VIBRATION POWERED IMPACT RECORDER (VPIR)
    2.
    发明申请
    VIBRATION POWERED IMPACT RECORDER (VPIR) 有权
    振动式冲击记录仪(VPIR)

    公开(公告)号:US20110004444A1

    公开(公告)日:2011-01-06

    申请号:US12792372

    申请日:2010-06-02

    IPC分类号: G06F17/40 G01P15/08 F03G7/08

    CPC分类号: G01P1/127 G01P15/0891

    摘要: A vibration-powered impact recording device that harvests power from vibrations that affect the device is provided. The recording device is affixed to an object and includes a vibration limit detection and recordation system. The system can include a suitable part that is fixed to the object, and a mass (or other suitable part) that is less firmly attached, with the relative motion between the two parts producing an electrical voltage. The electrical voltage can be used to power an information storage unit that records the details of the impact and optionally other sensors which record other parameters such as temperature, humidity etc. at the time of impact.

    摘要翻译: 提供了一种振动动力的冲击记录装置,其从影响装置的振动收集电力。 记录装置固定在物体上并包括振动极限检测和记录系统。 该系统可以包括固定到物体上的适当部件和不牢固地附接的质量(或其它合适的部件),两部分之间的相对运动产生电压。 可以使用电压为记录冲击细节的信息存储单元供电,以及可能的其他记录其他参数(如温度,湿度等)的其他传感器的电源。

    Apparatus for processing silicon devices with improved temperature
control
    3.
    发明授权
    Apparatus for processing silicon devices with improved temperature control 失效
    用于处理具有改进的温度控制的硅器件的装置

    公开(公告)号:US6002113A

    公开(公告)日:1999-12-14

    申请号:US80430

    申请日:1998-05-18

    IPC分类号: G01K11/12 H01L21/00 H05B3/02

    CPC分类号: H01L21/67248

    摘要: Apparatus for processing a silicon workpiece uses reflected UV light to measure and control the workpiece temperature. A linearly polarized beam including UV light is directed onto a silicon surface to produce a reflected beam. The reflected beam is cross-polarized to null out much of the light, and the resulting residual reflectivity spectrum is determined. The temperature is determined from the characteristics of this spectrum. A workpiece heating station uses this measuring technique to accurately control the temperature of a silicon workpiece and temperature-dependent processing over a wide range of processing temperatures, including temperatures below 500.degree. C.

    摘要翻译: 用于处理硅工件的设备使用反射的UV光来测量和控制工件温度。 包括UV光的线偏振光束被引导到硅表面上以产生反射光束。 反射光束被交叉极化以消除大部分光,并且确定所得残留反射率光谱。 温度根据该光谱的特性确定。 工件加热站采用这种测量技术来精确控制硅工件的温度,并在宽温度范围内(包括温度低于500℃)的温度依赖性处理。

    SMART SHUNT DEVICES AND METHODS
    4.
    发明申请
    SMART SHUNT DEVICES AND METHODS 有权
    SMART SHUNT设备和方法

    公开(公告)号:US20140309577A1

    公开(公告)日:2014-10-16

    申请号:US14213170

    申请日:2014-03-14

    IPC分类号: A61F9/007 G01L9/00 A61M27/00

    摘要: Devices and methods for the measurement and control of fluid using one or two capacitors are described. The devices use Micro-Electro-Mechanical-Systems (MEMS) and radio-frequency inductive coupling to sense the properties of a fluid in a tube. The single and double capacitor devices may be coupled to shunts implantable in a patient and operable to be interrogated non-invasively. The shunts employing the novel capacitor devices are insensitive to stray signals such as the orientation of a patient's head. The devices are operable to employ a wireless external spectrometer to measure passive subcutaneous components.

