公开(公告)号：US06387161B1

公开(公告)日：2002-05-14

申请号：US09721987

申请日：2000-11-27

申请人： Derong Zhou ,  John P. Borzio ,  Earle Kebbekus ,  David Miner

发明人： Derong Zhou ,  John P. Borzio ,  Earle Kebbekus ,  David Miner

IPC分类号： B01D5304

CPC分类号： C01B21/22 ,  B01D3/322 ,  C01P2006/80

摘要： Provided are a system and method for nitrous oxide purification, wherein the nitrous oxide product for use in semiconductor manufacturing. The system and process involve a first sub-system having a purification tank for holding a liquefied nitrous oxide, therein; a vaporizer in communication with the purification tank to receive, vaporize and convey a nitrous oxide vapor back to the purification tank; a distillation column disposed on a distal end of the purification tank to receive a nitrous oxide vapor; a condenser disposed on the distillation column, wherein light impurities are removed and wherein a nitrous oxide devoid of light impurities is conveyed and converted into vapor in the vaporizer. A second sub-system having a first dry bed vessel is disposed downstream of the vaporizer to receive the vapor and reacting the acid gas therein; a second dry bed vessel downstream of the first dry bed vessel for removing water and ammonia in the vapor. A third sub-system having a product tank wherein the purified nitrous oxide vapor is recondensed; a transferring manifold including a liquid pump, liquid filter and a bypass for distributing the purified nitrous oxide to holding vessels.

摘要翻译： 提供了用于一氧化二氮净化的系统和方法，其中用于半导体制造的一氧化二氮产品。 该系统和方法包括：第一子系统，其中具有用于容纳液化的一氧化二氮的净化罐; 蒸发器，其与净化罐连通以接收，蒸发并将一氧化二氮蒸气输送回到净化罐; 蒸馏塔，设置在净化罐的远端以接收一氧化二氮蒸汽; 设置在蒸馏塔上的冷凝器，其中去除轻杂质，并且其中没有轻杂质的一氧化二氮被输送并转化成蒸发器中的蒸气。 具有第一干床容器的第二子系统设置在蒸发器的下游，以接收蒸气并使其中的酸性气体反应; 在第一干床容器下游的第二干床容器，用于除去蒸汽中的水和氨。 具有产品罐的第三子系统，其中所述净化的一氧化二氮蒸气被再凝结; 包括液体泵，液体过滤器和用于将净化的一氧化二氮分配到保持容器的旁路的转运歧管。

公开(公告)号：US06505482B2

公开(公告)日：2003-01-14

申请号：US10044902

申请日：2002-01-15

申请人： Derong Zhou ,  John P. Borzio ,  Earle Kebbekus ,  David Miner

发明人： Derong Zhou ,  John P. Borzio ,  Earle Kebbekus ,  David Miner

IPC分类号： F25J100

CPC分类号： C01B21/22 ,  B01D3/322 ,  C01P2006/80

摘要： Provided are a system and method for nitrous oxide purification, wherein the nitrous oxide product is for use in semiconductor manufacturing. The system and process involve a first sub-system having a purification tank for holding a liquefied nitrous oxide, therein; a vaporizer in communication with the purification tank to receive, vaporize and convey a nitrous oxide vapor back to the purification tank; a distillation column disposed on a distal end of the purification tank to receive a nitrous oxide vapor; a condenser disposed on the distillation column, wherein light impurities are removed and wherein a nitrous oxide devoid of light impurities is conveyed and converted into vapor in the vaporizer. A second sub-system having a first dry bed vessel is disposed downstream of the vaporizer to receive the vapor and reacting the acid gas therein; a second dry bed vessel is disposed downstream of the first dry bed vessel for removing water and ammonia in the vapor. A third sub-system has a product tank wherein the purified nitrous oxide vapor is recondensed; and a transferring manifold including a liquid pump, liquid filter and a bypass for distributing the purified nitrous oxide to holding vessels.

