公开(公告)号：US09130337B1

公开(公告)日：2015-09-08

申请号：US14483082

申请日：2014-09-10

申请人： Cymer, LLC

发明人： Kevin O'Brien ,  Joshua Thornes ,  Michael Borrello

IPC分类号： H01S3/22 ,  H01S3/036 ,  H01S3/23 ,  H01S3/225

CPC分类号： H01S3/036 ,  H01S3/0014 ,  H01S3/104 ,  H01S3/13 ,  H01S3/134 ,  H01S3/22 ,  H01S3/2207 ,  H01S3/225 ,  H01S3/2251 ,  H01S3/2256 ,  H01S3/2308

摘要： A system and method for automatically performing gas optimization after a refill in the chambers of a two chamber gas discharge laser is disclosed. The laser is fired at low power, and the gas in the amplifier laser chamber bled if necessary until the discharge voltage meets or exceeds a minimum value without dropping the pressure below a minimum value. The power output is increased to a burst pattern that approximates the expected operation of the laser, and the amplifier chamber gas bled again if necessary until the voltage and an output energy meet or exceed minimum values, or until the pressure is less than a minimum value. The gas in the master oscillator chamber is then bled if necessary until the output energy of the master oscillator meets or falls below a maximum value, again without dropping the pressure in the chamber below the minimum value. While the pressure is adjusted, bandwidth is also measured and adjusted to stay within a desired range. Once the target values are provided, the process runs quickly without manual interaction.

摘要翻译： 公开了一种用于在二室气体放电激光器的腔室中重新填充之后自动执行气体优化的系统和方法。 激光器以低功率点火，并且放大器激光器室中的气体必要时排出，直到放电电压达到或超过最小值，而不将压力降低到最小值以下。 功率输出增加到近似于激光器的预期操作的脉冲串模式，并且如果需要，放大器腔室气体再次流出，直到电压和输出能量达到或超过最小值，或直到压力小于最小值 。 如果需要，主振荡器腔中的气体就会流出，直到主振荡器的输出能量达到或低于最大值，同时又不会使腔室内的压力下降到最小值以下。 在调节压力的同时，还测量和调整带宽以保持在期望的范围内。 一旦提供了目标值，该过程即可快速运行而无需手动交互。

公开(公告)号：US20170279240A1

公开(公告)日：2017-09-28

申请号：US15503996

申请日：2015-08-14

申请人： Cymer, LLC

发明人： Kevin O'Brien ,  Joshua Thornes ,  Michael Borrello

IPC分类号： H01S3/036

CPC分类号： H01S3/036 ,  H01S3/0014 ,  H01S3/104 ,  H01S3/13 ,  H01S3/134 ,  H01S3/22 ,  H01S3/2207 ,  H01S3/225 ,  H01S3/2251 ,  H01S3/2256 ,  H01S3/2308

摘要： A system and method for automatically performing gas optimization after a refill in the chambers of a two chamber gas discharge laser is disclosed. The laser is fired at low power, and the gas in the amplifier laser chamber bled if necessary until the discharge voltage meets or exceeds a minimum value without dropping the pressure below a minimum value. The power output is increased to a burst pattern that approximates the expected operation of the laser, and the amplifier chamber gas bled again if necessary until the voltage and an output energy meet or exceed minimum values, or until the pressure is less than a minimum value. The gas in the master oscillator chamber is then bled if necessary until the output energy of the master oscillator meets or falls below a maximum value, again without dropping the pressure in the chamber below the minimum value. While the pressure is adjusted, bandwidth is also measured and adjusted to stay within a desired range. Once the target values are provided, the process runs quickly without manual interaction.

