公开(公告)号：US20240291226A1

公开(公告)日：2024-08-29

申请号：US18571826

申请日：2022-06-02

申请人： Cymer, LLC

发明人： Siyu Chen ,  Spencer Ryan Williams

IPC分类号： H01S3/134 ,  G03F7/00 ,  G03F7/20 ,  H01S3/036 ,  H01S3/13 ,  H01S3/225 ,  H01S3/23

CPC分类号： H01S3/134 ,  H01S3/036 ,  H01S3/1305 ,  H01S3/225 ,  H01S3/2308 ,  H01S3/2366 ,  G03F7/2004 ,  G03F7/70025

摘要： A gas control apparatus includes a control system in communication with a gas discharge chamber. The control system includes a performance monitoring module configured to, during standard mode of operation of the gas discharge chamber and in between performance of gas recovery schemes on the gas discharge chamber that use a gas recovery setting: compare one or more performance parameters of the gas discharge chamber to respective thresholds; determine whether the gas recovery setting needs to be adjusted based on the comparison; and adjust the value for the gas recovery setting based on the determination. The control system includes a gas recovery module configured to perform the gas recovery scheme, the gas recovery module being configured to access the most recently adjusted value for the gas recovery setting from the performance monitoring module when performing the current gas recovery scheme.