公开(公告)号：US07199882B2

公开(公告)日：2007-04-03

申请号：US11102334

申请日：2005-04-08

申请人： Donald J. Svetkoff ,  Donald B. T. Kilgus ,  Warren Lin ,  Jonathan S. Ehrmann

发明人： Donald J. Svetkoff ,  Donald B. T. Kilgus ,  Warren Lin ,  Jonathan S. Ehrmann

IPC分类号： G01B11/24

CPC分类号： G01B11/2545 ,  G01B11/026 ,  G01B11/24 ,  G01B11/2518 ,  G01N21/9501 ,  G02B21/22

摘要： A system including confocal and triangulation-based scanners or subsystems provides data which is both acquired and processed under the control of a control algorithm to obtain information such as dimensional information about microscopic targets which may be “non-cooperative.” The “non-cooperative” targets are illuminated with a scanning beam of electromagnetic radiation such as laser light incident from a first direction. A confocal detector of the electromagnetic radiation is placed at a first location for receiving reflected radiation which is substantially optically collinear with the incident beam of electromagnetic radiation. The system includes a spatial filter for attenuating background energy. The triangulation-based subsystem also includes a detector of electromagnetic radiation which is placed at a second location which is non-collinear with respect to the incident beam. This detector has a position sensitive axis. Digital data is derived from signals produced by the detectors. In this way, data from at least one triangulation-based channel is acquired in parallel or sequentially with at least one slice of confocal image data having substantially perfect temporal and spatial registration with the triangulation-based sensor data. This allows for fusion or further processing of the data for use with a predetermined measurement algorithm to thereby obtain information about the targets.

摘要翻译： 包括基于共焦和三角测量的扫描仪或子系统的系统提供在控制算法的控制下获取和处理的数据，以获得关于可能是“非合作”的微观目标的尺寸信息。 “非协同”目标用诸如从第一方向入射的激光的电磁辐射扫描束照射。 电磁辐射的共焦检测器被放置在第一位置，用于接收与入射的电磁辐射束基本上光学共线的反射辐射。 该系统包括用于衰减背景能量的空间滤波器。 基于三角测量的子系统还包括电磁辐射检测器，其被放置在相对于入射光束非共线的第二位置。 该检测器具有位置敏感轴。 数字数据源自由检测器产生的信号。 以这种方式，来自至少一个基于三角测量的信道的数据被并行或顺序地与具有基于三角测量的传感器数据具有基本上完美的时间和空间配准的共焦图像数据的至少一个切片获取。 这允许融合或进一步处理与预定测量算法一起使用的数据，从而获得关于目标的信息。

公开(公告)号：US06177998B1

公开(公告)日：2001-01-23

申请号：US09420740

申请日：1999-10-20

申请人： Donald J. Svetkoff ,  Donald B. T. Kilgus ,  Warren Lin ,  Jonathan S. Ehrmann

发明人： Donald J. Svetkoff ,  Donald B. T. Kilgus ,  Warren Lin ,  Jonathan S. Ehrmann

IPC分类号： G01B1124

CPC分类号： G01B11/2545 ,  G01B11/026 ,  G01B11/24 ,  G01B11/2518 ,  G01N21/9501 ,  G02B21/22

摘要： A system including confocal and triangulation-based scanners or subsystems provides data which is both acquired and processed under the control of a control algorithm to obtain information such as dimensional information about microscopic targets which may be “non-cooperative.” The “non-cooperative” targets are illuminated with a scanning beam of electromagnetic radiation such as laser light incident from a first direction. A confocal detector of the electromagnetic radiation is placed at a first location for receiving reflected radiation which is substantially optically collinear with the incident beam of electromagnetic radiation. The system includes a spatial filter for attenuating background energy. The triangulation-based subsystem also includes a detector of electromagnetic radiation which is placed at a second location which is non-collinear with respect to the incident beam. This detector has a position sensitive axis. Digital data is derived from signals produced by the detectors. In this way, data from at least one triangulation-based channel is acquired in parallel or sequentially with at least one slice of confocal image data having substantially perfect temporal and spatial registration with the triangulation-based sensor data. This allows for fusion or further processing of the data for use with a predetermined measurement algorithm to thereby obtain information about the targets.

