公开(公告)号：US20120145999A1

公开(公告)日：2012-06-14

申请号：US13193690

申请日：2011-07-29

申请人： Dongwoo Suh ,  Sung Bock Kim ,  Hojun Ryu

发明人： Dongwoo Suh ,  Sung Bock Kim ,  Hojun Ryu

IPC分类号： H01L29/775 ,  B82Y40/00 ,  B82Y99/00 ,  H01L21/336

CPC分类号： H01L29/0673 ,  B82Y10/00 ,  B82Y40/00 ,  H01L21/02381 ,  H01L21/0245 ,  H01L21/02532 ,  H01L21/02603 ,  H01L21/02639 ,  H01L21/02645 ,  H01L21/02653 ,  H01L29/068 ,  H01L29/66439 ,  H01L29/775 ,  H01L29/78696 ,  Y10S977/762

摘要： Provided are semiconductor devices and methods of manufacturing the same. The semiconductor device includes a substrate including a first top surface, a second top surface lower in level than the first top surface, and a first perpendicular surface disposed between the first and second top surfaces, a first source/drain region formed under the first top surface, a first nanowire extended from the first perpendicular surface in one direction and being spaced apart from the second top surface, a second nanowire extended from a side surface of the first nanowire in the one direction, being spaced apart from the second top surface, and including a second source/drain region, a gate electrode on the first nanowire, and a dielectric layer between the first nanowire and the gate electrode.

摘要翻译： 提供半导体器件及其制造方法。 该半导体器件包括：衬底，其包括第一顶表面，比第一顶表面低的第二顶表面和设置在第一和第二顶表面之间的第一垂直表面，形成在第一顶表面下的第一源极/漏极区域 表面，在一个方向上从第一垂直表面延伸并与第二顶表面间隔开的第一纳米线，从第一纳米线的沿一个方向的侧表面延伸的第二纳米线，与第二顶表面间隔开， 并且包括第一源极/漏极区域，第一纳米线上的栅电极以及第一纳米线与栅电极之间的介电层。

公开(公告)号：US08993991B2

公开(公告)日：2015-03-31

申请号：US13193690

申请日：2011-07-29

申请人： Dongwoo Suh ,  Sung Bock Kim ,  Hojun Ryu

发明人： Dongwoo Suh ,  Sung Bock Kim ,  Hojun Ryu

IPC分类号： H01L29/06 ,  B82Y10/00 ,  B82Y40/00 ,  H01L29/66 ,  H01L29/775 ,  H01L29/786 ,  H01L21/02

CPC分类号： H01L29/0673 ,  B82Y10/00 ,  B82Y40/00 ,  H01L21/02381 ,  H01L21/0245 ,  H01L21/02532 ,  H01L21/02603 ,  H01L21/02639 ,  H01L21/02645 ,  H01L21/02653 ,  H01L29/068 ,  H01L29/66439 ,  H01L29/775 ,  H01L29/78696 ,  Y10S977/762

摘要： Provided are semiconductor devices and methods of manufacturing the same. The semiconductor device includes a substrate including a first top surface, a second top surface lower in level than the first top surface, and a first perpendicular surface disposed between the first and second top surfaces, a first source/drain region formed under the first top surface, a first nanowire extended from the first perpendicular surface in one direction and being spaced apart from the second top surface, a second nanowire extended from a side surface of the first nanowire in the one direction, being spaced apart from the second top surface, and including a second source/drain region, a gate electrode on the first nanowire, and a dielectric layer between the first nanowire and the gate electrode.

摘要翻译： 提供半导体器件及其制造方法。 该半导体器件包括：衬底，其包括第一顶表面，比第一顶表面低的第二顶表面和设置在第一和第二顶表面之间的第一垂直表面，形成在第一顶表面下的第一源极/漏极区域 表面，在一个方向上从第一垂直表面延伸并与第二顶表面间隔开的第一纳米线，从第一纳米线的沿一个方向的侧表面延伸的第二纳米线，与第二顶表面间隔开， 并且包括第一源极/漏极区域，第一纳米线上的栅电极以及第一纳米线与栅电极之间的介电层。

公开(公告)号：US20080135758A1

公开(公告)日：2008-06-12

申请号：US11776945

申请日：2007-07-12

申请人： Woo Seok YANG ,  Seong Mok Cho ,  Hojun Ryu ,  Byoung Gon Yu

发明人： Woo Seok YANG ,  Seong Mok Cho ,  Hojun Ryu ,  Byoung Gon Yu

IPC分类号： G01J5/00 ,  H01L21/00 ,  H01L27/14

CPC分类号： H01L27/14669 ,  G01J5/20 ,  H01L27/14683

摘要： Provided are a bolometer and a method of manufacturing the bolometer. The bolometer includes: a semiconductor substrate comprising a detection circuit; a reflective layer disposed in an area of a surface of the semiconductor substrate; metal pads disposed on the surface of the semiconductor substrate beside both sides of the reflective layer to keep predetermined distances from the both sides of the reflective layer; and a sensor structure forming a space corresponding to quarter of an infrared wavelength (λ/4) from a surface of the reflective layer and positioned above the semiconductor substrate, wherein the sensor structure includes: a body including a polycrystalline resistive layer formed of one of doped Si and Si1-xGex (where x=0.2˜0.5) to be positioned above the reflective layer; and support arms positioned outside the body to be electrically connected to the metal pads.

