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公开(公告)号：US06389940B1
公开(公告)日：2002-05-21
申请号：US09906199
申请日：2001-07-16
申请人： David C. Long , John U. Knickerbocker , Mark J. LaPlante , Thomas Weiss , Robert P. Westerfield, Jr.
发明人： David C. Long , John U. Knickerbocker , Mark J. LaPlante , Thomas Weiss , Robert P. Westerfield, Jr.
IPC分类号： B26F100
CPC分类号： B26D7/26 , B26F1/02 , B26F2210/08 , H05K1/0306 , H05K3/005 , Y10T83/04 , Y10T83/0448 , Y10T83/0481 , Y10T83/857 , Y10T83/8699 , Y10T83/8828 , Y10T83/8835 , Y10T83/8845 , Y10T83/8855
摘要： A gang punch tool assembly and method is provided for punching holes in a plurality of greensheets which are processed sequentially through the assembly. The punch mechanism is a gang punch cooperating with a corresponding die and the greensheet is automatically fed to the gang punch and die, the greensheet punched and then the punched greensheet removed from the punch area and another greensheet positioned for punching. Operation of the gang punch apparatus is efficient and effective and has a high greensheet throughput. A preferred gang punch uses a pressurizable air chamber for controlling punching of the greensheet without damage to the greensheets or gang punch mechanism.
摘要翻译： 提供了一种组合冲孔工具组合件和方法，用于对多个通过组件顺序处理的多个刮板中的孔进行冲孔。 冲头机构是与相应的模具配合的组合冲头，并且毛坯自动进给组合冲头和模具，冲切毛坯，然后将冲孔毛坯从冲头区域移除，另一个毛坯定位用于冲压。 组合打孔装置的操作是高效和有效的并且具有高的毛坯生产量。 优选的组合冲头使用可加压空气室来控制毛坯的冲压而不损坏刮板或组合冲头机构。
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公开(公告)号：US06314852B1
公开(公告)日：2001-11-13
申请号：US09128447
申请日：1998-08-03
申请人： David C. Long , John U. Knickerbocker , Mark J. LaPlante , Thomas Weiss , Robert P. Westerfield, Jr.
发明人： David C. Long , John U. Knickerbocker , Mark J. LaPlante , Thomas Weiss , Robert P. Westerfield, Jr.
IPC分类号： B26F100
CPC分类号： B26D7/26 , B26F1/02 , B26F2210/08 , H05K1/0306 , H05K3/005 , Y10T83/04 , Y10T83/0448 , Y10T83/0481 , Y10T83/857 , Y10T83/8699 , Y10T83/8828 , Y10T83/8835 , Y10T83/8845 , Y10T83/8855
摘要： A gang punch tool assembly and method is provided for punching holes in a plurality of greensheets which are processed sequentially through the assembly. The punch mechanism is a gang punch cooperating with a corresponding die and the greensheet is automatically fed to the gang punch and die, the greensheet punched and then the punched greensheet removed from the punch area and another greensheet positioned for punching. Operation of the gang punch apparatus is efficient and effective and has a high greensheet throughput. A preferred gang punch uses a pressurizable air chamber for controlling punching of the greensheet without damage to the greensheets or gang punch mechanism.
摘要翻译： 提供了一种组合冲孔工具组合件和方法，用于对多个通过组件顺序处理的多个刮板中的孔进行冲孔。 冲头机构是与相应的模具配合的组合冲头，并且毛坯自动进给组合冲头和模具，冲切毛坯，然后将冲孔毛坯从冲头区域移除，另一个毛坯定位用于冲压。 组合打孔装置的操作是高效和有效的并且具有高的毛坯生产量。 优选的组合冲头使用可加压空气室来控制毛坯的冲压而不损坏刮板或组合冲头机构。
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公开(公告)号：US06223636B1
公开(公告)日：2001-05-01
申请号：US09128448
申请日：1998-08-03
申请人： Mark J. LaPlante , James G. Balz , Ferdinand D. DiMaria , John U. Knickerbocker , David C. Long , Thomas Weiss , Robert P. Westerfield, Jr.
发明人： Mark J. LaPlante , James G. Balz , Ferdinand D. DiMaria , John U. Knickerbocker , David C. Long , Thomas Weiss , Robert P. Westerfield, Jr.
IPC分类号： B26F104
CPC分类号： B26F1/04 , B26F2210/08 , H05K1/0306 , H05K3/005 , Y10T83/04 , Y10T83/8727 , Y10T83/883 , Y10T83/943
摘要： A gang-punch pin apparatus for punching selected hole patterns in thin sheet materials such as greensheets is provided. The gang-punch pin apparatus uses program plates in the punch apparatus which plates are positioned intermediate the non-punching end of the punch pins and a clearance plate wherein punch pins not used for punching a particular layer of the MLC are retracted into during punching. At the other punch pin locations, the punch pins, upon activation of the punch apparatus by compressing an expandable chamber, usually by application of a force on the punch apparatus, are extended through the lower portion of the punch apparatus to form vias in a greensheet. A die apparatus is also provided for use with the punch assembly to form the vias and to remove the punched material (slugs) from the die apparatus. The gang punch-pin may be shorter than conventional pins and be made at a low cost because of the thin sheet metal plates preferably used to make the component parts of the punch and die apparatus.