    摘要翻译: 描述了使用一个或两个电容器来测量和控制流体的装置和方法。 这些器件使用微机电系统(MEMS)和射频感应耦合来感测管中流体的性质。 单电容器装置和双电容器装置可以耦合到可植入患者体内的分流器,并可操作以非侵入性地询问。 采用新型电容器装置的分流器对诸如患者头部的取向的杂散信号不敏感。 这些装置可操作地使用无线外部光谱仪来测量被动皮下组分。

    Method for attractive bonding of two crystalline substrates
    5.
    发明授权
    Method for attractive bonding of two crystalline substrates 有权
    两种结晶底物有吸引力结合的方法

    公开(公告)号:US06187653B1

    公开(公告)日:2001-02-13

    申请号:US09465884

    申请日:1999-12-17

    IPC分类号: H01L2130

    摘要: A process for device fabrication is disclosed in which two substrates having different crystal lattices are bound together. In the process the substrate surfaces are placed in physical contact with each other. A flexible membrane is placed in physical contact with a surface of one of the substrates. Pneumatic force is applied to the flexible membrane. The duration of the contact and the pressure of the contact are selected to facilitate a bond between the two substrate surfaces that results from attractive Van der Waals' forces between the two surfaces. The bulk of one of the substrates is then typically removed. Thereafter, the bonded surfaces are heated to a high temperature to effect a permanent bond.

    摘要翻译: 公开了一种用于器件制造的方法,其中具有不同晶格的两个衬底结合在一起。 在该过程中,衬底表面彼此物理接触。 将柔性膜放置成与其中一个基板的表面物理接触。 气动力被施加到柔性膜上。 选择接触的持续时间和接触压力,以便于由两个表面之间的有吸引力的范德华力引起的两个基板表面之间的接合。 然后通常去除其中一个底物的大部分。 然后,将接合面加热至高温,进行永久接合。

    Method for bonding two crystalline substrates together
    6.
    发明授权
    Method for bonding two crystalline substrates together 有权
    将两个结晶基板结合在一起的方法

    公开(公告)号:US6136667A

    公开(公告)日:2000-10-24

    申请号:US369682

    申请日:1999-08-05

    IPC分类号: H01L21/18 H01L31/18 H01L21/30

    摘要: A process for device fabrication is disclosed in which two substrates having different crystal lattices are bound together. In the process the substrate surfaces are thoroughly cleaned and placed in physical contact with each other. The duration of the contact and the pressure of the contact are selected to facilitate a bond between the two substrate surfaces that results from attractive Van der Waals' forces between the two surfaces. The bonded substrates are heated to a moderate temperature to effect escape of gases which may be entrapped by the substrates. The bulk of one of the substrates is then typically removed. The substrates can be heated again to a moderate temperature to effect removal of any gases remaining entrapped on the substrates. Thereafter, the bonded surfaces are heated to a high temperature to effect a permanent bond.

    摘要翻译: 公开了一种用于器件制造的方法,其中具有不同晶格的两个衬底结合在一起。 在此过程中,基材表面被彻底清洁并相互物理接触。 选择接触的持续时间和接触压力,以便于由两个表面之间的有吸引力的范德华力引起的两个基板表面之间的接合。 将粘合的基材加热到适度的温度以实现可被基底捕获的气体逸出。 然后通常去除其中一个底物的大部分。 可以将衬底再次加热到适度的温度,以除去残留在衬底上的任何气体。 然后,将接合面加热至高温,进行永久接合。

    Method for processing silicon workpieces using hybrid optical thermometer system
    7.
    发明授权
    Method for processing silicon workpieces using hybrid optical thermometer system 有权
    使用混合光学温度计系统处理硅工件的方法

    公开(公告)号:US06830942B1

    公开(公告)日:2004-12-14

    申请号:US09286929

    申请日:1999-04-06

    IPC分类号: G01R3126

    摘要: A method is disclosed for processing a silicon workpiece including a hybrid thermometer system for measuring and controlling the processing temperature where fabrication materials have been or are being applied to the workpiece. The hybrid thermometer system uses optical reflectance and another thermometer technique, such as a thermocouple and/or a pyrometer. Real-time spectral data are compared to values in a spectrum library to determine the “surface conditions”. A decision is then made based on the surface conditions as to how the temperature is measured, e.g., with optical reflectance, a pyrometer, or a thermocouple, and the temperature is measured using the appropriately selected technique. Utilizing the hybrid thermometer system, the temperature of a silicon workpiece may be accurately measured at low temperatures while accounting for the presence of fabrication materials.

