METHOD OF MANUFACTURING THERMAL INKJET PRINTHEAD
    3.
    发明申请
    METHOD OF MANUFACTURING THERMAL INKJET PRINTHEAD 审中-公开
    制造热喷头的方法

    公开(公告)号:US20080283494A1

    公开(公告)日:2008-11-20

    申请号:US11874551

    申请日:2007-10-18

    IPC分类号: G11B5/127

    摘要: A method of manufacturing a thermal inkjet printhead. The method includes forming on a substrate a chamber layer having an ink chamber, forming a sacrificial layer on the chamber layer wherein the sacrificial layer fills the ink chamber, and planarizing a top surface of the sacrificial layer and of the chamber layer using a primary Chemical Mechanical Polishing (CMP) process until the sacrificial layer and the chamber layer attain a desired height, wherein a slurry is used in the primary CMP process that includes polishing particles having an average particle size of 500 nm˜2 μm.

    摘要翻译: 一种制造热喷墨打印头的方法。 该方法包括在基底上形成具有墨水室的腔室层,在腔室层上形成牺牲层,其中牺牲层填充墨水腔,以及使用主要化学物质对牺牲层和腔室层的顶表面进行平坦化 机械抛光(CMP)工艺直到牺牲层和室层达到期望的高度,其中在包括平均粒度为500nm〜2μm的抛光颗粒的初级CMP工艺中使用浆料。

    Inkjet printhead and method of manufacturing the same
    8.
    发明授权
    Inkjet printhead and method of manufacturing the same 失效
    喷墨打印头及其制造方法

    公开(公告)号:US07568784B2

    公开(公告)日:2009-08-04

    申请号:US11384542

    申请日:2006-03-21

    IPC分类号: B41J2/14 B41J2/05

    CPC分类号: B41J2/1603 B41J2/1623

    摘要: An inkjet printhead and a method of manufacturing the same. The inkjet printhead may include a substrate in which a manifold to supply ink is formed in a lower portion of the substrate and a plurality of ink feed holes connected to the manifold are formed in an upper portion of the substrate, feed hole guides that are formed on inner sidewalls of the ink feed holes to define lengths of the ink feed holes, a chamber layer stacked on the substrate, the chamber layer including a plurality of ink chambers connected to the ink feed holes, a plurality of heaters to heat ink inside the ink chambers to generate bubbles, and a nozzle layer stacked on the chamber layer, the nozzle layer including a plurality of nozzles, the ink being ejectable through the nozzles.

    摘要翻译: 喷墨打印头及其制造方法。 喷墨打印头可以包括基板,其中在基板的下部形成有用于供应墨水的歧管,并且在基板的上部形成有连接到歧管的多个供墨孔,形成的供给孔引导件 在墨供给孔的内侧壁上限定供墨孔的长度,层叠在基板上的室层,室层包括与供墨孔连接的多个墨室,多个加热器, 油墨室以产生气泡,以及层叠在室层上的喷嘴层,喷嘴层包括多个喷嘴,油墨可通过喷嘴喷射。

    Thermally driven inkjet printhead
    9.
    发明申请
    Thermally driven inkjet printhead 审中-公开
    热驱动喷墨打印头

    公开(公告)号:US20070019039A1

    公开(公告)日:2007-01-25

    申请号:US11402905

    申请日:2006-04-13

    IPC分类号: B41J2/05

    CPC分类号: B41J2/1404 B41J2002/14387

    摘要: A thermally driven inkjet printhead includes a substrate, a heater formed on the substrate, a chamber layer stacked on the substrate to define an ink chamber on an upper portion of the heater and an ink feed hole to supply ink to the ink chamber at one side of the ink chamber, an intermediate layer stacked on the chamber layer in which a through hole connected to the ink chamber is formed, and a nozzle layer stacked on the intermediate layer in which a nozzle connected to the through hole is formed. The through hole is connected to the ink feed hole and has a smaller cross-sectional area than a size of the heater.

    摘要翻译: 热驱动喷墨打印头包括基板,形成在基板上的加热器,堆叠在基板上的腔室层,以在加热器的上部限定墨室;以及供墨孔,用于向一侧的墨室供墨 在形成有连接到墨水室的通孔的室层上形成有中间层,并且在形成有与通孔连接的喷嘴的中间层上堆叠的喷嘴层。 通孔连接到供墨孔,并且具有比加热器的尺寸更小的横截面积。

    Inkjet printhead and method of manufacturing the same
    10.
    发明申请
    Inkjet printhead and method of manufacturing the same 审中-公开
    喷墨打印头及其制造方法

    公开(公告)号:US20060284938A1

    公开(公告)日:2006-12-21

    申请号:US11415143

    申请日:2006-05-02

    IPC分类号: B41J2/045

    摘要: An Inkjet printhead and a method of manufacturing the same. The inkjet printhead includes a substrate having an ink feedhole, a chamber layer formed on the substrate to define an ink chamber filled with ink supplied though the ink feedhole, and a nozzle layer formed on the chamber layer and having one or more nozzles to eject the ink filled in the chamber, wherein the chamber layer and the nozzle layer are made of solid film resists.

    摘要翻译: 喷墨打印头及其制造方法。 喷墨打印头包括具有供墨孔的基板,形成在基板上以限定填充有通过供墨孔供应的墨水的墨室的腔室层,以及形成在腔室层上并具有一个或多个喷嘴以喷射的喷嘴层 填充在室中的油墨,其中室层和喷嘴层由固体膜抗蚀剂制成。