摘要:
The present invention relates to a quartz glass blank for an optical component for transmission of ultraviolet radiation of a wavelength of 250 nm or shorter, and to a use of the quartz glass blank in microlithography in combination with ultraviolet radiation of a wavelength of 250 nm or shorter. Moreover, the invention relates to a procedure for manufacture of the quartz glass blank. A quartz glass blank of the described type should show little induced absorption and be optimized with respect to compaction and decompaction. The quartz glass blank according to the invention is characterized by the following properties: a glass structure essentially free of oxygen defect sites, an H2-content in the range of 0.1×1016 molecules/cm3 to 4.0×1016 molecules/cm3, an OH-content in the range of 125 wt-ppm to 450 wt-ppm, an SiH group-content of less than 5×1016 molecules/cm3, a refractive index inhomogeneity, Δn, of less than 2 ppm, and a stress birefringence of less than 2 nm/cm. In the use according to the invention, the quartz glass blank complies with dimensioning rules (2), (3), and (4) in terms of its minimal and maximal hydrogen contents and OH-content, CH2min, CH2max, and COH, respectively, with P being the pulse number and ε being the energy density (in mJ/cm2): CH2min [molecules/cm3]=1×106ε2P, (2) CH2max [molecules/cm3]=2×1018ε, (3) COH [wt-ppm]=1,700×ε[mJ/cm2]0.4±50. (4) The procedure according to the invention is characterized in that a mixed quartz glass is generated from a first and a second quartz glass by mixing the two quartz glasses in the course of a homogenization treatment.
摘要:
Starting from an optical component of quartz glass for transmitting ultraviolet radiation of a wavelength between 190 nm and 250 nm, with a glass structure essentially without oxygen defects, a hydrogen content ranging from 0.1×1016 molecules/cm3 to 5.0×1016 molecules/cm3, and with a content of SiH groups of less than 5×1016 molecules/cm3, to provide such a component which is particularly well suited for use with linearly polarized UV laser radiation, the present invention suggests that the component should have a content of hydroxyl groups ranging from 10 to 250 wt ppm and a fictive temperature above 1000° C.
摘要翻译:从用于透射波长在190nm和250nm之间的紫外线辐射的石英玻璃的光学部件开始,具有基本上没有氧缺陷的玻璃结构,氢含量范围为0.1×10 16分/ cm 3至5.0×10 16分/ cm 3,以及与 SiH基团的含量小于5×10 16分子/ cm 3,以提供特别适合用于线性偏振UV激光辐射的这种组分,本发明提出该组分的羟基含量范围为10〜 250重量ppm,假想温度高于1000℃
摘要:
Starting from an optical component of quartz glass for transmitting ultraviolet radiation of a wavelength between 190 nm and 250 nm, with a glass structure essentially without oxygen defects, a hydrogen content ranging from 0.1×1016 molecules/cm3 to 5.0×1016 molecules/cm3, and with a content of SiH groups of less than 5×1016 molecules/cm3, to provide such a component which is particularly well suited for use with linearly polarized UV laser radiation, the present invention suggests that the component should have a content of hydroxyl groups ranging from 10 to 250 wt ppm and a fictive temperature above 1000° C.
摘要翻译:从用于透射波长在190nm和250nm之间的紫外线辐射的石英玻璃的光学部件开始,基本上没有氧缺陷的玻璃结构,氢含量范围为0.1×10 16分子/ SUP> 3至5.0×10 16分子/ cm 3,并且SiH基团的含量小于5×10 16个分子 为了提供特别适合用于线性偏振UV激光辐射的这种组分,本发明提出组分应具有10至250重量%的羟基含量 ppm,假想温度高于1000℃
摘要:
Starting from an optical component of quartz glass for transmitting ultraviolet radiation of a wavelength between 190 nm and 250 nm, with a glass structure essentially without oxygen defects, a hydrogen content ranging from 0.1×1016 molecules/cm3 to 5.0×1016 molecules/cm3, and with a content of SiH groups of less than 5×1016 molecules/cm3, to provide such a component which is particularly well suited for use with linearly polarized UV laser radiation, the present invention suggests that the component should have a content of hydroxyl groups ranging from 10 to 250 wt ppm and a fictive temperature above 1000° C.
