公开(公告)号：US07038880B2

公开(公告)日：2006-05-02

申请号：US10633132

申请日：2003-08-01

申请人： Cherng-Chyi Han ,  Danning Yang ,  Mao-Min Chen

发明人： Cherng-Chyi Han ,  Danning Yang ,  Mao-Min Chen

IPC分类号： G11B5/147

CPC分类号： G11B5/3136 ,  G11B5/127 ,  G11B5/147 ,  G11B5/31 ,  G11B5/3196

摘要： An inductive-type write head and its method of fabrication are disclosed. The write head has a vertically separated two-element planar coil of reduced resistance which is the result of forming the lower of the two coils with windings of a greater height and substantially larger cross-sectional area than those of the upper coil. The formation of a lower coil with greater height is possible because of a surface planarization that allows separating the coils by an alumina layer of minimal thickness. This method allows the reduction of coil resistance without the necessity of enlarging the head dimensions. The reduced resistance results in lower power consumption and the elimination of pole tip protrusion caused by excessive heating during operation.

摘要翻译： 公开了一种电感式写入头及其制造方法。 写头具有具有降低的电阻的垂直分离的两元件平面线圈，其是形成两个线圈中较低的线圈的结果，其绕组具有比上部线圈的更大的高度和大得多的横截面积的绕组。 由于表面平坦化，允许通过最小厚度的氧化铝层分离线圈，所以形成较高高度的下线圈是可能的。 该方法允许减小线圈电阻而不需要扩大头部尺寸。 降低的电阻导致较低的功率消耗和由于操作期间的过度加热而导致的极尖突起的消除。

公开(公告)号：US20050024765A1

公开(公告)日：2005-02-03

申请号：US10633132

申请日：2003-08-01

申请人： Cherng-Chyi Han ,  Danning Yang ,  Mao-Min Chen

发明人： Cherng-Chyi Han ,  Danning Yang ,  Mao-Min Chen

IPC分类号： G11B5/127 ,  G11B5/147 ,  G11B5/31

CPC分类号： G11B5/3136 ,  G11B5/127 ,  G11B5/147 ,  G11B5/31 ,  G11B5/3196

摘要： An inductive-type write head and its method of fabrication are disclosed. The write head has a vertically separated two-element planar coil of reduced resistance which is the result of forming the lower of the two coils with windings of a greater height and substantially larger cross-sectional area than those of the upper coil. The formation of a lower coil with greater height is possible because of a surface planarization that allows separating the coils by an alumina layer of minimal thickness. This method allows the reduction of coil resistance without the necessity of enlarging the head dimensions. The reduced resistance results in lower power consumption and the elimination of pole tip protrusion caused by excessive heating during operation.

摘要翻译： 公开了一种电感式写入头及其制造方法。 写头具有具有降低的电阻的垂直分离的两元件平面线圈，其是形成两个线圈中较低的线圈的结果，其绕组具有比上部线圈的更大的高度和大得多的横截面积的绕组。 由于表面平坦化，允许通过最小厚度的氧化铝层分离线圈，所以形成较高高度的下线圈是可能的。 该方法允许减小线圈电阻而不需要扩大头部尺寸。 降低的电阻导致较低的功率消耗和由于操作期间的过度加热而导致的极尖突起的消除。

公开(公告)号：US07120989B2

公开(公告)日：2006-10-17

申请号：US10781168

申请日：2004-02-18

申请人： Danning Yang ,  Cherng-Chyi Han

发明人： Danning Yang ,  Cherng-Chyi Han

IPC分类号： G11B5/127 ,  B05D1/32 ,  B44C1/22

CPC分类号： G11B5/1278 ,  Y10T29/49039 ,  Y10T29/49041 ,  Y10T29/49048 ,  Y10T29/49052

摘要： For PMR (Perpendicular Magnetic Recording) design, one of the major technology problems is the use of CMP to fabricate the pole structure. If the device is under-polished there is a danger of leaving behind a magnetic shorting layer while if it is over-polished there may be damage to the main pole. This problem has been overcome by surrounding the main pole, write gap, stitched write head pillar with a layer of CMP etch stop material which, using optical inspection alone, allows CMP (performed under a first set of conditions) to be terminated just as the stitched write head gets exposed. This is followed by a second CMP step (performed under a second set of conditions) for further fine trimming of the stitched head, as needed.