摘要翻译： 提供了一种用于冲压薄片材料如绿叶片中的选定孔图案的组合打孔针装置。 组合打孔针装置使用打孔装置中的程序板，其中板位于冲头销的非冲孔端之间，而间隙板，其中不用于冲压MLC的特定层的冲头不会在冲压期间缩回。 在另一冲头销位置，通常通过在冲压装置上施加力来压缩可膨胀室而使冲压装置激活时，冲头穿过冲头装置的下部，以形成毛坯中的通孔 。 还提供了一种模具设备，用于与冲头组件一起使用以形成通孔并且将冲压材料（芯棒）从模具设备移除。 由于薄板金属板优选用于制造冲头和模具装置的组成部件，所以组合打孔销可能比传统的销子更短，并且制造成本低。
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公开(公告)号：US07118385B1
公开(公告)日：2006-10-10
申请号：US11162779
申请日：2005-09-22
IPC分类号： H01R12/00
CPC分类号： H05K7/1061
摘要： A self-aligning socket for an integrated circuit package includes an outer frame and an array of contacts configured for alignment with corresponding conductive pads on the bottom of the integrated circuit package. The outer frame further includes a first plurality of alignment ball bearings configured thereon, the ball bearings mounted on cantilevered spring rods.
摘要翻译： 用于集成电路封装的自对准插座包括外框架和触头阵列，其被配置为与集成电路封装的底部上的对应导电焊盘对准。 外框架还包括构造在其上的第一多个对准球轴承，球轴承安装在悬臂弹簧杆上。
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5.发明授权Electrostatic chuck having relatively thick and thin areas and means for uniformly cooling said thick and thin areas during chuck anodization 失效静电卡盘具有相对较厚和较薄的区域，以及用于在卡盘阳极氧化期间均匀冷却所述厚薄区域的装置
公开(公告)号：US5521790A
公开(公告)日：1996-05-28
申请号：US241527
申请日：1994-05-12
IPC分类号： B23Q3/15 , H01L21/027 , H01L21/683 , H02N13/00
CPC分类号： H01L21/6833 , H01L21/6831 , H02N13/00 , Y10T279/23
摘要： An aluminum electrostatic chuck for holding semiconductor wafers during wafer processing. The chuck is characterized by a closely determined magnitude of electrostatic holding force due to an anodization step for creating a finely uniform thickness of dielectric material on the chuck surface facing the wafer which, in turn, determines the holding force. The chuck cross section comprises two different thickness areas with fluid cooling being applied to the thinner thickness area during chuck anodization to assure thickness uniformity of the anodized material across the face of the chuck.
摘要翻译： 一种用于在晶片加工期间保持半导体晶片的铝静电卡盘。 卡盘的特征在于由于阳极氧化步骤的紧密确定的静电保持力的大小，用于在面向晶片的卡盘表面上形成精细均匀的电介质材料厚度，这又决定了保持力。 卡盘横截面包括两个不同的厚度区域，在卡盘阳极氧化期间，流体冷却被施加到较薄的厚度区域，以确保阳极氧化材料穿过卡盘的表面的厚度均匀性。
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公开(公告)号：US5452510A
公开(公告)日：1995-09-26
申请号：US169910
申请日：1993-12-20
IPC分类号： B23Q3/15 , H01L21/683 , H02N13/00 , H01R43/00
CPC分类号： H01L21/6831 , Y10T29/49117 , Y10T29/49885 , Y10T29/49888 , Y10T29/49982 , Y10T29/49986 , Y10T29/49993
摘要： An electrostatic chuck and method of manufacture of the chuck in which the component parts are machined, then partially anodized to provide a hard insulating surface on surfaces that are not in contact with the wafer, and then assembled, after which the top surface abutting the workpiece is machined and a correction radius is cut to suppress discharges between the electrodes.
摘要翻译： 一种静电卡盘及其制造方法，其中对零件进行机械加工，然后进行部分阳极氧化处理，以在不与晶片接触的表面上提供硬绝缘表面，然后组装，之后顶表面邻接工件 被加工并且修正半径被切割以抑制电极之间的放电。
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公开(公告)号：US06251251B1
公开(公告)日：2001-06-26
申请号：US09192431
申请日：1998-11-16
IPC分类号： C25D2118
CPC分类号： C25D7/12 , C25D17/001 , C25D17/12
摘要： An anode assembly including a perforated anode. A perforated anode holder holds the anode. The anode holder includes perforations at least in a bottom wall such that plating solution may flow through perforations in the anode holder and perforations in the anode. An anode isolator separates the anode and a cathode. The anode isolator includes at least one curvilinear surface.
