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公开(公告)号：US5385634A
公开(公告)日：1995-01-31
申请号：US43569
申请日：1993-04-07
IPC分类号： H01L21/28 , H01L21/285 , H01L21/3213 , H01L21/336 , H01L21/60 , H01L21/768 , H01L23/485 , H01L29/78 , H01L21/00
CPC分类号： H01L21/76897 , H01L21/28512 , H01L21/76804 , H01L23/485 , H01L2924/0002 , Y10S438/97
摘要： In fabricating a contact window to source/drain electrode next to a gate electrode of an integrated circuit: (1) establishing a structure with a window over the source/drain region next to the gate electrode; (2) establishing a region of titanium silicide over the source/drain electrode and establishing a titanium nitride layer over the window and gate electrode; (3) establishing a layer of silicon nitride over the titanium nitride layer; (4) patterning the silicon nitride layer; (5) using the patterned silicon nitride layer as a mask to pattern the titanium nitride layer; (6) adding another silicon nitride layer to seal the gate electrode where it is not protected by titanium nitride; (7) opening a window over the electrode by an anisotropic etch; (8) widening the window with an isotropic etch, using the silicon nitride and titanium nitride as a protective barrier; and (9) adding contact material in said windows.
摘要翻译： 在制造与集成电路的栅电极相邻的源极/漏电极的接触窗口时：（1）在栅电极旁边的源极/漏极区域上建立具有窗口的结构; （2）在源/漏电极上建立硅化钛区域，并在窗口和栅电极上建立氮化钛层; （3）在氮化钛层上建立氮化硅层; （4）构图氮化硅层; （5）使用图案化氮化硅层作为掩模来图案化氮化钛层; （6）添加另一个氮化硅层以密封其不受氮化钛保护的栅电极; （7）通过各向异性蚀刻在电极上打开窗口; （8）使用氮化硅和氮化钛作为保护屏障，用各向同性蚀刻来加宽窗口; 和（9）在所述窗口中添加接触材料。
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公开(公告)号：US5610099A
公开(公告)日：1997-03-11
申请号：US267278
申请日：1994-06-28
IPC分类号： H01L21/285 , H01L21/336 , H01L21/283
CPC分类号： H01L29/6659 , H01L21/28518
摘要： In fabricating a source/drain electrode of an integrated circuit transistor and a contact window for it: (1) establishing a structure with a window over the source/drain region next to a gate electrode and isolation structure; (2) establishing a dielectric layer covering the isolation structure, the window, and gate electrode; (3) implanting a moderate concentration of impurities into the source/drain region through said dielectric layer so that the moderate concentration region extends partially under the gate electrode; (4) removing the horizontal portions of the dielectric layer with an anisotropic etch thereby leaving the dielectric on vertical side walls; (5) establishing a region of titanium silicide over the moderately dosed source/drain region and establishing a titanium nitride layer over the isolation structure, windows, and gate electrode; (6) establishing a layer of silicon nitride over the titanium nitride layer; (7) implanting the substrate with a relatively heavier dose of ions through the silicon nitride, titanium nitride, and titanium silicide layers to create a heavier concentration source/drain region intersecting said moderate concentration region, where the heavy concentration region does not underlie the gate electrode; (8) patterning the silicon nitride layer; (9) using the patterned silicon nitride layer as a mask to pattern the titanium nitride layer; (10) adding thick interlevel dielectric over the patterned nitride layers; (11) opening windows over the electrodes; and (12) adding contact material in said windows.
