公开(公告)号：US08674489B2

公开(公告)日：2014-03-18

申请号：US12912203

申请日：2010-10-26

申请人： Sebastien Bolis ,  Fabrice Jacquet ,  Damien Saint-Patrice

发明人： Sebastien Bolis ,  Fabrice Jacquet ,  Damien Saint-Patrice

IPC分类号： H01L23/02

CPC分类号： B81B7/0006 ,  B81B2203/0353 ,  B81B2207/012 ,  B81B2207/07 ,  H01L23/481 ,  H01L23/5389 ,  H01L27/14618 ,  H01L27/14627 ,  H01L2924/0002 ,  H05K1/0219 ,  H05K1/183 ,  H05K3/403 ,  H05K3/4697 ,  H05K2201/09172 ,  H05K2201/09181 ,  H05K2201/09645 ,  H01L2924/00012 ,  H01L2924/00

摘要： An interconnect device is disclosed including a support in which at least one hole is formed, the hole having walls forming a closed contour and being formed by a cavity and one or several slots communicating with the cavity. The slots extend in a direction making a non-zero angle with the main plane of the support. Several conducting elements are positioned on at least one wall of the hole and pass through the hole. The conducting elements are each intended to connect conducting areas to each other that are situated on either side of the support. At least one of the slots separates two of the conducting elements from each other.

摘要翻译： 公开了一种互连装置，其包括其中形成有至少一个孔的支撑件，所述孔具有形成封闭轮廓的壁，并且由空腔和与腔体连通的一个或多个槽形成。 狭槽在与支撑件的主平面成非零角度的方向上延伸。 几个导电元件位于孔的至少一个壁上并穿过该孔。 导电元件各自旨在将位于支撑体两侧的导电区域彼此连接。 至少一个槽将两个导电元件彼此分开。

公开(公告)号：US20120031874A1

公开(公告)日：2012-02-09

申请号：US13264170

申请日：2010-04-20

申请人： Damien Saint-Patrice ,  Sebastien Bolis ,  Fabrice Jacquet

发明人： Damien Saint-Patrice ,  Sebastien Bolis ,  Fabrice Jacquet

IPC分类号： C23F1/02 ,  H05K13/00

CPC分类号： B81C1/00047 ,  B81B2203/0315

摘要： A method for making a micro-device including at least one receiving site for components, formed in a thickness of a substrate. The method includes: a) making in at least one first substrate adhesively bonded to a second substrate via a discontinuous adhesive bonding interface, at least one first trench around at least one sacrificial block of the first substrate, by etching the first substrate so as to expose the adhesive bonding interface; and b) removing the sacrificial block so as to make at least one first cavity in the first substrate.

摘要翻译： 一种制造微型器件的方法，所述微器件包括形成在衬底厚度中的用于部件的至少一个接收部位。 该方法包括：a）通过蚀刻第一基底，通过不连续的粘合界面，至少一个第一基底的至少一个牺牲块周围的至少一个第一沟槽，在至少一个第一基底上制造粘合的第二基底， 暴露粘合界面; 以及b）去除所述牺牲块，以便在所述第一基板中形成至少一个第一空腔。

公开(公告)号：US09003654B2

公开(公告)日：2015-04-14

申请号：US13039902

申请日：2011-03-03

申请人： Fabrice Jacquet ,  Sebastien Bolis ,  Damien Saint-Patrice

发明人： Fabrice Jacquet ,  Sebastien Bolis ,  Damien Saint-Patrice

IPC分类号： H01K3/10 ,  H01L21/768 ,  H01L21/683 ,  H01L23/00

CPC分类号： H01L21/76898 ,  H01L21/6835 ,  H01L24/24 ,  H01L24/32 ,  H01L24/82 ,  H01L2221/68372 ,  H01L2224/0556 ,  H01L2224/24011 ,  H01L2224/2405 ,  H01L2224/24051 ,  H01L2224/245 ,  H01L2224/32057 ,  H01L2224/82101 ,  H01L2224/82399 ,  H01L2224/82815 ,  H01L2224/82896 ,  H01L2224/9202 ,  H01L2224/92144 ,  H01L2224/92244 ,  H01L2924/0002 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01047 ,  H01L2924/01057 ,  H01L2924/01058 ,  H01L2924/01061 ,  H01L2924/01079 ,  H01L2924/01082 ,  Y10T29/49155 ,  Y10T29/49165 ,  H01L2924/014 ,  H01L2224/05552