摘要翻译： 提供了一氧化二氮净化的系统和方法，其中一氧化二氮产品用于半导体制造。 该系统和方法包括：第一子系统，其中具有用于容纳液化的一氧化二氮的净化罐; 蒸发器，其与净化罐连通以接收，蒸发并将一氧化二氮蒸气输送回到净化罐; 蒸馏塔，设置在净化罐的远端以接收一氧化二氮蒸汽; 设置在蒸馏塔上的冷凝器，其中去除轻杂质，并且其中没有轻杂质的一氧化二氮被输送并转化成蒸发器中的蒸气。 具有第一干床容器的第二子系统设置在蒸发器的下游，以接收蒸气并使其中的酸性气体反应; 第二干床容器设置在第一干床容器的下游，用于除去蒸气中的水和氨。 第三子系统具有产品罐，其中净化的一氧化二氮蒸汽重新凝结; 以及包括用于将净化的一氧化二氮分配到保持容器的液体泵，液体过滤器和旁路的输送歧管。

公开(公告)号：US06370911B1

公开(公告)日：2002-04-16

申请号：US09373506

申请日：1999-08-13

申请人： Derong Zhou ,  John P. Borzio ,  Earle Kebbekus ,  David Miner

发明人： Derong Zhou ,  John P. Borzio ,  Earle Kebbekus ,  David Miner

IPC分类号： F25J100

CPC分类号： C01B21/22 ,  B01D3/322 ,  C01P2006/80

摘要： Provided are a system and method for nitrous oxide purification, wherein the nitrous oxide product for use in semiconductor manufacturing. The system and process involve a first sub-system having a purification tank for holding a liquefied nitrous oxide, therein; a vaporizer in communication with the purification tank to receive, vaporize and convey a nitrous oxide vapor back to the purification tank; a distillation column disposed on a distal end of the purification tank to receive a nitrous oxide vapor; a condenser disposed on the distillation column, wherein light impurities are removed and wherein a nitrous oxide devoid of light impurities is conveyed and converted into vapor in said vaporizer. A second sub-system having a first dry bed vessel is disposed downstream of the vaporizer to receive the vapor and reacting the acid gas therein; a second dry bed vessel downstream of the said first dry bed vessel for removing water and ammonia in the vapor. A third sub-system having a product tank wherein the purified nitrous oxide vapor is recondensed; a transferring manifold including a liquid pump, liquid filter and a bypass for distributing the purified nitrous oxide to holding vessels.

摘要翻译： 提供了用于一氧化二氮净化的系统和方法，其中用于半导体制造的一氧化二氮产品。 该系统和方法包括：第一子系统，其中具有用于容纳液化的一氧化二氮的净化罐; 蒸发器，其与净化罐连通以接收，蒸发并将一氧化二氮蒸气输送回到净化罐; 蒸馏塔，设置在净化罐的远端以接收一氧化二氮蒸汽; 设置在蒸馏塔上的冷凝器，其中去除轻质杂质，并且其中没有轻杂质的一氧化二氮被输送并转化成所述蒸发器中的蒸气。 具有第一干床容器的第二子系统设置在蒸发器的下游，以接收蒸气并使其中的酸性气体反应; 在所述第一干床容器下游的第二干床容器，用于除去蒸气中的水和氨。 具有产品罐的第三子系统，其中所述净化的一氧化二氮蒸气被再凝结; 包括液体泵，液体过滤器和用于将净化的一氧化二氮分配到保持容器的旁路的转运歧管。

公开(公告)号：US06361750B1

公开(公告)日：2002-03-26

申请号：US09725965

申请日：2000-11-29

申请人： Derong Zhou ,  Gregory M. Jursich ,  Earle R. Kebbekus ,  John P. Borzio ,  Jason R. Uner

发明人： Derong Zhou ,  Gregory M. Jursich ,  Earle R. Kebbekus ,  John P. Borzio ,  Jason R. Uner

IPC分类号： B01J804

摘要： Processes are disclosed for increasing the condensed phase production of BCl3 comprising less than about 10 ppm phosgene, less than 10 ppm chlorine, and less than 10 ppm HCl. In one embodiment the process comprises injecting an inert gas into a container having condensed BCl3 therein, the condensed BCl3 having therein a minor portion of phosgene impurity. A major portion of the phosgene in the condensed BCl3 is decomposed to carbon monoxide and chlorine by increasing temperature to produce a phosgene deficient stream. The temperature of the phosgene deficient stream is then decreased, and contacted with an adsorbent to remove the chlorine in the stream by adsorption to form a chlorine and phosgene free condensed stream. The chlorine and phosgene free stream is stripped using an inert gas to form a BCl3 product condensed stream, and an inert gas is used to pump the BCl3 product condensed stream to a product receiver.

