公开(公告)号：US5216273A

公开(公告)日：1993-06-01

申请号：US762940

申请日：1991-09-19

申请人： Christian Doering ,  Thomas Grauer ,  Michael Mettner ,  Armin Schuelke ,  Jiri Marek ,  Hans-Peter Trah ,  Joerg Muchow ,  Martin Willmann

发明人： Christian Doering ,  Thomas Grauer ,  Michael Mettner ,  Armin Schuelke ,  Jiri Marek ,  Hans-Peter Trah ,  Joerg Muchow ,  Martin Willmann

IPC分类号： F16K31/02 ,  F15C5/00 ,  F16K99/00

CPC分类号： F16K99/0001 ,  F15C5/00 ,  F16K99/0015 ,  F16K99/0051 ,  F16K2099/0074 ,  F16K2099/008

摘要： A microwave is made of a stack of layers. A sculptured silicon substrate is held between two covers each consisting of one or more layers. The inlet and the outlet of the microvalve are formed by perforations in the respective covers. A central valve plate is sculptured out of the silicon substrate with surfaces respectively facing the two covers in the region of the inlet and outlet in a symmetrical fashion. The valve plate is connected to the outer frame portion of the silicon substrate by one or more silicon strips. The valve plate is also shaped as a closure member near the inlet and/or the outlet. Electrodes are provided on the covers opposite the valve plate so that the valve can be electrostatically actuated with the valve plate serving as counterelectrode for these electrodes on the covers.

摘要翻译： 微波由一叠层组成。 雕刻的硅衬底保持在两个盖之间，每个盖由一层或多层组成。 微型阀的入口和出口由相应盖子中的穿孔形成。 中心阀板从硅衬底雕刻出来，其表面分别以对称的方式在入口和出口的区域中面对两个盖。 阀板通过一个或多个硅带连接到硅衬底的外框部分。 阀板也在入口和/或出口附近形成为封闭构件。 电极设置在与阀板相对的盖上，使得阀可以被静电驱动，阀板用作反射电极，用于盖上的这些电极。

公开(公告)号：US5242533A

公开(公告)日：1993-09-07

申请号：US828033

申请日：1992-01-30

申请人： Hans-Peter Trah ,  Guenther Findler ,  Joerg Muchow

发明人： Hans-Peter Trah ,  Guenther Findler ,  Joerg Muchow

IPC分类号： H01L21/22 ,  H01L21/302 ,  H01L21/306 ,  H01L21/3063 ,  H01L21/3065 ,  H01L21/308 ,  H01L29/84

CPC分类号： H01L21/30604 ,  H01L21/3063 ,  H01L21/3081 ,  Y10S438/924

摘要： Processes are proposed for structuring monocrystalline semiconductor substrates provided with a basic doping, in particular silicon substrates with a (100) or (110) crystal orientation. In this process, at least one main surface of the semiconductor substrate is passivated by means of a structured masking layer, and in an etching step etching into the semiconductor substrate is done anisotropically through openings in the masking layer. It is proposed that as the masking layer (12), a structured, preferably monocrystalline, layer of the basic material of the semiconductor substrate be used, which is doped such that a pn junction is produced between the masking layer (12) and the semiconductor substrate (10), the junction being polarized in the depletion direction and serving as an etch stop. It is also proposed that the semiconductor substrate (10) be formed of a substrate (11) and at least one layer (13), applied thereon, with buried zones (16), with pn junctions being produced between the zones (16) and the substrate (11). Zones (16) that are electrically insulated from one another and the semiconductor substrate (10) are electrically bonded, so that the pn junctions are polarized in the depletion direction and serve as an etch stop for deep etching.

摘要翻译： 提出了用于构造设置有基本掺杂的单晶半导体衬底的工艺，特别是具有（100）或（110）晶体取向的硅衬底。 在该工艺中，半导体衬底的至少一个主表面通过结构化掩模层钝化，并且在蚀刻步骤中，通过掩模层中的开口各向异性地进行蚀刻到半导体衬底中。 提出，作为掩模层（12），使用半导体衬底的基本材料的结构化的，优选单晶层，其被掺杂以使得在掩模层（12）和半导体层（12）之间产生pn结 衬底（10），所述结在耗尽方向上极化并用作蚀刻停止。 还提出半导体衬底（10）由衬底（11）和其上施加有至少一个层（13）形成，具有掩埋区域（16），在区域（16）和 基板（11）。 彼此电绝缘的区域（16）和半导体衬底（10）电连接，使得pn结在耗尽方向上极化，并用作深刻蚀的蚀刻停止。