公开(公告)号：US06249347B1

公开(公告)日：2001-06-19

申请号：US09420935

申请日：1999-10-19

申请人： Donald J. Svetkoff ,  Donald B. T. Kilgus ,  Warren Lin ,  Jonathan S. Ehrmann

发明人： Donald J. Svetkoff ,  Donald B. T. Kilgus ,  Warren Lin ,  Jonathan S. Ehrmann

IPC分类号： G01B1124

CPC分类号： G01B11/2545 ,  G01B11/026 ,  G01B11/24 ,  G01B11/2518 ,  G01N21/9501 ,  G02B21/22

摘要： A system including confocal and triangulation-based scanners or subsystems provides data which is both acquired and processed under the control of a control algorithm to obtain information such as dimensional information about microscopic targets which may be “non-cooperative.” The “non-cooperative” targets are illuminated with a scanning beam of electromagnetic radiation such as laser light incident from a first direction. A confocal detector of the electromagnetic radiation is placed at a first location for receiving reflected radiation which is substantially optically collinear with the incident beam of electromagnetic radiation. The system includes a spatial filter for attenuating background energy. The triangulation-based subsystem also includes a detector of electromagnetic radiation which is placed at a second location which is non-collinear with respect to the incident beam. This detector has a position sensitive axis. Digital data is derived from signals produced by the detectors. In this way, data from at least one triangulation-based channel is acquired in parallel or sequentially with at least one slice of confocal image data having substantially perfect temporal and spatial registration with the triangulation-based sensor data. This allows for fusion or further processing of the data for use with a predetermined measurement algorithm to thereby obtain information about the targets.

公开(公告)号：US06750974B2

公开(公告)日：2004-06-15

申请号：US10244891

申请日：2002-09-16

申请人： Donald J. Svetkoff ,  Donald B. T. Kilgus ,  Warren Lin ,  Jonathan S. Ehrmann

发明人： Donald J. Svetkoff ,  Donald B. T. Kilgus ,  Warren Lin ,  Jonathan S. Ehrmann

IPC分类号： G01B1124

CPC分类号： G01N21/95684 ,  G01B11/2518 ,  G01B11/2545

摘要： A system including confocal and triangulation-based scanners or subsystems provides data which is both acquired and processed under the control of a control algorithm to obtain information such as dimensional information about microscopic targets which may be “non-cooperative.” The “non-cooperative” targets are illuminated with a scanning beam of electromagnetic radiation such as laser light incident from a first direction. A confocal detector of the electromagnetic radiation is placed at a first location for receiving reflected radiation which is substantially optically collinear with the incident beam of electromagnetic radiation. The system includes a spatial filter for attenuating background energy. The triangulation-based subsystem also includes a detector of electromagnetic radiation which is placed at a second location which is non-collinear with respect to the incident beam. This detector has a position sensitive axis. Digital data is derived from signals produced by the detectors. In this way, data from at least one triangulation-based channel is acquired in parallel or sequentially with at least one slice of confocal image data having substantially perfect temporal and spatial registration with the triangulation-based sensor data. This allows for fusion or further processing of the data for use with a predetermined measurement algorithm to thereby obtain information about the targets.

