公开(公告)号：US20210362277A1

公开(公告)日：2021-11-25

申请号：US17047254

申请日：2019-06-04

Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.

Inventor： Patrick Riechel ,  Mark Unrath ,  Jake Roberts ,  Joseph Hasty ,  James Brookhyser ,  Zachary Dunn ,  Christopher Hamner ,  Geoffrey Lott ,  Jacob Magers ,  Jack Rundel ,  Jeffrey Howerton ,  Jan Kleinert ,  Doug Hall ,  Gary Larsen ,  Julie Wilson ,  Lee Petersen ,  Mark Wegner ,  Kurt Eaton

IPC: B23K26/70 ,  B23K26/08 ,  B23K26/03 ,  B23K26/067 ,  B23K26/082 ,  B65H18/10 ,  G02F1/33 ,  G02B27/10

Abstract: Apparatus and techniques for laser-processing workpieces can be improved, and new functionalities can be provided. Some embodiments discussed relate to use of beam characterization tools to facilitate adaptive processing, process control and other desirable features. Other embodiments relate to laser power sensors incorporating integrating spheres. Still other embodiments relate to workpiece handling systems capable of simultaneously providing different workpieces to a common laser-processing apparatus. A great number of other embodiments and arrangements are also detailed.

公开(公告)号：US11260472B2

公开(公告)日：2022-03-01

申请号：US16464551

申请日：2017-12-28

Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.

Inventor： Patrick Riechel

IPC: B23K26/082 ,  B23K26/0622 ,  B23K26/00 ,  B23K26/06 ,  B23K26/08 ,  B23K101/36

Abstract: Methods and apparatus for extending the lifetime of optical components are disclosed. A beam of laser energy directed along a beam path that intersects a scan lens, through which it can be transmitted. The beam path can be deflected within a scan region of the scan lens to process a workpiece with the laser energy transmitted by the scan lens. The scan region can be shifted to a different location within the scan lens, e.g., to delay or avoid accumulation of laser-induced damage within the scan lens, while processing a workpiece.

公开(公告)号：US20210107091A1

公开(公告)日：2021-04-15

申请号：US16464551

申请日：2017-12-28

Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.

Inventor： Patrick Riechel

IPC: B23K26/082 ,  B23K26/00 ,  B23K26/06 ,  B23K26/08 ,  B23K26/0622

Abstract: Methods and apparatus for extending the lifetime of optical components are disclosed. A beam of laser energy directed along a beam path that intersects a scan lens, through which it can be transmitted. The beam path can be deflected within a scan region of the scan lens to process a workpiece with the laser energy transmitted by the scan lens. The scan region can be shifted to a different location within the scan lens, e.g., to delay or avoid accumulation of laser-induced damage within the scan lens, while processing a workpiece.

公开(公告)号：US20190001442A1

公开(公告)日：2019-01-03

申请号：US15750140

申请日：2016-09-08

Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.

Inventor： Mark Unrath ,  Chuan Yang ,  Jan Kleinert ,  Mark Peeples ,  Hugh Owens ,  Gwendolyn Byrne ,  Haibin Zhang ,  Justin Redd ,  Corie Neufeld ,  James D. Brookhyser ,  Yasu Osako ,  Mehmet Alpay ,  Zhibin Lin ,  Patrick Riechel ,  Tim Nuckolls ,  Hisashi Matsumoto ,  Chris Ryder

IPC: B23K26/382 ,  B23K26/082 ,  B23K26/70 ,  B23K26/0622

Abstract: Apparatus and techniques for laser-processing workpieces can be improved, and new functionalities can be provided. Some embodiments discussed relate to processing of workpieces in a manner resulting in enhanced accuracy, throughput, etc. Other embodiments relate to realtime Z-height measurement and, when suitable, compensation for certain Z-height deviations. Still other embodiments relate to modulation of scan patterns, beam characteristics, etc., to facilitate feature formation, avoid undesirable heat accumulation, or otherwise enhance processing throughput. A great number of other embodiments and arrangements are also detailed.