate. The apparatus also has a purge pas supply system configured to provide a purge gas near a surface of a component of the lithographic projection apparatus. The purge gas supply system includes a purge gas mixture generator configured to generate a purge gas mixture which includes at least one purging gas and moisture. The purge gas mixture generator has a moisturizer configured to add the moisture to the purge gas and a purge gas mixture outlet connected to the purge gas mixture generator configured to supply the purge gas mixture near the surface.

    摘要翻译： 平版印刷投影装置包括被配置为支撑图案形成装置的支撑件，所述图案形成装置被配置为根据期望的图案来图案化投影光束。 该装置具有被配置为保持基板的基板台，配置成将图案化的光束投影到基板的目标部分上的投影系统。 该设备还具有净化气体供应系统，其构造成在光刻投影设备的部件的表面附近提供净化气体。 净化气体供应系统包括净化气体混合物发生器，其被配置为产生包括至少一个净化气体和水分的净化气体混合物。 净化气体混合物发生器具有保湿剂，其被配置为将湿气添加到净化气体中，以及净化气体混合物出口，其连接到净化气体混合物发生器，其构造成在表面附近提供净化气体混合物。

    Lithographic projection apparatus, gas purging method, device manufacturing method and purge gas supply system
    2.
    发明申请
    Lithographic projection apparatus, gas purging method, device manufacturing method and purge gas supply system 失效
    平版印刷设备，气体净化方法，装置制造方法和吹扫气体供应系统

    公开(公告)号：US20070030463A1

    公开(公告)日：2007-02-08

    申请号：US10565486

    申请日：2004-07-21

    申请人： Bipin Parekh ,  Jeffrey Spiegelman ,  Robert Zeller ,  Russell Holmes

    发明人： Bipin Parekh ,  Jeffrey Spiegelman ,  Robert Zeller ,  Russell Holmes

    IPC分类号： G03B27/52

    CPC分类号： G02B27/0006 ,  G03F7/70933

    摘要： A lithographic projection apparatus (1) includes a support configured to support a patterning device (MA), the patterning device configured to pattern the projection beam according to a desired pattern. The apparatus has a substrate (W) table configure to hold a substrate, a projection system configured to project the patterned beam onto a target portion of the substrate. The apparatus also has a purge gas supply system (100) configured to provide a purge gas near a surface of a component of the lithographic projection apparatus. The purge gas supply system (100) includes a purge gas mixture generator (120) configured to generate a purge gas mixture which includes at least one purging gas and moisture. The purge gas mixture generator has a moisturizer (150) configured to add the moisture to the purge gas and a purge gas mixture outlet (130) connected to the purge gas mixture generator (120) configured to supply the purge gas mixture near the surface.

    摘要翻译： 光刻投影设备（1）包括被配置为支撑图案形成装置（MA）的支撑件，所述图案形成装置被配置成根据期望的图案对投影光束进行图案化。 该装置具有构造成保持基板的基板（W）台，配置成将图案化的光束投影到基板的目标部分上的投影系统。 该设备还具有净化气体供应系统（100），其构造成在光刻投影设备的部件的表面附近提供净化气体。 净化气体供应系统（100）包括净化气体混合物发生器（120），其被配置为产生包括至少一个净化气体和湿气的净化气体混合物。 净化气体混合物发生器具有配置成将湿气添加到净化气体中的保湿剂（150）和连接到净化气体混合物发生器（120）的净化气体混合物出口（130），其构造成在表面附近提供净化气体混合物。

    Method and apparatus for treating fluids
    3.
    发明申请
    Method and apparatus for treating fluids 失效
    用于处理流体的方法和装置

    公开(公告)号：US20060219634A1

    公开(公告)日：2006-10-05

    申请号：US10559018

    申请日：2004-05-27

    申请人： Bipin Parekh ,  Saksatha Ly ,  Jieh-Hwa Shyu ,  John Pillion

    发明人： Bipin Parekh ,  Saksatha Ly ,  Jieh-Hwa Shyu ,  John Pillion

    IPC分类号： B01D15/04

    CPC分类号： B01D61/24 ,  B01D15/00 ,  B01D53/22 ,  B01D61/28 ,  B01D63/02 ,  B01J19/2475 ,  B01J20/28014 ,  B01J20/28023 ,  C01D7/07

    摘要： The present invention is directed to an apparatus for combining a component from a fluid composition with a reactive fluid. The apparatus includes a hollow fiber contactor (142) having a plurality of hollow fibers contained within a housing. A reactive fluid (224), which may be on the shell or lumen side of the hollow fiber membrane, is included in the apparatus and is used for combining with a component from a fluid composition which is on the opposite side of the membrane from the reactive liquid. The reactive liquid combines with one or more components from the fluid composition and can be used for purification of the fluid composition or for the preparation of chemical reagents.

    摘要翻译： 本发明涉及一种用于将来自流体组合物的组分与反应性流体组合的装置。 该装置包括具有容纳在壳体内的多个中空纤维的中空纤维接触器（142）。 可以在中空纤维膜的壳体或内腔侧的反应性流体（224）被包括在该装置中，并且用于与来自膜的相反侧的流体组合物的组分与 反应液体。 反应性液体与来自流体组合物的一种或多种组分结合，并且可用于纯化流体组合物或用于制备化学试剂。

    Process for degassing an aqueous plating solution
    4.
    发明授权
    Process for degassing an aqueous plating solution 失效
    脱水电镀液的方法

    公开(公告)号：US07014679B2

    公开(公告)日：2006-03-21

    申请号：US10467245

    申请日：2002-01-31

    申请人： Bipin Parekh ,  Saksatha Ly ,  Qunwei Wu

    发明人： Bipin Parekh ,  Saksatha Ly ,  Qunwei Wu

    IPC分类号： B01D19/00 ,  B01D53/22

    CPC分类号： B01D63/02 ,  B01D19/0031 ,  B01D19/0068 ,  B01D71/32 ,  B01D2313/90 ,  C25D3/38 ,  C25D21/12

    摘要： A process for removing oxygen from a copper plating solution is provided. The solution is passed through a degasser comprising a shell and hollow hydrophobic fiber porous membranes wherein the shell while a vacuum is drawn on the surfaces of the fibers opposite the fiber surfaces contacted by the solution. Gas passed through the fiber walls while liquid is prevented from infiltrating the fiber pores. The composition of the solution is monitored so that the composition can be retained substantially constant by adding components of the solution as needed.

