公开(公告)号：US20230307883A1

公开(公告)日：2023-09-28

申请号：US18326463

申请日：2023-05-31

申请人： ELECTRO SCIENTIFIC INDUSTRIES, INC.

发明人： James BROOKHYSER ,  Jan KLEINERT ,  Jered RICHTER

IPC分类号： H01S3/106 ,  G02B6/42 ,  G02F1/00 ,  G02F1/29 ,  G02F1/33 ,  H01S5/12 ,  H01S5/14 ,  G02B26/06

CPC分类号： H01S3/1068 ,  G02B6/42 ,  G02F1/00 ,  G02F1/292 ,  G02F1/33 ,  H01S5/124 ,  H01S5/145 ,  G02B26/06

摘要： A beam positioner for deflecting a beam path, along which a diffracted beam of linearly polarized laser light is propagatable, within a two-dimensional scan field, the beam positioner includes a first acousto-optic deflectors (AOD) to deflect the beam path within a first one-dimensional scan field extending along a first axis of the two-dimensional scan field, a second AOD to deflect the beam path within a second one-dimensional scan field extending along a second axis of the two-dimensional scan field, a phase retarder arranged between the first AOD and the second AOD and within the beam path along which the beam of laser light is propagatable from the first AOD and a mirror arranged between the first AOD and the second AOD and within the beam path along which the beam of laser light is propagatable from the first AOD.

公开(公告)号：US20230390866A1

公开(公告)日：2023-12-07

申请号：US18252059

申请日：2021-11-23

申请人： ELECTRO SCIENTIFIC INDUSTRIES, INC.

发明人： James BROOKHYSER ,  Jan KLEINERT ,  Jered RICHTER ,  Mark UNRATH

IPC分类号： B23K26/082 ,  B23K26/06

CPC分类号： B23K26/0821 ,  B23K26/0648 ,  B23K26/0676 ,  B23K26/0643 ,  B23K26/0665

摘要： Numerous embodiments of optical relay systems are disclosed. In one embodiment, a laser-processing apparatus includes an optical relay system configured to correct for beam placement errors by maintaining the optical path length of a beam of laser energy between a first positioner and a scan lens. In another embodiment, the optical relay system may include a first lens, a second lens, and a zoom lens assembly arranged between the first lens and the second lens, wherein the zoom lens assembly includes a first lens group and a second lens group. The zoom lens assembly may be movable relative to the first lens and the second lens (e.g., mounted on a positioner, such as a motion stage). The distance between the lenses of the first lens group and the distance between the lenses of the second lens group may be fixed or variable.

公开(公告)号：US20230420905A1

公开(公告)日：2023-12-28

申请号：US18253997

申请日：2021-11-11

申请人： ELECTRO SCIENTIFIC INDUSTRIES, INC.

发明人： Brian JOHANSEN ,  Tyler HOWE ,  Mehmet ALPAY ,  James BROOKHYSER ,  Jered RICHTER

IPC分类号： H01S3/106 ,  G02F1/33

CPC分类号： H01S3/1068 ,  G02F1/332 ,  G02F2203/22

摘要： An apparatus includes an acousto-optical deflector (AOD) system operative to deflect a beam of laser energy within a two-dimensional scan field. The AOD system includes a first AOD operative to deflect the beam of laser energy along a first axis of the two-dimensional scan field; a second AOD arranged optically downstream of the first AOD, wherein the second AOD is operative to deflect the beam of laser energy along a second axis of the two-dimensional scan field; and a controller operatively coupled to the AOD system. The controller is configured to drive each of the first AOD and the second AOD to deflect the beam of laser energy within the two-dimensional scan field and is further configured to drive the first AOD and the second AOD at at least substantially the same diffraction efficiency.