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公开(公告)号:US12017908B2
公开(公告)日:2024-06-25
申请号:US17239006
申请日:2021-04-23
发明人: Ching-Kai Shen , Jung-Kuo Tu , Wei-Cheng Shen , Yi-Chuan Teng
CPC分类号: B81B3/0021 , B81C1/00047 , B81B2203/0127 , B81B2203/0315 , B81B2203/0376 , B81B2203/0384 , B81B2203/0392 , B81B2203/04 , B81B2207/07
摘要: A semiconductor structure includes a substrate, a MEMS substrate, a dielectric structure between the substrate and the MEMS substrate, a cavity in the dielectric structure, an electrode over the substrate, and a protrusion disposed in the cavity. The MEMS substrate includes a movable membrane, and the cavity is sealed by the movable membrane. A height of the protrusion is less than a depth of the cavity.
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公开(公告)号:US09164275B2
公开(公告)日:2015-10-20
申请号:US13486280
申请日:2012-06-01
IPC分类号: G02B26/00 , G09G5/00 , G09G5/10 , G02B26/02 , G02B26/04 , B81B7/02 , G09G3/34 , B32B3/00 , B81C1/00 , H02N1/00 , B81B3/00
CPC分类号: G02B26/02 , B32B3/00 , B81B3/0062 , B81B7/02 , B81B2201/047 , B81B2203/0307 , B81B2203/0376 , B81C1/00103 , G02B26/04 , G02F2203/12 , G09G3/34 , G09G5/10 , G09G2300/08 , H02N1/006
摘要: A display device includes: a plurality of pixels each having a shutter plate formed and an actuator portion, wherein the actuator portion has a beam portion connected to the shutter plate, a drive electrode causing the beam portion to bend to drive the shutter plate, a first supporting portion supporting the drive electrode and fixed on a substrate, and a second supporting portion supporting the beam portion and fixed on the substrate, at least one of the first supporting portion and the second supporting portion has a planar portion, and a recessed portion formed to be concaved from the planar portion and connected to the substrate, and the recessed portion has a vertically formed portion formed to be inclined substantially vertically from the planar portion, and a portion starting from the vertically formed portion and formed such that the inclination of the portion becomes gentle toward the substrate.
摘要翻译: 显示装置包括:多个像素,每个具有形成的快门板和致动器部分,其中致动器部分具有连接到快门板的光束部分,使光束部分弯曲以驱动快门板的驱动电极, 支撑驱动电极并固定在基板上的第一支撑部分和支撑梁部分并固定在基板上的第二支撑部分,第一支撑部分和第二支撑部分中的至少一个具有平坦部分,并且凹部 形成为从平面部分凹陷并连接到基板,并且凹部具有形成为从平面部分大致垂直地倾斜的垂直形成部分,以及从垂直形成部分开始的部分, 该部分对基板变得柔和。
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公开(公告)号:US20120306830A1
公开(公告)日:2012-12-06
申请号:US13486280
申请日:2012-06-01
IPC分类号: G09G5/00
CPC分类号: G02B26/02 , B32B3/00 , B81B3/0062 , B81B7/02 , B81B2201/047 , B81B2203/0307 , B81B2203/0376 , B81C1/00103 , G02B26/04 , G02F2203/12 , G09G3/34 , G09G5/10 , G09G2300/08 , H02N1/006
摘要: A display device includes: a plurality of pixels each having a shutter plate formed and an actuator portion, wherein the actuator portion has a beam portion connected to the shutter plate, a drive electrode causing the beam portion to bend to drive the shutter plate, a first supporting portion supporting the drive electrode and fixed on a substrate, and a second supporting portion supporting the beam portion and fixed on the substrate, at least one of the first supporting portion and the second supporting portion has a planar portion, and a recessed portion formed to be concaved from the planar portion and connected to the substrate, and the recessed portion has a vertically formed portion formed to be inclined substantially vertically from the planar portion, and a portion starting from the vertically formed portion and formed such that the inclination of the portion becomes gentle toward the substrate.
