公开(公告)号：US20060207293A1

公开(公告)日：2006-09-21

申请号：US10565099

申请日：2004-07-18

申请人： Rene Sowa ,  Ralph Sattmann ,  Jan Vydra

发明人： Rene Sowa ,  Ralph Sattmann ,  Jan Vydra

IPC分类号： C03B37/07 ,  C03B37/028

CPC分类号： C03B37/01211 ,  C03B37/01245 ,  C03B37/01251 ,  C03B37/0126 ,  C03B37/02736 ,  C03B37/02754 ,  C03B2205/14

摘要： The production of an optical component from quartz glass by elongation of a coaxial arrangement of a core rod and a hollow cylinder is known. The arrangement is thus introduced into a heating zone, such that the lower end begins to partly soften and the component drawn from the softened part. According to the invention, a pseudo-continuous method for the formation of the restriction in the inner passage of the hollow cylinder on which the core rod is supported, is disclosed, whereby an upper hollow cylinder is fused end on with a lower hollow cylinder to form an axial composite cylinder, a core rod is introduced into the lower hollow cylinder and the axial cylinder composite partly softened and elongated to form the optical component. A drawing bulb extending to the upper hollow cylinder forms, within which the inner passage at least partly collapses with formation of the restriction and the upper cylinder is then separated off from the drawn optical component at a separating plane and then elongated together with a core rod to form an optical component.

摘要翻译： 已知通过芯棒和中空圆柱体的同轴布置的延长从石英玻璃生产光学部件。 因此，该布置被引入加热区，使得下端开始部分软化，并且从软化部分拉出的部件。 根据本发明，公开了一种用于在其上支撑有芯棒的中空圆柱体的内部通道中形成限制的伪连续方法，其中上空心圆筒以下空心圆筒熔化， 形成轴向复合圆筒，将芯棒引入下空心圆筒中，轴向圆筒复合材料部分软化和拉长以形成光学部件。 延伸到上部中空圆筒的拉丝灯泡形成，其中内部通道至少部分地与形成限制部分地折叠，并且上部圆柱体在分离平面处从拉出的光学部件分离出来，然后与芯棒一起拉长 以形成光学部件。

公开(公告)号：US20060174659A1

公开(公告)日：2006-08-10

申请号：US10565134

申请日：2004-07-18

申请人： Oliver Ganz ,  Rene Sowa ,  Peter Bauer ,  Norbert Cibis ,  Ralph Sattmann ,  Jan Vydra ,  Clemens Schmitt

发明人： Oliver Ganz ,  Rene Sowa ,  Peter Bauer ,  Norbert Cibis ,  Ralph Sattmann ,  Jan Vydra ,  Clemens Schmitt

IPC分类号： C03B37/027

CPC分类号： C03B37/01211 ,  C03B37/01245 ,  C03B37/01251 ,  C03B37/0126 ,  C03B37/02736 ,  C03B37/02754 ,  C03B2205/14

摘要： The production of an optical component from quartz glass, by elongation of a coaxial arrangement of a core rod and a hollow cylinder of a given length, is known. The arrangement is thus introduced into a heating zone with a vertical orientation, such that the lower end begins to partly soften and the component is drawn downwards from the softened part. The hollow cylinder has an inner passage, provided with a restriction in the region of the lower end thereof, on which the core rod is supported. Several methods are disclosed for formation of the restriction in which the inner passage (55) is mechanically machined to a final dimension and, in one version of the method, the restriction in the inner passage (55) is generated by means of softening the lower end face of the hollow cylinder, swaged against a tool and thus folded inwards with formation of a peripheral bead ring.

