METHODS OF FABRICATING SEMICONDUCTOR DEVICE
    3.
    发明申请
    METHODS OF FABRICATING SEMICONDUCTOR DEVICE 有权
    制造半导体器件的方法

    公开(公告)号:US20120225504A1

    公开(公告)日:2012-09-06

    申请号:US13411678

    申请日:2012-03-05

    IPC分类号: H01L21/66

    摘要: A method of manufacturing a semiconductor device includes providing a wafer, forming a memory device which includes phase change material layer on the wafer, completing a wafer level process of manufacturing the semiconductor device, and performing a thermal treatment process on the wafer to densify the phase change material. To this end, the process temperature of the thermal treatment is higher than the crystallization temperature of the phase change material and lower than the melting point of the phase change material.

    摘要翻译: 一种制造半导体器件的方法包括提供晶片,形成在晶片上包括相变材料层的存储器件,完成制造半导体器件的晶片级工艺,以及对晶片进行热处理以使相位致密化 换材料 为此,热处理的工艺温度高于相变材料的结晶温度,并且低于相变材料的熔点。