摘要翻译： 提供测辐射热度计和制造测辐射热计的方法。 测辐射热计包括：包括检测电路的半导体衬底; 设置在所述半导体衬底的表面的区域中的反射层; 设置在半导体衬底的表面上的金属焊盘，位于反射层的两侧，以保持与反射层两侧的预定距离; 以及传感器结构，其从所述反射层的表面形成对应于红外波长（λ/ 4）的四分之一并位于所述半导体衬底上方的空间，其中所述传感器结构包括：主体，包括由以下之一形成的多晶电阻层： 掺杂的Si和Si 1-x Ge x x（其中x = 0.2〜0.5）位于反射层上方; 以及位于主体外部的支撑臂，以电连接到金属垫。

公开(公告)号：US20050063644A1

公开(公告)日：2005-03-24

申请号：US10794143

申请日：2004-03-04

申请人： Yongwoo Park ,  Hyeon Bong Pyo ,  Dong Suh ,  Yeungjoon Sohn ,  Hojun Ryu ,  Mun Paek

发明人： Yongwoo Park ,  Hyeon Bong Pyo ,  Dong Suh ,  Yeungjoon Sohn ,  Hojun Ryu ,  Mun Paek

IPC分类号： G02B6/122 ,  G11B7/12 ,  G11B11/105 ,  G02B6/26 ,  G02B6/10

CPC分类号： G11B11/10543 ,  B82Y20/00 ,  G02B6/1226 ,  G11B7/124

摘要： A leaky plasmon mode directional coupler and a polarization detection module for a magneto-optical pickup head, which uses the leaky plasmon mode directional coupler, are provided. The leaky plasmon mode directional coupler is manufactured by integrating a planar waveguide and a leaky plasmon mode waveguide, which share a cladding layer with each other, into one body. The polarization detection module includes the leaky plasmon mode directional coupler, a first photo diode, which is formed on the leaky plasmon mode directional coupler, and a second photo diode, which is located at an output port of the planar waveguide.

摘要翻译： 提供一种使用泄漏等离子体激元模式定向耦合器的漏磁等离子体模式定向耦合器和用于磁光拾取头的偏振检测模块。 泄漏等离子体模式定向耦合器通过将平面波导和彼此共享包层的泄漏等离子体模式波导集成为一体来制造。 偏振检测模块包括漏电等离子体模式定向耦合器，形成在泄漏等离子体激元模式定向耦合器上的第一光电二极管和位于平面波导的输出端口处的第二光电二极管。

公开(公告)号：US07899285B2

公开(公告)日：2011-03-01

申请号：US10794143

申请日：2004-03-04

申请人： Yongwoo Park ,  Hyeon Bong Pyo ,  Dong Woo Suh ,  Yeungjoon Sohn ,  Hojun Ryu ,  Mun Cheol Paek

发明人： Yongwoo Park ,  Hyeon Bong Pyo ,  Dong Woo Suh ,  Yeungjoon Sohn ,  Hojun Ryu ,  Mun Cheol Paek

IPC分类号： G02B6/26

CPC分类号： G11B11/10543 ,  B82Y20/00 ,  G02B6/1226 ,  G11B7/124

摘要： A leaky plasmon mode directional coupler and a polarization detection module for a magneto-optical pickup head, which uses the leaky plasmon mode directional coupler, are provided. The leaky plasmon mode directional coupler is manufactured by integrating a planar waveguide and a leaky plasmon mode waveguide, which share a cladding layer with each other, into one body. The polarization detection module includes the leaky plasmon mode directional coupler, a first photo diode, which is formed on the leaky plasmon mode directional coupler, and a second photo diode, which is located at an output port of the planar waveguide.

摘要翻译： 提供一种使用泄漏等离子体激元模式定向耦合器的漏磁等离子体模式定向耦合器和用于磁光拾取头的偏振检测模块。 泄漏等离子体模式定向耦合器通过将平面波导和彼此共享包层的泄漏等离子体模式波导集成为一体来制造。 偏振检测模块包括漏电等离子体模式定向耦合器，形成在泄漏等离子体激元模式定向耦合器上的第一光电二极管和位于平面波导的输出端口处的第二光电二极管。

公开(公告)号：US06999660B2

公开(公告)日：2006-02-14

申请号：US10749349

申请日：2003-12-31

申请人： Yongwoo Park ,  Yeungjoon Sohn ,  Mun-Cheol Paek ,  Dong Woo Suh ,  Hojun Ryu ,  Hyeon-Bong Pyo