摘要翻译： 已知通过芯棒的同轴布置和给定长度的中空圆柱体从石英玻璃生产光学部件。 因此，该布置被引入具有垂直取向的加热区域，使得下端开始部分软化，并且部件从软化部分向下拉。 中空圆筒具有内部通道，在其下端的区域中设置有限制，其上支撑有芯棒。 公开了几种用于形成限制的方法，其中内部通道（55）被机械加工到最终尺寸，并且在该方法的一种形式中，内部通道（55）中的限制是通过软化下部 中空圆筒的端面，相对于工具进行锻压，从而向内折叠，形成周边的胎圈环。

公开(公告)号：US06622527B2

公开(公告)日：2003-09-23

申请号：US10154511

申请日：2002-05-23

申请人： Gerhard Schötz ,  Jan Vydra

发明人： Gerhard Schötz ,  Jan Vydra

IPC分类号： C03B37018

CPC分类号： C03C13/045 ,  C03B19/1453 ,  C03B37/01446 ,  C03B2201/21 ,  C03B2201/23 ,  C03C3/06 ,  C03C25/002 ,  C03C25/607 ,  C03C2201/21 ,  C03C2201/23

摘要： A core glass for making a preform for an optical fiber particularly useful for the transmission of ultraviolet radiation and methods for making the core glass are disclosed. The core glass is obtained by the flame hydrolysis of a silicon compound, deposition of finely granular SiO2 on a substrate with direct vitrification and formation of a synthetic quartz glass. The quartz glass has a hydrogen content of less than 1×1018 molecules/cm3.

摘要翻译： 公开了一种用于制造用于传输紫外线辐射的特别有用的光纤预制棒的芯玻璃和用于制造芯玻璃的方法。 核心玻璃通过硅化合物的火焰水解获得，通过直接玻璃化沉积细颗粒SiO 2并形成合成石英玻璃。 石英玻璃的氢含量小于1×10 18分子/ cm 3。

公开(公告)号：US20110100062A1

公开(公告)日：2011-05-05

申请号：US12737371

申请日：2009-07-01

申请人： Jan Vydra ,  Peter Bauer ,  Karsten Braeuer ,  Michael Huenermann

发明人： Jan Vydra ,  Peter Bauer ,  Karsten Braeuer ,  Michael Huenermann

IPC分类号： C03B37/018 ,  C03B37/023 ,  G02B6/02

CPC分类号： C03B37/01823 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/31 ,  C03B2203/22 ,  G02B6/036 ,  Y02P40/57

摘要： A known refraction-sensitive optical fiber comprises a core zone with an index of refraction nK, a jacket zone surrounding the core zone, said jacket zone having an index of refraction nM, and an annular zone made of quartz glass doped with fluorine, said annular zone surrounding the jacket zone and having an index of refraction NF, where nF

摘要翻译： 已知的折射敏感光纤包括具有折射率nK的核心区域，围绕核心区域的护套区域，所述护套区域具有折射率nM，以及由掺杂氟的石英玻璃制成的环形区域，所述环形 并且具有折射率NF，其中nF

公开(公告)号：US20070209400A1

公开(公告)日：2007-09-13

申请号：US10593508

申请日：2005-03-16

申请人： Achim Hofmann ,  Clemens Schmitt ,  Jan Vydra

发明人： Achim Hofmann ,  Clemens Schmitt ,  Jan Vydra

IPC分类号： C03B37/012

CPC分类号： C03B37/01211 ,  C03B37/0126 ,  C03B2201/04

摘要： According to a previously known method for producing an optical component from synthetic quartz glass, a coaxial arrangement comprising an outer jacket tube, an inner jacket tube that is provided with an internal bore, and a core rod whose bottom face rests on a thrust bearing within the internal bore, is fed into a heating zone in a vertical orientation, is softened therein zone by zone, and is elongated so as to obtain the quartz glass component. In order to create a simple and inexpensive method that is based on said method and makes it possible to reproducibly manufacture a high-quality optical component, the thrust bearing is embodied as a constriction of the internal bore of the inner jacket tube.