摘要： A method for metalizing at least one blind via formed in at least one substrate, including: a) arranging at least one solid portion of electrically conductive material in the blind via, b) performing a thermal treatment of the solid portion of electrically conductive material, making it melt in the blind via, cooling the electrically conductive material, solidifying it in the blind via, and wherein, before carrying out step a), at least part of the walls of the blind via is covered with a material able to prevent wetting of said part of the walls of the blind via by the melted electrically conductive material obtained during the performance of step b), the solidified electrically conductive material obtained after carrying out step c) being able not to be secured to said non-wetting part of the walls of the blind via.

摘要翻译： 一种用于金属化在至少一个衬底中形成的至少一个盲孔的方法，包括：a）在所述盲孔中布置导电材料的至少一个实心部分，b）对导电材料的实心部分进行热处理， 使其在盲孔中熔化，冷却导电材料，将其固化在盲孔中，并且其中，在进行步骤a）之前，盲孔通孔的至少一部分壁被能够防止润湿的材料覆盖 通过在步骤b）执行期间获得的熔融导电材料的盲孔的所述部分壁的所述部分，在执行步骤c）之后获得的凝固的导电材料不能固定到所述非润湿部分 盲人通道的墙壁。

公开(公告)号：US08470184B2

公开(公告)日：2013-06-25

申请号：US13264170

申请日：2010-04-20

申请人： Damien Saint-Patrice ,  Sebastien Bolis ,  Fabrice Jacquet

发明人： Damien Saint-Patrice ,  Sebastien Bolis ,  Fabrice Jacquet

IPC分类号： C23F1/00

CPC分类号： B81C1/00047 ,  B81B2203/0315

摘要： A method for making a micro-device including at least one receiving site for components, formed in a thickness of a substrate. The method includes: a) making in at least one first substrate adhesively bonded to a second substrate via a discontinuous adhesive bonding interface, at least one first trench around at least one sacrificial block of the first substrate, by etching the first substrate so as to expose the adhesive bonding interface; and b) removing the sacrificial block so as to make at least one first cavity in the first substrate.

摘要翻译： 一种制造微型器件的方法，所述微器件包括形成在衬底厚度中的用于部件的至少一个接收部位。 该方法包括：a）通过蚀刻第一基底，通过不连续的粘合界面，至少一个第一基底的至少一个牺牲块周围的至少一个第一沟槽，在至少一个第一基底上制造粘合的第二基底， 暴露粘合界面; 以及b）去除所述牺牲块，以便在所述第一基板中形成至少一个第一空腔。

公开(公告)号：US08482130B2

公开(公告)日：2013-07-09

申请号：US13031917

申请日：2011-02-22

申请人： Damien Saint-Patrice ,  Sebastien Bolis ,  Fabrice Jacquet

发明人： Damien Saint-Patrice ,  Sebastien Bolis ,  Fabrice Jacquet

IPC分类号： H01L23/48 ,  H01L21/768

CPC分类号： H01L21/76898 ,  H01L23/481 ,  H01L24/24 ,  H01L24/92 ,  H01L2224/24226 ,  H01L2224/24992 ,  H01L2224/24997 ,  H01L2224/30151 ,  H01L2224/32225 ,  H01L2224/82 ,  H01L2224/8203 ,  H01L2224/82101 ,  H01L2224/83 ,  H01L2224/83192 ,  H01L2224/8385 ,  H01L2224/9202 ,  H01L2924/00014 ,  H01L2924/00

摘要： An interconnect structure including: at least one first substrate, whereof at least one first face is made integral with at least one face of at least one second substrate, at least one blind via passing through the first substrate and emerging at the first face of the first substrate and at a second face, opposite the first face, of the first substrate, at least one electric contact arranged against said face of the second substrate and opposite the blind via, and/or against the first face and/or against the second face of the first substrate, at least one channel putting the blind via in communication with an environment outside the interconnect structure and/or with at least one cavity formed in the interconnect structure, and extending substantially parallel to one of said faces of the first or second substrate.