摘要翻译： 对于PMR（垂直磁记录）设计，主要的技术问题之一是使用CMP制造极结构。 如果设备磨光不良，则会有留下磁性短路层的危险，而如果超磨光，则可能会损坏主极。 通过使用CMP蚀刻停止材料层围绕主极，写入间隙，缝合写头柱来克服这个问题，其使用光学检查单独允许CMP（在第一组条件下执行）被终止，就像 拼接写头被曝光。 接下来是第二CMP步骤（在第二组条件下执行），以根据需要进一步精细修剪缝合的头部。

公开(公告)号：US20050177996A1

公开(公告)日：2005-08-18

申请号：US10781168

申请日：2004-02-18

申请人： Danning Yang ,  Cherng-Chyi Han

发明人： Danning Yang ,  Cherng-Chyi Han

IPC分类号： G11B5/31 ,  G11B5/127 ,  G11B5/147

CPC分类号： G11B5/1278 ,  Y10T29/49039 ,  Y10T29/49041 ,  Y10T29/49048 ,  Y10T29/49052

摘要： For PMR (Perpendicular Magnetic Recording) design, one of the major technology problems is the use of CMP to fabricate the pole structure. If the device is under-polished there is a danger of leaving behind a magnetic shorting layer while if it is over-polished there may be damage to the main pole. This problem has been overcome by surrounding the main pole, write gap, stitched write head pillar with a layer of CMP etch stop material which, using optical inspection alone, allows CMP (performed under a first set of conditions) to be terminated just as the stitched write head gets exposed. This is followed by a second CMP step (performed under a second set of conditions) for further fine trimming of the stitched head, as needed.

摘要翻译： 对于PMR（垂直磁记录）设计，主要的技术问题之一是使用CMP制造极结构。 如果设备磨光不足，则会有留下磁性短路层的危险，而如果超磨光，则可能会损坏主极。 通过使用CMP蚀刻停止材料层围绕主极，写入间隙，缝合写头柱来克服这个问题，其使用光学检查单独允许CMP（在第一组条件下执行）被终止，就像 拼接写头被曝光。 接下来是第二CMP步骤（在第二组条件下执行），以根据需要进一步精细修剪缝合的头部。

公开(公告)号：US07419891B1

公开(公告)日：2008-09-02

申请号：US11352652

申请日：2006-02-13

申请人： Benjamin Chen ,  Hongping Yuan ,  Danning Yang ,  Wei Zhang ,  Hugh C. Hiner ,  Lei Wang ,  Yingjian Chen ,  Brant Nease

发明人： Benjamin Chen ,  Hongping Yuan ,  Danning Yang ,  Wei Zhang ,  Hugh C. Hiner ,  Lei Wang ,  Yingjian Chen ,  Brant Nease

IPC分类号： H01L21/20

CPC分类号： H01L43/12 ,  B82Y10/00 ,  B82Y25/00 ,  G11B5/3906 ,  G11B5/3909

摘要： The method and system for providing a magnetic element are disclosed. The method and system include providing a magnetic element stack that includes a plurality of layers and depositing a stop layer on the magnetic element stack. The method and system also include providing a dielectric antireflective coating (DARC) layer on the stop layer, forming a single layer mask for defining the magnetic element on a portion of the DARC layer, and removing a remaining portion of the DARC layer not covered by the single layer mask. The portion of the DARC layer covers a portion of the stop layer. The method further includes removing a remaining portion of the stop layer and defining the magnetic element using at least the portion of stop layer as a mask.

