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    PIEZOELECTRIC MICRO ENERGY HARVESTER AND MANUFACTURING METHOD THEREOF
    1.
    发明申请
    PIEZOELECTRIC MICRO ENERGY HARVESTER AND MANUFACTURING METHOD THEREOF 有权
    压电微型收割机及其制造方法

    公开(公告)号：US20120153778A1

    公开(公告)日：2012-06-21

    申请号：US13316590

    申请日：2011-12-12

    申请人： Chi Hoon JUN ,  Sang Choon KO ,  Jong Tae MOON

    发明人： Chi Hoon JUN ,  Sang Choon KO ,  Jong Tae MOON

    IPC分类号： H02N2/18 ,  H01L41/22

    CPC分类号： H01L41/29 ,  H01L41/1136 ,  H01L41/31 ,  H01L41/316 ,  H01L41/317 ,  H01L41/318 ,  H02N2/188 ,  Y10T29/42

    摘要： Disclosed is a piezoelectric micro energy harvester and manufacturing method thereof, the method including: forming an insulation film on a substrate; patterning the insulation film and forming an electrode pad pattern, a center electrode pattern, and a side electrode pattern; forming an open cavity at an inside of the substrate for suspension of the center electrode pattern and the side electrode pattern; disposing a conductive film on the electrode pad pattern, the center electrode pattern, and the side electrode pattern and forming electrode pads, a center electrode, and a side electrode; and forming a piezoelectric film so as to cover a space between the center electrode and the side electrode and upper surfaces of the center electrode and the side electrode.

    摘要翻译： 公开了一种压电微能量收集器及其制造方法，该方法包括：在基板上形成绝缘膜; 图案化绝缘膜并形成电极焊盘图案，中心电极图案和侧面电极图案; 在所述基板的内部形成开放空腔，以悬浮所述中心电极图案和所述侧面电极图案; 在电极焊盘图形，中心电极图案和侧面电极图案上设置导电膜，形成电极焊盘，中心电极和侧面电极; 以及形成压电膜以覆盖中心电极和侧电极之间的空间以及中心电极和侧电极的上表面。

    HUMIDITY SENSOR AND METHOD OF MANUFACTURING THE SAME
    2.
    发明申请
    HUMIDITY SENSOR AND METHOD OF MANUFACTURING THE SAME 有权
    湿度传感器及其制造方法

    公开(公告)号：US20100147070A1

    公开(公告)日：2010-06-17

    申请号：US12617701

    申请日：2009-11-12

    申请人： Chi Hoon JUN ,  Sang Choon Ko ,  Chang Auck Choi ,  Byoung Gon Yu

    发明人： Chi Hoon JUN ,  Sang Choon Ko ,  Chang Auck Choi ,  Byoung Gon Yu

    IPC分类号： G01N19/10 ,  B05D5/12 ,  B44C1/22

    CPC分类号： G01N27/121

    摘要： Provided are a humidity sensor and a method of manufacturing the same. The humidity sensor has high sensitivity, quick response time, improved temperature characteristics, low hysteresis and excellent durability. Moreover, for the humidity sensor, a humidity sensitive layer may be formed of various materials. The humidity sensor may be manufactured in a small size on a large scale.The humidity sensor includes a substrate, an open cavity with an open upper portion formed to have a depth and a width in the substrate, a plurality of electrode pads formed on the substrate, a heater connected to one pad of the electrode pads at one end, and connected to another pad of the electrode pads at the other end to be suspended over the open cavity, a plurality of sensing electrodes formed on the same plane as the heater, and suspended over the open cavity to output a sensed signal to the electrode pads, a humidity sensitive layer formed on the heater and the sensing electrodes, suspended over the open cavity, and changed in characteristic according to the humidity, and an ambient temperature measurement part configured to measure the temperature around the humidity sensor, wherein the temperature is used as a reference temperature to control a heating temperature of the heater.

    摘要翻译： 提供了一种湿度传感器及其制造方法。 湿度传感器灵敏度高，响应时间快，温度特性好，滞后小，耐久性好。 此外，对于湿度传感器，湿度敏感层可以由各种材料形成。 湿度传感器可以大规模制造。 湿度传感器包括基底，具有形成为在基底中具有深度和宽度的敞开上部的开口腔，形成在基底上的多个电极垫，一端连接到电极垫的一个垫 并且在另一端连接到电极焊盘的另一焊盘以悬挂在开放空腔上，多个感测电极形成在与加热器相同的平面上，并且悬挂在开放空腔上以将感测到的信号输出到电极 衬垫，形成在加热器上的湿度敏感层和悬挂在开放空腔上的感测电极，并且根据湿度改变特性;以及环境温度测量部件，被配置为测量湿度传感器周围的温度，其中温度为 用作参考温度来控制加热器的加热温度。

    MICRO GAS SENSOR AND MANUFACTURING METHOD THEREOF
    3.
    发明申请
    MICRO GAS SENSOR AND MANUFACTURING METHOD THEREOF 有权
    微气体传感器及其制造方法

    公开(公告)号：US20090151429A1

    公开(公告)日：2009-06-18

    申请号：US12142695

    申请日：2008-06-19

    申请人： Chi Hoon JUN ,  Sang Choon KO ,  Moon Youn JUNG ,  Seon Hee PARK

    发明人： Chi Hoon JUN ,  Sang Choon KO ,  Moon Youn JUNG ,  Seon Hee PARK

    IPC分类号： G01N9/00 ,  H01L21/00

    CPC分类号： G01N33/0027 ,  G01N27/128

    摘要： Provided is a micro gas sensor including: a substrate; an open cavity and electrode pad separation grooves formed on the substrate; a plurality of electrode pads formed on an upper portion of the substrate and electrically insulated from each other by the electrode pad separation grooves; a micro heater connected to a plurality of the electrode pads by a bridge structure and suspended on the open cavity; a plurality of sensing electrodes formed on the same plane between the micro heater and a plurality of the electrode pads in a cantilever array and suspended on the open cavity; and a gas sensing film formed to be hung down between microelectrode finger spacings of a plurality of the sensing electrodes to represent changes in characteristics according to a gas concentration by contacting surfaces of the micro heater and a plurality of the sensing electrodes. Therefore, the micro gas sensor can have low power consumption, a rapid heating and cooling time, high durability, high sensitivity characteristics, and a capability of easily forming a gas sensing film by using various materials. In addition, the micro gas sensor can be miniaturized and mass-produced at low cost in a simple structure using only a single pattern mask.

    摘要翻译： 提供一种微气体传感器，包括：基板; 形成在所述基板上的开放空腔和电极焊盘分离槽; 多个电极焊盘，其形成在所述基板的上部并且由所述电极焊盘分离槽彼此电绝缘; 微加热器，其通过桥结构连接到多个电极焊盘并悬挂在所述开放空腔上; 多个感测电极，形成在微加热器和悬臂式悬臂之间的多个电极焊盘的同一平面上; 以及气体传感膜，其被形成为悬挂在多个感测电极的微电极指间隔之间，以通过接触微加热器的表面和多个感测电极来表示根据气体浓度的特性变化。 因此，微气体传感器可以具有低功耗，快速的加热和冷却时间，高耐久性，高灵敏度特性，以及通过使用各种材料容易地形成气体感测膜的能力。 此外，微型气体传感器可以在仅使用单一图案掩模的简单结构中以低成本小型化和批量生产。