公开(公告)号：US20220384185A1

公开(公告)日：2022-12-01

申请号：US17750450

申请日：2022-05-23

Applicant: DENSO CORPORATION

Inventor： Kazufumi AOKI ,  Naoki MARUNO ,  Bahman SOLTANI ,  Yuya KATO ,  Kyohei KOTAKE ,  Shinji MUKOTA ,  Manabu TOMISAKA ,  Yasuo ISHIHARA ,  Shusaku NAKAZAWA ,  Tetsuji YAMAGUCHI

IPC: H01L21/02 ,  H01L21/304

Abstract: Provided is a surface processing apparatus and a surface processing method for a SiC substrate using anodization. The surface processing apparatus for the SiC substrate includes a surface processing pad and a power supply device. The surface processing pad includes a grinding wheel layer. The grinding wheel layer is disposed facing a workpiece surface of the SiC substrate. The power supply device passes a pulsed current having a period greater than 0.01 seconds and less than or equal to 20 seconds for anodizing the workpiece surface to be processed by the grinding wheel layer through the SiC substrate as an anode in the presence of an electrolyte.

公开(公告)号：US20160201211A1

公开(公告)日：2016-07-14

申请号：US14982048

申请日：2015-12-29

Applicant: DENSO CORPORATION

Inventor： Kenji OCHI ,  Toshihiro MIYAKE ,  Yasuo ISHIHARA

IPC: C25D9/02 ,  C25D3/22 ,  H01R13/03 ,  C25D3/56 ,  C25D7/00 ,  C25D5/00 ,  C25D3/12 ,  C25D3/38

CPC classification number: C25D9/02 ,  C25D3/12 ,  C25D3/22 ,  C25D3/38 ,  C25D3/56 ,  C25D5/00 ,  C25D7/00 ,  C25D15/00 ,  H01R13/03

Abstract: A composite material includes a metal material having conductivity and an oxidation inhibitor mixed with the metal material. The oxidation inhibitor forms a complex with the metal material to exert a resistance to oxidation of the metal material. For example, the composite material is formed on a surface of a base material as a plating material. As another example, the composite material is plated on a surface of an electrode.

Abstract translation: 复合材料包括具有导电性的金属材料和与金属材料混合的氧化抑制剂。 氧化抑制剂与金属材料形成复合物以发挥金属材料的氧化性。 例如，复合材料形成在作为电镀材料的基材的表面上。 作为另一示例，将复合材料镀在电极的表面上。