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公开(公告)号：US10126323B2
公开(公告)日：2018-11-13
申请号：US14890937
申请日：2014-05-20
Applicant: DENSO CORPORATION
Inventor： Minekazu Sakai , Kiyomasa Sugimoto
IPC: G01P21/00 , G01P15/125 , G01P15/08
Abstract: A capacitive physical quantity sensor includes a first substrate, a movable electrode, a fixed electrode, a second substrate, a signal applying unit, a C-V conversion circuit, and an auxiliary electrode. The auxiliary electrode is disposed from a portion of the second substrate which faces the movable electrode to a portion of the second substrate which faces a displaceable region of the movable electrode. The signal applying unit applies a predetermined potential to the auxiliary electrode at the time of self-diagnosis, to thereby increase a density of electric force lines generated between the fixed electrode located in a direction of displacing the movable electrode and the movable electrode.
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公开(公告)号：US09823266B2
公开(公告)日：2017-11-21
申请号：US14890642
申请日：2014-05-16
Applicant: DENSO CORPORATION
Inventor： Kiyomasa Sugimoto , Minekazu Sakai
IPC: G01P15/125 , G01P15/08 , B81C1/00
CPC classification number: G01P15/125 , B81B2201/0235 , B81B2203/051 , B81C1/00166 , G01P15/0802 , G01P2015/0814 , G01P2015/088
Abstract: A capacitive physical quantity sensor includes a first substrate, a movable electrode, a fixed electrode, and a second substrate. An auxiliary electrode is disposed on a portion of the second substrate to face the movable electrode and the auxiliary electrode has a facing area that faces the movable electrode. The facing area in a case where the movable electrode is displaced in one direction is different from the facing area in a case where the movable electrode is displaced in an opposite direction opposite to the one direction. The physical quantity is detected based on a capacitance, which is generated corresponding to the interval between the fixed electrode and the movable electrode, and a capacitance, which is generated corresponding to an interval between the facing area of the movable electrode and the auxiliary electrode.
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3.发明申请公开(公告)号：US20220232328A1
公开(公告)日：2022-07-21
申请号：US17716259
申请日：2022-04-08
Applicant: DENSO CORPORATION
Inventor： Kazuaki Mawatari , Minekazu Sakai , Yuuji Koyama
Abstract: A piezoelectric element includes: a vibration unit that outputs a pressure detection signal according to a pressure; a support member; and an improvement unit for improving a detection accuracy of the pressure detection signal. The vibration unit on the support member includes a piezoelectric film and an electrode film in a support region and vibration regions. Each vibration region has one end portion as a fixed end and an other end portion as a free end. A part of each vibration region on a one end portion side is a first region, and another part of each vibration region on an other end portion side is a second region. The electrode film is disposed in the first region.
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公开(公告)号：US10132631B2
公开(公告)日：2018-11-20
申请号：US15123756
申请日：2015-04-17
Applicant: DENSO CORPORATION
Inventor： Minekazu Sakai , Naoki Yoshida , Kiyomasa Sugimoto
IPC: G01C19/5607 , G01C19/5614 , G01C19/5621 , G01C19/5628 , G01C19/5642 , H01L41/047 , H03H9/21 , H01L41/04 , H01L41/113
Abstract: An angular velocity sensor includes a first substrate having first and second surfaces, a vibrating member disposed on the first substrate and including a drive piece capable of vibrating along the first substrate, a second substrate disposed on the first surface side, a first drive piece control electrode, a first drive piece auxiliary electrode, and a first drive piece control circuit applying a voltage to the first drive piece auxiliary electrode. The first drive piece control circuit adjusts, based on the capacitance generated between the first drive piece control electrode and the first drive piece auxiliary electrode, the voltage to be applied to the first drive piece auxiliary electrode to maintain a constant distance between the first drive piece control electrode and the first drive piece auxiliary electrode.
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公开(公告)号：US10393523B2
公开(公告)日：2019-08-27
申请号：US15307859
申请日：2015-06-11
Applicant: DENSO CORPORATION
Inventor： Kiyomasa Sugimoto , Naoki Yoshida , Minekazu Sakai , Nobuaki Kuzuya
IPC: G01C19/56 , G01C19/5607 , G01C19/5614 , G01C19/5628 , G01P21/00 , G01C25/00 , G01P15/125 , G01P15/08
Abstract: A physical quantity sensor includes a detection unit outputting a detection signal corresponding to a vibration of a vibrating element in an angular velocity sensor, and a self-diagnostic unit self-diagnosing a detection environment of an acceleration sensor and the angular velocity sensor on a basis of the detection signal outputted by the detection unit.
