公开(公告)号：US20220384185A1

公开(公告)日：2022-12-01

申请号：US17750450

申请日：2022-05-23

Applicant: DENSO CORPORATION

Inventor： Kazufumi AOKI ,  Naoki MARUNO ,  Bahman SOLTANI ,  Yuya KATO ,  Kyohei KOTAKE ,  Shinji MUKOTA ,  Manabu TOMISAKA ,  Yasuo ISHIHARA ,  Shusaku NAKAZAWA ,  Tetsuji YAMAGUCHI

IPC: H01L21/02 ,  H01L21/304

Abstract: Provided is a surface processing apparatus and a surface processing method for a SiC substrate using anodization. The surface processing apparatus for the SiC substrate includes a surface processing pad and a power supply device. The surface processing pad includes a grinding wheel layer. The grinding wheel layer is disposed facing a workpiece surface of the SiC substrate. The power supply device passes a pulsed current having a period greater than 0.01 seconds and less than or equal to 20 seconds for anodizing the workpiece surface to be processed by the grinding wheel layer through the SiC substrate as an anode in the presence of an electrolyte.

公开(公告)号：US20150246402A1

公开(公告)日：2015-09-03

申请号：US14635400

申请日：2015-03-02

Applicant: DENSO CORPORATION

Inventor： Kouichirou YASUDA ,  Yasuji INOBE ,  Akira ITOH ,  Nobuhiko NAGAI ,  Tetsuji YAMAGUCHI ,  Hiroyuki OOTANI

IPC: B23H1/04

CPC classification number: B23H1/04 ,  B23H1/00 ,  B23H7/30 ,  B23H7/38 ,  B23H9/14 ,  B23H11/00

Abstract: In an electrical discharge machine that applies a voltage between an electrode and a workpiece to generate electrical discharge, an electrode holder holds the electrode. An ultrasonic motor has a fingertip that comes into contact with electrode holder, and moves electrode holder in a driving direction by moving the fingertip in an annular manner at an ultrasonic-range frequency. A roller bearing guides the movement of the electrode holder in the driving direction. A control circuit controls a position of the electrode in the driving direction by driving the ultrasonic motor, and moves the electrode holder based on an abnormality occurring in resistance against the movement of the electrode holder in the driving direction such that the electrode holder is moved by a movement distance equivalent to when the largest roller element among a plurality of roller elements of the roller bearing rolls and rotates once without sliding or longer.

Abstract translation: 在施加电极和工件之间的电压以产生放电的放电机中，电极夹持器保持电极。 超声波马达具有与电极保持器接触的指尖，并且以超声波范围的频率以环状方式移动指尖，沿着驱动方向移动电极保持器。 滚子轴承引导电极夹持器在驱动方向上的移动。 控制电路通过驱动超声波马达来控制电极在驱动方向上的位置，并且基于在驱动方向上抵抗电极保持器的移动的电阻的异常而使电极保持器移动，使得电极保持器被移动 相当于当滚子轴承的多个滚子元件中的最大滚子元件滚动并且一次旋转而不滑动或更长时的运动距离。

公开(公告)号：US20130217305A1

公开(公告)日：2013-08-22

申请号：US13770166

申请日：2013-02-19

Applicant: DENSO CORPORATION

Inventor： Kyohei KOUTAKE ,  Fumiyoshi KANOH ,  Tetsuji YAMAGUCHI ,  Sumitomo INOMATA

IPC: B24B7/22 ,  B24B49/14

CPC classification number: B24B7/22 ,  B24B7/228 ,  B24B49/14

Abstract: The present invention provides a method of working a high hardness material including the steps of heating the high hardness material, working the high hardness material by using a polishing tool, cooling the polishing tool at a position which is different from a worked part, and washing the polishing tool at a position which is different from the worked part.

Abstract translation: 本发明提供了一种加工高硬度材料的方法，包括以下步骤：加热高硬度材料，通过使用抛光工具加工高硬度材料，在与加工部分不同的位置冷却抛光工具，以及洗涤 该抛光工具位于与加工部分不同的位置处。