摘要翻译： 在制造集成电路晶体管的源极/漏极电极及其接触窗口时：（1）在栅极电极和隔离结构旁边的源极/漏极区域上建立具有窗口的结构; （2）建立覆盖隔离结构，窗口和栅电极的电介质层; （3）通过所述电介质层将中等浓度的杂质注入源极/漏极区域，使得中等浓度区域部分地延伸到栅电极下方; （4）用各向异性蚀刻去除电介质层的水平部分，从而将电介质留在垂直侧壁上; （5）在中等剂量的源极/漏极区域上建立硅化钛区域，并在隔离结构，窗口和栅电极上建立氮化钛层; （6）在氮化钛层上建立氮化硅层; （7）通过氮化硅，氮化钛和硅化钛层将相对较重剂量的离子注入衬底以产生与所述中等浓度区域相交的较重的浓度源/漏区，其中重浓度区域不位于栅极 电极; （8）构图氮化硅层; （9）使用图案化的氮化硅层作为掩模来图案化氮化钛层; （10）在图案化的氮化物层上添加厚的层间电介质; （11）在电极上打开窗户; 和（12）在所述窗口中添加接触材料。
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公开(公告)号：US20090127399A1
公开(公告)日：2009-05-21
申请号：US11955612
申请日：2007-12-13
申请人： George E. Mueller , Gary Lai , Thomas C. Taylor
发明人： George E. Mueller , Gary Lai , Thomas C. Taylor
摘要： An experiment system with six different re-entry experiment locations for testing high temperature re-entry materials, creating new thermal protection systems, proving innovative new concepts for spacecraft exterior surfaces and the incremental development of next generation aerospace materials. A commercial transportation system to and from orbit provides a 24-hour return cycle for the experiments on a surface actually re-entering the earth's atmosphere. Now using existing doors, hatches and other points on the reusable launch vehicle's exterior, the actual re-entry environment is experienced by test specimens with quick turn around for a wide variety of different re-entry temperatures ranges for broad testing and development purposes. The reusable launch vehicle launches, remains in orbit for 24 hours and returns to provide an actual test environment for the exterior experiment system.
摘要翻译： 具有六个不同重新进入实验位置的实验系统，用于测试高温重入物料，创建新的热保护系统，为航天器外表面提供创新的新概念，以及下一代航空材料的增量开发。 往返轨道的商业运输系统为实际重新进入地球大气层的表面提供了24小时的循环。 现在在可重复使用的运载火箭的外部使用现有的门，舱口和其他点，实际的重入环境经历了快速转弯的各种不同的重新进入温度范围，用于广泛的测试和开发目的。 可重复使用的运载火箭发射，保持在轨道上24小时，并返回，为外部实验系统提供实际的测试环境。
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公开(公告)号：US06439508B1
公开(公告)日：2002-08-27
申请号：US09686145
申请日：2000-10-10
申请人： Thomas C. Taylor
发明人： Thomas C. Taylor
IPC分类号： B64G110
CPC分类号： B64G1/60 , B64G1/12 , B64G1/56 , B64G1/641 , B64G2001/224
摘要： An improved inflatable habitation volume in space comprising reduced cost, improved debris impact protection, enhanced penetration resistance, self sealing qualities, innovative flat end caps, industry accepted commercial design/manufacturing techniques, enhanced inflatable assembly techniques and expanded interior volume. Costs are reduced by compressing the launch package, removing the three gravity launch load requirements from the transportation process and inflating in microgravity. The inflatable habitation volume unit can be connected to either existing orbital facilities or connected to similar units to create expanded volumes and space tourist torus structures rotated for partial gravity.
摘要翻译： 空间中的改善的充气居住体积包括降低的成本，改进的碎片冲击保护，增强的穿透阻力，自密封性质，创新的扁平端盖，业界公认的商业设计/制造技术，增强的充气组装技术和扩大的内部容积。 通过压缩发射包降低成本，消除运输过程中的三个重力发射载荷要求，并在微重力中膨胀。 可充气居住体积单元可以连接到现有的轨道设施或连接到类似的单元，以产生扩展的体积和空间的旅游环形结构旋转以进行部分重力。
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5.发明授权
公开(公告)号：US5927653A
公开(公告)日：1999-07-27
申请号：US632786
申请日：1996-04-17
申请人： George E. Mueller , Walter P. Kistler , Thomas G. Johnson , Henry O. Pohl , Chris McLain , Allan S. Hill , Jason E. Andrews , Thomas C. Taylor , Aaron Cohen , Dale Myers , Adam P. Bruckner , Steven C. Knowles , Richard Warwick
发明人： George E. Mueller , Walter P. Kistler , Thomas G. Johnson , Henry O. Pohl , Chris McLain , Allan S. Hill , Jason E. Andrews , Thomas C. Taylor , Aaron Cohen , Dale Myers , Adam P. Bruckner , Steven C. Knowles , Richard Warwick
摘要： A two-stage wingless reusable aerospace vehicle having upper and lower stages that take off from a take-off area and separate at a separation point along a first trajectory. The separation forces are generated by air retained between the upper and lower stages, which is at a pressure higher than ambient pressure at the separation point. The lower stage is then propelled along a return trajectory to a landing area. After separation from the lower stage, the upper stage continues to an Earth orbit for deployment of a payload. After deploying the payload, the upper stage moves out of the Earth orbit, re-enters the Earth's atmosphere, and returns to the take-off and landing area. The upper and lower stages are powered by liquid oxygen and kerosene engines. The aerospace vehicle is transported to a take-off area by a transport vehicle having a first fixed carriage and a second translatable carriage that is adapted to move the upper stage relative to the lower stage for assembly of the aerospace vehicle while in the horizontal position. The transport vehicle then pivots the aerospace vehicle from the horizontal to the vertical position for launching.
