公开(公告)号：US20210362277A1

公开(公告)日：2021-11-25

申请号：US17047254

申请日：2019-06-04

Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.

Inventor： Patrick Riechel ,  Mark Unrath ,  Jake Roberts ,  Joseph Hasty ,  James Brookhyser ,  Zachary Dunn ,  Christopher Hamner ,  Geoffrey Lott ,  Jacob Magers ,  Jack Rundel ,  Jeffrey Howerton ,  Jan Kleinert ,  Doug Hall ,  Gary Larsen ,  Julie Wilson ,  Lee Petersen ,  Mark Wegner ,  Kurt Eaton

IPC: B23K26/70 ,  B23K26/08 ,  B23K26/03 ,  B23K26/067 ,  B23K26/082 ,  B65H18/10 ,  G02F1/33 ,  G02B27/10

Abstract: Apparatus and techniques for laser-processing workpieces can be improved, and new functionalities can be provided. Some embodiments discussed relate to use of beam characterization tools to facilitate adaptive processing, process control and other desirable features. Other embodiments relate to laser power sensors incorporating integrating spheres. Still other embodiments relate to workpiece handling systems capable of simultaneously providing different workpieces to a common laser-processing apparatus. A great number of other embodiments and arrangements are also detailed.

公开(公告)号：US20190001442A1

公开(公告)日：2019-01-03

申请号：US15750140

申请日：2016-09-08

Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.

Inventor： Mark Unrath ,  Chuan Yang ,  Jan Kleinert ,  Mark Peeples ,  Hugh Owens ,  Gwendolyn Byrne ,  Haibin Zhang ,  Justin Redd ,  Corie Neufeld ,  James D. Brookhyser ,  Yasu Osako ,  Mehmet Alpay ,  Zhibin Lin ,  Patrick Riechel ,  Tim Nuckolls ,  Hisashi Matsumoto ,  Chris Ryder

IPC: B23K26/382 ,  B23K26/082 ,  B23K26/70 ,  B23K26/0622

Abstract: Apparatus and techniques for laser-processing workpieces can be improved, and new functionalities can be provided. Some embodiments discussed relate to processing of workpieces in a manner resulting in enhanced accuracy, throughput, etc. Other embodiments relate to realtime Z-height measurement and, when suitable, compensation for certain Z-height deviations. Still other embodiments relate to modulation of scan patterns, beam characteristics, etc., to facilitate feature formation, avoid undesirable heat accumulation, or otherwise enhance processing throughput. A great number of other embodiments and arrangements are also detailed.

公开(公告)号：US20140110384A1

公开(公告)日：2014-04-24

申请号：US14059029

申请日：2013-10-21

Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.

Inventor： Jan Kleinert ,  Robert Reichenbach ,  Mark Unrath ,  Hisashi Matsumoto ,  Jefferey Howerton ,  Mehmet E. Alpay ,  Andy MOORE

IPC: B23K26/00

CPC classification number: B23K26/082 ,  B23K26/0006 ,  B23K26/009 ,  B23K26/352

Abstract: The invention is a method and an apparatus for marking an article and the article thus marked. It includes providing the article. Generating a plurality of groups of laser pulses. At least one of the plurality of groups is generated by modulating a beam of laser pulses to form a plurality of beamlets. Each, of the plurality of beamlets, include at least one laser pulse. It also includes directing the plurality of groups of laser pulses onto the article such that laser pulses within the at least one of the plurality of groups impinge upon the article at spot areas that do not overlap one another, wherein laser pulses within the plurality of groups are configured to produce a visible mark on the article.

Abstract translation: 本发明是用于标记物品和如此标记的物品的方法和装置。 它包括提供文章。 产生多组激光脉冲。 通过调制激光脉冲束来形成多个子束中的至少一个组。 多个子束中的每一个包括至少一个激光脉冲。 它还包括将多组激光脉冲引导到物品上使得多个组中的至少一个组内的激光脉冲在不彼此重叠的斑点区域处撞击物品，其中多个组内的激光脉冲 被配置为在物品上产生可见标记。

公开(公告)号：US10118252B2

公开(公告)日：2018-11-06

申请号：US14707950

申请日：2015-05-08

Applicant: Electro Scientific Industries, Inc.

Inventor： Yasu Osako ,  Mark Unrath ,  Mark Kosmowski

IPC: B23K26/08 ,  B23K26/38

Abstract: Systems and methods for laser processing continuously moving sheet material include one or more laser processing heads configured to illuminate the moving sheet material with one or more laser beams. The sheet material may include, for example, an optical film continuously moving from a first roller to a second roller during a laser process. In one embodiment, a vacuum chuck is configured to removably affix a first portion of the moving sheet material thereto. The vacuum chuck controls a velocity of the moving sheet material as the first portion is processed by the one or more laser beams. In one embodiment, a conveyor includes a plurality of vacuum chucks configured to successively affix to different portions of the sheet material during laser processing.

公开(公告)号：US10213871B2

公开(公告)日：2019-02-26

申请号：US14059029

申请日：2013-10-21

Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.

Inventor： Jan Kleinert ,  Robert Reichenbach ,  Mark Unrath ,  Hisashi Matsumoto ,  Jefferey Howerton ,  Mehmet E. Alpay ,  Andy Moore

IPC: B23K26/00 ,  B23K26/02 ,  B23K26/082 ,  B23K26/352

Abstract: The invention is a method and an apparatus for marking an article and the article thus marked. It includes providing the article. Generating a plurality of groups of laser pulses. At least one of the plurality of groups is generated by modulating a beam of laser pulses to form a plurality of beamlets. Each, of the plurality of beamlets, include at least one laser pulse. It also includes directing the plurality of groups of laser pulses onto the article such that laser pulses within the at least one of the plurality of groups impinge upon the article at spot areas that do not overlap one another, wherein laser pulses within the plurality of groups are configured to produce a visible mark on the article.

公开(公告)号：US20150239064A1

公开(公告)日：2015-08-27

申请号：US14707950

申请日：2015-05-08

Applicant: Electro Scientific Industries, Inc.

Inventor： Yasu Osako ,  Mark Unrath ,  Mark Kosmowski

IPC: B23K26/08 ,  B23K26/38

CPC classification number: B23K26/0846 ,  B23K26/38

Abstract: Systems and methods for laser processing continuously moving sheet material include one or more laser processing heads configured to illuminate the moving sheet material with one or more laser beams. The sheet material may include, for example, an optical film continuously moving from a first roller to a second roller during a laser process. In one embodiment, a vacuum chuck is configured to removably affix a first portion of the moving sheet material thereto. The vacuum chuck controls a velocity of the moving sheet material as the first portion is processed by the one or more laser beams. In one embodiment, a conveyor includes a plurality of vacuum chucks configured to successively affix to different portions of the sheet material during laser processing.

Abstract translation: 用于激光处理连续移动的片材的系统和方法包括一个或多个激光处理头，其被配置为用一个或多个激光束照射移动片材。 片材可以包括例如在激光处理期间从第一辊连续地移动到第二辊的光学膜。 在一个实施例中，真空卡盘构造成将可动片材的第一部分可拆卸地固定到其上。 当第一部分被一个或多个激光束处理时，真空吸盘控制移动片材的速度。 在一个实施例中，输送机包括多个真空卡盘，其构造成在激光加工期间连续地贴附到片材的不同部分。