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1.发明授权Cleaning sheet, transfer member provided with cleaning function, and method for cleaning substrate processing apparatus 失效具有清洁功能的清洁片，转印部件以及清洗基板处理装置的方法公开(公告)号：US08524007B2
公开(公告)日：2013-09-03
申请号：US12977762
申请日：2010-12-23
申请人： Daisuke Uenda , Yukio Arimitsu , Yoshio Terada , Yasuhiro Amano , Akihisa Murata
发明人： Daisuke Uenda , Yukio Arimitsu , Yoshio Terada , Yasuhiro Amano , Akihisa Murata
CPC分类号： B08B1/00 , B08B7/0028 , H01L21/02096 , Y10T428/24355 , Y10T428/2457 , Y10T428/24612 , Y10T428/31
摘要： A cleaning sheet including a cleaning layer which has a microasperity shape having an arithmetic average roughness Ra of 0.05 μm or less and a maximum height Rz of 1.0 μm or less. Preferably, a substantial surface area of the cleaning layer per a flat surface of 1 mm2 is 150% or more of a substantial surface area of a silicon wafer mirror surface per a flat area of 1 mm2. The cleaning sheet may be provided on at least one surface of a transfer member so that the transfer member has a cleaning function. When the cleaning sheet or the transfer member having a cleaning function is transferred in a substrate processing apparatus in place of a substrate to be processed therein, the cleaning sheet contacts and cleans a site of the substrate processing apparatus.
摘要翻译： 一种清洁片，包括具有0.05微米以下的算术平均粗糙度Ra和1.0mum以下的最大高度Rz的微细度形状的清洁层。 优选地，每1mm平坦表面的清洁层的基本表面积为1mm 2的平坦区域的硅晶片镜表面的基本表面积的150％或更多。 清洁片可以设置在转印构件的至少一个表面上，使得转印构件具有清洁功能。 当清洁片或具有清洁功能的转印元件在衬底处理设备中转移以代替待处理衬底时，清洁片接触并清洁衬底处理设备的位置。
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2.发明申请CLEANING SHEET, TRANSFER MEMBER PROVIDED WITH CLEANING FUNCTION, AND METHOD FOR CLEANING SUBSTRATE PROCESSING APPARATUS 失效清洁片，具有清洁功能的转移构件以及清洁基板处理装置的方法公开(公告)号：US20090263153A1
公开(公告)日：2009-10-22
申请号：US12067235
申请日：2006-10-12
申请人： Daisuke Uenda , Yukio Arimitsu , Yoshio Terada , Yasuhiro Amano , Akihisa Murata
发明人： Daisuke Uenda , Yukio Arimitsu , Yoshio Terada , Yasuhiro Amano , Akihisa Murata
CPC分类号： B08B1/00 , B08B7/0028 , H01L21/02096 , Y10T428/24355 , Y10T428/2457 , Y10T428/24612 , Y10T428/31
摘要： There are provided a transfer member provided with a cleaning function, which have excellent foreign matter removing performance and transfer performance, and which can remove foreign matters having a predetermined particle diameter with especially high efficiency.The transfer member provided with a cleaning function includes a transfer member and the cleaning layer provided on at least one surface of the transfer member. The cleaning layer has a microasperity shape having an arithmetic average roughness Ra of 0.05 μm or less and a maximum height Rz of 1.0 μm or less. Preferably, a substantial surface area of the cleaning layer per a flat surface of 1 mm2 is 150% or more of a substantial surface area of a silicon wafer mirror surface per a flat area of 1 mm2.
摘要翻译： 提供具有清除功能的转印构件，其具有优异的异物去除性能和转印性能，并且可以以特别高的效率去除具有预定粒径的异物。 设置有清洁功能的传送构件包括传送构件和设置在传送构件的至少一个表面上的清洁层。 清洁层具有0.05微米以下的算术平均粗糙度Ra和1.0μm以下的最大高度Rz的微细度形状。 优选地，每1mm平坦表面的清洁层的基本表面积为1mm 2的平坦区域的硅晶片镜表面的基本表面积的150％或更多。
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公开(公告)号：US08475600B2
公开(公告)日：2013-07-02
申请号：US12067235
申请日：2006-10-12
申请人： Daisuke Uenda , Yukio Arimitsu , Yoshio Terada , Yasuhiro Amano , Akihisa Murata
发明人： Daisuke Uenda , Yukio Arimitsu , Yoshio Terada , Yasuhiro Amano , Akihisa Murata
CPC分类号： B08B1/00 , B08B7/0028 , H01L21/02096 , Y10T428/24355 , Y10T428/2457 , Y10T428/24612 , Y10T428/31
摘要： A cleaning sheet including a cleaning layer which has a microasperity shape having an arithmetic average roughness Ra of 0.05 μm or less and a maximum height Rz of 1.0 μm or less. Preferably, a substantial surface area of the cleaning layer per a flat surface of 1 mm2 is 150% or more of a substantial surface area of a silicon wafer mirror surface per a flat area of 1 mm2. The cleaning sheet may be provided on at least one surface of a transfer member so that the transfer member has a cleaning function. When the cleaning sheet or the transfer member having a cleaning function is transferred in a substrate processing apparatus in place of a substrate to be processed therein, the cleaning sheet contacts and cleans a site of the substrate processing apparatus.