公开(公告)号：US07297181B2

公开(公告)日：2007-11-20

申请号：US11009510

申请日：2004-12-13

申请人： Derong Zhou ,  John P. Borzio ,  Mindi Xu ,  Hwa-Chi Wang ,  Tran Vuong

发明人： Derong Zhou ,  John P. Borzio ,  Mindi Xu ,  Hwa-Chi Wang ,  Tran Vuong

IPC分类号： C01C1/02 ,  B01D53/04

CPC分类号： B01D53/261 ,  B01D53/02 ,  C01C1/024 ,  Y10S203/17

摘要： An ammonia purification system includes a hydrocarbon removal station that removes hydrocarbons from gaseous ammonia via adsorption, a moisture removal station that removes water from gaseous ammonia via adsorption, and a distillation station including a distillation column connected with a condenser to facilitate removal of impurities from ammonia and condensation of gaseous ammonia to form a purified liquid ammonia product. The system further includes a storage tank to receive purified ammonia, a remote station connected with the storage tank, and a vaporizer connected with the storage tank. The vaporizer is configured to receive and vaporize liquid ammonia from the storage tank and deliver gaseous ammonia back to the storage tank so as to facilitate pumping of the ammonia to the remote station based upon a vapor pressure established within the storage tank.

摘要翻译： 氨净化系统包括通过吸附从气态氨除去烃的除烃站，通过吸附从气态氨除去水的除湿站，以及包括与冷凝器连接的蒸馏塔以便于从氨除去杂质的蒸馏站 和气态氨的缩合形成纯化的液氨产物。 该系统还包括用于接收净化氨的储罐，与储罐连接的远程站以及与储存罐连接的蒸发器。 蒸发器被配置为从储罐接收和蒸发液氨，并将气态氨返回到储罐，以便于基于在储罐内建立的蒸汽压力将氨泵送到远程站。

公开(公告)号：US07906094B2

公开(公告)日：2011-03-15

申请号：US11863524

申请日：2007-09-28

申请人： Cyril Bourasseau ,  Gregory M. Jursich ,  Mindi Xu ,  John P. Borzio ,  Donald W. Mitchell, Jr. ,  Derong Zhou ,  Thomas K. Moncur

发明人： Cyril Bourasseau ,  Gregory M. Jursich ,  Mindi Xu ,  John P. Borzio ,  Donald W. Mitchell, Jr. ,  Derong Zhou ,  Thomas K. Moncur

IPC分类号： C01B33/04

CPC分类号： C01B33/04 ,  C01B33/046

摘要： Methods for the production of trisilane from the pyrolysis of disilane in a single reactor.

摘要翻译： 在单个反应器中从乙硅烷的热解生产丙硅烷的方法。

公开(公告)号：US20080175784A1

公开(公告)日：2008-07-24

申请号：US11863524

申请日：2007-09-28

申请人： Cyril Bourasseau ,  Gregory M. Jursich ,  Mindi Xu ,  John P. Borzio ,  Donald W. Mitchell ,  Derong Zhou ,  Thomas K. Moncur

发明人： Cyril Bourasseau ,  Gregory M. Jursich ,  Mindi Xu ,  John P. Borzio ,  Donald W. Mitchell ,  Derong Zhou ,  Thomas K. Moncur

IPC分类号： C01B33/04

CPC分类号： C01B33/04 ,  C01B33/046

摘要： Methods for the production of trisilane from the pyrolysis of disilane in a single reactor.