公开(公告)号：US20150036203A1

公开(公告)日：2015-02-05

申请号：US14364991

申请日：2012-10-23

申请人： Heiko Nitsche ,  Frederic Njikam Njimonzie ,  Wolfram Schock ,  Joerg Muchow ,  Helmut Grutzeck ,  Zoltan Lestyan

发明人： Heiko Nitsche ,  Frederic Njikam Njimonzie ,  Wolfram Schock ,  Joerg Muchow ,  Helmut Grutzeck ,  Zoltan Lestyan

IPC分类号： G02B26/08 ,  G02B26/10

CPC分类号： G02B26/0833 ,  B81B3/0043 ,  B81B2201/042 ,  B81B2203/0109 ,  B81B2203/0163 ,  G02B7/1821 ,  G02B26/101 ,  G02B26/105

摘要： A micromirror including a first layer having a first main extension plane, and a second layer having a second main extension plane, the first main extension plane and the second main extension plane being situated parallel to one another, the first layer and the second layer being sectionally connected to one another via at least one connection area, at least one spring element being implemented in the first layer, a movably suspended mirror plate being implemented in the second layer, the mirror plate having a mirror surface on a first side parallel to the main extension plane and being connected on an opposing second side via the connection area to an anchor of the spring element, a part of the spring element on the second side of the mirror plate being movably situated in relation to the mirror plate. A two-mirror system having such a micromirror is also provided.

摘要翻译： 一种微镜，包括具有第一主延伸面的第一层和具有第二主延伸面的第二层，第一主延伸面和第二主延伸面相互平行，第一层和第二层为 通过至少一个连接区域彼此分开连接，至少一个弹簧元件被实施在第一层中，可移动悬挂的镜板被实施在第二层中，镜板具有在平行于第二层的第一侧上的镜面 主延伸平面并经由连接区域连接到弹簧元件的锚固件的相对的第二侧上，反射镜板的第二侧上的弹簧元件的一部分相对于镜板可移动地定位。 还提供了具有这种微镜的双镜像系统。

公开(公告)号：US20120133242A1

公开(公告)日：2012-05-31

申请号：US13320712

申请日：2010-05-18

申请人： Frederic Njikam Njimonzie ,  Joerg Muchow ,  Zoltan Lestyan ,  Wolfram Schock

发明人： Frederic Njikam Njimonzie ,  Joerg Muchow ,  Zoltan Lestyan ,  Wolfram Schock

IPC分类号： H02N1/00 ,  H05K13/00

CPC分类号： G02B26/0841 ,  B81B3/0021 ,  B81B2201/033 ,  B81B2201/042 ,  Y10T29/49002

摘要： A micromechanical component has an outer stator electrode component and an outer actuator electrode component which is connected to a holder via at least one outer spring, an adjustable element being adjustable about a first rotation axis by application of a first voltage between the outer actuator electrode component and the outer stator electrode component, and having an inner stator electrode component and an inner actuator electrode component having a first web with at least one electrode finger disposed thereon, the adjustable element being adjustable about a second rotation axis by application of a second voltage between the at least one electrode finger of the inner actuator electrode component and the inner stator electrode component, and the inner actuator electrode component being connected to the outer actuator electrode component via an intermediate spring which is oriented along the second rotation axis. Also described is a production method for a micromechanical component.

摘要翻译： 微机械部件具有外部定子电极部件和外部致动器电极部件，其经由至少一个外部弹簧连接到保持器，可调节元件可围绕第一旋转轴线调节，通过在外部致动器电极部件 和外部定子电极部件，并且具有内部定子电极部件和内部致动器电极部件，所述内部致动器电极部件具有设置在其上的至少一个电极指的第一网状物，所述可调节元件可围绕第二旋转轴线调节， 内部致动器电极部件的至少一个电极指和内部定子电极部件，内部致动器电极部件通过沿着第二旋转轴线取向的中间弹簧连接到外部致动器电极部件。 还描述了一种用于微机械部件的制造方法。