摘要翻译： 包括穿孔阳极的阳极组件。 穿孔阳极支架固定阳极。 阳极保持器至少在底壁中具有穿孔，使得电镀溶液可以流过阳极保持器中的穿孔和阳极中的穿孔。 阳极隔离器分离阳极和阴极。 阳极隔离器包括至少一个曲线表面。
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公开(公告)号：US5612851A
公开(公告)日：1997-03-18
申请号：US471105
申请日：1995-06-06
申请人： Michael S. Barnes , John H. Keller , Joseph S. Logan , Robert E. Tompkins , Robert P. Westerfield, Jr.
发明人： Michael S. Barnes , John H. Keller , Joseph S. Logan , Robert E. Tompkins , Robert P. Westerfield, Jr.
IPC分类号： B23Q3/15 , H01L21/68 , H01L21/683 , H02N13/00
CPC分类号： H01L21/6833 , H01L21/68 , H01L21/6831 , H02N13/00 , H01J2237/0206 , Y10T279/23
摘要： An electrostatic chuck is disclosed that is resistant to the formation of vacuum arcs between the back of the wafer being processed and the body of the chuck. A guard ring surrounds the chuck and floats close to the self-bias potential induced by the plasma on the wafer. The voltage between the wafer and the closest electrode is thereby capacitively divided by the guard ring.
摘要翻译： 公开了一种静电卡盘，其耐受在被加工的晶片的背面和卡盘的主体之间形成真空电弧。 保护环围绕卡盘并且靠近由晶片上的等离子体引起的自偏压可浮动。 因此晶片和最近的电极之间的电压由保护环电容性地分开。
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公开(公告)号：US5535507A
公开(公告)日：1996-07-16
申请号：US169911
申请日：1993-12-20
申请人： Michael S. Barnes , John H. Keller , Joseph S. Logan , Raymond R. Ruckel , Robert E. Tompkins , Robert P. Westerfield, Jr.
发明人： Michael S. Barnes , John H. Keller , Joseph S. Logan , Raymond R. Ruckel , Robert E. Tompkins , Robert P. Westerfield, Jr.
IPC分类号： B23Q3/15 , H01L21/00 , H01L21/683 , H02N13/00 , H01R43/00
CPC分类号： H01L21/67109 , H01L21/6831 , H01L21/6833 , Y10T29/49117
摘要： An electrostatic chuck is made by a method in which the component parts are machined, then anodized to provide a hard insulating surface, and then assembled in a fixture, to provide a planar surface for wafer support that retains superior insulating properties; gas may be fed from the rim only, diffusing within interstices between the clamping surface and the wafer and maintaining a desired pressure by flowing radially through an impedance determined by the average spacing between clamping surface and wafer, thereby providing uniform pressure across the clamping surface without the use of elastomeric seals.
摘要翻译： 静电卡盘通过以下方法制成，其中组分部件被加工，然后阳极氧化以提供硬绝缘表面，然后组装在夹具中，以提供保持优异绝缘性能的晶片支撑件的平面表面; 气体可以仅从边缘进料，在夹紧表面和晶片之间的空隙内扩散，并通过径向流过由夹紧表面和晶片之间的平均间隔确定的阻抗来保持期望的压力，由此在夹紧表面上提供均匀的压力而没有 使用弹性密封件。
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公开(公告)号：US5463525A
公开(公告)日：1995-10-31
申请号：US169932
申请日：1993-12-20
申请人： Michael S. Barnes , John H. Keller , Joseph S. Logan , Robert E. Tompkins , Robert P. Westerfield, Jr.
发明人： Michael S. Barnes , John H. Keller , Joseph S. Logan , Robert E. Tompkins , Robert P. Westerfield, Jr.
IPC分类号： B23Q3/15 , H01L21/68 , H01L21/683 , H02N13/00
CPC分类号： H01L21/6833 , H01L21/68 , H01L21/6831 , H02N13/00 , H01J2237/0206 , Y10T279/23
摘要： An electrostatic chuck suppresses the formation of vacuum arcs between the back of the wafer being processed and the body of the chuck by the interposition of a guard ring that floats close to the self-bias potential induced by the plasma on the wafer, thereby capacitively dividing the voltage between the wafer and the closest electrode.
摘要翻译： 静电吸盘通过插入保护环，从而抑制正在处理的晶片的背面与卡盘的主体之间的真空电弧的形成，该保护环漂浮在由晶片上的等离子体引起的自偏压附近，从而电容分开 晶片和最近的电极之间的电压。
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