公开(公告)号：US09802749B2

公开(公告)日：2017-10-31

申请号：US14688778

申请日：2015-04-16

Applicant: ENTEGRIS, INC

Inventor： Minna Hovinen ,  John R. Kingery ,  Glenn M. Tom ,  Kevin T. O'Dougherty ,  Kirk Mikkelsen ,  Donald D. Ware ,  Peter C. Van Buskirk

IPC: B65D83/00 ,  B01J4/02 ,  G01F23/18

CPC classification number: B65D83/0061 ,  B01J4/02 ,  B01J2219/00065 ,  B01J2219/00067 ,  B01J2219/00069 ,  B01J2219/00164 ,  G01F23/18

Abstract: Fluid supply systems for storage and dispensing of chemical reagents and compositions, e.g., high purity liquid reagents and chemical mechanical polishing compositions used to manufacture microelectronic device products, having capability for detection of an empty or near-empty condition when the contained liquid is at or approaching depletion during dispensing operation. Fluid delivery systems employing empty detect arrangements are described, including pressure transducer monitoring of dispensed material intermediate the supply package and a servo-hydraulic dispense pump, or monitoring of dispenser chamber replenishment times in a dispenser being replenished on a cyclic schedule to flow material from the dispenser to a downstream tool utilizing the dispensed material.

公开(公告)号：US09618942B2

公开(公告)日：2017-04-11

申请号：US14497848

申请日：2014-09-26

Applicant: Entegris, Inc.

Inventor： Kevin T. O'Dougherty ,  Robert E. Andrews ,  Tripunithura V. Jayaraman ,  Joseph P. Menning ,  Christopher A. Baye

IPC: G05D7/06 ,  B67D7/34 ,  B67D7/02

CPC classification number: G05D7/0617 ,  B67D7/0283 ,  B67D7/348 ,  Y10T137/0318 ,  Y10T137/8158

Abstract: An electronic storage device is coupled with a container capable of holding liquid for electronically storing information relating to the liquid stored in the container. The system can be configured with an antenna, for storing information to and reading information from the electronic storage device. A microprocessor-based controller, coupled with the antenna, may be employed for controlling processing of the liquid based on information read from the electronic storage device by the antenna. A connector of a secure reader system having a reader is provided to physically couple to a container having an information storing mechanism, for periodically reading information from an information storing mechanism. The connector may draw material from the container simultaneous with the reading.

公开(公告)号：US09802808B2

公开(公告)日：2017-10-31

申请号：US14812651

申请日：2015-07-29

Applicant: ENTEGRIS, INC.

Inventor： Kevin T. O'Dougherty ,  Glenn M. Tom

IPC: B67D7/02 ,  F16K35/00 ,  B67D7/32 ,  F16K35/02 ,  B67D7/34 ,  F16L37/08

CPC classification number: B67D7/0288 ,  B67D7/0261 ,  B67D7/32 ,  B67D7/3227 ,  B67D7/3281 ,  B67D7/34 ,  B67D7/344 ,  F16K35/00 ,  F16K35/025 ,  F16L37/08 ,  Y10T29/49826 ,  Y10T29/53

Abstract: Fluid storage and dispensing systems and processes involving various structures methods for fluid storage and dispensing, including, pre-connect verification couplings that are usefully employed with fluid storage and dispensing packages to ensure proper coupling and avoid fluid contamination issues, empty detect systems (e.g., monitoring pressure of dispensed liquid medium to detect pressure droop conditions) useable with fluid storage and dispensing packages incorporating liners that are pressure-compressed in the fluid dispensing operation, ergonomically enhanced structures for facilitating removal of a dispense connector from a capped vessel, cap integrity assurance systems for preventing misuse of vessel caps, and keycoding systems for ensuring coupling of proper dispense assemblies and vessels. Fluid storage and dispensing systems achieve zero or near-zero headspace character, and prevent or ameliorate solubilization effects in liquid dispensing from liners in overpack vessels.