摘要翻译： 一种互连结构，包括：至少一个第一基底，其中至少一个第一面与至少一个第二基底的至少一个表面整体形成，至少一个盲孔通过第一基底并出现在第一基底的第一面上 第一基板，并且在与第一基板相对的第二面处的第一基板的至少一个电触点，布置成抵靠第二基板的所述表面并与盲孔相对和/或抵靠第一表面和/或抵靠第二基板的第二表面 第一基板的表面，至少一个通道，其将盲孔通孔与互连结构外部的环境和/或形成在互连结构中的至少一个空腔连通，并且基本平行于第一或第二基板的一个 第二基板。

公开(公告)号：US08542445B2

公开(公告)日：2013-09-24

申请号：US12669323

申请日：2008-07-17

申请人： Sebastien Bolis

发明人： Sebastien Bolis

IPC分类号： G02B1/06 ,  G02B3/12

CPC分类号： G02B3/14 ,  G02B26/004 ,  G02B26/0825

摘要： An optical device with a deformable membrane including an anchoring area on a support helping to contain a constant volume of liquid in contact with one of its faces, a substantially central area, configured to be deformed reversibly from a rest position, and an actuation mechanism displacing the liquid in the central area stressing the membrane in at least one area situated strictly between the central area and the anchoring area. The actuation mechanism is electrostatic and includes at least one pair of opposing electrodes, one of the electrodes of the pair being at the level of the membrane, the other being at the level of the support, the electrodes being separated by dielectric, the dielectric being formed at least by the liquid.

摘要翻译： 一种具有可变形膜的光学装置，其包括在支撑件上的锚定区域，其有助于容纳与其一个面接触的恒定体积的液体，构造成从静止位置可逆地变形的基本中心区域，以及致动机构 中心区域中的液体在严格位于中心区域和锚固区域之间的至少一个区域中对膜施加强力。 致动机构是静电的，并且包括至少一对相对电极，该对中的一个电极处于膜的高度，另一个位于支架的高度，电极被电介质隔开，电介质为 至少由液体形成。

公开(公告)号：US20110086461A1

公开(公告)日：2011-04-14

申请号：US12992714

申请日：2009-05-19

申请人： Sebastien Bolis

发明人： Sebastien Bolis

IPC分类号： H01L31/18

CPC分类号： H01L27/14618 ,  G02B13/001 ,  G02B13/0085 ,  H01L27/14609 ,  H01L27/14625 ,  H01L27/14685 ,  H01L27/14696 ,  H01L31/0203 ,  H01L31/02325 ,  H01L2924/0002 ,  H04N5/2253 ,  H04N5/2254 ,  H04N5/2257 ,  H01L2924/00

摘要： A method for making an optical device with integrated optoelectronic components, including a) making a protective structure including a support in which at least one blind hole is made, an optical element being positioned in the blind hole, b) attaching the support to a substrate including the integrated optoelectronic components, the blind hole forming a cavity in which the optical element faces one of the optoelectronic components, c) achieving thinning of the substrate and making electric connections through the substrate, and d) making an aperture through the bottom wall of the blind hole, uncovering at least one portion of the optical field of the optical element.

摘要翻译： 一种用于制造具有集成光电子部件的光学器件的方法，包括：a）制造包括至少一个盲孔的支撑件的保护结构，光学元件定位在盲孔中，b）将支撑件附接到基板 包括集成的光电子部件，盲孔形成光学元件面向光电元件之一的空腔，c）实现基板的薄化和通过基板的电连接，以及d）通过底板 盲孔，露出光学元件的光场的至少一部分。

公开(公告)号：US20100182703A1

公开(公告)日：2010-07-22

申请号：US12669266

申请日：2008-07-17

申请人： Sebastien Bolis

发明人： Sebastien Bolis

IPC分类号： G02B3/14

CPC分类号： G02B3/14 ,  G02B26/0825 ,  G02B26/0858 ,  G02B26/0866

摘要： An optical device with a deformable membrane including an anchoring area on a support helping to contain a constant volume of liquid in contact with one of its faces, a substantially central area, configured to be deformed reversibly from a rest position, and an actuation mechanism displacing the liquid in the central area, stressing the membrane in parts situated between the central area and the anchoring area. The actuation mechanism includes plural thermal or piezoelectric actuators of micro-beam type, distributed at the periphery of the membrane, the micro-beams including at least one fixed part joined to the support and at least one moving part coming into contact, on an actuation, with the membrane in an area situated between the central area and the anchoring area.