摘要翻译： 根据用于从合成石英玻璃制造光学部件的以前已知的方法，一种同轴装置，包括外护套管，设置有内孔的内护套和底面搁置在推力轴承内的芯棒 将内孔以垂直取向供给到加热区域中，逐渐被软化，并且被拉长以获得石英玻璃部件。 为了创建基于所述方法的简单且便宜的方法，并且使得可以可重复地制造高质量的光学部件，推力轴承被实施为内护套管的内孔的收缩。

公开(公告)号：US07080527B2

公开(公告)日：2006-07-25

申请号：US10310349

申请日：2002-12-05

申请人： Bodo Kühn ,  Bruno Uebbing ,  Martin Trommer ,  Stefan Ochs ,  Stephan Thomas ,  Steffen Kaiser ,  Jan Vydra

发明人： Bodo Kühn ,  Bruno Uebbing ,  Martin Trommer ,  Stefan Ochs ,  Stephan Thomas ,  Steffen Kaiser ,  Jan Vydra

IPC分类号： C03B8/04

CPC分类号： C03C4/0071 ,  C03B19/1453 ,  C03B19/1469 ,  C03B2201/21 ,  C03B2201/23 ,  C03C3/06 ,  C03C4/0085 ,  C03C2201/21 ,  C03C2201/23 ,  C03C2203/40 ,  C03C2203/52 ,  C03C2203/54 ,  Y02P40/57

摘要： The present invention relates to a quartz glass blank for an optical component for transmission of ultraviolet radiation of a wavelength of 250 nm or shorter, and to a use of the quartz glass blank in microlithography in combination with ultraviolet radiation of a wavelength of 250 nm or shorter. Moreover, the invention relates to a procedure for manufacture of the quartz glass blank. A quartz glass blank of the described type should show little induced absorption and be optimized with respect to compaction and decompaction. The quartz glass blank according to the invention is characterized by the following properties: a glass structure essentially free of oxygen defect sites, an H2-content in the range of 0.1×1016 molecules/cm3 to 4.0×1016 molecules/cm3, an OH-content in the range of 125 wt-ppm to 450 wt-ppm, an SiH group-content of less than 5×1016 molecules/cm3, a refractive index inhomogeneity, Δn, of less than 2 ppm, and a stress birefringence of less than 2 nm/cm. In the use according to the invention, the quartz glass blank complies with dimensioning rules (2), (3), and (4) in terms of its minimal and maximal hydrogen contents and OH-content, CH2min, CH2max, and COH, respectively, with P being the pulse number and ε being the energy density (in mJ/cm2): CH2min [molecules/cm3]=1×106ε2P,  (2) CH2max [molecules/cm3]=2×1018ε,  (3) COH [wt-ppm]=1,700×ε[mJ/cm2]0.4±50.  (4) The procedure according to the invention is characterized in that a mixed quartz glass is generated from a first and a second quartz glass by mixing the two quartz glasses in the course of a homogenization treatment.

公开(公告)号：US08544299B2

公开(公告)日：2013-10-01

申请号：US12448998

申请日：2008-01-15

申请人： Gerhard Schoetz ,  Karsten Braeuer ,  Jan Vydra

发明人： Gerhard Schoetz ,  Karsten Braeuer ,  Jan Vydra

IPC分类号： C03B37/018

CPC分类号： C03B37/01426 ,  C03B37/01211 ,  C03B37/01466 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/23 ,  C03B2203/42 ,  C03C3/06

摘要： To improve a known method for making a quartz glass tube as a semifinished product for the manufacture of optical fibers, the tube comprising an inner fluorine-doped quartz glass layer and an outer quartz glass layer, so as to achieve inexpensive manufacture and improved dimensional stability of the quartz glass tube, it is suggested according to the invention that the quartz glass of the inner layer should be produced in a first plasma deposition process with formation of an inner layer having a wall thickness of at least 1.5 mm, with a fluorine content of at least 1.5% by wt. being set in the quartz glass, and that the quartz glass of the outer layer should be produced in a second plasma deposition process and deposited directly or indirectly on the inner layer with formation of a composite tube, and that the composite tube should be elongated into the quartz glass tube.

