Abstract:
The present invention relates to microanalysers and more particularly to microanalysers making use of the secondary ion emission for producing, by means of a corpuscular optical system which combines ion optics and mass spectrography, ''''characteristic images'''' of the surface of the sample which indicate the map of distribution of its various elements or isotopes.
Abstract:
In an ionic microanalyzer, the energy filtering of the ions of the beam providing an image of a sample is effected by means of a spherical capacitor, suitably associated with the magnetic deflector used for the momentum-to-charge ratio filtering, through an intermediate lens system.