公开(公告)号：US07080527B2

公开(公告)日：2006-07-25

申请号：US10310349

申请日：2002-12-05

申请人： Bodo Kühn ,  Bruno Uebbing ,  Martin Trommer ,  Stefan Ochs ,  Stephan Thomas ,  Steffen Kaiser ,  Jan Vydra

发明人： Bodo Kühn ,  Bruno Uebbing ,  Martin Trommer ,  Stefan Ochs ,  Stephan Thomas ,  Steffen Kaiser ,  Jan Vydra

IPC分类号： C03B8/04

CPC分类号： C03C4/0071 ,  C03B19/1453 ,  C03B19/1469 ,  C03B2201/21 ,  C03B2201/23 ,  C03C3/06 ,  C03C4/0085 ,  C03C2201/21 ,  C03C2201/23 ,  C03C2203/40 ,  C03C2203/52 ,  C03C2203/54 ,  Y02P40/57

摘要： The present invention relates to a quartz glass blank for an optical component for transmission of ultraviolet radiation of a wavelength of 250 nm or shorter, and to a use of the quartz glass blank in microlithography in combination with ultraviolet radiation of a wavelength of 250 nm or shorter. Moreover, the invention relates to a procedure for manufacture of the quartz glass blank. A quartz glass blank of the described type should show little induced absorption and be optimized with respect to compaction and decompaction. The quartz glass blank according to the invention is characterized by the following properties: a glass structure essentially free of oxygen defect sites, an H2-content in the range of 0.1×1016 molecules/cm3 to 4.0×1016 molecules/cm3, an OH-content in the range of 125 wt-ppm to 450 wt-ppm, an SiH group-content of less than 5×1016 molecules/cm3, a refractive index inhomogeneity, Δn, of less than 2 ppm, and a stress birefringence of less than 2 nm/cm. In the use according to the invention, the quartz glass blank complies with dimensioning rules (2), (3), and (4) in terms of its minimal and maximal hydrogen contents and OH-content, CH2min, CH2max, and COH, respectively, with P being the pulse number and ε being the energy density (in mJ/cm2): CH2min [molecules/cm3]=1×106ε2P,  (2) CH2max [molecules/cm3]=2×1018ε,  (3) COH [wt-ppm]=1,700×ε[mJ/cm2]0.4±50.  (4) The procedure according to the invention is characterized in that a mixed quartz glass is generated from a first and a second quartz glass by mixing the two quartz glasses in the course of a homogenization treatment.

公开(公告)号：US07082790B2

公开(公告)日：2006-08-01

申请号：US10310279

申请日：2002-12-05

申请人： Bodo Kühn ,  Bruno Uebbing ,  Martin Trommer ,  Stefan Ochs ,  Gero Fischer ,  Ulla Holst

发明人： Bodo Kühn ,  Bruno Uebbing ,  Martin Trommer ,  Stefan Ochs ,  Gero Fischer ,  Ulla Holst

IPC分类号： C03B8/04

CPC分类号： C03B19/1469 ,  C03B19/1415 ,  C03B19/1453 ,  C03B2201/07 ,  C03B2201/21 ,  C03B2201/23 ,  C03C3/06 ,  C03C4/0071 ,  C03C4/0085 ,  C03C2201/21 ,  C03C2201/23 ,  C03C2203/40 ,  C03C2203/52 ,  C03C2203/54 ,  Y02P40/57

摘要： The present invention relates to a quartz glass blank for an optical component for transmission of ultraviolet radiation of a wavelength of 250 nm or shorter, and to a use of the quartz glass blank in microlithography in combination with ultraviolet radiation of a wavelength of 250 nm or shorter. Moreover, the invention relates to a procedure for manufacture of the quartz glass blank. A quartz glass blank of the described type should show little induced absorption and be optimized with respect to compaction and decompaction. The quartz glass blank according to the invention is characterized by the following properties: a glass structure essentially free of oxygen defect sites, an H2-content in the range of 0.1×1016 molecules/cm3 to 4.0×1016 molecules/cm3, an OH-content in the range of 125 wt-ppm to 450 wt-ppm, an SiH group-content of less than 5×1016 molecules/cm3, a refractive index inhomogeneity, Δn, of less than 2 ppm, and a stress birefringence of less than 2 nm/cm. In the use according to the invention, the quartz glass blank complies with dimensioning rules (2), (3), and (4) in terms of its OH-content, minimal and maximal hydrogen contents, COH, CH2min, and CH2max, respectively, with P being the pulse number and ε being the energy density: COH [wt-ppm]=1,700×ε[mJ/cm2]0.4±50,  (2) CH2min [molecules/cm3]=1×106ε2 P,  (3) CH2max [molecules/cm3]=2×1018ε.  (4) The procedure according to the invention is characterized in that a mixed quartz glass is generated from a first and a second quartz glass by mixing the two quartz glasses.