摘要翻译： 为了改进用于制造石英玻璃管作为制造光纤的半成品的已知方法，该管包括内部掺氟石英玻璃层和外部石英玻璃层，以便实现便宜的制造和改善的尺寸稳定性 的石英玻璃管，根据本发明提出，内层的石英玻璃应该在第一等离子体沉积工艺中生产，形成壁厚至少为1.5mm的内层，氟含量 至少1.5重量％。 设置在石英玻璃中，并且外层的石英玻璃应该在第二等离子体沉积工艺中生产并直接或间接沉积在内层上，形成复合管，并且复合管应该被拉长成 石英玻璃管。

公开(公告)号：US20120324960A1

公开(公告)日：2012-12-27

申请号：US13583605

申请日：2011-03-10

申请人： Ralph Sattmann ,  Jan Vydra ,  Michael Huenermann

发明人： Ralph Sattmann ,  Jan Vydra ,  Michael Huenermann

IPC分类号： C03B37/027 ,  G02B6/036

CPC分类号： C03B37/02754 ,  C03B37/01211 ,  C03B37/01228 ,  C03B37/01242 ,  C03B37/018 ,  C03B37/027 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/20 ,  C03B2201/30 ,  C03B2201/31 ,  C03B2203/22 ,  C03B2203/23 ,  C03B2205/30 ,  C03C13/045 ,  C03C2201/12 ,  G02B6/03633 ,  G02B6/0365 ,  Y10T428/2935

摘要： Methods for producing an optical fiber by elongating a silica glass blank or a coaxial group of silica glass components, on the basis of which a fiber is obtained that comprises a core zone, an inner jacket zone enclosing the core zone and a ring zone surrounding the inner jacket zone, are known. In order to provide, proceeding from this, a method, a tubular semi-finished product and a group of coaxial components for the cost-effective production of an optical fiber, which is characterized by a high quality of the boundary between the core and jacket and by low bending sensitivity, according to the invention, the silica glass of the ring zone is provided in the form of a ring zone tube made of silica glass having a mean fluorine content of at least 6000 weight ppm and the tube has an inner tube surface and an outer tube surface, wherein via the wall of the ring zone tube, a radial fluorine concentration profile is adjusted which has an inner fluorine depletion layer with a layer thickness of at least 1 μm and no more than 10 μm, in which the fluorine content decreases toward the inner tube surface and is no more than 3000 weight ppm in a region close to the surface which has a thickness of 1 μm.

摘要翻译： 通过使二氧化硅玻璃坯料或同轴的二氧化硅玻璃成分组延长来制造光纤的方法，在此基础上获得包含芯区的纤维，包围芯区的内护套区和围绕该芯区的环带 内护套区域，已知。 为了提供一种用于成本有效地生产光纤的方法，管状半成品和一组同轴部件，其特征在于芯和夹套之间的边界质量高 并且通过低弯曲灵敏度，根据本发明，环区的石英玻璃以平均氟含量为至少6000重量ppm的石英玻璃制成的环形管的形式提供，并且管具有内管 表面和外管表面，其中通过环带管的壁，调节径向氟浓度分布，其具有层厚度为至少1μm且不大于10μm的内氟耗尽层，其中 氟含量向内管表面减少，并且在接近表面厚度为1μm的区域中不超过3000重量ppm。

公开(公告)号：US20100034998A1

公开(公告)日：2010-02-11

申请号：US12448998

申请日：2008-01-15

申请人： Gerhard Schoetz ,  Karsten Braeuer ,  Jan Vydra

发明人： Gerhard Schoetz ,  Karsten Braeuer ,  Jan Vydra

IPC分类号： C03C13/04 ,  C03B37/018 ,  B28B23/08

CPC分类号： C03B37/01426 ,  C03B37/01211 ,  C03B37/01466 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/23 ,  C03B2203/42 ,  C03C3/06

摘要： To improve a known method for making a quartz glass tube as a semifinished product for the manufacture of optical fibers, the tube comprising an inner fluorine-doped quartz glass layer and an outer quartz glass layer, so as to achieve inexpensive manufacture and improved dimensional stability of the quartz glass tube, it is suggested according to the invention that the quartz glass of the inner layer should be produced in a first plasma deposition process with formation of an inner layer having a wall thickness of at least 1.5 mm, with a fluorine content of at least 1.5% by wt. being set in the quartz glass, and that the quartz glass of the outer layer should be produced in a second plasma deposition process and deposited directly or indirectly on the inner layer with formation of a composite tube, and that the composite tube should be elongated into the quartz glass tube.