摘要翻译： 公开了用于提供磁性元件的方法和系统。 该方法和系统包括提供包括多个层的磁性元件堆叠并在磁性元件堆叠上沉积停止层。 该方法和系统还包括在停止层上提供介电抗反射涂层（DARC）层，形成用于在DARC层的一部分上限定磁性元件的单层掩模，以及去除DARC层未覆盖的DARC层的剩余部分 单层面膜。 DARC层的一部分覆盖停止层的一部分。 该方法还包括使用停止层的至少一部分作为掩模去除停止层的剩余部分并限定磁性元件。

公开(公告)号：US08424192B1

公开(公告)日：2013-04-23

申请号：US11199281

申请日：2005-08-08

申请人： Danning Yang ,  Lei Wang ,  Yingjian Chen ,  Brant Nease ,  Kyusik Sin

发明人： Danning Yang ,  Lei Wang ,  Yingjian Chen ,  Brant Nease ,  Kyusik Sin

IPC分类号： G11B5/127 ,  H04R31/00

CPC分类号： G11B5/1278 ,  G11B5/3116 ,  G11B5/3163 ,  G11B5/3169 ,  Y10T29/49041 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method and system for manufacturing a pole on a recording head is disclosed. The method and system include sputtering at least one ferromagnetic layer and fabricating a hard mask on the ferromagnetic layer. The method and system also include defining the pole and depositing a write gap on the pole. A portion of the pole is encapsulated in an insulator.

摘要翻译： 公开了一种在记录头上制造磁极的方法和系统。 该方法和系统包括溅射至少一个铁磁层并在铁磁层上制造硬掩模。 该方法和系统还包括限定极点并在极上沉积写入间隙。 极的一部分被封装在绝缘体中。

公开(公告)号：US07296339B1

公开(公告)日：2007-11-20

申请号：US10936921

申请日：2004-09-08

申请人： Danning Yang ,  Yingjian Chen ,  Brant Nease ,  Kyusik Sin

发明人： Danning Yang ,  Yingjian Chen ,  Brant Nease ,  Kyusik Sin

IPC分类号： G11B5/127 ,  H04R31/00

CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/3163 ,  G11B5/3169 ,  Y10T29/49039 ,  Y10T29/49043 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method and system for manufacturing a perpendicular magnetic recording head is disclosed. The method and system include providing a chemical mechanical planarization (CMP) uniformity structure having an aperture therein and forming a perpendicular magnetic recording pole within the aperture. The CMP uniformity structure may include a CMP barrier layer. The method and system further include fabricating an insulator after formation of the perpendicular magnetic recording pole and performing a CMP to remove a portion of the insulator, expose a portion of the perpendicular magnetic recording pole and planarize an exposed surface of the perpendicular magnetic recording head.

摘要翻译： 公开了用于制造垂直磁记录头的方法和系统。 该方法和系统包括提供其中具有孔的化学机械平面化（CMP）均匀性结构，并在孔内形成垂直的磁记录极。 CMP均匀性结构可以包括CMP阻挡层。 所述方法和系统还包括在形成垂直磁记录极之后制造绝缘体，并执行CMP以去除绝缘体的一部分，暴露垂直磁记录极的一部分并平面化垂直磁记录头的暴露表面。

公开(公告)号：US09196270B1

公开(公告)日：2015-11-24

申请号：US11635830

申请日：2006-12-07

申请人： Danning Yang ,  Guanghong Luo ,  Yun-Fei Li

发明人： Danning Yang ,  Guanghong Luo ,  Yun-Fei Li

IPC分类号： G11B5/31 ,  G11B5/39 ,  H01L21/311 ,  H01L21/314

CPC分类号： G11B5/398 ,  G11B5/3163 ,  G11B5/39 ,  G11B5/3903 ,  G11B5/3932 ,  H01L21/31138 ,  H01L21/3144 ,  H01L43/08 ,  Y10T29/49041 ,  Y10T29/49048 ,  Y10T29/49052

摘要： The method and system for providing a magnetoresistive device are described. The method and system include depositing a plurality of magnetoresistive element layers which cover at least one device area and at least one field area. The method and system also include providing a single layer mask. The single layer mask covers a first portion of the magnetoresistive element layers in the device area(s) and exposes the magnetoresistive element layers in the field area(s). The method and system include defining the magnetoresistive element(s) using the single layer mask and depositing a hard bias layer on the device area(s) and the field area(s) after the magnetic element(s) are defined. The method and system further include performing a planarization after the hard bias layer is deposited.