公开(公告)号：US07552601B2

公开(公告)日：2009-06-30

申请号：US11093318

申请日：2005-03-30

申请人： Bodo Kühn ,  Stephan Thomas ,  Steffen Kaiser

发明人： Bodo Kühn ,  Stephan Thomas ,  Steffen Kaiser

IPC分类号： C03B31/018 ,  C03B15/00 ,  C03B37/00

CPC分类号： C03C3/06 ,  C03B19/1453 ,  C03B19/1469 ,  C03B2201/21 ,  C03B2201/23 ,  C03C4/0071 ,  C03C4/0085 ,  C03C2201/21 ,  C03C2201/23 ,  C03C2203/44 ,  C03C2203/52 ,  C03C2203/54 ,  G02B1/00 ,  G03F7/70341 ,  G03F7/70958 ,  G03F7/70966

摘要： Starting from an optical component of quartz glass for transmitting ultraviolet radiation of a wavelength between 190 nm and 250 nm, with a glass structure essentially without oxygen defects, a hydrogen content ranging from 0.1×1016 molecules/cm3 to 5.0×1016 molecules/cm3, and with a content of SiH groups of less than 5×1016 molecules/cm3, to provide such a component which is particularly well suited for use with linearly polarized UV laser radiation, the present invention suggests that the component should have a content of hydroxyl groups ranging from 10 to 250 wt ppm and a fictive temperature above 1000° C.

摘要翻译： 从用于透射波长在190nm和250nm之间的紫外线辐射的石英玻璃的光学部件开始，具有基本上没有氧缺陷的玻璃结构，氢含量范围为0.1×10 16分/ cm 3至5.0×10 16分/ cm 3，以及与 SiH基团的含量小于5×10 16分子/ cm 3，以提供特别适合用于线性偏振UV激光辐射的这种组分，本发明提出该组分的羟基含量范围为10〜 250重量ppm，假想温度高于1000℃

公开(公告)号：US07064093B2

公开(公告)日：2006-06-20

申请号：US10310276

申请日：2002-12-05

申请人： Bodo Kühn ,  Bruno Uebbing

发明人： Bodo Kühn ,  Bruno Uebbing

IPC分类号： C03C3/06

CPC分类号： C03B19/1453 ,  C03B19/1415 ,  C03B2201/07 ,  C03B2201/20 ,  C03B2201/21 ,  C03B2201/23 ,  C03C3/06 ,  C03C2201/11 ,  C03C2201/21 ,  C03C2201/23 ,  C03C2203/44 ,  C03C2203/52

摘要： The present invention concerns a quartz glass blank for an optical component for the transmission of ultraviolet radiation of a wave length of 250 nm and under, as well as its utilization in microlithography in connection with ultraviolet radiation of a wavelength of 250 nm and under. Such quartz glass blank is to have low induced absorption, while being optimized in respect of compaction and de-compaction. The quartz glass blank according to the invention has the following properties: A glass structure essentially free of oxygen defect sites; a H2 content in the range of 3×1017 molecules/cm3 to 2.0×1018 molecules/cm3; an OH content in the range of 500 weight ppm to 1000 weight ppm; a SiH group content of less than 2×1017 molecules/cm3; a chlorine content in the range of 60 weight ppm to 120 weight ppm; a refractive index inhomogeneity, Δn, of less than 2 ppm; and a stress birefringence of less than 2 nm/cm. For utilization according to the invention, the quartz glass blank—in respect of its minimum and maximum hydrogen content, CH2min and CH2max, as well as its OH content COH—is in accordance with the scaling laws (2), (3) and (4), and P standing for the pulse number and ε for the energy density: CH2min[molecules/cm3]=1.0×108ε2P ,   (2) CH2max[molecules/cm3]=2×1019ε,   (3) COH[weight ppm]=1700ε[mJ/cm2]0.4±50 .   (4)

公开(公告)号：US06699121B2

公开(公告)日：2004-03-02

申请号：US10075352

申请日：2002-02-14

申请人： József Bognár ,  Bodo Kühn ,  Franz Heidjann

发明人： József Bognár ,  Bodo Kühn ,  Franz Heidjann

IPC分类号： A61F1240

CPC分类号： A01F29/02 ,  A01F12/40

摘要： An agricultural harvesting machine has a comminuting device which includes a chopper rotor having a rotor shaft, and a conveying element pivotably connected with the rotor shaft. The conveying element is formed by a first arm and a second arm which are interconnected by a cross web. In one embodiment the cross web has a recess between the first and second arms, and a cutting element is provided which passes either through the recess of the conveying element or outside of the first and second arms of conveying element as the conveying element rotates. In another embodiment the conveying element is provided with both leading and trailing cutting edges arranged in sets. Initially one set of cutting edges is utilized and the conveying element can latter be reversed in position to utilize the other set.

