公开(公告)号：US07120989B2

公开(公告)日：2006-10-17

申请号：US10781168

申请日：2004-02-18

申请人： Danning Yang ,  Cherng-Chyi Han

发明人： Danning Yang ,  Cherng-Chyi Han

IPC分类号： G11B5/127 ,  B05D1/32 ,  B44C1/22

CPC分类号： G11B5/1278 ,  Y10T29/49039 ,  Y10T29/49041 ,  Y10T29/49048 ,  Y10T29/49052

摘要： For PMR (Perpendicular Magnetic Recording) design, one of the major technology problems is the use of CMP to fabricate the pole structure. If the device is under-polished there is a danger of leaving behind a magnetic shorting layer while if it is over-polished there may be damage to the main pole. This problem has been overcome by surrounding the main pole, write gap, stitched write head pillar with a layer of CMP etch stop material which, using optical inspection alone, allows CMP (performed under a first set of conditions) to be terminated just as the stitched write head gets exposed. This is followed by a second CMP step (performed under a second set of conditions) for further fine trimming of the stitched head, as needed.

摘要翻译： 对于PMR（垂直磁记录）设计，主要的技术问题之一是使用CMP制造极结构。 如果设备磨光不良，则会有留下磁性短路层的危险，而如果超磨光，则可能会损坏主极。 通过使用CMP蚀刻停止材料层围绕主极，写入间隙，缝合写头柱来克服这个问题，其使用光学检查单独允许CMP（在第一组条件下执行）被终止，就像 拼接写头被曝光。 接下来是第二CMP步骤（在第二组条件下执行），以根据需要进一步精细修剪缝合的头部。

公开(公告)号：US07038880B2

公开(公告)日：2006-05-02

申请号：US10633132

申请日：2003-08-01

申请人： Cherng-Chyi Han ,  Danning Yang ,  Mao-Min Chen

发明人： Cherng-Chyi Han ,  Danning Yang ,  Mao-Min Chen

IPC分类号： G11B5/147

CPC分类号： G11B5/3136 ,  G11B5/127 ,  G11B5/147 ,  G11B5/31 ,  G11B5/3196

摘要： An inductive-type write head and its method of fabrication are disclosed. The write head has a vertically separated two-element planar coil of reduced resistance which is the result of forming the lower of the two coils with windings of a greater height and substantially larger cross-sectional area than those of the upper coil. The formation of a lower coil with greater height is possible because of a surface planarization that allows separating the coils by an alumina layer of minimal thickness. This method allows the reduction of coil resistance without the necessity of enlarging the head dimensions. The reduced resistance results in lower power consumption and the elimination of pole tip protrusion caused by excessive heating during operation.

摘要翻译： 公开了一种电感式写入头及其制造方法。 写头具有具有降低的电阻的垂直分离的两元件平面线圈，其是形成两个线圈中较低的线圈的结果，其绕组具有比上部线圈的更大的高度和大得多的横截面积的绕组。 由于表面平坦化，允许通过最小厚度的氧化铝层分离线圈，所以形成较高高度的下线圈是可能的。 该方法允许减小线圈电阻而不需要扩大头部尺寸。 降低的电阻导致较低的功率消耗和由于操作期间的过度加热而导致的极尖突起的消除。

公开(公告)号：US20050177996A1

公开(公告)日：2005-08-18

申请号：US10781168

申请日：2004-02-18

申请人： Danning Yang ,  Cherng-Chyi Han

发明人： Danning Yang ,  Cherng-Chyi Han

IPC分类号： G11B5/31 ,  G11B5/127 ,  G11B5/147

CPC分类号： G11B5/1278 ,  Y10T29/49039 ,  Y10T29/49041 ,  Y10T29/49048 ,  Y10T29/49052

摘要： For PMR (Perpendicular Magnetic Recording) design, one of the major technology problems is the use of CMP to fabricate the pole structure. If the device is under-polished there is a danger of leaving behind a magnetic shorting layer while if it is over-polished there may be damage to the main pole. This problem has been overcome by surrounding the main pole, write gap, stitched write head pillar with a layer of CMP etch stop material which, using optical inspection alone, allows CMP (performed under a first set of conditions) to be terminated just as the stitched write head gets exposed. This is followed by a second CMP step (performed under a second set of conditions) for further fine trimming of the stitched head, as needed.