摘要翻译： 包括基于共焦和三角测量的扫描仪或子系统的系统提供在控制算法的控制下获取和处理的数据，以获得关于可能是“非合作”的微观目标的尺寸信息。 “非协同”目标用诸如从第一方向入射的激光的电磁辐射扫描束照射。 电磁辐射的共焦检测器被放置在第一位置，用于接收与入射的电磁辐射束基本上光学共线的反射辐射。 该系统包括用于衰减背景能量的空间滤波器。 基于三角测量的子系统还包括电磁辐射检测器，其被放置在相对于入射光束非共线的第二位置。 该检测器具有位置敏感轴。 数字数据源自由检测器产生的信号。 以这种方式，来自至少一个基于三角测量的信道的数据被并行或顺序地与具有基于三角测量的传感器数据具有基本上完美的时间和空间配准的共焦图像数据的至少一个切片获取。 这允许融合或进一步处理与预定测量算法一起使用的数据，从而获得关于目标的信息。

公开(公告)号：US06366357B1

公开(公告)日：2002-04-02

申请号：US09035564

申请日：1998-03-05

申请人： Donald J. Svetkoff ,  Donald B. T. Kilgus ,  Warren Lin ,  Jonathan S. Ehrmann

发明人： Donald J. Svetkoff ,  Donald B. T. Kilgus ,  Warren Lin ,  Jonathan S. Ehrmann

IPC分类号： G01B1124

CPC分类号： G01B11/2545 ,  G01B11/026 ,  G01B11/24 ,  G01B11/2518 ,  G01N21/9501 ,  G02B21/22

摘要： A system including confocal and triangulation-based scanners or subsystems provides data which is both acquired and processed under the control of a control algorithm to obtain information such as dimensional information about microscopic targets which may be “non-cooperative.” The “non-cooperative” targets are illuminated with a scanning beam of electromagnetic radiation such as laser light incident from a first direction. A confocal detector of the electromagnetic radiation is placed at a first location for receiving reflected radiation which is substantially optically collinear with the incident beam of electromagnetic radiation. The system includes a spatial filter for attenuating background energy. The triangulation-based subsystem also includes a detector of electromagnetic radiation which is placed at a second location which is non-collinear with respect to the incident beam. This detector has a position sensitive axis. Digital data is derived from signals produced by the detectors. In this way, data from at least one triangulation-based channel is acquired in parallel or sequentially with at least one slice of confocal image data having substantially perfect temporal and spatial registration with the triangulation-based sensor data. This allows for fusion or further processing of the data for use with a predetermined measurement algorithm to thereby obtain information about the targets.

摘要翻译： 包括基于共焦和三角测量的扫描仪或子系统的系统提供在控制算法的控制下获取和处理的数据，以获得关于可能是“非合作”的微观目标的尺寸信息。 “非协同”目标用诸如从第一方向入射的激光的电磁辐射扫描束照射。 电磁辐射的共焦检测器被放置在第一位置，用于接收与入射的电磁辐射束基本上光学共线的反射辐射。 该系统包括用于衰减背景能量的空间滤波器。 基于三角测量的子系统还包括电磁辐射检测器，其被放置在相对于入射光束非共线的第二位置。 该检测器具有位置敏感轴。 数字数据源自由检测器产生的信号。 以这种方式，来自至少一个基于三角测量的信道的数据被并行或顺序地与具有基于三角测量的传感器数据具有基本上完美的时间和空间配准的共焦图像数据的至少一个切片获取。 这允许融合或进一步处理与预定测量算法一起使用的数据，从而获得关于目标的信息。

公开(公告)号：US06181425B2

公开(公告)日：2001-01-30

申请号：US09419586

申请日：1999-10-18

申请人： Donald J. Svetkoff ,  Donald B. T. Kilgus ,  Warren Lin ,  Jonathan S. Ehrmann

发明人： Donald J. Svetkoff ,  Donald B. T. Kilgus ,  Warren Lin ,  Jonathan S. Ehrmann