公开(公告)号：US20110261428A1

公开(公告)日：2011-10-27

申请号：US12998538

申请日：2009-09-16

申请人： Stefan Pinter ,  Joerg Muchow ,  Joachim Fritz ,  Christoph Friese

发明人： Stefan Pinter ,  Joerg Muchow ,  Joachim Fritz ,  Christoph Friese

IPC分类号： G02B26/10 ,  G01J1/42

CPC分类号： G02B26/0833 ,  G02B27/01 ,  Y10S359/90

摘要： A micromechanical component has a light window; a mirror element adjustable with respect to the light window from a first position into at least one second position about at least one axis of rotation, an optical sensor having a detection surface designed to ascertain a light intensity on the detection surface and to provide a corresponding sensor signal. The light window, the mirror element in the first position and the detection surface are situated in relation to one another in such a way that a portion of a light beam reflected on the light window strikes the detection surface at least partially; and an evaluation unit designed to define, on the basis of the sensor signal, information regarding an instantaneous position of the mirror element and/or an instantaneous intensity of the deflected light beam.

摘要翻译： 微机械部件具有光窗口; 相对于所述光窗可从第一位置调节到关于至少一个旋转轴线的至少一个第二位置的反射镜元件;光学传感器，具有被设计成确定所述检测表面上的光强度的检测表面，并且提供对应的 传感器信号。 光窗，第一位置的反射镜元件和检测表面彼此相对设置，使得在光窗上反射的光束的一部分至少部分地撞击检测表面; 以及评估单元，其被设计为基于传感器信号来定义关于镜元件的瞬时位置和/或偏转光束的瞬时强度的信息。

公开(公告)号：US07918136B2

公开(公告)日：2011-04-05

申请号：US12158425

申请日：2006-11-21

申请人： Joerg Muchow ,  Hubert Benzel ,  Simon Armbruster ,  Christoph Schelling

发明人： Joerg Muchow ,  Hubert Benzel ,  Simon Armbruster ,  Christoph Schelling

IPC分类号： G01L9/06

CPC分类号： G01L9/0054 ,  G01L9/0055

摘要： A micromechanical sensor element (1) is provided, which has a sealed diaphragm (2) affixed in a frame (3), exhibits high sensitivity at high overload resistance and has a small size, and which allows a piezoresistive measured-value acquisition. To this end, at least one carrier element (4), which is connected to the frame (3) via at least one connection link (5), is formed in the region of the diaphragm (2). Furthermore, piezoresistors (6) for detecting a deformation are situated in the region of the connection link (5).

摘要翻译： 提供了一种微机械传感器元件（1），其具有固定在框架（3）中的密封隔膜（2），在高过载电阻下表现出高灵敏度并且具有小尺寸，并且允许压阻测量值采集。 为此，在隔膜（2）的区域中形成至少一个通过至少一个连接连杆（5）连接到框架（3）的载体元件（4）。 此外，用于检测变形的压电电阻（6）位于连接连杆（5）的区域中。

公开(公告)号：US20100201292A1

公开(公告)日：2010-08-12

申请号：US12698806

申请日：2010-02-02

申请人： Michael Krueger ,  Frederic Njikam Njimonzie ,  Joerg Muchow

发明人： Michael Krueger ,  Frederic Njikam Njimonzie ,  Joerg Muchow

IPC分类号： H02N11/00 ,  H05K13/00

CPC分类号： H02N1/006 ,  Y10T29/49226

摘要： An electrostatic drive having at least three intermediate frames, each two adjacent intermediate frames being connected to one another via at least one intermediate spring whose longitudinal directions lie on a first axis of rotation, and intermediate electrode fingers being situated on frame girders oriented parallel to the first axis of rotation of the intermediate frames, and having an outer frame that surrounds the intermediate frames and that is connected to the outermost intermediate frame via at least one outer spring whose longitudinal direction lies on a second axis of rotation that is oriented non-parallel to the first axis of rotation, and outer electrode fingers being situated on frame girders oriented parallel to the second axis of rotation of the outer frame and of the outermost intermediate frame of the at least three intermediate frames. In addition, a micromechanical component having this electrostatic drive, a method for operating such a micromechanical component, and methods for manufacturing the electrostatic drive and the micromechanical component are described.