摘要翻译： 为了改进用于制造石英玻璃管作为制造光纤的半成品的已知方法，该管包括内部掺氟石英玻璃层和外部石英玻璃层，以便实现便宜的制造和改善的尺寸稳定性 的石英玻璃管，根据本发明提出，内层的石英玻璃应该在第一等离子体沉积工艺中生产，形成壁厚至少为1.5mm的内层，氟含量 至少1.5重量％。 设置在石英玻璃中，并且外层的石英玻璃应该在第二等离子体沉积工艺中生产并直接或间接沉积在内层上，形成复合管，并且复合管应该被拉长成 石英玻璃管。

公开(公告)号：US06550277B1

公开(公告)日：2003-04-22

申请号：US09709168

申请日：2000-11-10

申请人： Bruno Uebbing ,  Jan Vydra

发明人： Bruno Uebbing ,  Jan Vydra

IPC分类号： C03B1906

CPC分类号： C03C4/0085 ,  C03B19/1453 ,  C03B2201/03 ,  C03B2201/04 ,  C03B2201/075 ,  C03C3/06 ,  C03C2201/06 ,  C03C2201/08 ,  C03C2201/23 ,  C03C2203/40 ,  Y10S65/08 ,  Y10S65/16 ,  Y10S501/905

摘要： The invention concerns a quartz glass body for an optical component for the transmission of UV radiation with a wavelength of 250 nm and less, especially for a wavelength of 157 nm, as well as a process for the manufacture of the quartz glass body where fine quartz glass particles are formed by flame hydrolysis of a silicon compound, deposited and vitrified. Suitability of a quartz glass as represented by high base transmission and radiation resistance depends on structural properties caused by local stoichiometric deviations, and on the chemical composition. The quartz glass body according to the inventions is distinguished by a uniform base transmission (relative change of base transmission ≦1%) in the wavelength range from 155 nm to 250 nm (radiation penetration depth of 10 mm) of at least 80%, a low OH content (less than 10 ppm by weight) and a glass structure substantially free from oxygen defect centers. A quartz glass body of this kind is manufactured by a process which allows bulk embedding of hydrogen or oxygen into the glass network in that at least a two stage heat treatment takes place at temperatures ranging from 850° C. to 1600° C. before the vitrification, the last stage comprising sintering at a temperature between 1300° C. and 1600° C. in an atmosphere containing hydrogen or oxygen, or a nonflammable mixture of these substances.

摘要翻译： 本发明涉及一种用于传输波长为250nm以下，特别是波长为157nm的紫外线的光学部件的石英玻璃体，以及用于制造石英玻璃体的方法，其中精细的石英 通过硅化合物的火焰水解形成玻璃颗粒，沉积并玻璃化。 由高碱性透射和耐辐射性表示的石英玻璃的适用性取决于由局部化学计量偏差引起的结构特性以及化学成分。 根据本发明的石英玻璃体的特征在于在155nm至250nm（辐射穿透深度为10mm）的波长范围内的均匀的基底透射率（基底透射率的相对变化<= 1％）为至少80％ 低OH含量（小于10ppm重量）和基本上不含氧缺陷中心的玻璃结构。 这种石英玻璃体是通过允许将氢气或氧气大量嵌入玻璃网络的方法来制造的，因为至少在两个阶段之间的热处理在850℃至1600℃之间的温度下进行 玻璃化，最后阶段包括在含有氢气或氧气的气氛中在1300℃和1600℃之间的温度下烧结，或这些物质的不可燃混合物。