Quartz glass blank for an optical component, and manufacturing procedure and use thereof

    公开(公告)号:US07080527B2

    公开(公告)日:2006-07-25

    申请号:US10310349

    申请日:2002-12-05

    IPC分类号: C03B8/04

    摘要: The present invention relates to a quartz glass blank for an optical component for transmission of ultraviolet radiation of a wavelength of 250 nm or shorter, and to a use of the quartz glass blank in microlithography in combination with ultraviolet radiation of a wavelength of 250 nm or shorter. Moreover, the invention relates to a procedure for manufacture of the quartz glass blank. A quartz glass blank of the described type should show little induced absorption and be optimized with respect to compaction and decompaction. The quartz glass blank according to the invention is characterized by the following properties: a glass structure essentially free of oxygen defect sites, an H2-content in the range of 0.1×1016 molecules/cm3 to 4.0×1016 molecules/cm3, an OH-content in the range of 125 wt-ppm to 450 wt-ppm, an SiH group-content of less than 5×1016 molecules/cm3, a refractive index inhomogeneity, Δn, of less than 2 ppm, and a stress birefringence of less than 2 nm/cm. In the use according to the invention, the quartz glass blank complies with dimensioning rules (2), (3), and (4) in terms of its minimal and maximal hydrogen contents and OH-content, CH2min, CH2max, and COH, respectively, with P being the pulse number and ε being the energy density (in mJ/cm2): CH2min [molecules/cm3]=1×106ε2P,  (2) CH2max [molecules/cm3]=2×1018ε,  (3) COH [wt-ppm]=1,700×ε[mJ/cm2]0.4±50.  (4) The procedure according to the invention is characterized in that a mixed quartz glass is generated from a first and a second quartz glass by mixing the two quartz glasses in the course of a homogenization treatment.

    Optical component quartz glass
    4.
    发明申请
    Optical component quartz glass 审中-公开
    光学元件石英玻璃

    公开(公告)号:US20090239732A1

    公开(公告)日:2009-09-24

    申请号:US12455164

    申请日:2009-05-29

    IPC分类号: C03C3/23 C03C3/12

    摘要: Starting from an optical component of quartz glass for transmitting ultraviolet radiation of a wavelength between 190 nm and 250 nm, with a glass structure essentially without oxygen defects, a hydrogen content ranging from 0.1×1016 molecules/cm3 to 5.0×1016 molecules/cm3, and with a content of SiH groups of less than 5×1016 molecules/cm3, to provide such a component which is particularly well suited for use with linearly polarized UV laser radiation, the present invention suggests that the component should have a content of hydroxyl groups ranging from 10 to 250 wt ppm and a fictive temperature above 1000° C.

    摘要翻译: 从用于透射波长在190nm和250nm之间的紫外线辐射的石英玻璃的光学部件开始,具有基本上没有氧缺陷的玻璃结构,氢含量范围为0.1×10 16分/ cm 3至5.0×10 16分/ cm 3,以及与 SiH基团的含量小于5×10 16分子/ cm 3,以提供特别适合用于线性偏振UV激光辐射的这种组分,本发明提出该组分的羟基含量范围为10〜 250重量ppm,假想温度高于1000℃

    Bidirectional DC-DC converter
    5.
    发明授权
    Bidirectional DC-DC converter 有权
    双向DC-DC转换器

    公开(公告)号:US09148065B2

    公开(公告)日:2015-09-29

    申请号:US14002593

    申请日:2012-02-27

    IPC分类号: H02M3/335 H02M3/337

    摘要: The invention puts forward a bidirectional DC-DC converter for high voltages that is as simple as possible and that entails as few losses as possible. The bidirectional DC-DC converter (1) converter comprises an input stage (2) to convert a DC input voltage into first AC voltage, a transformer (3) to transform the first AC voltage into a second AC voltage, and an output stage (4) to convert the second AC voltage into a DC output voltage, whereby, in order to provide the first and/or second AC voltage, at least one of the input stages (2) and/or output stages (4) comprises a branch of a multi-level converter (5) with a first number of active first semiconductor switches (61).

    摘要翻译: 本发明提出了一种尽可能简单的高电压双向DC-DC转换器,尽可能减少损耗。 双向DC-DC转换器(1)转换器包括将DC输入电压转换为第一AC电压的输入级(2),将第一AC电压变换为第二AC电压的变压器(3)和输出级( 为了提供第一和/或第二AC电压,输入级(2)和/或输出级(4)中的至少一个包括分支 具有第一数量的有源第一半导体开关(61)的多电平转换器(5)。

    Device for sensing a displacement for a linear drive, and linear drive
    6.
    发明授权
    Device for sensing a displacement for a linear drive, and linear drive 有权
    用于检测线性驱动器的位移和线性驱动的装置

    公开(公告)号:US07423421B2

    公开(公告)日:2008-09-09

    申请号:US11357433

    申请日:2006-02-17

    IPC分类号: G01B7/14 G01R33/06

    摘要: A device for sensing the linear axial displacement of an actuator comprises, in one embodiment, a movable, elongated magnet coupled to the actuator and a fixed Hall sensor. A one-dimensional bearing for the magnet is designed to receive bearing forces in a direction radial to the axial direction by permitting a displacement and pivoting movement of the magnet around the one-dimensional bearing. Arranging the Hall sensor in the region of the one-dimensional bearing ensures that the spacing or gap between the magnet and the Hall sensor remains constant, even in case of a pivoting and/or radial movement of the actuator and of the magnet connected thereto along the full length of displacement of the actuator. Accordingly, the results in sensing the linear displacement of the actuator are not adversely affected by admissible deflections of the actuator from the axial direction of linear displacement.

    摘要翻译: 用于感测致动器的线性轴向位移的装置在一个实施例中包括耦合到致动器的可移动的细长磁体和固定的霍尔传感器。 用于磁体的一维轴承被设计成通过允许磁体围绕一维轴承的位移和枢转运动而在径向向轴向方向上承受轴承力。 在一维轴承区域中安排霍尔传感器确保了磁体和霍尔传感器之间的间隔或间隙保持恒定,即使在致动器和连接到其上的磁体的枢转和/或径向移动的情况下 执行器的全长位移。 因此,感测致动器的线性位移的结果不受致动器从线性位移的轴向方向的允许偏转的不利影响。

    Shock wave generator
    10.
    发明授权
    Shock wave generator 失效
    冲击波发生器

    公开(公告)号:US5041121A

    公开(公告)日:1991-08-20

    申请号:US454638

    申请日:1989-12-21

    摘要: A shock wave generator for the fragmentation of concrements, having a light-pulse-transmiting light guide and a converter arranged at the distal light guide end and having an ionization surface which, when a light pulse impinges, initiates a shock wave in the surrounding fluid, as well as having a shock wave outlet zone. In order to increase its efficiency and durability, the generator is constructed such that the ionization surface extends obliquely sloped with respect to the beaming axis of the impinging light pulse and the shock wave outlet zone is arranged in the direct shock wave beaming area of the ionization surface, thereby permitting a largely unhindered, low-loss propagation for the shock wave to the application point.

    摘要翻译: 一种用于破碎混凝土的冲击波发生器,具有光脉冲透射光导和布置在远端光导端处的转换器,并且具有电离表面,当光脉冲入射时,其在周围流体中引发冲击波 ,以及具有冲击波出口区。 为了提高其效率和耐久性,发电机被构造成使得电离表面相对于入射光脉冲的发射轴线倾斜倾斜延伸,并且冲击波出口区域布置在电离的直接冲击波发射区域中 从而允许冲击波对应用点的大大不受阻碍的低损耗传播。