IPC分类号： G01B1124

CPC分类号： G01B11/2545 ,  G01B11/026 ,  G01B11/24 ,  G01B11/2518 ,  G01N21/9501 ,  G02B21/22

摘要： A system including confocal and triangulation-based scanners or subsystems provides data which is both acquired and processed under the control of a control algorithm to obtain information such as dimensional information about microscopic targets which may be “non-cooperative.” The “non-cooperative” targets are illuminated with a scanning beam of electromagnetic radiation such as laser light incident from a first direction. A confocal detector of the electromagnetic radiation is placed at a first location for receiving reflected radiation which is substantially optically collinear with the incident beam of electromagnetic radiation. The system includes a spatial filter for attenuating background energy. The triangulation-based subsystem also includes a detector of electromagnetic radiation which is placed at a second location which is non-collinear with respect to the incident beam. This detector has a position sensitive axis. Digital data is derived from signals produced by the detectors. In this way, data from at least one triangulation-based channel is acquired in parallel or sequentially with at least one slice of confocal image data having substantially perfect temporal and spatial registration with the triangulation-based sensor data. This allows for fusion or further processing of the data for use with a predetermined measurement algorithm to thereby obtain information about the targets.

摘要翻译： 包括基于共焦和三角测量的扫描仪或子系统的系统提供在控制算法的控制下获取和处理的数据，以获得关于可能是“非合作”的微观目标的尺寸信息。 “非协同”目标用诸如从第一方向入射的激光的电磁辐射扫描束照射。 电磁辐射的共焦检测器被放置在第一位置，用于接收与入射的电磁辐射束基本上光学共线的反射辐射。 该系统包括用于衰减背景能量的空间滤波器。 基于三角测量的子系统还包括电磁辐射检测器，其被放置在相对于入射光束非共线的第二位置。 该检测器具有位置敏感轴。 数字数据源自由检测器产生的信号。 以这种方式，来自至少一个基于三角测量的信道的数据被并行或顺序地与具有基于三角测量的传感器数据具有基本上完美的时间和空间配准的共焦图像数据的至少一个切片获取。 这允许融合或进一步处理与预定测量算法一起使用的数据，从而获得关于目标的信息。

公开(公告)号：US5993289A

公开(公告)日：1999-11-30

申请号：US35319

申请日：1998-03-05

申请人： Robert F. Allen ,  Paul Holzapfel ,  Anthony L. Bartels ,  Warren Lin

发明人： Robert F. Allen ,  Paul Holzapfel ,  Anthony L. Bartels ,  Warren Lin

IPC分类号： B24B37/04 ,  B24B49/04 ,  B24B49/12 ,  G05B19/401 ,  G05B19/402

CPC分类号： B24B37/0053 ,  B24B37/04 ,  B24B49/04 ,  B24B49/12 ,  G05B19/401 ,  G05B19/402 ,  G05B2219/23231 ,  G05B2219/36372 ,  G05B2219/37002 ,  G05B2219/37117 ,  G05B2219/37125 ,  G05B2219/37266 ,  G05B2219/37283 ,  G05B2219/37286 ,  G05B2219/37573 ,  G05B2219/45232

摘要： A method for detecting the presence of a workpiece on a polishing pad of a chemical mechanical polishing (CMP) machine applies an optical interrogation signal to a workpiece during the CMP process. An optical probe assembly produces a light signal that communicates with the polishing pad; portions of the light signal reflect from the polishing pad in a scattered manner. A light receptor receives reflected light associated with the interrogation signal, and the characteristics of the received light are analyzed and processed by a suitable processor. By analyzing the scattered light signals, the method distinguishes the reflective characteristics of the polishing pad from the reflective characteristics of the workpiece. Thus, the method may be used to detect a lost or broken workpiece in a fast and effective manner.