摘要翻译： 一种两级无翼可重复使用的航空航天器，具有从起飞区域起飞并且沿着第一轨迹在分离点分离的上段和下段。 分离力由保持在上部和下部之间的空气产生，其处于高于分离点处的环境压力的压力。 然后，下阶段沿着返回轨迹被推进到着陆区域。 在与下级分离之后，上级继续到地球轨道，用于部署有效载荷。 部署有效载荷后，上级移出地球轨道，重新进入地球大气层，返回起飞和着陆区域。 上层和下层由液氧和煤油发动机提供动力。 航空航天车辆通过具有第一固定支架和第二可平移滑架的运输车辆被运送到起飞区域，该第二可平移滑架适于在水平位置组装航空航天器时相对于下部台阶移动。 然后，运输车辆将航空航天器从水平轴枢转到用于发射的垂直位置。
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公开(公告)号：US4867395A
公开(公告)日：1989-09-19
申请号：US858739
申请日：1986-05-01
申请人： Thomas C. Taylor , Robert A. Citron
发明人： Thomas C. Taylor , Robert A. Citron
摘要： A module incorporating at least one flat end cap is positioned within the payload of the Space Shuttle or other space vehicle to enhance the capabilities of the payload area. The flat end cap reduces the required volume in the launch vehicle to be occupied by the module and provides for efficient use of the interior space of the Space Shuttle by providing more flat surfaces to which necessary equipment can be fastened. The module is truncated, thus adding another flat surface, i.e., a ceiling, to the interior of the vehicle. The truncated top of the module is capable of separate integration and carries additional experiments within racks which can be attached to its interior surface. The module can be fabricated from aluminum members in an aircraft type fashion of construction, or can be assembled from existing or modified Space Lab hardware. The module provides a full scope of services within its pressurized interior and will enhance the carrying capability of the shuttle with respect to handling both personnel and cargo.
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公开(公告)号：US07562670B1
公开(公告)日：2009-07-21
申请号：US11412786
申请日：2006-04-28
IPC分类号： F16K17/40
CPC分类号： F16K17/40 , Y10T137/1767 , Y10T137/6123
摘要： A thin diaphragm valve includes a base plate attached to a valve attach plate. A diaphragm is positioned between the plates to move between open and closed positions. A spring can be provided between the diaphragm and a sealing flange of a pipe. Because no sliding friction occurs between sealing surfaces, wear is reduced and leakage is also reduced. A pierceable membrane can also be added to provide additional security.
摘要翻译： 薄隔膜阀包括附接到阀附接板的基板。 隔板位于板之间，以在打开和关闭位置之间移动。 可以在隔膜和管道的密封凸缘之间设置弹簧。 由于密封面之间不产生滑动摩擦，所以磨损减少，泄漏也减少。 也可以添加可刺破的膜以提供额外的安全性。
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公开(公告)号：US07503526B1
公开(公告)日：2009-03-17
申请号：US11232932
申请日：2005-09-23
IPC分类号： B64G1/28
CPC分类号： B64G1/34 , B64G1/002 , B64G1/12 , B64G1/14 , B64G1/402 , B64G1/50 , B64G1/62 , B64G1/646 , B64G1/648
摘要： A transportation node system orbits a celestial body. The node system includes a truss having two ends, the truss rotating around its center of mass while orbiting the celestial body. The truss stores payloads. The node system also includes tether tips, each attached to one end of the truss via a tether so that each tether tip can extend from the truss and retract to the truss for transfer of payloads. The tether runs through the length of the truss and connects to each tether tip, each tether tip being capable of engaging payloads. The node further includes at least one tether cable reel that reels in and reels out the tether so the tether tips can extend from and retract to the truss.