摘要翻译： 农业收割机具有粉碎装置，该粉碎装置包括具有转子轴的切碎机转子和与转子轴可枢转地连接的输送元件。 输送元件由第一臂和第二臂形成，第一臂和第二臂通过横向腹板互连。 在一个实施例中，横向腹板在第一和第二臂之间具有凹部，并且提供切割元件，当切割元件旋转时，穿过输送元件的凹部或输送元件的第一和第二臂的外部。 在另一个实施例中，输送元件设置有成组排列的前切割边缘和后切割边缘。 最初使用一组切削刃，并且可以将输送元件反转到适当的位置以利用另一组。

公开(公告)号：US07156732B2

公开(公告)日：2007-01-02

申请号：US10899279

申请日：2004-07-26

申请人： Bodo Kühn ,  Franz Heidjann

发明人： Bodo Kühn ,  Franz Heidjann

IPC分类号： A01F12/40

CPC分类号： A01F12/444 ,  A01D41/1243 ,  Y10S460/901

摘要： An agricultural machine having at least one crop processing work unit, a plurality of crop transport units operatively assembled as a straw walker step, wherein the crop transport units convey crop streams in opposite directions and are spaced apart defining a crop through-gap, and a cleaning device having a forced-draught fan before the cleaning device, further comprising an exhaust fan located after the cleaning device, wherein the transport units are located between the forced-draught fan and the exhaust fan, wherein an air stream is produced by the forced-draught fan and the exhaust fan and is directed from the forced-draught fan to the exhaust fan, and wherein the air stream improves a cleaning process in the straw walker through-gap of the straw walker step.An agricultural machine having at least one crop processing work unit and an exhaust fan for carrying away a portion of the crop processed by working members for processing a plurality of crop streams out of an agricultural machine, comprising a crop distributing device operatively connected to the exhaust fan and having guide webs that are variable in position, wherein the crop distributing device has a first working position for receiving a first of the crop streams and a second of the crop streams and a second working position for receiving one of the crop streams, wherein in the first working position the first and the second crop streams are combined and discharged for broadcasting as a common crop stream, and wherein in the second working position the first of the crop streams is received and discharged and the second of the crop streams is conveyed and discharged from the working members in swath form separate from the first of the crop streams. The crop streams passing through the agricultural machine are conveyed with less turbulence. Long-stalked straw is deposited in a swath for later use, and short-stalked straw and chaff are discharged out of the agricultural harvester separate from and without whirling up again the crop swath.

公开(公告)号：US06860805B2

公开(公告)日：2005-03-01

申请号：US10027019

申请日：2001-12-20

申请人： Bodo Kühn ,  Franz Heidjann

发明人： Bodo Kühn ,  Franz Heidjann

IPC分类号： A01D41/12 ,  A01F12/44 ,  A01F12/40 ,  A01F12/48

CPC分类号： A01F12/444 ,  A01D41/1243 ,  Y10S460/901

摘要： An agricultural machine having at least one crop processing work unit, a plurality of crop transport units operatively assembled as a straw walker step, wherein the crop transport units convey crop streams in opposite directions and are spaced apart defining a crop through-gap, and a cleaning device having a forced-draught fan before the cleaning device, further comprising an exhaust fan located after the cleaning device, wherein the transport units are located between the forced-draught fan and the exhaust fan, wherein an air stream is produced by the forced-draught fan and the exhaust fan and is directed from the forced-draught fan to the exhaust fan, and wherein the air stream improves a cleaning process in the straw walker through-gap of the straw walker step.An agricultural machine having at least one crop processing work unit and an exhaust fan for carrying away a portion of the crop processed by working members for processing a plurality of crop streams out of an agricultural machine, comprising a crop distributing device operatively connected to the exhaust fan and having guide webs that are variable in position, wherein the crop distributing device has a first working position for receiving a first of the crop streams and a second of the crop streams and a second working position for receiving one of the crop streams, wherein in the first working position the first and the second crop streams are combined and discharged for broadcasting as a common crop stream, and wherein in the second working position the first of the crop streams is received and discharged and the second of the crop streams is conveyed and discharged from the working members in swath form separate from the first of the crop streams. The crop streams passing through the agricultural machine are conveyed with less turbulence. Long-stalked straw is deposited in a swath for later use, and short-stalked straw and chaff are discharged out of the agricultural harvester separate from and without whirling up again the crop swath.

公开(公告)号：US06435966B1

公开(公告)日：2002-08-20

申请号：US09559350

申请日：2000-04-27

申请人： Franz Heidjann ,  Martin Dammann ,  Dirk Speckamp ,  Bodo Kühn ,  Walter Fögeling ,  Andreas Arnold

发明人： Franz Heidjann ,  Martin Dammann ,  Dirk Speckamp ,  Bodo Kühn ,  Walter Fögeling ,  Andreas Arnold

IPC分类号： A01F1244

CPC分类号： A01F12/305

摘要： A harvesting machine having a dividing device for dividing granular material from stem- or stalk-like material, and a separating device connected downstream of the dividing device, in which there is a conveying unit for conveying the stream of material from the dividing device to the separating device. In order to satisfactorily discharge the stem- or stalk-like material from the conveying tines of the conveying unit, cleaning elements are provided for cleaning away the material being conveyed over the free ends of the conveying tines.

摘要翻译： 一种具有分割装置的收割机，用于将粒状材料从杆状或茎状材料分离，以及连接在分割装置下游的分离装置，其中存在用于将材料流从分配装置输送到 分离装置。 为了从输送单元的输送齿中令人满意地排出杆状或茎状材料，提供清洁元件以清除在输送齿的自由端上输送的材料。