摘要翻译: 显示装置包括:多个像素,每个具有形成的快门板和致动器部分,其中致动器部分具有连接到快门板的光束部分,使光束部分弯曲以驱动快门板的驱动电极; 支撑驱动电极并固定在基板上的第一支撑部分和支撑梁部分并固定在基板上的第二支撑部分,第一支撑部分和第二支撑部分中的至少一个具有平坦部分,并且凹部 形成为从平面部分凹陷并连接到基板,并且凹部具有形成为从平面部分大致垂直地倾斜的垂直形成部分,以及从垂直形成部分开始的部分, 该部分对基板变得柔和。
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公开(公告)号:US20120264301A1
公开(公告)日:2012-10-18
申请号:US13232012
申请日:2011-09-14
申请人: Andrew B. Graham , Gary Yama , Gary O'Brien
发明人: Andrew B. Graham , Gary Yama , Gary O'Brien
IPC分类号: H01L21/306
CPC分类号: B81C1/00103 , B81B2203/0376 , B81C2201/0104
摘要: A method of shaping a substrate in one embodiment includes providing a first support layer, providing a first shaping pattern on the first support layer, providing a substrate on the first shaping pattern, performing a first chemical mechanical polishing (CMP) process on the substrate positioned on the first shaping pattern, and removing the once polished substrate from the first shaping pattern.
摘要翻译: 在一个实施例中,成形衬底的方法包括提供第一支撑层,在第一支撑层上提供第一成形图案,在第一成形图案上提供衬底,在定位的衬底上执行第一化学机械抛光(CMP)工艺 在第一成形图案上,并且从第一成形图案去除一次抛光的基板。
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5.
公开(公告)号:US07919362B2
公开(公告)日:2011-04-05
申请号:US12011333
申请日:2008-01-25
申请人: Sébastien Bolis
发明人: Sébastien Bolis
IPC分类号: H01L21/00
CPC分类号: B81C1/00333 , B81B2203/0376 , B81C2203/0136 , Y10T29/49002
摘要: A method for preparing a cover on a substrate in particular for the encapsulation of electronic, optical, optoelectronic components, of the electromechanical microsystems type, also known as Micro-Electro-Mechanical Systems (MEMS) or optoelectromechanical microsystems, also known as Micro-Opto-Elect-Mechanical systems (MOEMS), joined to the substrate.
摘要翻译: 用于在衬底上制备覆盖物的方法,特别是用于机电微系统类型的电子,光学,光电子部件的封装,也称为微机电系统(MEMS)或光电机械微系统,也称为微光电 - 机电系统(MOEMS),连接到基板。
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公开(公告)号:US20100066208A1
公开(公告)日:2010-03-18
申请号:US12372369
申请日:2009-02-17
申请人: Jaeyoung CHOI , Jongmin KIM , Sang Yoon LEE
发明人: Jaeyoung CHOI , Jongmin KIM , Sang Yoon LEE
IPC分类号: H02N2/18
CPC分类号: H02N2/18 , B81B2201/038 , B81B2203/0376 , B81C1/00103 , B81C2201/0115
摘要: Exemplary embodiments relate to an energy converting apparatus and a method for converting energy, which may convert energy of an applied signal into electrical energy. The energy converting apparatus may include at least one nanowire which resonates in response to the applied signal. The resonating nanowire may contact an electrode allowing a current to flow through the electrode and the nanowire by a Schottky contact between the electrode and the nanowire. The method for converting energy may include applying a signal to at least one nanowire to resonate the nanowire, and generating electrical energy through the contact between the resonating nanowire and an electrode.
摘要翻译: 示例性实施例涉及能量转换装置和用于转换能量的方法,其可以将施加的信号的能量转换成电能。 能量转换装置可以包括响应于所施加的信号而谐振的至少一个纳米线。 谐振纳米线可以接触允许电流通过电极和纳米线之间的肖特基接触流过电极和纳米线的电极。 用于转换能量的方法可以包括将信号施加到至少一个纳米线以共振纳米线,以及通过谐振纳米线和电极之间的接触产生电能。
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公开(公告)号:US06649078B2
公开(公告)日:2003-11-18
申请号:US09732004
申请日:2000-12-06
申请人: Conrad M. Yu
发明人: Conrad M. Yu
IPC分类号: C03C1500
CPC分类号: B81C1/00071 , B01L3/502707 , B01L2200/12 , B81B2201/058 , B81B2203/0376
摘要: Method and system of forming microfluidic capillaries in a variety of substrate materials. A first layer of a material such as silicon dioxide is applied to a channel etched in substrate. A second, sacrificial layer of a material such as a polymer is deposited on the first layer. A third layer which may be of the same material as the first layer is placed on the second layer. The sacrificial layer is removed to form a smooth walled capillary in the substrate.
