公开(公告)号：US10217655B2

公开(公告)日：2019-02-26

申请号：US15536980

申请日：2015-12-18

Applicant: ENTEGRIS, INC.

Inventor： Ryan Mushel ,  Jason T. Steffens

IPC: H01L21/673

Abstract: A front opening wafer container has a container portion and a door sized to close an open front of the container portion. The container portion has shelves for holding wafers defining a seating position and has forward and rearward wafer supports to suspend wafers therebetween in a transport position above the seating position. Shock condition cushion portions are arranged adjacent the transport position for protecting the wafers during a shock condition. The wafers may be bonded wafers having a thinned wafer side and a carrier substrate side. Wafer engagement pads and finger members extend in opposing directions from a central strip on the door providing a balance wafer engagement. When closing the door, a primary wafer support portion engages the wafers first and a secondary elastomeric wafer support engages the wafer secondly. A V-groove for receiving the wafers in the wafer supports has a greater angle defined between the V-groove and the thinned wafer side than the angle defined between the V-groove and carrier substrate side providing enhanced protection for the bonded wafers.

公开(公告)号：USD767234S1

公开(公告)日：2016-09-20

申请号：US29519122

申请日：2015-03-02

Applicant: ENTEGRIS, INC.

Designer： Eric A. Kirkland ,  Russ V. Raschke ,  Jason T. Steffens

公开(公告)号：US11581209B2

公开(公告)日：2023-02-14

申请号：US17091642

申请日：2020-11-06

Applicant: ENTEGRIS, INC.

Inventor： Jason T. Steffens ,  Andrew Harris ,  Michael C. Zabka ,  B. Jorden Lundgren ,  Bryant L. Lymburn

IPC: H01L21/673

Abstract: Environmental control material holders can retain environmental control material within wafer carriers, allowing the environmental control material to protect wafers from moisture while also securing the environmental control material. The environmental control material holders may include a baseplate and tabs defining spaces to hold environmental control material, and can be configured to engage a handle of a wafer cassette. The environmental control material holders may retain one or more environmental control materials. Additionally, the environmental control material holders can be configured to also retain a humidity indicator.

公开(公告)号：US10593577B2

公开(公告)日：2020-03-17

申请号：US15480736

申请日：2017-04-06

Applicant: Entegris, Inc.

Inventor： Russ V. Raschke ,  Jason T. Steffens

IPC: H01L21/673 ,  H01L21/67

Abstract: A reticle container for containing a reticle including a base plate having one or more windows. Each of the windows can include mounting recess having a recess sidewall including an undercut defined therein. A transparent substrate can be disposed in the mounting recess and is retained therein by a retention member having an arcuate portion extending between a first end portion and a second end portion. At least the first end portion of the retention member can be positioned in the undercut defined in the recess sidewall such that the arcuate portion of the retention member contacts the transparent substrate to retain the transparent substrate in the mounting recess.

公开(公告)号：US20170365496A1

公开(公告)日：2017-12-21

申请号：US15536980

申请日：2015-12-18

Applicant: ENTEGRIS, INC.

Inventor： Ryan MUSHEL ,  Jason T. Steffens

IPC: H01L21/673

CPC classification number: H01L21/67369 ,  H01L21/67366 ,  H01L21/67373 ,  H01L21/67383 ,  H01L21/67386

Abstract: A front opening wafer container has a container portion and a door sized to close an open front of the container portion. The container portion has shelves for holding wafers defining a seating position and has forward and rearward wafer supports to suspend wafers therebetween in a transport position above the seating position. Shock condition cushion portions are arranged adjacent the transport position for protecting the wafers during a shock condition. The wafers may be bonded wafers having a thinned wafer side and a carrier substrate side. Wafer engagement pads and finger members extend in opposing directions from a central strip on the door providing a balance wafer engagement. When closing the door, a primary wafer support portion engages the wafers first and a secondary elastomeric wafer support engages the wafer secondly. A V-groove for receiving the wafers in the wafer supports has a greater angle defined between the V-groove and the thinned wafer side than the angle defined between the V-groove and carrier substrate side providing enhanced protection for the bonded wafers.

公开(公告)号：US09592930B2

公开(公告)日：2017-03-14

申请号：US14558445

申请日：2014-12-02

Applicant: Entegris, Inc.

Inventor： Barry Gregerson ,  Michael S. Adams ,  Jason T. Steffens

IPC: H01L21/673 ,  B65D25/10 ,  H01L21/677 ,  B65D25/28 ,  B65D43/02 ,  B65D85/00

CPC classification number: B65D25/103 ,  B65D25/28 ,  B65D43/02 ,  B65D85/70 ,  H01L21/6732 ,  H01L21/67369 ,  H01L21/67383 ,  H01L21/67386 ,  H01L21/67763

Abstract: A front semiconductor opening wafer container for large diameter wafers includes a container portion and a door. The container portion includes a left closed side, a right closed side, a closed back, an open front, and an open interior including a plurality of slots for receiving and containing the wafers. The door is attachable to the container portion to close the open front and selectively latchable to the container portion. Optimized sag control is provided as well as enhanced structural rigidity, and wafer seating features.

Abstract translation: 用于大直径晶片的前半导体开口晶片容器包括容器部分和门。 容器部分包括左封闭侧，右封闭侧，闭合背部，开放前部和包括用于接收和容纳晶片的多个狭槽的开放内部。 门可附接到容器部分以封闭敞开的前部，并可选择性地闩锁到容器部分。 提供优化的下垂控制以及增强的结构刚度和晶片座位功能。

公开(公告)号：US12255084B2

公开(公告)日：2025-03-18

申请号：US17613418

申请日：2020-05-20

Applicant: ENTEGRIS, INC.

Inventor： Jason T. Steffens ,  Mark V. Smith ,  Matthew A. Fuller

IPC: H01L21/673

Abstract: A handle for a wafer carrier that includes an insertable member configured to be inserted into an aperture of the wafer carrier, and a locking mechanism moveable relative to the insertable member. A tab of the insertable member retains the insertable member in the aperture when in an engaged state. When in a locked state, the locking mechanism maintains the tab in the engaged state and a flexible member of the locking mechanism is positioned to maintain the locking mechanism in the locked state. A wafer carrier includes the detachable handle and the locking mechanism.

公开(公告)号：USD767233S1

公开(公告)日：2016-09-20

申请号：US29518509

申请日：2015-02-24

Applicant: ENTEGRIS, INC.

Designer： Russ V. Raschke ,  Jason T. Steffens ,  Eric S. Olson