发明人： Yongwoo Park ,  Yeungjoon Sohn ,  Mun-Cheol Paek ,  Dong Woo Suh ,  Hojun Ryu ,  Hyeon-Bong Pyo

IPC分类号： G02B6/34

CPC分类号： G02B6/34 ,  G02B6/122 ,  G02B6/124

摘要： Provided is a focusing waveguide grating coupler using a leaky mode which can form single output beam while relieving the dependency on manufacturing processes. The focusing waveguide grating coupler of the present research includes: a substrate having a first refraction index n1; a first core layer having a second refraction index n2, the first core layer being formed on the substrate; a second core layer having a third refraction index n3, the second core layer being formed on the first core layer apart from the first core layer with a space d in between; a first cladding layer having a fourth refraction index n4, the first cladding layer being formed on the second core layer; a second cladding layer having a fifth refraction index n5, the second cladding layer being formed on the first cladding layer and inserted between the first core layer and the second core layer; and a Fresnel lens positioned on the second cladding layer, wherein the refractive indexes satisfy conditions of n5>(n2, n3)>n1 and n5>n4; and light inputted through the first and second core layers to the Fresnel lens as radiated leaky beam by a leaky mode formed according to the conditions, and the leaky beam forms an optical focus by performing single directional coupling.

摘要翻译： 提供了一种使用泄漏模式的聚焦波导光栅耦合器，其可以形成单个输出光束，同时减轻对制造工艺的依赖性。 本研究的聚焦波导光栅耦合器包括：具有第一折射率n1的衬底; 具有第二折射率n2的第一芯层，所述第一芯层形成在所述基板上; 具有第三折射率n3的第二芯层，所述第二芯层与所述第一芯层分开形成在所述第一芯层上，其间具有空间d; 具有第四折射率n4的第一包层，所述第一包层形成在所述第二芯层上; 具有第五折射率n5的第二包层，所述第二包层形成在所述第一包层上并插入在所述第一芯层和所述第二芯层之间; 和位于第二包覆层上的菲涅尔透镜，其中折射率满足n5>（n2，n3）> n1和n5> n4的条件; 以及通过第一和第二核心层通过根据条件形成的泄漏模式作为辐射泄漏波束通过第一和第二核心层输入到菲涅耳透镜的光，并且通过执行单向耦合来形成光学焦点。

公开(公告)号：US20050008294A1

公开(公告)日：2005-01-13

申请号：US10749349

申请日：2003-12-31

申请人： Yongwoo Park ,  Yeungjoon Sohn ,  Mun-Cheol Paek ,  Dong-Woo Suh ,  Hojun Ryu ,  Hyeon-Bong Pyo

发明人： Yongwoo Park ,  Yeungjoon Sohn ,  Mun-Cheol Paek ,  Dong-Woo Suh ,  Hojun Ryu ,  Hyeon-Bong Pyo

IPC分类号： G02B6/28 ,  G02B6/122 ,  G02B6/124 ,  G02B6/34

CPC分类号： G02B6/34 ,  G02B6/122 ,  G02B6/124

摘要： Provided is a focusing waveguide grating coupler using a leaky mode which can form single output beam while relieving the dependency on manufacturing processes. The focusing waveguide grating coupler of the present research includes: a substrate having a first refraction index n1; a first core layer having a second refraction index n2, the first core layer being formed on the substrate; a second core layer having a third refraction index n3, the second core layer being formed on the first core layer apart from the first core layer with a space d in between; a first cladding layer having a fourth refraction index n4, the first cladding layer being formed on the second core layer; a second cladding layer having a fifth refraction index n5, the second cladding layer being formed on the first cladding layer and inserted between the first core layer and the second core layer; and a Fresnel lens positioned on the second cladding layer, wherein the refractive indexes satisfy conditions of n5>(n2, n3)>n1 and n5>n4; and light inputted through the first and second core layers to the Fresnel lens as radiated leaky beam by a leaky mode formed according to the conditions, and the leaky beam forms an optical focus by performing single directional coupling.

摘要翻译： 提供了一种使用泄漏模式的聚焦波导光栅耦合器，其可以形成单个输出光束，同时减轻对制造工艺的依赖性。 本研究的聚焦波导光栅耦合器包括：具有第一折射率n1的衬底; 具有第二折射率n2的第一芯层，所述第一芯层形成在所述基板上; 具有第三折射率n3的第二芯层，所述第二芯层与所述第一芯层分开形成在所述第一芯层上，其间具有空间d; 具有第四折射率n4的第一包层，所述第一包层形成在所述第二芯层上; 具有第五折射率n5的第二包层，所述第二包层形成在所述第一包层上并插入在所述第一芯层和所述第二芯层之间; 和位于第二包覆层上的菲涅尔透镜，其中折射率满足n5>（n2，n3）> n1和n5> n4的条件; 以及通过第一和第二核心层通过根据条件形成的泄漏模式作为辐射泄漏波束通过第一和第二核心层输入到菲涅耳透镜的光，并且通过执行单向耦合来形成光学焦点。