摘要:
Methods for reducing inclusion content of sputter targets and targets so produced are disclosed. Inclusions may be reduced by adding a small amount of Si to the molten Al or molten Al alloy followed by filtering of the molten metals through a filter medium. Targets having substantially no inclusions therein of greater than about 400 μm are especially useful in the sputtering of large flat panel displays and result, upon sputtering, in a reduction in the amount of macroparticles sputtered onto the substrate.
摘要:
The present invention relates to a method for determining a critical size for a diameter of an Al2O3 inclusion (38) in an Al or Al alloy sputter target (42) to prevent arcing during sputtering thereof. This method includes providing a sputtering apparatus having an argon plasma. The plasma has a plasma sheath of a known thickness during sputtering under a selected sputtering environment of an Al or Al alloy sputter target having an Al2O3 inclusion-free sputtering surface. When the thickness of the sheath is known for a selected sputtering environment, the critical size of an Al2O3 inclusion (38) can be determined based upon the thickness of the sheath. More specifically, the diameter of an Al2O3 inclusion (38) in an Al or Al alloy sputter target (42) must be less than the thickness of the plasma sheath during sputtering under the selected sputtering environment to inhibit arcing.
摘要翻译:本发明涉及一种用于确定Al或Al合金溅射靶(42)中的Al 2 O 3 N 2夹杂物(38)的直径的临界尺寸的方法, 以防止溅射期间的电弧。 该方法包括提供具有氩等离子体的溅射装置。 等离子体在溅射期间具有已知厚度的等离子体护套,在Al或Al合金溅射靶的溅射环境中,Al或Al合金溅射靶具有Al 2 N 3 O 3不含夹杂物的溅射表面 。 当对于选定的溅射环境来说已知护套的厚度时,可以基于厚度来确定Al 2 N 3 N 3夹杂物(38)的临界尺寸 鞘。 更具体地说,Al或Al合金溅射靶(42)中的Al 2 N 3 N 3夹杂物(38)的直径必须小于等离子体鞘的厚度 在溅射环境中进行溅射以抑制电弧放电。
摘要:
Methods for reducing inclusion content of sputter targets and targets so produced are disclosed. Inclusions may be reduced by adding a small amount of Si to the molten Al or molten Al alloy followed by filtering of the molten metals through a filter medium. Targets having substantially no inclusions therein of greater than about 400 μm are especially useful in the sputtering of large flat panel displays and result, upon sputtering, in a reduction in the amount of macroparticles sputtered onto the substrate.
摘要:
A method of constructing increased life sputter targets and targets made by the method are disclosed. The method comprises starting with a precursor target design or profile and making magnetic field strength measurements along the radial surface of same and at a plurality of vertical dimensions above the surface. An optimal magnetic field strength ratio is provided between the erosion tracks of the target. The vertical dimension of the material to be added to one of the erosion tracks is determined and then the height of the other erosion track is calculated by utilizing this optimal magnetic field strength ratio.
摘要:
Methods for reducing inclusion content of sputter targets and targets so produced are disclosed. Inclusions may be reduced by adding a small amount of Si to the molten Al or molten Al alloy followed by filtering of the molten metals through a filter medium. Targets having substantially no inclusions therein of greater than about 400 μm are especially useful in the sputtering of large flat panel displays and result, upon sputtering, in a reduction in the amount of macroparticles sputtered onto the substrate.
摘要:
An air energy power machine comprises an air compressor (1). An air inlet end of the air compressor is connected with an air storage tank (2) through a pipeline; an air outlet end of the air compressor is connected with a first heat exchanger (3) through a pipeline; a second heat exchanger (4) is connected to the right side of the first heat exchanger through a pipeline; the second heat exchanger is connected with the air storage tank to form a closed loop; a first liquid pump (5) connected with the first heat exchanger through a pipeline is arranged below the first heat exchanger; a first liquid collection tank (6) is connected to the first liquid pump; a first steam turbine (7) is arranged above the first heat exchanger; a steam inlet of the first steam turbine is connected with the first heat exchanger through a pipeline.
摘要:
A multi-contact character input method includes: setting an input character corresponding to each multi-contact operation, in which attributes of the multi-contact operation include a position of each contact in a plurality of contacts, or/and the number of contacts contacting a multi-point touch screen within the same time, or/and a sliding direction of each contact; a user performing a multi-contact operation; identifying the multi-contact operation of the user and obtaining a corresponding input character according to the attributes of the multi-contact operation; and inputting the corresponding character. The multi-contact character input method fully uses the advantages of multi-point touch sensing, implements the input of frequently used functional keys or character keys through a multi-point touch combination of a special manner, and provides input convenience for the user without requiring the user to change a click input mode.
摘要:
Provided are a platform authentication strategy management method for trusted connection architecture (TCA), and the trusted network connection (TNC) client, TNC access point and evaluation strategy service provider for implementing the method in the TCA. In the embodiments of the present invention, the platform authentication strategy for the access requester can be configured in the TNC access point or the evaluation strategy service provider, and the platform authentication strategy for the access requester configured in the evaluation strategy service provider can be delivered to the TNC access point. Moreover, a component-type-level convergence platform evaluation strategy can be executed in the TNC access point or the evaluation strategy service provider, to ensure that the realization of the TCA platform authentication has good application extensibility.
摘要:
In a road image analyzing apparatus capable of obviously and rapidly distinguishing a road marking from a guardrail and capable of obtaining precise position information, a pre-processing unit defines sub-areas to main image data obtained by an image pickup unit, and an edge extracting unit extracts an edge component in each of the sub-areas. A linear line extracting unit analyzes the extracted edge component to extract a linear component, and a linear component analyzing unit extracts a continuous component from the linear component by using the linear component. A matching process unit performs a matching process between a vertex of the continuous component and auxiliary image data to obtain three-dimensional position information of each continuous component. An identifying unit identifies whether the continuous component is a road marking or a guardrail on the basis of height information of each continuous component included in the three-dimensional position information.
摘要:
Provided is a building roof outline recognition device which facilitates automation. A small-building candidate region is extracted based on normalized DSM data using a region segmentation method. By using the building candidate region as a marker and further using height information included in the normalized DSM data and the like, a building region is extracted using a region growing method. While referencing the height information, from among edges appearing in the orthoimage, edges fitting with an outer shape of the building region are extracted as an outer shape of the roof when viewed from above. Further, for a building judged to have a slanted roof, a roof structure line which is the boundary between the roof surfaces is extracted from the building region, and a three-dimensional structure of the building roof outline is determined from the roof outer shape and the roof structure line.