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Patent Agency Ranking
公开(公告)号：US09739797B2
公开(公告)日：2017-08-22
申请号：US14391479
申请日：2013-05-13
Applicant: DENSO CORPORATION
Inventor： Fumiyoshi Ariki , Minekazu Sakai , Kiyomasa Sugimoto
IPC: G01P15/18 , G01P15/02 , G01P15/125 , G01C19/5733 , G01C19/5769
CPC classification number: G01P15/125 , G01C19/5733 , G01C19/5769 , G01P15/18
Abstract: A sensor device includes a semiconductor substrate and multiple sensing portions that are placed on one side of the semiconductor substrate and convert a physical quantity into an electrical signal. The one side is parallel to a reference plane defined by an X-direction and a Y-direction perpendicular to each other. The semiconductor substrate has a center point that is both a geometric center and a center of mass. The semiconductor substrate is axisymmetric with respect to each of a first reference line passing through the center point and parallel to the X-direction and a second reference line passing through the center point and parallel to the Y-direction. Each of the sensing portions is axisymmetric with respect to each of the first reference line and the second reference line.
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公开(公告)号：US20140216156A1
公开(公告)日：2014-08-07
申请号：US14238942
申请日：2012-10-18
Applicant: DENSO CORPORATION
Inventor： Minekazu Sakai
IPC: G01P15/125
CPC classification number: G01P15/125 , G01P2015/0831
Abstract: An acceleration sensor includes a first and second anchors above a substrate, a first weight portion supported by the first anchor, a first electrode extended from the first weight portion, a second electrode supported by the second anchor, and a first beam connecting the first weight portion with the first anchor. The first weight portion includes a first left portion and a first right portion with different weights. The first beam includes a first connection beam connecting the first left portion with the first anchor, and a first support beam connecting the first connection beam with the first anchor. When acceleration is applied to the acceleration sensor, the first left portion and the first right portion are movable in opposite directions in a seesaw manner, in which the first anchor-provides a support point.
Abstract translation: 加速度传感器包括在基板上方的第一和第二锚固件，由第一锚固件支撑的第一重量部分，从第一重物部分延伸的第一电极，由第二锚固件支撑的第二电极和连接第一重物 部分与第一锚。 第一重量部分包括具有不同重量的第一左部分和第一右部分。 第一梁包括连接第一左侧部分和第一锚固件的第一连接梁以及将第一连接梁与第一锚固件连接的第一支撑梁。 当对加速度传感器施加加速度时，第一左侧部分和第一右侧部分以跷跷板方式在相反方向上可移动，其中第一锚定器提供支撑点。
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公开(公告)号：US10338092B2
公开(公告)日：2019-07-02
申请号：US15022954
申请日：2014-09-23
Applicant: DENSO CORPORATION
Inventor： Minekazu Sakai , Kiyomasa Sugimoto
Abstract: In a physical quantity sensor, a contact part that is directly and electrically connected to an external circuit is formed in a support substrate, and the support substrate is maintained at a predetermined potential through the contact part. With this configuration, the support substrate is maintained at the predetermined potential without disposing an electrode in the interior of the semiconductor layer. For that reason, a processing precision can be restrained from being reduced in forming the movable electrode, and hence a detection precision can be restrained from being reduced.
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公开(公告)号：US10001375B2
公开(公告)日：2018-06-19
申请号：US15203947
申请日：2016-07-07
Applicant: DENSO CORPORATION
Inventor： Takeru Kanazawa , Minekazu Sakai
IPC: G01C19/5719 , G01P15/125 , G01C19/574 , G01P15/08
CPC classification number: G01C19/5719 , G01C19/574 , G01C19/5783 , G01P15/125 , G01P2015/0814
Abstract: A sensor device has a gyro sensor and an acceleration sensor. The gyro sensor has a fixed base portion formed in a rectangular frame shape. The acceleration sensor is formed in an inside space of the fixed base portion of the rectangular frame shape. The gyro sensor is formed in an outside space formed between the fixed base portion and an outer frame portion of a sensor base plate. The gyro sensor and the acceleration sensor are formed in one chip. As a result, the sensor device can be made smaller in size.
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公开(公告)号：US20150075285A1
公开(公告)日：2015-03-19
申请号：US14391479
申请日：2013-05-13
Applicant: DENSO CORPORATION
Inventor： Fumiyoshi Ariki , Minekazu Sakai , Kiyomasa Sugimoto
IPC: G01P15/125
CPC classification number: G01P15/125 , G01C19/5733 , G01C19/5769 , G01P15/18
Abstract: A sensor device includes a semiconductor substrate and multiple sensing portions that are placed on one side of the semiconductor substrate and convert a physical quantity into an electrical signal. The one side is parallel to a reference plane defined by an X-direction and a Y-direction perpendicular to each other. The semiconductor substrate has a center point that is both a geometric center and a center of mass. The semiconductor substrate is axisymmetric with respect to each of a first reference line passing through the center point and parallel to the X-direction and a second reference line passing through the center point and parallel to the Y-direction. Each of the sensing portions is axisymmetric with respect to each of the first reference line and the second reference line.
Abstract translation: 传感器装置包括半导体衬底和放置在半导体衬底的一侧上并将物理量转换为电信号的多个感测部分。 一侧平行于由彼此垂直的X方向和Y方向限定的参考平面。 半导体衬底具有几何中心和质心两者的中心点。 半导体衬底相对于通过中心点并平行于X方向的第一参考线和穿过中心点并平行于Y方向的第二参考线的每一个轴对称。 每个感测部分相对于第一参考线和第二参考线中的每一个轴对称。
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