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4.发明申请CLEANING SHEET, TRANSFER MEMBER PROVIDED WITH CLEANING FUNCTION, AND METHOD FOR CLEANING SUBSTRATE PROCESSING APPARATUS 失效清洁片，具有清洁功能的转移构件以及清洁基板处理装置的方法公开(公告)号：US20110088721A1
公开(公告)日：2011-04-21
申请号：US12977762
申请日：2010-12-23
申请人： Daisuke Uenda , Yukio Arimitsu , Yoshio Terada , Yasuhiro Amano , Akihisa Murata
发明人： Daisuke Uenda , Yukio Arimitsu , Yoshio Terada , Yasuhiro Amano , Akihisa Murata
IPC分类号： B08B1/00
CPC分类号： B08B1/00 , B08B7/0028 , H01L21/02096 , Y10T428/24355 , Y10T428/2457 , Y10T428/24612 , Y10T428/31
摘要： A cleaning sheet including a cleaning layer which has a microasperity shape having an arithmetic average roughness Ra of 0.05 μm or less and a maximum height Rz of 1.0 μm or less. Preferably, a substantial surface area of the cleaning layer per a flat surface of 1 mm2 is 150% or more of a substantial surface area of a silicon wafer mirror surface per a flat area of 1 mm2. The cleaning sheet may be provided on at least one surface of a transfer member so that the transfer member has a cleaning function. When the cleaning sheet or the transfer member having a cleaning function is transferred in a substrate processing apparatus in place of a substrate to be processed therein, the cleaning sheet contacts and cleans a site of the substrate processing apparatus.
摘要翻译： 一种清洁片，包括具有0.05微米以下的算术平均粗糙度Ra和1.0微米或更小的最大高度Rz的微细凹凸形状的清洁层。 优选地，每1mm平坦表面的清洁层的基本表面积为1mm 2的平坦区域的硅晶片镜表面的基本表面积的150％或更多。 清洁片可以设置在转印构件的至少一个表面上，使得转印构件具有清洁功能。 当清洁片或具有清洁功能的转印元件在衬底处理设备中转移以代替待处理衬底时，清洁片接触并清洁衬底处理设备的位置。
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5.发明授权公开(公告)号：US07811647B2
公开(公告)日：2010-10-12
申请号：US10592132
申请日：2005-02-18
申请人： Yukio Arimitsu , Akihisa Murata , Tomoko Kishimoto
发明人： Yukio Arimitsu , Akihisa Murata , Tomoko Kishimoto
CPC分类号： H01L21/6835 , C09J5/08 , C09J7/22 , C09J7/38 , C09J2203/326 , C09J2205/11 , C09J2205/302 , H01L2221/68331 , H01L2924/19041 , H01L2924/30105 , Y10T428/14 , Y10T428/1405 , Y10T428/1476 , Y10T428/28 , Y10T428/2809 , Y10T428/2813
摘要： Disclosed is a heat-peelable pressure-sensitive adhesive sheet that can prevent the deformation of a pressure-sensitive adhesive layer due to pressurization in a pressing process and can be easily peeled off from the processed article.The heat-peelable pressure-sensitive adhesive sheet includes a substrate, and a heat-expandable pressure-sensitive adhesive layer arranged on or above at least one side of the substrate and containing a foaming agent, in which the heat-expandable pressure-sensitive adhesive layer has a shear modulus (23° C.) in an unfoamed state of 7×106 Pa or more. The heat-expandable pressure-sensitive adhesive layer preferably has a shear modulus (95° C.) in an unfoamed state of less than 7×106 Pa. The foaming agent in the heat-expandable pressure-sensitive adhesive layer preferably has a foam initiating temperature higher than 80° C.
