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公开(公告)号：US09791472B2
公开(公告)日：2017-10-17
申请号：US14911288
申请日：2014-09-01
Applicant: DENSO CORPORATION
Inventor： Minekazu Sakai , Kiyomasa Sugimoto
IPC: G01P15/125 , G01P15/18 , G01P15/08
CPC classification number: G01P15/125 , G01P15/18 , G01P2015/082
Abstract: In an acceleration sensor, a semiconductor layer is provided with a rod-shaped weight portion that passes through a center of a frame portion, extends in a second direction, and is connected to the frame portion through a first beam portion. A first-direction movable electrode and a second-direction movable electrode are provided on the weight portion. According to the above configuration, because a mass of the first- and second-direction movable electrodes can be applied to the vicinity of a center of the frame portion, and a rotational moment can be reduced. Thus, detection accuracy can be restrained from being reduced.
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公开(公告)号：US10132631B2
公开(公告)日：2018-11-20
申请号：US15123756
申请日：2015-04-17
Applicant: DENSO CORPORATION
Inventor： Minekazu Sakai , Naoki Yoshida , Kiyomasa Sugimoto
IPC: G01C19/5607 , G01C19/5614 , G01C19/5621 , G01C19/5628 , G01C19/5642 , H01L41/047 , H03H9/21 , H01L41/04 , H01L41/113
Abstract: An angular velocity sensor includes a first substrate having first and second surfaces, a vibrating member disposed on the first substrate and including a drive piece capable of vibrating along the first substrate, a second substrate disposed on the first surface side, a first drive piece control electrode, a first drive piece auxiliary electrode, and a first drive piece control circuit applying a voltage to the first drive piece auxiliary electrode. The first drive piece control circuit adjusts, based on the capacitance generated between the first drive piece control electrode and the first drive piece auxiliary electrode, the voltage to be applied to the first drive piece auxiliary electrode to maintain a constant distance between the first drive piece control electrode and the first drive piece auxiliary electrode.
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公开(公告)号：US10509051B2
公开(公告)日：2019-12-17
申请号：US15537665
申请日：2016-01-07
Applicant: DENSO CORPORATION
Inventor： Kiyomasa Sugimoto , Naoki Yoshida
Abstract: A physical quantity sensor includes: a detection element that outputs a sensor signal in accordance with a physical quantity; and a mount member. The detection element includes a sensor portion that has a first surface, includes a movable electrode, and a fixed electrode, and outputs the sensor signal, and a cap portion that has a first surface and is bonded with the sensor portion. Each of the first surface of the sensor portion and the first surface of the cap portion is mounted on the mount member, and the detection element detects the physical quantity. An electrode, which is connected with the movable electrode and connected with a circuit portion, and an electrode, which is connected with the fixed electrode and connected with the circuit portion, are provided on a side surface continued to the first surface of the cap portion.
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公开(公告)号：US10338092B2
公开(公告)日：2019-07-02
申请号：US15022954
申请日：2014-09-23
Applicant: DENSO CORPORATION
Inventor： Minekazu Sakai , Kiyomasa Sugimoto
Abstract: In a physical quantity sensor, a contact part that is directly and electrically connected to an external circuit is formed in a support substrate, and the support substrate is maintained at a predetermined potential through the contact part. With this configuration, the support substrate is maintained at the predetermined potential without disposing an electrode in the interior of the semiconductor layer. For that reason, a processing precision can be restrained from being reduced in forming the movable electrode, and hence a detection precision can be restrained from being reduced.
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公开(公告)号：US20150075285A1
公开(公告)日：2015-03-19
申请号：US14391479
申请日：2013-05-13
Applicant: DENSO CORPORATION
Inventor： Fumiyoshi Ariki , Minekazu Sakai , Kiyomasa Sugimoto
IPC: G01P15/125
CPC classification number: G01P15/125 , G01C19/5733 , G01C19/5769 , G01P15/18
Abstract: A sensor device includes a semiconductor substrate and multiple sensing portions that are placed on one side of the semiconductor substrate and convert a physical quantity into an electrical signal. The one side is parallel to a reference plane defined by an X-direction and a Y-direction perpendicular to each other. The semiconductor substrate has a center point that is both a geometric center and a center of mass. The semiconductor substrate is axisymmetric with respect to each of a first reference line passing through the center point and parallel to the X-direction and a second reference line passing through the center point and parallel to the Y-direction. Each of the sensing portions is axisymmetric with respect to each of the first reference line and the second reference line.