摘要翻译： 用于检测在化学机械抛光（CMP）机器的抛光垫上的工件的存在的方法在CMP工艺期间向工件应用光学询问信号。 光学探头组件产生与抛光垫连通的光信号; 光信号的一部分以分散的方式从抛光垫反射。 光接收器接收与询问信号相关联的反射光，并且接收的光的特性由合适的处理器分析和处理。 通过分析散射光信号，该方法将抛光垫的反射特性与工件的反射特性区分开。 因此，该方法可以用于以快速有效的方式检测损失或破碎的工件。

公开(公告)号：US5823853A

公开(公告)日：1998-10-20

申请号：US781132

申请日：1997-01-09

申请人： Anthony L. Bartels ,  Robert F. Allen ,  Paul Holzapfel ,  Warren Lin

发明人： Anthony L. Bartels ,  Robert F. Allen ,  Paul Holzapfel ,  Warren Lin

IPC分类号： B24B37/04 ,  B24B49/04 ,  B24B49/12 ,  G05B19/401 ,  G05B19/402 ,  H01L21/304 ,  H01L21/66 ,  B24B49/00

CPC分类号： B24B37/0053 ,  B24B37/04 ,  B24B49/04 ,  B24B49/12 ,  G05B19/401 ,  G05B19/402 ,  G05B2219/23231 ,  G05B2219/36372 ,  G05B2219/37002 ,  G05B2219/37117 ,  G05B2219/37125 ,  G05B2219/37266 ,  G05B2219/37283 ,  G05B2219/37286 ,  G05B2219/37573 ,  G05B2219/45232

摘要： An apparatus for use with a chemical mechanical planarization (CMP) system includes an infrared LED emitter that generates an interrogation signal and directs the interrogation signal toward a polishing pad configured to process a workpiece during the CMP procedure. A reflected signal produced in response to the interrogation signal is received by a detector, and the reflected signal is processed by a converter to produce a control signal having an analog voltage. The control signal is processed and an output is produced indicative of the presence of extraneous material proximate an area of the polishing pad when the analog voltage is measured within a predetermined range. The predetermined voltage range is established such that a variety of polishing pads having different physical characteristics may be employed without altering the position of the emitter or the operating parameters of the apparatus.

摘要翻译： 用于化学机械平面化（CMP）系统的装置包括红外LED发射器，其产生询问信号并将询问信号引导到抛光垫，所述抛光垫被配置为在CMP过程期间处理工件。 响应于询问信号产生的反射信号由检测器接收，并且反射信号由转换器处理以产生具有模拟电压的控制信号。 处理控制信号，并且当在预定范围内测量模拟电压时，产生指示在抛光垫的区域附近存在外来材料的输出。 建立预定电压范围，使得可以采用具有不同物理特性的各种抛光垫，而不改变发射器的位置或装置的操作参数。

公开(公告)号：US20050269174A1

公开(公告)日：2005-12-08

申请号：US10861213

申请日：2004-06-03

申请人： Warren Lin

发明人： Warren Lin

IPC分类号： F16D65/10 ,  F16D65/12

CPC分类号： F16D65/12 ,  F16D2065/1328 ,  F16D2065/1392

摘要： Embodiments of the present invention are directed to disc brake rotor assemblies which include disc brake rotor ring and a disc brake rotor hat. The disc brake rotor ring may include a first side including an inner perimeter and an outer perimeter, a first annular braking surface and a plurality of first mounting flanges positioned along the inner perimeter for affixing a corresponding portion of a rotor hat. Each flange may include an opening for receiving a fastener. The disc brake rotor ring may also include a second side parallel to and spaced apart from the first side thereby jointly defining a plurality of vents there-between, the second side including an inner perimeter and an outer perimeter, a second annular braking surface having and a plurality of second mounting flanges positioned on the inner perimeter of the for affixing a corresponding portion of a rotor hat. Each flange in the second side may also include an opening for receiving a fastener. Either the first side or the second side may be used as an outboard side when the brake rotor assembly is mounted on a wheel hub of a vehicle. In addition, the first mounting flanges may be alternately arranged and spaced apart from the second mounting flanges. The first mounting flanges and second mounting flanges are positioned in a central plane between the first side and the second side and the central plane is substantially parallel to the first side and the second side.