摘要翻译： 一种具有可变形膜的光学装置，其包括在支撑件上的锚定区域，其有助于容纳与其一个面接触的恒定体积的液体，构造成从静止位置可逆地变形的基本中心区域，以及致动机构 在中心区域的液体，在位于中心区域和锚固区域之间的部分中压迫膜。 致动机构包括分布在隔膜周边的多个微波束型的热压电致动器或压电致动器，所述微型梁包括至少一个固定部分，所述至少一个固定部分接合到所述支撑件上以及至少一个移动部件接触， ，其中膜位于位于中心区域和锚定区域之间的区域中。

公开(公告)号：US20120170920A1

公开(公告)日：2012-07-05

申请号：US13394641

申请日：2010-09-14

申请人： Stephane Moreau ,  Sebastien Bolis

发明人： Stephane Moreau ,  Sebastien Bolis

IPC分类号： G03B17/00 ,  G02B3/14

CPC分类号： G02B3/12 ,  G02B3/14 ,  G02B26/004 ,  G02B26/0825 ,  G02B27/0068 ,  H01L41/098

摘要： An optical device with a deformable membrane (2) including an anchor area (2.3) on a support (1) entrapping a liquid or gas fluid, a central area (2.1) reversibly deformable from a rest position, actuating means for moving the fluid (4) biasing the membrane (2) into an intermediate area between the anchor area (2.3) and the central area (2.1), the actuating means include a piezoelectric continuous crown accommodating several actuators (5.1), this crown surrounding the central area (2.1), the actuating means (5) being anchored to the membrane (2) in at least the intermediate area (2.2), the actuating means (5) and the membrane (2) to which they are anchored, forming at least one piezoelectric bimorph (B), the actuating means (5) radially contracting or extending upon actuation so as to generate a movement of said fluid (4) from the intermediate area (2.2) to the central area (2.1) of the membrane (2) or vice versa, aiming at deforming the central area (2.1) with respect to its rest position.

摘要翻译： 一种具有可变形膜（2）的光学装置，包括在包含液体或气体流体的支撑件（1）上的锚定区域（2.3），从静止位置可逆地变形的中心区域（2.1），用于移动流体的致动装置 4）将膜（2）偏置到锚定区域（2.3）和中心区域（2.1）之间的中间区域中，致动装置包括容纳多个致动器（5.1）的压电连续冠，围绕中心区域（2.1 ），所述致动装置（5）至少在中间区域（2.2），所述致动装置（5）和所述膜（2）中锚固到所述膜（2）上，所述致动装置（5）和所述膜（2）形成至少一个压电双压电晶片 （B）中，致动装置（5）在致动时径向收缩或延伸，以便产生所述流体（4）从中间区域（2.2）到膜（2）的中心区域（2.1）或副 反之亦然，旨在使中心区域（2.1）相对于其静止位置变形 。

公开(公告)号：US08072689B2

公开(公告)日：2011-12-06

申请号：US12669266

申请日：2008-07-17

申请人： Sebastien Bolis

发明人： Sebastien Bolis

IPC分类号： G02B3/12

CPC分类号： G02B3/14 ,  G02B26/0825 ,  G02B26/0858 ,  G02B26/0866

摘要： An optical device with a deformable membrane including an anchoring area on a support helping to contain a constant volume of liquid in contact with one of its faces, a substantially central area, configured to be deformed reversibly from a rest position, and an actuation mechanism displacing the liquid in the central area, stressing the membrane in parts situated between the central area and the anchoring area. The actuation mechanism includes plural thermal or piezoelectric actuators of micro-beam type, distributed at the periphery of the membrane, the micro-beams including at least one fixed part joined to the support and at least one moving part coming into contact, on an actuation, with the membrane in an area situated between the central area and the anchoring area.

摘要翻译： 一种具有可变形膜的光学装置，其包括在支撑件上的锚定区域，其有助于容纳与其一个面接触的恒定体积的液体，构造成从静止位置可逆地变形的基本中心区域，以及致动机构 在中心区域的液体，在位于中心区域和锚固区域之间的部分中压迫膜。 致动机构包括分布在隔膜周边的多个微波束型的热压电致动器或压电致动器，所述微型梁包括至少一个固定部分，所述至少一个固定部分接合到所述支撑件上以及至少一个移动部件接触， ，其中膜位于位于中心区域和锚定区域之间的区域中。