公开(公告)号：US20160341602A1

公开(公告)日：2016-11-24

申请号：US14720207

申请日：2015-05-22

申请人： Cymer, LLC

发明人： Joshua Thornes

IPC分类号： G01J3/45 ,  G01J3/26

CPC分类号： G01J3/26 ,  G01J3/027 ,  G01J3/18 ,  G01J3/2803 ,  G01J9/00

摘要： A metrology system includes an optical frequency separation apparatus in the path of the pulsed light beam and configured to interact with the pulsed light beam and output a plurality of spatial components that correspond to the spectral components of the pulsed light beam; a plurality of sensing regions that receive and sense the output spatial components; and a control system connected to an output of each sensing region. The control system is configured to: measure, for each sensing region output, a property of the output spatial components from the optical frequency separation apparatus for one or more pulses; analyze the measured properties including averaging the measured properties to calculate an estimate of the spectral feature of the pulsed light beam; and determine whether the estimated spectral feature of the pulsed light beam is within an acceptable range of values of spectral features.

摘要翻译： 计量系统包括在脉冲光束的路径中的光学频率分离装置，并被配置为与脉冲光束相互作用并输出与脉冲光束的光谱分量相对应的多个空间分量; 多个感测区域，其接收和感测输出空间分量; 以及连接到每个感测区域的输出的控制系统。 所述控制系统被配置为：对于每个感测区域输出，针对一个或多个脉冲测量来自所述光学频率分离装置的输出空间分量的特性; 分析测量的性质，包括对测量的性质进行平均，以计算脉冲光束的光谱特征的估计; 并且确定脉冲光束的估计光谱特征是否在光谱特征值的可接受范围内。

公开(公告)号：US09831628B2

公开(公告)日：2017-11-28

申请号：US15503996

申请日：2015-08-14

申请人： Cymer, LLC

发明人： Kevin O'Brien ,  Joshua Thornes ,  Michael Borrello

IPC分类号： H01S3/22 ,  H01S3/036 ,  H01S3/00 ,  H01S3/104 ,  H01S3/13 ,  H01S3/134 ,  H01S3/225 ,  H01S3/23

CPC分类号： H01S3/036 ,  H01S3/0014 ,  H01S3/104 ,  H01S3/13 ,  H01S3/134 ,  H01S3/22 ,  H01S3/2207 ,  H01S3/225 ,  H01S3/2251 ,  H01S3/2256 ,  H01S3/2308

摘要： A system and method for automatically performing gas optimization after a refill in the chambers of a two chamber gas discharge laser is disclosed. The laser is fired at low power, and the gas in the amplifier laser chamber bled if necessary until the discharge voltage meets or exceeds a minimum value without dropping the pressure below a minimum value. The power output is increased to a burst pattern that approximates the expected operation of the laser, and the amplifier chamber gas bled again if necessary until the voltage and an output energy meet or exceed minimum values, or until the pressure is less than a minimum value. The gas in the master oscillator chamber is then bled if necessary until the output energy of the master oscillator meets or falls below a maximum value, again without dropping the pressure in the chamber below the minimum value. While the pressure is adjusted, bandwidth is also measured and adjusted to stay within a desired range. Once the target values are provided, the process runs quickly without manual interaction.

公开(公告)号：US09778108B2

公开(公告)日：2017-10-03

申请号：US14720207

申请日：2015-05-22

申请人： Cymer, LLC

发明人： Joshua Thornes

IPC分类号： G01J3/28 ,  G01J3/26 ,  G01J3/18 ,  G01J9/00 ,  G01J3/02

CPC分类号： G01J3/26 ,  G01J3/027 ,  G01J3/18 ,  G01J3/2803 ,  G01J9/00

摘要： A metrology system includes an optical frequency separation apparatus in the path of the pulsed light beam and configured to interact with the pulsed light beam and output a plurality of spatial components that correspond to the spectral components of the pulsed light beam; a plurality of sensing regions that receive and sense the output spatial components; and a control system connected to an output of each sensing region. The control system is configured to: measure, for each sensing region output, a property of the output spatial components from the optical frequency separation apparatus for one or more pulses; analyze the measured properties including averaging the measured properties to calculate an estimate of the spectral feature of the pulsed light beam; and determine whether the estimated spectral feature of the pulsed light beam is within an acceptable range of values of spectral features.