摘要翻译： 在单个反应器中从乙硅烷的热解生产丙硅烷的方法。

公开(公告)号：US07175696B2

公开(公告)日：2007-02-13

申请号：US10369341

申请日：2003-02-18

申请人： Derong Zhou ,  John P. Borzio ,  Gregory M. Jursich ,  Earle R. Kebbekus

发明人： Derong Zhou ,  John P. Borzio ,  Gregory M. Jursich ,  Earle R. Kebbekus

IPC分类号： B01D3/00

CPC分类号： B01D53/002 ,  B01D1/0094 ,  B01D1/305 ,  B01D3/34 ,  B01D5/009 ,  B01D53/26

摘要： Herein is disclosed a method and an apparatus for preparing a highly purified gas from a crude liquid comprising the gas and one or more of a metal, particulates, water vapor, or a volatile impurity. The method comprises: (a) vaporizing the crude liquid, to yield (i) a first vapor stream comprising the gas and (ii) a first liquid stream comprising the gas; (b) removing water vapor, particulates, or both from the first vapor stream, to yield a second vapor stream comprising the gas; (c) condensing the second vapor stream, to yield a second liquid stream comprising the gas; and (d) sparging the second liquid stream with an inert gas, to yield (i) a third vapor stream comprising the gas and (ii) a third liquid stream comprising the highly purified gas. Also disclosed is a method for preparing an adsorbent to effectively remove water vapor from the gas, as well as an adsorbent so prepared.

摘要翻译： 本文公开了一种从包含气体和一种或多种金属，微粒，水蒸气或挥发性杂质的粗液中制备高纯度气体的方法和装置。 该方法包括：（a）蒸发粗液体，以产生（i）包含气体的第一蒸气流和（ii）包含该气体的第一液流; （b）从第一蒸汽流中除去水蒸气，颗粒物或二者，以产生包含该气体的第二蒸气流; （c）冷凝第二蒸气流，产生包含气体的第二液体流; 和（d）用惰性气体喷射第二液体流，产生（i）包含气体的第三蒸气流和（ii）包含高度纯化气体的第三液体流。 还公开了一种制备吸附剂以有效地从气体中除去水蒸气的方法，以及如此制备的吸附剂。

公开(公告)号：US06238636B1

公开(公告)日：2001-05-29

申请号：US09389895

申请日：1999-09-03

申请人： Derong Zhou ,  Gregory M. Jursich ,  Earle R. Kebbekus ,  John P. Borzio ,  Jason R. Uner

发明人： Derong Zhou ,  Gregory M. Jursich ,  Earle R. Kebbekus ,  John P. Borzio ,  Jason R. Uner

IPC分类号： C01B3506

CPC分类号： C01B35/061 ,  F17C2227/0302 ,  F17C2270/0518

摘要： Processes are disclosed for increasing the condensed phase production of BCl3 comprising less than about 10 ppm phosgene, less than 10 ppm chlorine, and less than 10 ppm HCl. In one embodiment the process comprises injecting an inert gas into a container having condensed BCl3 therein, the condensed BCl3 having therein a minor portion of phosgene impurity. A major portion of the phosgene in the condensed BCl3 is decomposed to carbon monoxide and chlorine by increasing temperature to produce a phosgene deficient stream. The temperature of the phosgene deficient stream is then decreased, and contacted with an adsorbent to remove the chlorine in the stream by adsorption to form a chlorine and phosgene free condensed stream. The chlorine and phosgene free stream is stripped using an inert gas to form a BCl3 product condensed stream, and an inert gas is used to pump the BCl3 product condensed stream to a product receiver.

摘要翻译： 公开了用于增加包含小于约10ppm光气，小于10ppm氯和小于10ppm HCl的BCl 3的冷凝相生产的方法。 在一个实施方案中，该方法包括将惰性气体注入其中具有冷凝的BCl 3的容器中，冷凝的BCl 3中有少部分光气杂质。 浓缩的BCl 3中的光气的主要部分通过升高温度而分解成一氧化碳和氯，以产生光气不足的物流。 然后减少光气缺乏物流的温度，并与吸附剂接触以通过吸附除去流中的氯以形成无氯和无光气的冷凝物流。 使用惰性气体汽提氯和无光气流以形成BCl 3产物冷凝流，并使用惰性气体将BCl 3产物冷凝流泵送到产品接收器。