摘要翻译： 运输节点系统绕着天体。 节点系统包括具有两端的桁架，桁架围绕其中心旋转，同时绕着天体转动。 桁架存储有效载荷。 节点系统还包括系绳末端，每个系绳尖通过系绳连接到桁架的一端，使得每个系绳尖端可以从桁架延伸并缩回到桁架以传送有效载荷。 系绳穿过桁架的长度并连接到每个系绳尖端，每个系绳尖端能够接合有效载荷。 节点还包括至少一个系绳电缆卷轴，其卷绕并卷出系绳，使得系绳尖端可以从桁架延伸并缩回到桁架。
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公开(公告)号：US07156348B1
公开(公告)日：2007-01-02
申请号：US11076926
申请日：2005-03-11
IPC分类号： B64G1/64
CPC分类号： B64G1/402 , B64G1/1078 , B64G1/26 , B64G1/401 , B64G1/646 , F17C13/088 , F17C2201/0104 , F17C2205/0107 , F17C2205/013 , F17C2205/032 , F17C2205/0364 , F17C2205/0376 , F17C2221/011 , F17C2221/012 , F17C2223/0161 , F17C2223/033 , F17C2270/0194 , Y02E60/321
摘要： A platform for storage and transfer of propellant tanks in space includes frames configured to releasably support plural propellant tanks in storage positions, and transfer mechanisms configured to transfer propellant tanks to and from the storage positions. The platform includes a central structure to which the plural frames are connected at predetermined spaced intervals. The transfer mechanisms include extendable telescoping arms mounted to the central structure. The arms have end effectors configured to grip bands on propellant tanks. Two platforms may be positioned adjacent each other for the transfer of propellant tanks therebetween.
摘要翻译： 用于在空间中存储和传送推进剂罐的平台包括被配置为将多个推进剂罐可释放地支撑在储存位置的框架，以及构造成将推进剂罐传送到存储位置和从储存位置传送推进剂罐的传送机构。 平台包括以预定间隔的间隔连接多个框架的中心结构。 传送机构包括安装在中央结构上的伸缩臂。 臂具有构造成抓住推进剂罐上的带的末端效应器。 两个平台可以彼此相邻地定位以在其间传送推进剂罐。
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10.发明授权Fabrication of metal-ferroelectric-metal capacitors with a two step patterning sequence 失效金属 - 铁电 - 金属电容器的制造，具有两步图案化顺序
公开(公告)号：US5789323A
公开(公告)日：1998-08-04
申请号：US428544
申请日：1995-04-25
申请人： Thomas C. Taylor
发明人： Thomas C. Taylor
IPC分类号： H01L21/02 , H01L21/302
CPC分类号： H01L28/60
摘要： A method of fabricating a metal-ferroelectric-metal ("MFM") capacitor includes the steps of depositing a silicon dioxide layer on a silicon or other substrate, a lower platinum or other noble metal electrode, a PZT or other ferroelectric material dielectric layer, and an upper platinum or other noble metal electrode. The upper electrode and ferroelectric dielectric layer are patterned and etched according to a first pattern corresponding to the final dimensions of the ferroelectric dielectric layer. The upper electrode and lower electrode are subsequently patterned and etched according to a second pattern corresponding to the final dimensions of one or more upper electrodes and the final extent of the lower electrode. The second etching step leaves a benign vestigial upper electrode feature. An oxide layer is finally deposited over the entire surface of the MFM capacitor structure, which is etched and metalized over desired upper and lower electrode contacts.
摘要翻译： 制造金属 - 铁电体（“MFM”）电容器的方法包括以下步骤：在硅或其它基底，下部铂金或其它贵金属电极，PZT或其它铁电材料电介质层上沉积二氧化硅层， 和上铂金或其他贵金属电极。 根据对应于铁电介质层的最终尺寸的第一图案，对上电极和铁电介质层进行图案化和蚀刻。 随后根据对应于一个或多个上电极的最终尺寸和下电极的最终尺寸的第二图案对上电极和下电极进行图案化和蚀刻。 第二蚀刻步骤留下良性残留的上电极特征。 氧化层最终沉积在MFM电容器结构的整个表面上，该MFM电容器结构在所需的上部和下部电极触点上被蚀刻和金属化。
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