摘要翻译： 描述了用于提供磁阻器件的方法和系统。 该方法和系统包括沉积多个覆盖至少一个器件区域和至少一个场区域的磁阻元件层。 该方法和系统还包括提供单层掩模。 单层掩模覆盖器件区域中的磁阻元件层的第一部分并且暴露场区域中的磁阻元件层。 该方法和系统包括使用单层掩模限定磁阻元件，并且在限定了磁性元件之后，在器件区域和场区域上沉积硬偏置层。 所述方法和系统还包括在沉积硬偏压层之后执行平面化。

公开(公告)号：US08404129B1

公开(公告)日：2013-03-26

申请号：US12751815

申请日：2010-03-31

申请人： Guanghong Luo ,  Danning Yang ,  Ming Jiang

发明人： Guanghong Luo ,  Danning Yang ,  Ming Jiang

IPC分类号： B44C1/22

CPC分类号： G11B5/3163 ,  G11B2005/0021

摘要： A method and system for fabricating an optical component are described. The method and system include providing a first planarization stopping and a second planarization stopping structure. The first planarization stopping structure has a first height and a first edge. The second planarization stopping structure has a second height different from the first height and a second edge. The first edge is separated from the second edge by a distance. The method and system also include providing an optical material. The optical material resides at least between the first edge of the first planarization stopping structure and the second edge of the second planarization stopping structure. The method and system also include planarizing the optical components. The planarization removes a portion of the optical material to form a surface between the first planarization stopping structure and the second planarization stopping structure. This surface has a curvature.

摘要翻译： 描述了用于制造光学部件的方法和系统。 该方法和系统包括提供第一平坦化停止和第二平坦化停止结构。 第一平面化停止结构具有第一高度和第一边缘。 第二平坦化停止结构具有与第一高度不同的第二高度和第二边缘。 第一边缘与第二边缘分开一段距离。 该方法和系统还包括提供光学材料。 光学材料至少位于第一平坦化停止结构的第一边缘和第二平坦化停止结构的第二边缘之间。 该方法和系统还包括平面化光学部件。 平坦化除去光学材料的一部分以在第一平坦化停止结构和第二平坦化停止结构之间形成表面。 该表面具有曲率。

公开(公告)号：US08375564B1

公开(公告)日：2013-02-19

申请号：US12633562

申请日：2009-12-08

申请人： Guanghong Luo ,  Danning Yang ,  Weimin Si ,  Dujiang Wan ,  Yun-Fei Li ,  Lijie Guan ,  Ming Jiang

发明人： Guanghong Luo ,  Danning Yang ,  Weimin Si ,  Dujiang Wan ,  Yun-Fei Li ,  Lijie Guan ,  Ming Jiang

IPC分类号： G11B5/127 ,  H04R31/00

CPC分类号： G11B5/1278 ,  G11B5/3116 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method provides a pole of magnetic recording transducer. A nonmagnetic stop layer having a thickness and a top surface is provided. A depression that forms a bevel is provided in the stop layer. The bevel has a depth less than the thickness and a bevel angle with respect to a remaining portion of the top surface. The bevel angle is greater than zero and less than ninety degrees. An intermediate layer having a substantially flat top surface is provided over the stop layer. A trench is formed in the intermediate layer via a removal process. The trench has a profile corresponding to the pole. The stop layer is a stop for the removal process. The method also includes providing the pole in the trench. The pole has a leading edge bevel corresponding to the bevel in the stop layer.

摘要翻译： 一种方法提供磁记录传感器的极点。 提供具有厚度和顶表面的非磁性停止层。 形成斜面的凹陷设置在停止层中。 该斜面具有小于该厚度的深度和相对于顶部表面的剩余部分的斜角。 斜角大于零，小于九十度。 具有基本上平坦的顶表面的中间层设置在停止层上。 通过去除工艺在中间层中形成沟槽。 沟槽具有对应于极点的轮廓。 停止层是移除过程的停止点。 该方法还包括在沟槽中设置极点。 极具有对应于停止层中的斜面的前缘斜面。