摘要翻译:从用于透射波长在190nm和250nm之间的紫外线辐射的石英玻璃的光学部件开始,具有基本上没有氧缺陷的玻璃结构,氢含量范围为0.1×10 16分/ cm 3至5.0×10 16分/ cm 3,以及与 SiH基团的含量小于5×10 16分子/ cm 3,以提供特别适合用于线性偏振UV激光辐射的这种组分,本发明提出该组分的羟基含量范围为10〜 250重量ppm,假想温度高于1000℃
摘要:
The invention puts forward a bidirectional DC-DC converter for high voltages that is as simple as possible and that entails as few losses as possible. The bidirectional DC-DC converter (1) converter comprises an input stage (2) to convert a DC input voltage into first AC voltage, a transformer (3) to transform the first AC voltage into a second AC voltage, and an output stage (4) to convert the second AC voltage into a DC output voltage, whereby, in order to provide the first and/or second AC voltage, at least one of the input stages (2) and/or output stages (4) comprises a branch of a multi-level converter (5) with a first number of active first semiconductor switches (61).
摘要:
A device for sensing the linear axial displacement of an actuator comprises, in one embodiment, a movable, elongated magnet coupled to the actuator and a fixed Hall sensor. A one-dimensional bearing for the magnet is designed to receive bearing forces in a direction radial to the axial direction by permitting a displacement and pivoting movement of the magnet around the one-dimensional bearing. Arranging the Hall sensor in the region of the one-dimensional bearing ensures that the spacing or gap between the magnet and the Hall sensor remains constant, even in case of a pivoting and/or radial movement of the actuator and of the magnet connected thereto along the full length of displacement of the actuator. Accordingly, the results in sensing the linear displacement of the actuator are not adversely affected by admissible deflections of the actuator from the axial direction of linear displacement.
摘要:
The invention relates to lenses, prisms or other optical members which are subjected to high-power ultraviolet light having a wavelength of about 360 nm or less, or ionizing radiation, particularly optical members for use in laser exposure apparatus for lithography, and to blanks for such optical members. The homogeneity of the refractive index distribution and the resistance to optical deterioration when the optical members are exposed for a long period of time to short wavelength ultraviolet light from a laser beam are improved. The optical members are made of high-purity synthetic silica glass material containing at least about 50 wt. ppm of OH groups, and are doped with hydrogen. The refractive index distribution caused by the fictive temperature distribution during heat treatment in the process of producing high-purity silica glass blanks for optical members in accordance with the present invention is offset by the combined refractive index distribution determined by the OH group concentration distribution or by the OH group concentration distribution and the Cl concentration distribution in the glass.
摘要:
A component for the transmission of light of high energy density with a wavelength between 250 nm and 400 nm is made of synthetic, high-purity fused vitreous silica having a hydroxyl ion content in the range between 50 ppm and 1200 ppm and an under-stoichiometric content of oxygen for the achievement of a minimal transmission variation in the transmission of the light.
摘要:
A shock wave generator for the fragmentation of concrements, having a light-pulse-transmiting light guide and a converter arranged at the distal light guide end and having an ionization surface which, when a light pulse impinges, initiates a shock wave in the surrounding fluid, as well as having a shock wave outlet zone. In order to increase its efficiency and durability, the generator is constructed such that the ionization surface extends obliquely sloped with respect to the beaming axis of the impinging light pulse and the shock wave outlet zone is arranged in the direct shock wave beaming area of the ionization surface, thereby permitting a largely unhindered, low-loss propagation for the shock wave to the application point.