摘要翻译: 在各种基材中形成微流体毛细管的方法和系统。 将诸如二氧化硅的材料的第一层施加到在衬底中蚀刻的沟道。 第二层,诸如聚合物的材料的牺牲层沉积在第一层上。 可以与第一层材料相同的第三层被放置在第二层上。 除去牺牲层以在衬底中形成平滑壁的毛细管。
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公开(公告)号:US20160129440A1
公开(公告)日:2016-05-12
申请号:US14935078
申请日:2015-11-06
申请人: The Charles Stark Draper Laboratory, Inc. , Brigham and Women's Hospital, Inc. , Massachusetts Institute of Technology
发明人: Jeffrey T. Borenstein , Eli J. Weinberg , James C. Hsiao , Ahmad S. Khalil , Malinda M. Tupper , Guillermo Garcia-Cardena , Peter Mack , Sarah L. Tao
CPC分类号: B01L3/502707 , B01L2200/12 , B01L2300/0861 , B01L2300/12 , B29C33/3857 , B29C59/02 , B29K2025/06 , B29L2031/753 , B33Y80/00 , B81B2201/058 , B81B2203/0338 , B81B2203/0376 , B81C1/00119 , B81C99/0085 , Y10T29/49126 , Y10T29/49155 , Y10T29/49156 , Y10T29/49401 , Y10T156/1039 , Y10T428/139
摘要: Microfluidic structures featuring substantially circular channels may be fabricated by embossing polymer sheets.
摘要翻译: 具有基本圆形通道的微流体结构可以通过压花聚合物片来制造。
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公开(公告)号:US09181082B2
公开(公告)日:2015-11-10
申请号:US13608938
申请日:2012-09-10
申请人: Jeffrey T. Borenstein , Eli J. Weinberg , James C. Hsiao , Ahmad S. Khalil , Malinda M. Tupper , Guillermo Garcia-Cardena , Peter Mack , Sarah L. Tao
发明人: Jeffrey T. Borenstein , Eli J. Weinberg , James C. Hsiao , Ahmad S. Khalil , Malinda M. Tupper , Guillermo Garcia-Cardena , Peter Mack , Sarah L. Tao
CPC分类号: B01L3/502707 , B01L2200/12 , B01L2300/0861 , B01L2300/12 , B29C33/3857 , B29C59/02 , B29K2025/06 , B29L2031/753 , B33Y80/00 , B81B2201/058 , B81B2203/0338 , B81B2203/0376 , B81C1/00119 , B81C99/0085 , Y10T29/49126 , Y10T29/49155 , Y10T29/49156 , Y10T29/49401 , Y10T156/1039 , Y10T428/139
摘要: Microfluidic structures featuring substantially circular channels may be fabricated by embossing polymer sheets.
摘要翻译: 具有基本圆形通道的微流体结构可以通过压花聚合物片来制造。
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公开(公告)号:US08524174B2
公开(公告)日:2013-09-03
申请号:US12593487
申请日:2008-02-29
申请人: Levent Yobas , Lih Feng Cheow
发明人: Levent Yobas , Lih Feng Cheow
IPC分类号: B01L3/00 , A61J1/06 , G01N1/10 , G01N1/18 , G01N33/00 , E03B7/07 , F03B11/02 , F15C1/00 , F15C1/06 , G01N35/00
CPC分类号: F16K99/0001 , B01L3/502707 , B01L3/50273 , B01L3/502738 , B01L3/502784 , B01L2200/0673 , B01L2300/0803 , B01L2300/0861 , B01L2300/0867 , B01L2300/087 , B01L2300/123 , B01L2400/0481 , B01L2400/0655 , B81B2201/058 , B81B2203/0376 , B81C1/00071 , B81C1/00103 , B81C2201/019 , F04B43/043 , F16K99/0026 , F16K99/0046 , F16K2099/0074 , F16K2099/0076 , F16K2099/0078 , F16K2099/0084 , Y10T137/206 , Y10T137/2224 , Y10T137/8593 , Y10T137/85954 , Y10T137/85978 , Y10T137/86107 , Y10T436/25375 , Y10T436/2575
摘要: A fluid cartridge, comprising a channel layer within which at least one circumferentially sealed fluid channel is formed, the channel layer comprising a substrate and an elastic layer fixedly arranged on the substrate, wherein the substrate has a rigidity being greater than that of the elastic layer, and wherein the at least one fluid channel is defined on at least one side thereof by the elastic layer.
摘要翻译: 一种流体盒,包括其中形成有至少一个周向密封的流体通道的沟道层,所述沟道层包括固定地布置在所述衬底上的衬底和弹性层,其中所述衬底具有大于所述弹性层的刚度 ,并且其中所述至少一个流体通道通过所述弹性层在其至少一个侧面上限定。
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