摘要:
The transistor comprises a source (1) and a drain (2) separated by a lightly doped intermediate zone (I). The intermediate zone (I) forms first (3) and second (4) junctions respectively with the source (1) and with the drain (2). The transistor comprises a first gate (5) to generate an electric field in the intermediate zone (I), on the same side as the first junction (3), and a second gate (6) to generate an electric field in the intermediate zone (I), on the same side as the second junction (4).
摘要:
The transistor comprises a source and a drain separated by a lightly doped intermediate zone. The intermediate zone forms first and second junctions respectively with the source and with the drain. The transistor comprises a first gate to generate an electric field in the intermediate zone, on the same side as the first junction, and a second gate to generate an electric field in the intermediate zone, on the same side as the second junction.
摘要:
The three-dimensional integrated CMOS circuit is formed in a hybrid substrate. n-MOS type transistors are formed, at a bottom level, in a first semi-conducting layer of silicon having a (100) orientation, which layer may be tension strained. p-MOS transistors are formed, at a top level, in a preferably monocrystalline and compression strained second semi-conducting layer of germanium having a (110) orientation. The second semi-conducting layer is transferred onto a first block in which the n-MOS transistors were previously formed, and the p-MOS transistors are then formed.
摘要:
The three-dimensional integrated CMOS circuit is formed in a hybrid substrate. n-MOS type transistors are formed, at a bottom level, in a first semi-conducting layer of silicon having a (100) orientation, which layer may be tension strained. p-MOS transistors are formed, at a top level, in a preferably monocrystalline and compression strained second semi-conducting layer of germanium having a (110) orientation. The second semi-conducting layer is transferred onto a first block in which the n-MOS transistors were previously formed, and the p-MOS transistors are then formed.
摘要:
A method is provided for fabricating a thin layer element, in which a layer of a first material supports a pattern of a second material having a thickness of less than 15 nm, including a step of doping by implanting a chemical species over at least a portion of the layer-pattern assembly to stabilize the pattern on the layer.
摘要:
The present invention provides a method of manufacturing a single-electron transistor device (100). The method includes forming a thinned region (110) in a silicon substrate (105), the thinned region (110) offset by a non-selected region (115). The method also includes forming at least one quantum island (145) from the thinned region (110) by subjecting the thinned region (110) to an annealing process. The non-selected region (115) is aligned with the quantum island (145) and tunnel junctions (147) are formed between the quantum island (145) and the non-selected region (115). The present invention also includes a single-electron device (200), and a method of manufacturing an integrated circuit (300) that includes a single-electron device (305).
摘要:
A method (100) of forming fully-depleted (90) and partially-depleted (92) silicon-on-insulator (SOI) devices on a single die in an integrated circuit device (2) is disclosed using SOI starting material (4, 6, 8) and a selective epitaxial growth process (110).
摘要:
The present invention provides a method of manufacturing a single-electron transistor device (100). The method includes forming a thinned region (110) in a silicon substrate (105), the thinned region (110) offset by a non-selected region (115). The method also includes forming at least one quantum island (145) from the thinned region (110) by subjecting the thinned region (110) to an annealing process. The non-selected region (115) is aligned with the quantum island (145) and tunnel junctions (147) are formed between the quantum island (145) and the non-selected region (115). The present invention also includes a single-electron device (200), and a method of manufacturing an integrated circuit (300) that includes a single-electron device (305).
摘要:
A method is provided for fabricating a thin layer element, in which a layer of a first material supports a pattern of a second material having a thickness of less than 15 nm, including a step of doping by implanting a chemical species over at least a portion of the layer-pattern assembly to stabilize the pattern on the layer.