摘要翻译： 本发明的实施例涉及包括盘式制动器转子环和盘式制动器转子帽的盘式制动转子组件。 盘式制动器转子环可以包括包括内周边和外周边的第一侧面，第一环形制动表面和沿着内周边定位的多个第一安装凸缘，用于固定转子帽的对应部分。 每个凸缘可以包括用于接收紧固件的开口。 盘式制动器转子环还可以包括平行于第一侧并与第一侧隔开的第二侧，从而在其之间共同限定多个通风口，第二侧包括内周边和外周边，第二侧具有和 多个第二安装凸缘，其位于用于固定转子帽的对应部分的内周上。 第二侧中的每个凸缘还可以包括用于接收紧固件的开口。 当制动转子组件安装在车辆的轮毂上时，第一侧或第二侧可以用作外侧。 此外，第一安装凸缘可以与第二安装凸缘交替布置和间隔开。 第一安装凸缘和第二安装凸缘位于第一侧和第二侧之间的中心平面中，并且中心平面基本上平行于第一侧和第二侧。

公开(公告)号：US5872633A

公开(公告)日：1999-02-16

申请号：US798803

申请日：1997-02-12

申请人： Paul Holzapfel ,  James Schlueter ,  Chris Karlsrud ,  Warren Lin

发明人： Paul Holzapfel ,  James Schlueter ,  Chris Karlsrud ,  Warren Lin

IPC分类号： B24B49/00 ,  G01B11/06 ,  H01L21/66 ,  B24B49/12

CPC分类号： B24B37/013 ,  B24B49/00 ,  G01B11/0625 ,  H01L22/26 ,  H01L22/12

摘要： The present invention provides methods and apparatus which permit the in-process, in-situ, substantially real time measurement of the actual thickness of a surface layer of a work piece, e.g., a semiconductor wafer. A probe is disposed proximate to the outer perimeter of a polishing pad on a CMP table such that the probe establishes optical contact with the wafer surface as a portion of the wafer extends beyond the outer perimeter of the polishing pad. A nozzle may be provided to apply a stream of compressed air at the disk surface under inspection to thereby remove excess slurry from the local region of the workpiece being inspected. A broad band light source is employed in conjunction with a fiber optic cable to direct light at the wafer surface. A bifurcated probe is employed such that the light applied to the workpiece surface is reflected back to and captured by a corresponding optical sensor connected to a fiber optic cable. The captured reflected light received by the receptor sensor and fiber optic cable assembly is applied to a photospectrum meter which analyzes the reflected light. An output signal from the photospectrum meter is transmitted to a processor which includes a smart algorithm configured to calculate the thickness of the surface layer. Alternatively, the reflective characteristics of the semiconductor layers may affect the nature of the reflected signal; changes in the reflected signal can be detected to indicate when a metallic layer has been removed from an oxide layer.

摘要翻译： 本发明提供了允许在工件中原位实质测量工件例如半导体晶片的表面层的实际厚度的方法和装置。 探针靠近CMP台面上的抛光垫的外周设置，使得当晶片的一部分延伸超过抛光垫的外周边时，探针与晶片表面建立光学接触。 可以设置喷嘴以在被检查的盘表面处施加压缩空气流，从而从被检查的工件的局部区域去除多余的浆料。 宽带光源与光纤电缆结合使用以引导晶片表面的光。 采用分叉探针，使得施加到工件表面的光被反射回并连接到光纤电缆的相应的光学传感器捕获。 由受体传感器和光缆组件接收的所捕获的反射光被施加到分析反射光的光谱仪上。 来自光谱仪的输出信号被传送到处理器，处理器包括配置成计算表面层厚度的智能算法。 或者，半导体层的反射特性可能影响反射信号的性质; 可以检测反射信号的变化，以指示金属层何时从氧化物层去除。