    摘要翻译: 公开了一种用于处理硅工件的方法,其包括用于测量和控制制造材料已经或正在施加到工件上的处理温度的混合温度计系统。 混合温度计系统使用光反射和另一种温度计技术,例如热电偶和/或高温计。 将实时光谱数据与光谱库中的值进行比较,以确定“表面条件”。 然后根据表面条件决定如何测量温度,例如光反射率,高温计或热电偶,并使用适当选择的技术来测量温度。 利用混合温度计系统,可以在低温下精确测量硅工件的温度,同时考虑到制造材料的存在。

    Apparatus and method for spectroscopic product recognition and
identification
    8.
    发明授权
    Apparatus and method for spectroscopic product recognition and identification 失效
    光谱产品识别和识别的装置和方法

    公开(公告)号:US5867265A

    公开(公告)日:1999-02-02

    申请号:US844671

    申请日:1997-04-17

    摘要: An optical identification system includes a light source with a broad wavelength spectrum that is directed on an object to be identified. Suitable optical components, such as, one or more collimating lenses gather light that is reflected from the object and direct this light into a spectrometer. The spectrometer disperses the collimated light using a dispersing element, such as one or more gratings, prisms or a combinations of both, onto an array of detectors. The array of detectors may be comprised of a linear diode array or a charge-coupled device (CCD) array which indicates the amount of light at each of a finely-spaced set of wavelengths covering a wide spectral range. The detectors are sensitive over a wavelength region, for example, in the case of silicon detectors from near-infrared plus the visible region, e.g., from 250 nm to 1100 nm. The set of signals from the detectors is read with an analog to digital converter, and transferred to a computer in the form of a spectrum. A set of known spectra determine the reference spectra and the unknown test spectrum is compared with the reference sets. A software program in the computer compares the test spectrum with reference spectra sets utilizing a statistical program. The program takes into account how much the known spectra vary from one another in addition to the average values. A display reads out a list of possible matches in rank order that have a probability of match greater than a predetermined threshold. An operator checks that the first listed item is correct and either accepts the first choice or indicates the correct choice. As an alternative, the system could automatically accept the first choice.

    摘要翻译: 光学识别系统包括针对要识别的对象的具有宽波长谱的光源。 合适的光学部件,例如一个或多个准直透镜聚集从物体反射的光,并将该光引导到光谱仪中。 光谱仪使用分散元件(例如一个或多个光栅,棱镜或两者的组合)将准直光分散到检测器阵列上。 检测器阵列可以包括线性二极管阵列或电荷耦合器件(CCD)阵列,其指示在覆盖宽光谱范围的精细间隔的波长组中的每一个处的光量。 检测器在波长区域是敏感的,例如在来自近红外加上可见光区域的硅检测器的情况下,例如250nm至1100nm。 来自检测器的一组信号用模数转换器读取,并以频谱的形式传送到计算机。 一组已知的光谱确定参考光谱,并将未知的测试光谱与参考集进行比较。 计算机中的软件程序将测试频谱与使用统计程序的参考谱集进行比较。 该程序考虑了除了平均值之外,已知光谱彼此之间有多少变化。 显示器以等于具有大于预定阈值的匹配概率的等级顺序读出可能的匹配列表。 操作员检查第一个列出的项目是否正确,并接受第一选择或指示正确的选择。 作为替代,系统可以自动接受第一选择。

    Vibration powered impact recorder (VPIR)
    10.
    发明授权
    Vibration powered impact recorder (VPIR) 有权
    振动动力撞击记录仪(VPIR)

    公开(公告)号:US08571835B2

    公开(公告)日:2013-10-29

    申请号:US12792372

    申请日:2010-06-02

    IPC分类号: G06F17/40 G01N1/00 G11C13/02

    CPC分类号: G01P1/127 G01P15/0891

    摘要: A vibration-powered impact recording device that harvests power from vibrations that affect the device is provided. The recording device is affixed to an object and includes a vibration limit detection and recordation system. The system can include a suitable part that is fixed to the object, and a mass (or other suitable part) that is less firmly attached, with the relative motion between the two parts producing an electrical voltage. The electrical voltage can be used to power an information storage unit that records the details of the impact and optionally other sensors which record other parameters such as temperature, humidity etc. at the time of impact.

    摘要翻译: 提供了一种振动动力的冲击记录装置,其从影响装置的振动收集电力。 记录装置固定在物体上并包括振动极限检测和记录系统。 该系统可以包括固定到物体上的适当部件和不牢固地附接的质量(或其它合适的部件),两部分之间的相对运动产生电压。 可以使用电压为记录冲击细节的信息存储单元供电,以及可能的其他记录其他参数(如温度,湿度等)的其他传感器的电源。