摘要翻译： 对于PMR（垂直磁记录）设计，主要的技术问题之一是使用CMP制造极结构。 如果设备磨光不足，则会有留下磁性短路层的危险，而如果超磨光，则可能会损坏主极。 通过使用CMP蚀刻停止材料层围绕主极，写入间隙，缝合写头柱来克服这个问题，其使用光学检查单独允许CMP（在第一组条件下执行）被终止，就像 拼接写头被曝光。 接下来是第二CMP步骤（在第二组条件下执行），以根据需要进一步精细修剪缝合的头部。

公开(公告)号：US20050024765A1

公开(公告)日：2005-02-03

申请号：US10633132

申请日：2003-08-01

申请人： Cherng-Chyi Han ,  Danning Yang ,  Mao-Min Chen

发明人： Cherng-Chyi Han ,  Danning Yang ,  Mao-Min Chen

IPC分类号： G11B5/127 ,  G11B5/147 ,  G11B5/31

CPC分类号： G11B5/3136 ,  G11B5/127 ,  G11B5/147 ,  G11B5/31 ,  G11B5/3196

摘要： An inductive-type write head and its method of fabrication are disclosed. The write head has a vertically separated two-element planar coil of reduced resistance which is the result of forming the lower of the two coils with windings of a greater height and substantially larger cross-sectional area than those of the upper coil. The formation of a lower coil with greater height is possible because of a surface planarization that allows separating the coils by an alumina layer of minimal thickness. This method allows the reduction of coil resistance without the necessity of enlarging the head dimensions. The reduced resistance results in lower power consumption and the elimination of pole tip protrusion caused by excessive heating during operation.

摘要翻译： 公开了一种电感式写入头及其制造方法。 写头具有具有降低的电阻的垂直分离的两元件平面线圈，其是形成两个线圈中较低的线圈的结果，其绕组具有比上部线圈的更大的高度和大得多的横截面积的绕组。 由于表面平坦化，允许通过最小厚度的氧化铝层分离线圈，所以形成较高高度的下线圈是可能的。 该方法允许减小线圈电阻而不需要扩大头部尺寸。 降低的电阻导致较低的功率消耗和由于操作期间的过度加热而导致的极尖突起的消除。

公开(公告)号：US08611046B2

公开(公告)日：2013-12-17

申请号：US12799131

申请日：2010-04-19

申请人： Yan Wu ,  Zhigang Bai ,  Moris Dovek ,  Cherng-Chyi Han ,  Min Li ,  Jianing Zhou ,  Jiun-Ting Lee ,  Min Zheng

发明人： Yan Wu ,  Zhigang Bai ,  Moris Dovek ,  Cherng-Chyi Han ,  Min Li ,  Jianing Zhou ,  Jiun-Ting Lee ,  Min Zheng

IPC分类号： G11B5/11 ,  G11B5/23 ,  G11B5/31

CPC分类号： G11B5/105 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/315 ,  G11B5/3163

摘要： A perpendicular magnetic recording (PMR) head is fabricated with a pole tip shielded laterally by a graded side shield that is conformal to the shape of the pole tip at an upper portion of the shield but not conformal to the pole tip at a lower portion. The shield includes a trailing shield, that is conformal to the trailing edge of the pole tip and may include a leading edge shield that magnetically connects two bottom ends of the graded side shield.