    摘要翻译： 提供了一种从镀铜液中除去氧气的方法。 将溶液通过包含壳和中空疏水性纤维多孔膜的脱气机，其中在将真空抽吸在与溶液接触的纤维表面相对的纤维表面上时，壳体。 气体通过纤维壁，同时防止液体渗透纤维孔隙。 监测溶液的组成，使得通过根据需要添加溶液的组分，可以将组合物保持基本上恒定。

    FAN SHROUD ASSEMBLY
    5.
    发明申请
    FAN SHROUD ASSEMBLY 审中-公开

    公开(公告)号：US20190085756A1

    公开(公告)日：2019-03-21

    申请号：US16107154

    申请日：2018-08-21

    申请人： Bipin Parekh

    发明人： Bipin Parekh

    IPC分类号： F02B29/04 ,  F02M35/10

    摘要： A fan shroud assembly according to an example of the present application includes an air intake duct configured to receive ambient air, a fan configured to receive hot air, a motor driving the fan, and an air induction intake box in fluid communication with the fan and the air intake duct to mix the hot air and the ambient air. A vehicle and a method of providing cooling air to a vehicle engine are also disclosed.

    Method and apparatus for treating fluids
    6.
    发明授权
    Method and apparatus for treating fluids 失效
    用于处理流体的方法和装置

    公开(公告)号：US07316728B2

    公开(公告)日：2008-01-08

    申请号：US10559018

    申请日：2003-05-27

    申请人： Bipin Parekh ,  Saksatha Ly ,  Jieh-Hwa Shyu ,  John E. Pillion

    发明人： Bipin Parekh ,  Saksatha Ly ,  Jieh-Hwa Shyu ,  John E. Pillion

    IPC分类号： B01D53/22 ,  B01D11/00 ,  B03C3/00 ,  B01D63/00

    CPC分类号： B01D61/24 ,  B01D15/00 ,  B01D53/22 ,  B01D61/28 ,  B01D63/02 ,  B01J19/2475 ,  B01J20/28014 ,  B01J20/28023 ,  C01D7/07

    摘要： The present invention is directed to an apparatus for combining a component from a fluid composition with a reactive fluid. The apparatus includes a hollow fiber contactor (142) having a plurality of hollow fibers contained within a housing. A reactive fluid (224), which may be on the shell or lumen side of the hollow fiber membrane, is included in the apparatus and is used for combining with a component from a fluid composition which is on the opposite side of the membrane from the reactive liquid. The reactive liquid combines with one or more components from the fluid composition and can be used for purification of the fluid composition or for the preparation of chemical reagents.

    摘要翻译： 本发明涉及一种用于将来自流体组合物的组分与反应性流体组合的装置。 该装置包括具有容纳在壳体内的多个中空纤维的中空纤维接触器（142）。 可以在中空纤维膜的壳体或内腔侧的反应性流体（224）被包括在该装置中，并且用于与来自膜的相反侧的流体组合物的组分与 反应液体。 反应性液体与来自流体组合物的一种或多种组分结合，并且可用于纯化流体组合物或用于制备化学试剂。

    Blend door assembly for climate control systems
    8.
    发明授权
    Blend door assembly for climate control systems 有权
    用于气候控制系统的混合门组件

    公开(公告)号：US06224480B1

    公开(公告)日：2001-05-01

    申请号：US09392705

    申请日：1999-09-09

    申请人： Vu Le ,  Bipin Parekh ,  Fred Butler

    发明人： Vu Le ,  Bipin Parekh ,  Fred Butler

    IPC分类号： B60H102

    CPC分类号： B60H1/00692

    摘要： An assembly 10 for controlling the temperature of air flowing into the passenger compartment of a vehicle has a frame 20, an arcuate door 40, and an actuation assembly 50. The frame 20 defines an opening 21 through which air flows into the passenger compartment of the vehicle. The frame 20 also includes opposite arcuate tracks 25, 26. The arcuate door 40 moves to control airflow through the opening 21 and has side edges 41, 42 which are slidably received in the opposite arcuate tracks 25, 26. The arcuate door 40 and the opposite arcuate tracks 25, 26 maintain the same center of curvature during the sliding of the arcuate door 40 in the opposite arcuate tracks 25, 26. The actuation assembly 50 moves the arcuate door 40 along the opposite arcuate tracks 25, 26.

    摘要翻译： 用于控制流入车辆的乘客舱的空气的温度的组件10具有框架20，弓形门40和致动组件50.框架20限定开口21，空气流入室内的空气 车辆。 框架20还包括相对的弧形轨道25,26。弧形门40移动以控制通过开口21的气流，并且具有可滑动地容纳在相对的弧形轨道25,26中的侧边缘41,42。弓形门40和 相对的弧形轨道25,26在弓形门40在相对的弧形轨道25,26中滑动期间保持相同的曲率中心。致动组件50沿着相对的弧形轨道25,26移动弓形门40。