摘要翻译： 公开了一种可以防止由于加压过程中的加压引起的压敏粘合剂层变形并且可以容易地从处理物品剥离的热剥离性粘合片。 热剥离性粘合片包括基材和布置在基材的至少一面上或上方的热可膨胀压敏粘合剂层，并且含有发泡剂，其中热膨胀性压敏粘合剂 层的剪切模量（23℃）为7×10 6 Pa以上的未发泡状态。 热膨胀性压敏粘合剂层的未发泡状态的剪切弹性模量（95℃）优选为小于7×10 6 Pa。发泡剂优选具有泡沫起始 温度高于80℃
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公开(公告)号：US07067030B2
公开(公告)日：2006-06-27
申请号：US10400792
申请日：2003-03-28
CPC分类号： H01L21/6835 , C09J7/22 , C09J7/26 , C09J7/29 , C09J7/38 , C09J2201/36 , C09J2205/11 , C09J2400/243 , C09J2421/006 , C09J2423/006 , C09J2433/00 , C09J2467/006 , H01L21/6836 , H01L2221/68327 , H01L2221/68331 , H01L2924/19041 , Y10T156/1064 , Y10T156/1082 , Y10T156/1153 , Y10T428/249984 , Y10T428/28 , Y10T428/2839 , Y10T428/2848 , Y10T428/2861
摘要： A heat-peelable adhesive sheet which comprises a substrate and, formed on at least one side thereof, a heat-expandable layer containing heat-expandable microspheres and an adhesive layer comprising an adhesive substance and in which the substrate has heat resistance and stretchability can be used to cut an adherend so as to form and secure a sufficient space between the resultant cut pieces and can withstand a heat treatment for expanding the heat-expandable layer. Consequently, the adhesive sheet can heighten the operating efficiency and working efficiency in the step of separating and recovering the cut pieces.
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7.发明申请公开(公告)号：US20080019078A1
公开(公告)日：2008-01-24
申请号：US10592132
申请日：2005-02-18
申请人： Yukio Arimitsu , Akihisa Murata , Tomoko Kishimoto
发明人： Yukio Arimitsu , Akihisa Murata , Tomoko Kishimoto
CPC分类号： H01L21/6835 , C09J5/08 , C09J7/22 , C09J7/38 , C09J2203/326 , C09J2205/11 , C09J2205/302 , H01L2221/68331 , H01L2924/19041 , H01L2924/30105 , Y10T428/14 , Y10T428/1405 , Y10T428/1476 , Y10T428/28 , Y10T428/2809 , Y10T428/2813
摘要： Disclosed is a heat-peelable pressure-sensitive adhesive sheet that can prevent the deformation of a pressure-sensitive adhesive layer due to pressurization in a pressing process and can be easily peeled off from the processed article. The heat-peelable pressure-sensitive adhesive sheet includes a substrate, and a heat-expandable pressure-sensitive adhesive layer arranged on or above at least one side of the substrate and containing a foaming agent, in which the heat-expandable pressure-sensitive adhesive layer has a shear modulus (23° C.) in an unfoamed state of 7×106 Pa or more. The heat-expandable pressure-sensitive adhesive layer preferably has a shear modulus (95° C.) in an unfoamed state of less than 7×106 Pa. The foaming agent in the heat-expandable pressure-sensitive adhesive layer preferably has a foam initiating temperature higher than 80° C.
摘要翻译： 公开了一种可以防止由于加压过程中的加压引起的压敏粘合剂层变形并且可以容易地从处理物品剥离的热剥离性粘合片。 热剥离性粘合片包括基材和布置在基材的至少一面上或上方的热可膨胀压敏粘合剂层，并且含有发泡剂，其中热膨胀性压敏粘合剂 在7×10 -6 Pa以上的未发泡状态下具有剪切模量（23℃）。 热可膨胀压敏粘合剂层优选具有小于7×10 -6 Pa的未发泡状态的剪切模量（95℃）。 热膨胀性压敏粘合剂层中的发泡剂优选具有高于80℃的泡沫起始温度。
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公开(公告)号：US08409884B2
公开(公告)日：2013-04-02
申请号：US13003269
申请日：2009-06-30
CPC分类号： H01L51/50 , C08K7/22 , C09J5/06 , C09J7/38 , C09J2201/128 , C09J2205/102 , C09J2205/11 , C09J2205/302 , H01L51/001 , H01L51/0096 , H01L2227/326 , Y10T156/1163 , Y10T156/1195
摘要： The process for producing an organic EL panel according to the present invention is a process for producing an organic electroluminescent panel by forming an organic electroluminescent element on an ultrathin glass plate by vacuum deposition method, including forming electrodes on the ultrathin glass plate, by temporarily fixing the ultrathin glass plate to a supporting plate via a double-sided adhesive tape having a thermal release adhesive layer formed at least on one face of the base material layer, containing heat-expandable microspheres that start expansion and/or foaming at temperature higher than the vacuum deposition temperature.