摘要翻译： 垂直磁记录（PMR）头被制造成具有通过分级侧屏蔽横向屏蔽的极尖，该平面侧屏蔽保护层在屏蔽的上部处与极尖的形状保持一致，但在下部不与极尖共形。 屏蔽件包括后挡板，其与电极尖端的后缘保持一致，并且可以包括磁性连接分级侧屏蔽件的两个底端的前缘屏蔽件。

公开(公告)号：US20120069470A1

公开(公告)日：2012-03-22

申请号：US13373172

申请日：2011-11-07

申请人： Cherng-Chyi Han ,  Lijie Guan ,  Joe Smyth ,  Moris Dovek

发明人： Cherng-Chyi Han ,  Lijie Guan ,  Joe Smyth ,  Moris Dovek

IPC分类号： G11B5/23

CPC分类号： G11B5/1278 ,  G11B5/3116 ,  G11B5/3146 ,  G11B5/315 ,  G11B5/3163

摘要： A PMR head comprises a substrate, a magnetic pole formed over the substrate, the pole having a pole tip having a cross-sectional tapered shape wherein the pole tip is surrounded by a write gap layer, an integrated shield comprising side shields on the substrate laterally surrounding the pole tip and a trailing shield overlying the pole tip and integral with the side shields.

摘要翻译： PMR头包括衬底，形成在衬底上的磁极，所述极具有具有横截面锥形形状的极尖，其中极尖由写间隙层围绕;集成屏蔽，包括在衬底上的侧屏蔽 围绕极尖和覆盖极尖并且与侧护罩成一体的后挡板。

公开(公告)号：US07979978B2

公开(公告)日：2011-07-19

申请号：US11728910

申请日：2007-03-27

申请人： Cherng-Chyi Han ,  Min Li ,  Fenglin Liu ,  Chen-Jung Chien

发明人： Cherng-Chyi Han ,  Min Li ,  Fenglin Liu ,  Chen-Jung Chien

IPC分类号： G11B5/187

CPC分类号： G11B5/1278 ,  G11B5/112 ,  G11B5/3146 ,  G11B5/315 ,  G11B5/3163 ,  G11B5/3169 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T428/1193

摘要： A process for forming the write pole of a PMR head is described. This write pole is symmetrically located relative to its side shields, This is accomplished, not through optical alignment, but by coating the pole with a uniform layer of non-magnetic material of a predetermined and precise thickness, followed by the formation of the shield layer around this.

摘要翻译： 描述了用于形成PMR头的写入极的过程。 该写入极相对于其侧屏对称地定位，这不是通过光学对准而是通过用预定和精确厚度的均匀的非磁性材料层涂覆极，然后形成屏蔽层 围绕这一点。

公开(公告)号：US20110146060A1

公开(公告)日：2011-06-23

申请号：US12932552

申请日：2011-02-28

申请人： Cherng-Chyi Han ,  Min Li ,  Fenglin Liu ,  Jiun-Ting Lee

发明人： Cherng-Chyi Han ,  Min Li ,  Fenglin Liu ,  Jiun-Ting Lee

IPC分类号： G11B5/127

CPC分类号： G11B5/3163 ,  G11B5/11 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/3146 ,  G11B5/315 ,  Y10T29/49032 ,  Y10T29/49039 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A perpendicular magnetic recording (PMR) head is fabricated with a pole tip shielded laterally by a separated pair of side shields and shielded from above by an upper shield. The side shields are formed by a RIE process using specific gases applied to a shield layer through a masking layer formed of material that has a slower etch rate than the shield material. A masking layer of Ta, Ru/Ta, TaN or Ti, formed on a shield layer of NiFe and using RIE gases of CH3OH, CO or NH3 or their combinations, produces the desired result. The differential in etch rates maintains the opening dimension within the mask and allows the formation of a wedge-shaped trench within the shield layer that separates the layer into two shields. The pole tip is then plated within the trench and, being aligned by the trench, acquires the wedge-shaped cross-section of the trench. An upper shield is then formed above the side shields and pole.