摘要翻译： 具有至少三个中间框架的静电驱动器，每两个相邻的中间框架经由至少一个中间弹簧彼此连接，所述至少一个中间弹簧的纵向位于第一旋转轴线上，中间电极指位于平行于 中间框架的第一旋转轴线，并且具有环绕中间框架的外框架，并且其经由至少一个外部弹簧连接到最外侧中间框架，该外部弹簧的纵向位于不平行的第二旋转轴线上 并且外电极指位于平行于外框的第二旋转轴线和至少三个中间框架的最外侧中间框架的框架梁上。 此外，描述了具有这种静电驱动的微机械部件，用于操作这种微机械部件的方法，以及用于制造静电驱动器和微机械部件的方法。

公开(公告)号：US07667282B2

公开(公告)日：2010-02-23

申请号：US11187346

申请日：2005-07-21

申请人： Joerg Muchow ,  Torsten Ohms ,  Volkmar Senz ,  Guenther-Nino-Carlo Ullrich ,  Ronald Gampp

发明人： Joerg Muchow ,  Torsten Ohms ,  Volkmar Senz ,  Guenther-Nino-Carlo Ullrich ,  Ronald Gampp

IPC分类号： H01L29/78

CPC分类号： B81B3/0072 ,  B81B2203/0127

摘要： A method and a micromechanical component which counteract manufacturing-process-related mechanical stresses in the membrane are provided. The membrane is formed on a substrate in a layer system and spans a cavity in the substrate. The layer system includes at least one base layer formed on the substrate for circuit elements. At least one structured masking layer is also formed on the base layer for defining the circuit elements. The masking layer is structured in the area of the membrane in such a way that mechanical stresses acting in the area of the membrane under vacuum are at least partially compensated, the intrinsic stress of the masking layer being taken into account in the layout of the structuring.

摘要翻译： 提供了一种抵抗膜中与制造过程相关的机械应力的方法和微机械部件。 膜在层系统中的基底上形成并跨越衬底中的空腔。 层系统包括在用于电路元件的基板上形成的至少一个基底层。 至少一个结构化掩模层也形成在基底层上以限定电路元件。 屏蔽层被构造在膜的区域中，使得在真空下作用在膜的区域中的机械应力被至少部分地补偿，掩蔽层的固有应力在结构化的布局中被考虑 。

公开(公告)号：US20090084182A1

公开(公告)日：2009-04-02

申请号：US12158425

申请日：2006-11-21

申请人： Joerg Muchow ,  Hubert Benzel ,  Simon Armbruster ,  Christoph Schelling

发明人： Joerg Muchow ,  Hubert Benzel ,  Simon Armbruster ,  Christoph Schelling

IPC分类号： G01L9/06 ,  G01P15/09 ,  H04R17/02

CPC分类号： G01L9/0054 ,  G01L9/0055

摘要： A micromechanical sensor element (1) is provided, which has a sealed diaphragm (2) affixed in a frame (3), exhibits high sensitivity at high overload resistance and has a small size, and which allows a piezoresistive measured-value acquisition. To this end, at least one carrier element (4), which is connected to the frame (3) via at least one connection link (5), is formed in the region of the diaphragm (2). Furthermore, piezoresistors (6) for detecting a deformation are situated in the region of the connection link (5).

摘要翻译： 提供了一种微机械传感器元件（1），其具有固定在框架（3）中的密封隔膜（2），在高过载电阻下表现出高灵敏度并且具有小尺寸，并且允许压阻测量值采集。 为此，在隔膜（2）的区域中形成至少一个通过至少一个连接连杆（5）连接到框架（3）的载体元件（4）。 此外，用于检测变形的压电电阻（6）位于连接连杆（5）的区域中。

公开(公告)号：US10690906B2

公开(公告)日：2020-06-23

申请号：US13307749

申请日：2011-11-30

申请人： Stefan Pinter ,  Joerg Muchow ,  Frank Schatz

发明人： Stefan Pinter ,  Joerg Muchow ,  Frank Schatz

IPC分类号： G02B26/08 ,  H02K33/18 ,  H02K41/035 ,  G02B26/10

摘要： A magnetic actuator includes: a plate having a main plane of extent and mounted rotatably about at least one first axis of rotation which is parallel to the main plane of extent, the plate having at least one conductor loop parallel to the main plane of extent; a magnetic bracket situated beneath the plate and having a U-shaped magnetic flux conducting rail and a hard magnet whose magnetization is perpendicular to the U-shaped opening, the magnetic bracket and the plate being aligned with one another in such a way that the opening in the magnetic bracket points toward the main plane of extent of the plate, the U-shaped magnetic flux conducting rail having a main direction of extent parallel to the first axis of rotation, and the plate being deflectable about the at least one axis of rotation by energizing the at least one conductor loop.