公开(公告)号：US20160368086A1

公开(公告)日：2016-12-22

申请号：US15180709

申请日：2016-06-13

Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC. ,  Association Alphanov, Centre Technologique Optique et Laser

Inventor： Geoffrey Lott ,  Nicolas Falletto ,  Rainer Kling

IPC: B23K26/0622 ,  B23K26/08 ,  B23K26/402 ,  C03B33/08 ,  B23K26/382

CPC classification number: B23K26/0624 ,  B23K26/082 ,  B23K26/389 ,  B23K26/402 ,  B23K2101/40 ,  B23K2103/50 ,  B23K2103/54 ,  C03B33/0222 ,  C03B33/04 ,  Y02P40/57

Abstract: A method for forming features in a substrate includes irradiating a substrate with a beam of laser pulses, wherein the laser pulses have a wavelength selected such that the beam of laser pulses is transmitted into an interior of the substrate through a first surface of the substrate. The beam of laser pulses is focused to form a beam waist at or near a second surface of the substrate, wherein the second surface is spaced apart from the first surface along a z-axis direction, and the beam waist is translated in a spiral pattern extending from the second surface of the substrate toward the first surface of the substrate. The beam of laser pulses is characterized by a pulse repetition rate in a range from 20 kHz to 3 MHz, a pulse duration, a pulse overlap, and a z-axis translation speed.

Abstract translation: 用于在衬底中形成特征的方法包括用激光脉冲束照射衬底，其中激光脉冲具有选择的波长，使得激光束的束通过衬底的第一表面传输到衬底的内部。 激光脉冲束被聚焦以在基板的第二表面处或附近形成束腰，其中第二表面沿着z轴方向与第一表面间隔开，并且光束腰部以螺旋图案平移 从基板的第二表面朝向基板的第一表面延伸。 激光脉冲束的特征在于在20kHz至3MHz的范围内的脉冲重复率，脉冲持续时间，脉冲重叠和z轴平移速度。

公开(公告)号：US20210362277A1

公开(公告)日：2021-11-25

申请号：US17047254

申请日：2019-06-04

Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.

Inventor： Patrick Riechel ,  Mark Unrath ,  Jake Roberts ,  Joseph Hasty ,  James Brookhyser ,  Zachary Dunn ,  Christopher Hamner ,  Geoffrey Lott ,  Jacob Magers ,  Jack Rundel ,  Jeffrey Howerton ,  Jan Kleinert ,  Doug Hall ,  Gary Larsen ,  Julie Wilson ,  Lee Petersen ,  Mark Wegner ,  Kurt Eaton

IPC: B23K26/70 ,  B23K26/08 ,  B23K26/03 ,  B23K26/067 ,  B23K26/082 ,  B65H18/10 ,  G02F1/33 ,  G02B27/10

Abstract: Apparatus and techniques for laser-processing workpieces can be improved, and new functionalities can be provided. Some embodiments discussed relate to use of beam characterization tools to facilitate adaptive processing, process control and other desirable features. Other embodiments relate to laser power sensors incorporating integrating spheres. Still other embodiments relate to workpiece handling systems capable of simultaneously providing different workpieces to a common laser-processing apparatus. A great number of other embodiments and arrangements are also detailed.