Abstract translation: 传感器装置包括半导体衬底和放置在半导体衬底的一侧上并将物理量转换为电信号的多个感测部分。 一侧平行于由彼此垂直的X方向和Y方向限定的参考平面。 半导体衬底具有几何中心和质心两者的中心点。 半导体衬底相对于通过中心点并平行于X方向的第一参考线和穿过中心点并平行于Y方向的第二参考线的每一个轴对称。 每个感测部分相对于第一参考线和第二参考线中的每一个轴对称。
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Patent Agency Ranking
公开(公告)号：US10393523B2
公开(公告)日：2019-08-27
申请号：US15307859
申请日：2015-06-11
Applicant: DENSO CORPORATION
Inventor： Kiyomasa Sugimoto , Naoki Yoshida , Minekazu Sakai , Nobuaki Kuzuya
IPC: G01C19/56 , G01C19/5607 , G01C19/5614 , G01C19/5628 , G01P21/00 , G01C25/00 , G01P15/125 , G01P15/08
Abstract: A physical quantity sensor includes a detection unit outputting a detection signal corresponding to a vibration of a vibrating element in an angular velocity sensor, and a self-diagnostic unit self-diagnosing a detection environment of an acceleration sensor and the angular velocity sensor on a basis of the detection signal outputted by the detection unit.
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公开(公告)号：US09972724B2
公开(公告)日：2018-05-15
申请号：US15536716
申请日：2016-01-07
Applicant: DENSO CORPORATION
Inventor： Kiyomasa Sugimoto
IPC: G01P15/125 , H01L29/84 , G01P15/18 , G01P15/08
CPC classification number: H01L29/84 , B81B2201/0235 , G01P15/125 , G01P15/18 , G01P2015/082 , G01P2015/0842
Abstract: An acceleration sensor includes: a semiconductor substrate that includes a support substrate and a semiconductor layer; a first-direction movable electrode; a second-direction movable electrode; a first-direction fixed electrode; a second-direction fixed electrode; and a support member. The acceleration sensor is configured to detect acceleration in a first direction in the surface direction of the semiconductor substrate and acceleration in a second direction orthogonal to the first direction and parallel to the surface direction. The first-direction movable electrode and the first-direction fixed electrode are provided such that an angle formed by an extended direction of the first-direction movable electrode and the first-direction fixed electrode and the second direction is sin−1(d/L)[deg], and the second-direction movable electrode and the second-direction fixed electrode are provided such that an angle formed by an extended direction of the second-direction movable electrode and the second-direction fixed electrode and the first direction is sin−1(d/L)[deg].
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公开(公告)号：US09739797B2
公开(公告)日：2017-08-22
申请号：US14391479
申请日：2013-05-13
Applicant: DENSO CORPORATION
Inventor： Fumiyoshi Ariki , Minekazu Sakai , Kiyomasa Sugimoto
IPC: G01P15/18 , G01P15/02 , G01P15/125 , G01C19/5733 , G01C19/5769
CPC classification number: G01P15/125 , G01C19/5733 , G01C19/5769 , G01P15/18
Abstract: A sensor device includes a semiconductor substrate and multiple sensing portions that are placed on one side of the semiconductor substrate and convert a physical quantity into an electrical signal. The one side is parallel to a reference plane defined by an X-direction and a Y-direction perpendicular to each other. The semiconductor substrate has a center point that is both a geometric center and a center of mass. The semiconductor substrate is axisymmetric with respect to each of a first reference line passing through the center point and parallel to the X-direction and a second reference line passing through the center point and parallel to the Y-direction. Each of the sensing portions is axisymmetric with respect to each of the first reference line and the second reference line.
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公开(公告)号：US10302670B2
公开(公告)日：2019-05-28
申请号：US15314600
申请日：2015-12-17
Applicant: DENSO CORPORATION
Inventor： Naoki Yoshida , Kiyomasa Sugimoto
IPC: G01P15/125 , G01P15/18 , H01G4/005 , G01P15/08 , H01G5/18
Abstract: An acceleration sensor includes: a sensor section having a cap section; a sensing section including movable and fixed electrodes and movable and fixed electrode connecting sections; a peripheral section. The cap section includes a movable electrode through-hole electrode in a movable electrode through hole and a fixed electrode through-hole electrode in a fixed electrode through hole. The cap section further includes a movable electrode pad connected to the movable electrode through-hole electrode and a circuit device and a fixed electrode pad connected to the fixed electrode through-hole electrode and the circuit device. The movable electrode pad and the fixed electrode pad are adjacent to each other in a region of the cap section overlapped with the peripheral section in the stacking direction.
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公开(公告)号：US10126323B2
公开(公告)日：2018-11-13
申请号：US14890937
申请日：2014-05-20
Applicant: DENSO CORPORATION
Inventor： Minekazu Sakai , Kiyomasa Sugimoto
IPC: G01P21/00 , G01P15/125 , G01P15/08
Abstract: A capacitive physical quantity sensor includes a first substrate, a movable electrode, a fixed electrode, a second substrate, a signal applying unit, a C-V conversion circuit, and an auxiliary electrode. The auxiliary electrode is disposed from a portion of the second substrate which faces the movable electrode to a portion of the second substrate which faces a displaceable region of the movable electrode. The signal applying unit applies a predetermined potential to the auxiliary electrode at the time of self-diagnosis, to thereby increase a density of electric force lines generated between the fixed electrode located in a direction of displacing the movable electrode and the movable electrode.
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