摘要翻译： 根据本发明的有机EL面板的制造方法是通过真空蒸镀法在超薄玻璃板上形成有机电致发光元件来制造有机电致发光面板的方法，包括在超薄玻璃板上形成电极，通过暂时固定 超薄玻璃板通过双面胶带连接到支撑板上，该双面胶带具有形成在基材层的至少一个表面上的热分解粘合剂层，该热剥离粘合剂层含有在高于所述基材层的温度下开始膨胀和/或发泡的热膨胀性微球 真空沉积温度。
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公开(公告)号：US20110124136A1
公开(公告)日：2011-05-26
申请号：US13003269
申请日：2009-06-30
IPC分类号： H01L33/00
CPC分类号： H01L51/50 , C08K7/22 , C09J5/06 , C09J7/38 , C09J2201/128 , C09J2205/102 , C09J2205/11 , C09J2205/302 , H01L51/001 , H01L51/0096 , H01L2227/326 , Y10T156/1163 , Y10T156/1195
摘要： Provided is a process for producing an organic EL panel by using an ultrathin glass plate, in which the ultrathin glass plate is not “fractured” or “cut” in the production process, the organic EL element is formed reliably when formed by vacuum deposition, and recovered without damage after the production process, and there is no need for installing an additional step of cleaning the rear face of the ultrathin glass plate. The process for producing an organic EL panel according to the present invention is a process for producing an organic electroluminescent panel by forming an organic electroluminescent element on an ultrathin glass plate by vacuum deposition method, comprising forming electrodes on the ultrathin glass plate, by temporarily fixing the ultrathin glass plate to a supporting plate via a double-sided adhesive tape having a thermal release adhesive layer formed at least on one face of the base material layer, containing heat-expandable microspheres that start expansion and/or foaming at temperature higher than the vacuum deposition temperature.
摘要翻译： 本发明提供一种通过使用超薄玻璃板在生产过程中不“断裂”或“切割”的超薄玻璃板制造有机EL面板的方法，当通过真空沉积形成时可靠地形成有机EL元件， 并且在生产过程之后没有损坏地恢复，并且不需要安装清洁超薄玻璃板的后表面的附加步骤。 根据本发明的有机EL面板的制造方法是通过真空蒸镀法在超薄玻璃板上形成有机电致发光元件来制造有机电致发光面板的方法，其特征在于，在所述超薄玻璃板上，通过临时固定 超薄玻璃板通过双面胶带连接到支撑板上，该双面胶带具有形成在基材层的至少一个表面上的热分解粘合剂层，该热剥离粘合剂层含有在高于所述基材层的温度下开始膨胀和/或发泡的热膨胀性微球 真空沉积温度。
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公开(公告)号：US07718257B2
公开(公告)日：2010-05-18
申请号：US10415948
申请日：2001-11-07
CPC分类号： C09J7/22 , C09J7/38 , C09J2201/36 , C09J2203/326 , C09J2205/11 , Y10T428/14 , Y10T428/1471 , Y10T428/1476 , Y10T428/249982 , Y10T428/28 , Y10T428/2813 , Y10T428/2848 , Y10T428/2852
摘要： A heat-peelable pressure-sensitive adhesive sheet comprises: a base material; and a thermo-expandable pressure-sensitive adhesive layer containing thermo-expandable microspheres, the thermo-expandable pressure-sensitive adhesive layer having a surface to be adhered to an adherend, wherein the surface of the thermo-expandable pressure-sensitive adhesive layer before subjecting to heating has a centerline average roughness of greater than 0.4 μm, and has a convex portion resulting from the thermo-expandable microspheres.
摘要翻译： 一种可热剥离的压敏粘合片包括：基材; 以及含有热可膨胀性微球的热可膨胀压敏粘合剂层，所述热可膨胀压敏粘合剂层具有粘合到被粘物的表面，其中所述热可膨胀压敏粘合剂层的表面经受 加热时的中心线平均粗糙度大于0.4μm，并具有由热膨胀性微球形成的凸部。
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