利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

5 条记录 (耗时 0.029 秒)

    Heating system for high throughput sputtering
    4.
    发明授权
    Heating system for high throughput sputtering 失效
    用于高通量溅射的加热系统

    公开(公告)号：US5972184A

    公开(公告)日：1999-10-26

    申请号：US45975

    申请日：1993-04-09

    申请人： Dennis R. Hollars ,  Delbert F. Waltrip ,  Robert B. Zubeck ,  Josef Bonigut ,  Robert M. Smith ,  Gary L. Payne

    发明人： Dennis R. Hollars ,  Delbert F. Waltrip ,  Robert B. Zubeck ,  Josef Bonigut ,  Robert M. Smith ,  Gary L. Payne

    IPC分类号： C23C14/02 ,  C23C14/34 ,  C23C14/35 ,  C23C14/50 ,  C23C14/54 ,  C23C14/56 ,  G05B19/05 ,  G05B19/418 ,  G11B5/85 ,  G11B5/851 ,  H01L21/00 ,  H01L21/677

    CPC分类号： H01L21/6776 ,  C23C14/02 ,  C23C14/028 ,  C23C14/34 ,  C23C14/35 ,  C23C14/352 ,  C23C14/50 ,  C23C14/54 ,  C23C14/541 ,  C23C14/568 ,  G05B19/052 ,  G05B19/4189 ,  G11B5/851 ,  H01J37/32733 ,  H01J37/3405 ,  H01L21/6715 ,  H01L21/67173 ,  H01L21/67207 ,  H01L21/67213 ,  H01L21/67236 ,  H01L21/67253 ,  H01L21/67259 ,  H01L21/67276 ,  H01L21/67712 ,  H01L21/67721 ,  G05B2219/31225 ,  G05B2219/31237 ,  G05B2219/32413 ,  G05B2219/34029 ,  G05B2219/34279 ,  G05B2219/34287 ,  G05B2219/34304 ,  G05B2219/50363 ,  Y02P90/18 ,  Y02P90/28

    摘要： A high throughput sputtering apparatus which provides a single or multi-layer coating to the surface of a plurality of substrates. The apparatus comprises a plurality of buffer and sputtering chambers which include an input end and an output end. The substrates are transported through the chambers at varying rates of speed such that the rate of speed of a pallet from the input end to the output end is a constant for each of the pallets. The high throughput sputtering apparatus also includes a transport system which transports the substrates through the sputtering chambers at variable velocities, a high capacity vacuum pump system which evacuates the ambient pressure within the sputtering chambers to a vacuum level within a pressure range sufficient to enable sputtering operation, a substrate heating system which heats the substrates to a temperature conducive to sputtering the coatings thereon and provides a substantially uniform temperature profile over the surface of the substrates; and an electronic control system which provides control signals to and for receiving feedback input from other components of the apparatus. The electronic control system is programmable to control the sputtering chambers, the transport system, the vacuum pump system, and the substrate heating system. The substrate heating system efficiently maintains a desired substrate temperature by minimizing radiative heat losses as the substrates proceed through the sputtering apparatus. The high throughput sputtering apparatus provides substrates to be sputtered in a rapid and uniform heating process to optimize film integrity during the sputtering steps, provides successive layers of thin films on the substrates, and removes the sputtered substrates without contaminating the environment.

    摘要翻译： 一种高通量溅射装置，其向多个基板的表面提供单层或多层涂层。 该装置包括多个缓冲和溅射室，其包括输入端和输出端。 基板以不同的速度传送通过室，使得托盘从输入端到输出端的速度速率对于每个托盘是恒定的。 高通量溅射装置还包括以可变速度输送基板通过溅射室的输送系统，将真空室内的环境压力排出到足以实现溅射操作的压力范围内的真空度的高容量真空泵系统 衬底加热系统，其将衬底加热到​​有利于溅射其上的涂层的温度，并在衬底的表面上提供基本均匀的温度分布; 以及电子控制系统，其向控制信号提供控制信号并从该设备的其他部件接收反馈输入。 电子控制系统可编程控制溅射室，输送系统，真空泵系统和基板加热系统。 当衬底通过溅射装置进行时，衬底加热系统通过最小化辐射热损失来有效地保持期望的衬底温度。 高通量溅射装置提供在快速且均匀的加热过程中溅射的基板，以在溅射步骤期间优化膜的完整性，在基板上提供连续的薄膜层，并且在不污染环境的情况下去除溅射的基板。

    Automatic pool cleaner apparatus
    5.
    发明授权
    Automatic pool cleaner apparatus 失效
    自动泳池清洁器

    公开(公告)号：US4169484A

    公开(公告)日：1979-10-02

    申请号：US910827

    申请日：1978-05-30

    申请人： Josef Bonigut ,  Ramon E. Lindberg ,  Peter K. Darm

    发明人： Josef Bonigut ,  Ramon E. Lindberg ,  Peter K. Darm

    IPC分类号： E04H4/16 ,  B08B3/02 ,  B08B9/08

    CPC分类号： E04H4/1681

    摘要： An automatic pool cleaner apparatus is disclosed including an elongated flexible conduit adapted to be connected at one end to a source of water under pressure and adapted to be connected at its other end to the rear of a body portion, said body portion having a plurality of water jet openings further defined on the rear thereof and positioned in a symmetrical relationship about the center line axis of said body portion, such that water discharged therefrom is directed to the rear substantially axially along the direction of said conduit, and further including means for maintaining said body portion in a submerged state, and means for causing said body to be oriented during its movements a substantial portion of the time in positions adjacent to the wall and bottom surfaces of said pool.

    摘要翻译： 公开了一种自动池清洁装置，其包括细长的柔性管道，其适于在一端连接到压力下的水源并且适于在其另一端连接到主体部分的后部，所述主体部分具有多个 水射流开口进一步限定在其后部并且以关于所述主体部分的中心线轴线的对称关系定位，使得从其排出的水基本上沿着所述管道的方向被引导到后部，并且还包括用于维持 所述主体部分处于浸没状态，以及用于使所述主体在其运动期间被定向的大部分时间在与所述池的壁和底表面相邻的位置中的装置。