摘要翻译： 垂直磁记录（PMR）头被制造成具有通过分离的一对侧屏蔽横向屏蔽的极尖并且被上屏蔽从上面屏蔽。 侧面屏蔽是通过RIE工艺形成的，其使用通过掩模层施加到屏蔽层上的特定气体，该屏蔽层由具有比屏蔽材料更慢的蚀刻速率的材料形成。 形成在NiFe的屏蔽层上并使用CH 3 OH，CO或NH 3的RIE气体或其组合的Ta，Ru / Ta，TaN或Ti的掩蔽层产生期望的结果。 蚀刻速率的差异保持了掩模内的开口尺寸，并且允许在屏蔽层内形成将该层分成两个屏蔽层的楔形沟槽。 然后将磁极尖端电镀在沟槽内，并且通过沟槽对准，获得沟槽的楔形横截面。 然后在侧屏和极上方形成上屏蔽。

公开(公告)号：US07773341B2

公开(公告)日：2010-08-10

申请号：US11825034

申请日：2007-07-03

申请人： Kunliang Zhang ,  Min Zheng ,  Min Li ,  Chen-Jung Chien ,  Cherng-Chyi Han

发明人： Kunliang Zhang ,  Min Zheng ,  Min Li ,  Chen-Jung Chien ,  Cherng-Chyi Han

IPC分类号： G11B5/33

CPC分类号： G11B5/3116 ,  G11B5/1278

摘要： A laminated main pole layer is disclosed in which a non-AFC scheme is used to break the magnetic coupling between adjacent high moment layers and reduce remanence in a hard axis direction while maintaining a high magnetic moment and achieving low values for Hch, Hce, and Hk. An amorphous material layer with a thickness of 3 to 20 Angstroms and made of an oxide, nitride, or oxynitride of one or more of Hf, Zr, Ta, Al, Mg, Zn, or Si is inserted between adjacent high moment stacks. The laminated structure also includes an alignment layer below each high moment layer within each stack. In one embodiment, a Ru coupling layer is inserted between two high moment layers in each stack to introduce an AFC scheme. An uppermost Ru layer is used as a CMP stop layer. A post annealing process may be employed to further reduce the anisotropy field (Hk).

摘要翻译： 公开了一种层叠主极层，其中使用非AFC方案来破坏相邻的高力矩层之间的磁耦合，并且在保持高磁矩的同时降低硬轴方向的剩磁，并实现Hch，Hce和 Hk。 由Hf，Zr，Ta，Al，Mg，Zn或Si中的一种或多种的氧化物，氮化物或氧氮化物形成的厚度为3〜20埃的无定形材料层插入相邻的高强度叠层之间。 层叠结构还包括在每个堆叠内的每个高力矩层下面的对准层。 在一个实施例中，Ru耦合层插入每个堆叠中的两个高矩层之间以引入AFC方案。 使用最上层的Ru层作为CMP停止层。 可以采用后退火工艺来进一步降低各向异性场（Hk）。

公开(公告)号：US07701666B2

公开(公告)日：2010-04-20

申请号：US12001350

申请日：2007-12-11

申请人： Cherng-Chyi Han ,  Kenichi Takano

发明人： Cherng-Chyi Han ,  Kenichi Takano

IPC分类号： G11B5/17

CPC分类号： G11B5/1278 ,  G11B5/3116 ,  G11B5/3143 ,  G11B5/3163 ,  Y10T29/49041 ,  Y10T29/49044 ,  Y10T29/49048 ,  Y10T29/4906 ,  Y10T29/49062

摘要： A perpendicular magnetic recording (PMR) head with single or double coil layers has a small write shield stitched onto a main write shield. The stitched shield allows the main write pole to produce a vertical write field with sharp vertical gradients that is reduced on both sides of the write pole so that adjacent track erasures are eliminated. From a fabrication point of view, both the main pole and the stitched shield are defined and formed using a single photolithographic process, a trim mask and CMP lapping process so that the main shield can be stitched onto a self-aligned main pole and stitched shield.

摘要翻译： 具有单线圈或双线圈层的垂直磁记录（PMR）头具有缝合在主写屏蔽上的小写写屏蔽。 拼接屏蔽允许主写柱产生垂直写入场，其尖锐的垂直梯度在写入极的两侧减小，从而消除相邻的轨迹擦除。 从制造的角度来看，使用单一光刻工艺，修剪掩模和CMP研磨工艺来限定和形成主极和缝合屏蔽物，使得主屏蔽可以缝合到自对准的主极和缝合屏蔽 。