Abstract:
A chemical reaction apparatus includes a solid body in which a reaction flow path is formed, and a heater having a thin-film heater formed on the body to oppose the reaction flow path and at least partially exposed to the reaction flow path, and which supplies a predetermined heat amount to the reaction flow path by the thin-film heater.
Abstract:
The compact chemical reactor includes a first substrate, a second substrate attached to the first substrate. A micro flow path is defined between the first substrate and the second substrate. A thin film heater provided in the flow path.
Abstract:
A compact chemical reactor has a first substrate. A catalyst layer is provided on an inner surface of a groove formed in a first surface of the first substrate. A second substrate, in which a concave portion to receive a portion of the catalyst layer is formed on a surface opposite to the first surface of the substrate, contacts the first substrate on the opposite surface.
Abstract:
A chemical reaction apparatus includes at least one reaction region formed on a solid body and having a continuously formed reaction flow path to which a fluid material is supplied, and a temperature adjusting layer which is provided on the body to correspond to a region including the reaction flow path and portions between adjacent portions of the reaction flow path. The temperature adjusting layer supplies a predetermined heat quantity to the reaction flow path.